JP6560933B2 - 半導体装置の製造方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
- H01L21/31055—Planarisation of the insulating layers involving a dielectric removal step the removal being a chemical etching step, e.g. dry etching
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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Description
図1〜図5を参照して、実施の形態1に係る半導体装置の製造方法について説明する。はじめに、図1に示されるように、主表面S1を有し、主表面S1上に第1領域R1と第2領域R2とを含む半導体基板SUBが準備される。第1領域R1は、複数の第1段差部OH1が形成されている。第2領域R2は、複数の第1段差部OH1よりも疎に配置された複数の第2段差部OH2が形成された第3領域R3と、段差部が形成されていない第4領域R4とを有している。第1領域R1と第2領域R2とは隣接している。第2領域R2は、平面視においてたとえば第1領域R1の周囲を取り囲むように形成されている(図2(b)参照)。ここで平面視とは、主表面S1に直交する方向の上方から主表面S1を視ることを意味する。第2領域R2において、第3領域R3および第4領域R4はそれぞれ任意の位置に形成されていればよい。図1に示されるように、たとえば第3領域R3が第1領域R1と隣接し、第4領域R4は第3領域R3よりも第1領域R1から離れた位置に形成されている。第1領域R1および第2領域R2の各外周端部は、主表面S1上において第1段差部OH1および第2段差部OH2が形成されていない部分であって、後述する被覆膜CMの表面S2が第1段差部OH1および第2段差部OH2上に形成されている部分よりも平坦な部分に位置している。
次に、図6〜図13を参照して、実施の形態1に係る半導体装置の製造方法の具体例について説明する。本具体例は、フラッシュメモリを備える半導体装置の製造方法である。図6は、本具体例における半導体チップCHPのレイアウト構成を示す平面図である。図7〜図9(a)、図10〜図13は、本具体例の半導体装置の製造方法を示す断面図である。図9(b)は、図9(a)に示される半導体基板SUBの上面図である。
次に、図14〜図18を参照して、実施の形態2に係る半導体装置の製造方法について説明する。実施の形態2に係る半導体装置の製造方法は、基本的には実施の形態1に係る半導体装置の製造方法と同様の構成を備えるが、エッチバック処理の被処理膜が被覆膜CM(図1〜図5参照)ではなく、第1段差部OH1(および第2段差部OH2)である点で異なる。
次に、実施の形態1および実施の形態2に係る半導体装置の製造方法の変形例について説明する。
Claims (10)
- 主表面を有し、前記主表面上に複数の第1段差部が形成された第1領域と、前記複数の第1段差部よりも疎に配置された複数の第2段差部が形成された、または段差部が形成されていない第2領域とを含む半導体基板を準備する工程と、
平面視において前記第1領域の周囲を取り囲むように少なくとも前記第2領域の一部上に感光体膜を形成する工程と、
前記第1領域と前記感光体膜とを覆うように流動性のある塗布膜を形成する工程と、
少なくとも前記第1領域上の前記塗布膜の一部を除去する工程とを備え、
前記塗布膜を形成する工程では、少なくとも前記第1段差部を覆うように前記塗布膜を形成し、
前記塗布膜を除去する工程では、前記塗布膜および前記第1段差部の少なくとも一部を除去する、半導体装置の製造方法。 - 前記感光体膜を形成する工程において、前記感光体膜は加熱処理または紫外線硬化処理により硬化される、請求項1に記載の半導体装置の製造方法。
- 前記塗布膜を除去する工程の後に、前記半導体基板の前記主表面上に残存している前記感光体膜および前記塗布膜を除去する工程をさらに備える、請求項1または請求項2に記載の半導体装置の製造方法。
- 前記感光体膜を形成する工程において、前記感光体膜は、平面視において前記第1領域の全周を連続的に取り囲むように形成される、請求項1〜請求項3のいずれか1項に記載の半導体装置の製造方法。
- 前記感光体膜を形成する工程において、前記感光体膜は、前記第2領域上に形成される、請求項4に記載の半導体装置の製造方法。
- 前記感光体膜を形成する工程において、前記感光体膜は、平面視において前記第1領域の周囲を断続的に取り囲むように形成される、請求項1〜請求項3のいずれか1項に記載の半導体装置の製造方法。
- 前記感光体膜の膜厚は、前記塗布膜の膜厚の1倍以上2倍以下である、請求項1〜請求項6のいずれか1項に記載の半導体装置の製造方法。
- 前記感光体膜の膜厚は、前記塗布膜の膜厚の1倍以上1.5倍以下である、請求項7に記載の半導体装置の製造方法。
- 前記塗布膜は粘度が100cP以下である、請求項1〜請求項8のいずれか1項に記載の半導体装置の製造方法。
- 前記塗布膜は粘度が10cP以下である、請求項9に記載の半導体装置の製造方法。
