JP6673466B2 - セラミック電子部品およびセラミック電子部品の製造方法 - Google Patents
セラミック電子部品およびセラミック電子部品の製造方法 Download PDFInfo
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- JP6673466B2 JP6673466B2 JP2018507217A JP2018507217A JP6673466B2 JP 6673466 B2 JP6673466 B2 JP 6673466B2 JP 2018507217 A JP2018507217 A JP 2018507217A JP 2018507217 A JP2018507217 A JP 2018507217A JP 6673466 B2 JP6673466 B2 JP 6673466B2
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- 239000000919 ceramic Substances 0.000 title claims description 352
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000012212 insulator Substances 0.000 claims description 155
- 238000010304 firing Methods 0.000 claims description 139
- 229910052751 metal Inorganic materials 0.000 claims description 62
- 239000002184 metal Substances 0.000 claims description 58
- 238000000034 method Methods 0.000 claims description 58
- 239000000463 material Substances 0.000 claims description 50
- 239000000843 powder Substances 0.000 claims description 48
- 239000004020 conductor Substances 0.000 claims description 43
- 239000002178 crystalline material Substances 0.000 claims description 29
- 150000002500 ions Chemical class 0.000 claims description 29
- 150000001875 compounds Chemical class 0.000 claims description 19
- 239000000203 mixture Substances 0.000 claims description 18
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 14
- 239000002994 raw material Substances 0.000 claims description 14
- 238000005245 sintering Methods 0.000 claims description 13
- 239000000654 additive Substances 0.000 claims description 12
- 230000000996 additive effect Effects 0.000 claims description 12
- 150000001768 cations Chemical class 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 150000002894 organic compounds Chemical class 0.000 claims description 7
- 229910052788 barium Inorganic materials 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 4
- 125000002091 cationic group Chemical group 0.000 claims 2
- 238000007747 plating Methods 0.000 description 44
- 238000011156 evaluation Methods 0.000 description 36
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 13
- 238000010030 laminating Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 239000007788 liquid Substances 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 238000005470 impregnation Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 230000001629 suppression Effects 0.000 description 8
- 230000000149 penetrating effect Effects 0.000 description 7
- 238000000177 wavelength dispersive X-ray spectroscopy Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 5
