JP6637608B2 - 部品内蔵基板及びその製造方法 - Google Patents
部品内蔵基板及びその製造方法 Download PDFInfo
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- JP6637608B2 JP6637608B2 JP2018538340A JP2018538340A JP6637608B2 JP 6637608 B2 JP6637608 B2 JP 6637608B2 JP 2018538340 A JP2018538340 A JP 2018538340A JP 2018538340 A JP2018538340 A JP 2018538340A JP 6637608 B2 JP6637608 B2 JP 6637608B2
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
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- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
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- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
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- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
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- VMTCKFAPVIWNOF-UHFFFAOYSA-N methane tetrahydrofluoride Chemical compound C.F.F.F.F VMTCKFAPVIWNOF-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4614—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
- H05K3/4617—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination characterized by laminating only or mainly similar single-sided circuit boards
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49833—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the chip support structure consisting of a plurality of insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/111—Pads for surface mounting, e.g. lay-out
- H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0008—Apparatus or processes for manufacturing printed circuits for aligning or positioning of tools relative to the circuit board
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/103—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by bonding or embedding conductive wires or strips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/145—Organic substrates, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0237—High frequency adaptations
- H05K1/025—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance
- H05K1/0251—Impedance arrangements, e.g. impedance matching, reduction of parasitic impedance related to vias or transitions between vias and transmission lines
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09727—Varying width along a single conductor; Conductors or pads having different widths
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
- H05K2203/063—Lamination of preperforated insulating layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components
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- Condensed Matter Physics & Semiconductors (AREA)
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- Production Of Multi-Layered Print Wiring Board (AREA)
Description
図1に示すように、本発明の第1の実施形態に係る部品内蔵基板1は、第1プリント配線基材10、第2プリント配線基材20、第3プリント配線基材30及び第4プリント配線基材40を、接着層9を介してそれぞれ下から順に積層して熱圧着により一括積層した構造を備えている。
なお、図4及び図8は第4プリント配線基材40について、図5及び図9は第3プリント配線基材30について、図6及び図10は電子部品80について、図7及び図11は部品内蔵基板1の最終工程について、それぞれの製造工程の詳細を示している。また、第1及び第2プリント配線基材10,20については、第4プリント配線基材40の製造工程と同様の工程で製造することができるので、ここでは特に明記しない限り説明を省略する。
本実施例では、まず、接着層9を構成する接着材の材質、電子部品80の厚さH、端面39a,32a間の距離D、及び配線パターン32間の間隔Sを変えた部品内蔵基板1を種々のサンプル基板として試作した。そして、それぞれのサンプル基板に発生した種々の不良モードを観察し、上述した部品内蔵基板1の各設計要素の最適値を求めた。
次に、第2の実施形態に係る部品内蔵基板1について説明する。
図18に示すように、第2の実施形態に係る部品内蔵基板1は、第3プリント配線基材30の開口部39の周囲に設けられる各配線パターン32の少なくとも一部が、例えば第4プリント配線基材40のビア44を介して接続される第1部分32bと、この第1部分から開口部39の開口端に向けて延びる第2部分32cとをそれぞれ有し、第2部分32cが開口部39を取り囲むように枠状に集中配置されるパターンに形成されている点が、第1の実施形態に係る部品内蔵基板1の第3プリント配線基材30の配線パターン32と相違している。
次に、第3の実施形態に係る部品内蔵基板1について説明する。
なお、図19においては、配線パターン32にハッチングを施して表してある。
図19に示すように、第3の実施形態に係る部品内蔵基板1は、開口部39が形成された第3プリント配線基材30の第3樹脂基材31上に配線パターン32が形成されている。配線パターン32は、ベタパターン32eとランドパターン32fを含む。部品内蔵基板1は、このように形成された配線パターン32の少なくとも一部(ベタパターン32e)が、開口部39の周囲にこの開口部39を取り囲む枠状に配置されている点が、第1及び第2の実施形態に係る部品内蔵基板1とは相違している。
2、3 ビアホール
7 マスク材
8 導体層
9 接着層
9a 接着材
10 第1プリント配線基材
11 第1樹脂基材
12,22,32,42 配線パターン
14,24,34,44 ビア
20 第2プリント配線基材
21 第2樹脂基材
30 第3プリント配線基材
31 第3樹脂基材
32a,39a 端面
39 開口部
40 第4プリント配線基材
41 第4樹脂基材
80 電子部品
Claims (8)
- 樹脂基材の少なくとも一方の面に配線パターンが形成されると共に前記配線パターンと接続されるビアが形成された複数のプリント配線基材を、接着層を介して一括積層すると共に、前記複数のプリント配線基材のうち両面から他のプリント配線基材によって挟まれた少なくとも一つのプリント配線基材に開口部が形成され、この開口部内に電子部品を内蔵してなる多層構造の部品内蔵基板であって、
前記開口部が形成されたプリント配線基材の前記配線パターンの少なくとも一部が前記開口部の周囲に該開口部を取り囲む枠状に配置され、
前記開口部が形成されたプリント配線基材には、複数の前記配線パターンが形成され、
前記複数の配線パターンの少なくとも一部が、前記枠状に集中配置されている
ことを特徴とする部品内蔵基板。 - 隣接する前記複数の配線パターンの前記枠状に集中配置された部分の間の間隔は、50μm以上200μm以下である
ことを特徴とする請求項1記載の部品内蔵基板。 - 前記配線パターンは、前記開口部の開口端よりも水平方向に引っ込んだ位置に配置されている
ことを特徴とする請求項1又は2記載の部品内蔵基板。 - 前記開口部の開口端から前記配線パターンの前記開口部側の端部までの距離は、2μm以上100μm以下である
ことを特徴とする請求項1〜3のいずれか1項記載の部品内蔵基板。 - 樹脂基材の少なくとも一方の面に配線パターンが形成されると共に前記配線パターンと接続されるビアが形成された複数のプリント配線基材を、接着層を介して一括積層すると共に、前記複数のプリント配線基材のうち両面から他のプリント配線基材によって挟まれた少なくとも一つのプリント配線基材に開口部が形成され、この開口部内に電子部品を内蔵してなる多層構造の部品内蔵基板であって、
前記開口部が形成されたプリント配線基材の前記配線パターンの少なくとも一部は、前記ビアを介して接続される第1部分と、この第1部分から前記開口部の開口端に向けて延びる第2部分とを有し、前記第2部分が前記開口部を取り囲むように枠状に配置されるパターンに形成され、
前記開口部が形成されたプリント配線基材には、複数の前記配線パターンが形成され、
前記複数の配線パターンの少なくとも一部は、それぞれ前記第1及び第2部分を有し、
前記第2部分が前記枠状に集中配置されるパターンに形成されている
ことを特徴とする多層構造の部品内蔵基板。 - 隣接する前記第2部分間の間隔は、50μm以上200μm以下である
ことを特徴とする請求項5記載の部品内蔵基板。 - 前記配線パターンは、前記第2部分が前記開口部の開口端よりも水平方向に引っ込んだ位置に配置されるパターンに形成されている
ことを特徴とする請求項5又は6記載の部品内蔵基板。 - 前記開口部の開口端から前記第2部分の前記開口部側の端部までの距離は、2μm以上100μm以下である
ことを特徴とする請求項5〜7のいずれか1項記載の部品内蔵基板。
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