- 239000002241 glass-ceramic Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910001597 celsian Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003801 milling Methods 0.000 description 4
- 239000007858 starting material Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000006104 solid solution Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910018516 Al—O Inorganic materials 0.000 description 1
- 229910015999 BaAl Inorganic materials 0.000 description 1
- -1 BaCO 3 Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000012671 ceramic insulating material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000004098 selected area electron diffraction Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- C—CHEMISTRY; METALLURGY
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
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- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
- C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
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- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
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- C04B35/195—Alkaline earth aluminosilicates, e.g. cordierite or anorthite
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- H01G4/018—Dielectrics
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
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- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
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- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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Description
焼成前セラミック絶縁体と焼成前ビア導体とを備える焼成前セラミック配線基板において、焼成前セラミック絶縁体に含まれている非晶質と、焼成前ビア導体に含まれている非晶質とは、一般に親和性が高くなっている。そのため、焼成前セラミック配線基板の焼成工程において、焼成前セラミック絶縁体に含まれている非晶質が、焼成中にビア導体内に浸入したり、ビア導体の端部に濡れ拡がったりする。それで、焼成前セラミック配線基板の表面近傍の焼成前ビア導体の非晶質の含有量を少なくしても、従来と同じく、ビア導体の端部が非晶質により被覆されてしまう虞がある。
この発明に係るセラミック電子部品の製造方法は、セラミック絶縁体と、セラミック絶縁体の表面に設けられた端子電極とを備えるセラミック電子部品の製造方法である。そして、以下の第1の工程ないし第5の工程を備える。
この発明の実施形態に係るセラミック電子部品100について、図1Aおよび図1Bを用いて説明する。第1の実施形態におけるセラミック電子部品100は、ICチップなどの能動部品およびコンデンサなどの受動部品を搭載し、それらを相互配線してモジュール化するためのセラミック配線基板である。
評価用セラミック電子部品100Aの製造方法について、図2ないし6を用いて説明する。図2は、第1の工程(グリーンシート取得工程)により準備されたグリーンシート5を模式的に示す図である。
後述の第3の工程(焼成前端子電極形成工程)でグリーンシート5に焼成前端子電極6aないし6eを形成する際に用いる導体ペーストの取得について説明する。出発原料として、表2に示す金属粉末、表3に示す酸化物粉末、表4に示す有機化合物、およびエチルセルロース樹脂を含む有機ビヒクルを準備した。
図3は、第3の工程(焼成前端子電極形成工程)により、焼成前端子電極6aないし6eが形成されたグリーンシート5を模式的に示す図である。なお、焼成前端子電極6aないし6eは、前述したように、焼成後に一辺の長さがそれぞれ30μm、50μm、100μm、1mm、2mmの正方形となるように形成されている。また、焼成前端子電極6aないし6eは、焼成後の間隔が500μmとなるように、1枚のグリーンシートにそれぞれ100個ずつ形成されている。
図4は、第4の工程(グリーンシート積層工程)において、焼成前端子電極6aないし6eが形成されたグリーンシートを含むグリーンシート5を積層する過程を模式的に示す図である。その際、焼成前端子電極6aないし6eが、グリーンシート5の間に挟まれないように、すなわち図4に示すように焼成前端子電極6aないし6eが最上部に配置されるように、所定の枚数を積層する。
第4の工程で得られた焼成前セラミック電子部品10Aを焼成し、評価用セラミック電子部品100Aとする焼成工程について説明する。焼成前セラミック電子部品10Aの焼成工程は、以下の4つの副工程を備えている。
この発明の第1の実施形態に係るセラミック電子部品100の製造方法の変形例について、図7ないし9を用いて説明する。なお、以下の説明でも、評価用セラミック電子部品100Aの製造方法の変形例を、セラミック電子部品100の製造方法の変形例の説明として援用する。
この発明の実施形態に係るセラミック電子部品200について、図10Aおよび図10Bを用いて説明する。第1の実施形態におけるセラミック電子部品100は、チップ型セラミック電子部品素体の表面に端子電極が形成されたものである。
Claims (10)
- セラミック絶縁体と、前記セラミック絶縁体の表面に設けられた端子電極とを備えるセラミック電子部品であって、
前記セラミック絶縁体は、結晶質と非晶質とを含み、
前記端子電極は、金属と酸化物とを含み、
前記結晶質と前記酸化物とは、含有する共通の金属元素としてTiを含み、
前記セラミック絶縁体において、前記端子電極を取り囲む厚さ5μmの隣接領域での前記金属元素の濃度は、前記端子電極から100μm離れた厚さ5μmの遠隔領域での前記金属元素の濃度より高く、
前記酸化物の塩基度Bを以下の(1)式ないし(3)式で表した場合、Tiを含む前記非晶質の塩基度とTiを含む前記酸化物の塩基度との差の絶対値が、0.018以下であることを特徴とする、セラミック電子部品。
(ここで、B(Mi-O)は端子電極中の各酸化物(陽イオンをMiとする)の塩基度、B(Mi-O 0 )はある元素の酸化物をMiOで表した場合のMiOの酸素供与能力、B(Si-O 0 )はSiO 2 の酸素供与能力、B(Ca-O 0 )はCaOの酸素供与能力、n i は各陽イオンMiの組成比、r Mi は各陽イオンMiのイオン半径(Å)、Z Mi は各陽イオンMiの価数、各陽イオンMiのイオン半径r Mi はPaulingのイオン半径の値) - 前記隣接領域は、前記金属元素を構成成分とする結晶質を含むことを特徴とする、請求項1に記載のセラミック電子部品。
- 前記金属元素を構成成分とする結晶質は、BaとTiとSiとを含んで構成されるフレスノイト型化合物を含むことを特徴とする、請求項2に記載のセラミック電子部品。
- セラミック絶縁体と、前記セラミック絶縁体の表面に設けられた端子電極とを備えるセラミック電子部品の製造方法であって、
前記セラミック絶縁体の原料粉末を含むグリーンシートを得る第1の工程と、
金属粉末と、前記セラミック絶縁体の原料粉末と共通する金属元素としてTiを含む添加物と、有機ビヒクルとを含む導体ペーストを得る第2の工程と、
前記グリーンシートのうち少なくとも1枚の主面に、前記導体ペーストを用いて焼成前端子電極を形成する第3の工程と、
主面に前記焼成前端子電極が形成されたグリーンシートを含む前記グリーンシートを、前記焼成前端子電極が前記グリーンシートの間に挟まれないように積層し、焼成前セラミック絶縁体と、前記焼成前セラミック絶縁体の表面に設けられた前記焼成前端子電極とを備える焼成前セラミック電子部品とする第4の工程と、
前記焼成前セラミック電子部品を焼成し、前記焼成前セラミック絶縁体を焼結させて、前記金属元素としてTiを含む結晶質と非晶質とを含むセラミック絶縁体とし、前記焼成前端子電極を焼結させて、金属とTiを含む酸化物とを含む端子電極とする第5の工程と、を備え、
前記第5の工程において、前記金属元素としてTiを前記添加物から前記非晶質中に拡散させ、前記セラミック絶縁体における前記端子電極を取り囲む厚さ5μmの隣接領域での前記金属元素の濃度を、前記端子電極から100μm離れた厚さ5μmの遠隔領域での前記金属元素の濃度より高くし、前記酸化物の塩基度Bを以下の(1)式ないし(3)式で表した場合、Tiを含む前記非晶質の塩基度とTiを含む前記酸化物の塩基度との差の絶対値が、0.018以下となるようにする、セラミック電子部品の製造方法。
(ここで、B(Mi-O)は端子電極中の各酸化物(陽イオンをMiとする)の塩基度、B(Mi-O 0 )はある元素の酸化物をMiOで表した場合のMiOの酸素供与能力、B(Si-O 0 )はSiO 2 の酸素供与能力、B(Ca-O 0 )はCaOの酸素供与能力、n i は各陽イオンMiの組成比、r Mi は各陽イオンMiのイオン半径(Å)、Z Mi は各陽イオンMiの価数、各陽イオンMiのイオン半径r Mi はPaulingのイオン半径の値) - 前記セラミック絶縁体の原料粉末は、SiO2 、TiO2およびBaを含んで構成される化合物を含んでいることを特徴とする、請求項4に記載のセラミック電子部品の製造方法。
- 前記添加物は、TiO2粉末であることを特徴とする、請求項4または5に記載のセラミック電子部品の製造方法。
- 前記TiO2粉末の比表面積が10m2/g以上であることを特徴とする、請求項6に記載のセラミック電子部品の製造方法。
- 前記添加物は、Ti含有有機化合物であることを特徴とする、請求項4または5に記載のセラミック電子部品の製造方法。
- 前記第5の工程は、前記焼成前セラミック絶縁体の焼結開始温度をT1℃としたときに、T1℃以上(T1+50)℃以下の温度範囲で1時間以上保持する工程と、(T1+50)℃を超える所定の温度で1時間以上保持する工程とを含むことを特徴とする、請求項4ないし8のいずれか1項に記載のセラミック電子部品の製造方法。
- 前記第4の工程は、前記焼成前セラミック電子部品の一方主面および他方主面上に、前記(T1+50)℃では焼結収縮しない収縮抑制用材料の原料粉末を含む収縮抑制用グリーンシートを積層する工程をさらに含むことを特徴とする、請求項9に記載のセラミック電子部品の製造方法。
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