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JP2015165697A JP6560933B2 (ja) | 2015-08-25 | 2015-08-25 | 半導体装置の製造方法 |
US15/243,068 US9842943B2 (en) | 2015-08-25 | 2016-08-22 | Method for manufacturing semiconductor device |
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JP2015165697A JP6560933B2 (ja) | 2015-08-25 | 2015-08-25 | 半導体装置の製造方法 |
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JP2017045785A JP2017045785A (ja) | 2017-03-02 |
JP2017045785A5 JP2017045785A5 (ja) | 2018-07-12 |
JP6560933B2 true JP6560933B2 (ja) | 2019-08-14 |
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KR102629347B1 (ko) * | 2016-12-08 | 2024-01-26 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
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JP2555958B2 (ja) * | 1993-11-17 | 1996-11-20 | 日本電気株式会社 | 半導体装置の製造方法 |
JPH098007A (ja) * | 1995-06-16 | 1997-01-10 | Sony Corp | 絶縁膜の平坦化方法 |
JP4068746B2 (ja) * | 1998-12-25 | 2008-03-26 | 株式会社ルネサステクノロジ | 半導体集積回路装置 |
JPWO2004025342A1 (ja) * | 2002-09-11 | 2006-01-12 | 富士通株式会社 | デバイス製造方法 |
US6747310B2 (en) | 2002-10-07 | 2004-06-08 | Actrans System Inc. | Flash memory cells with separated self-aligned select and erase gates, and process of fabrication |
KR100607326B1 (ko) * | 2005-06-30 | 2006-08-01 | 주식회사 하이닉스반도체 | 반도체 소자의 제조방법 |
CN101326635B (zh) * | 2005-12-14 | 2010-08-18 | 富士通微电子株式会社 | 半导体器件及其制造方法 |
JP2007234861A (ja) * | 2006-03-01 | 2007-09-13 | Renesas Technology Corp | 半導体装置の製造方法 |
US8119449B2 (en) * | 2006-03-14 | 2012-02-21 | Panasonic Corporation | Method of manufacturing an electronic part mounting structure |
US20080085609A1 (en) * | 2006-07-31 | 2008-04-10 | Vasek James E | Method for protecting high-topography regions during patterning of low-topography regions |
JP2009016462A (ja) * | 2007-07-03 | 2009-01-22 | Renesas Technology Corp | 半導体装置およびその製造方法 |
US7875516B2 (en) * | 2007-09-14 | 2011-01-25 | Qimonda Ag | Integrated circuit including a first gate stack and a second gate stack and a method of manufacturing |
EP2211373A1 (en) * | 2007-10-31 | 2010-07-28 | Mitsubishi Chemical Corporation | Etching method and method for manufacturing optical/electronic device using the same |
JP5119865B2 (ja) * | 2007-11-02 | 2013-01-16 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置、電子機器 |
KR101450137B1 (ko) * | 2008-01-25 | 2014-10-13 | 삼성전자주식회사 | 유기반도체용 공중합체 및 이를 이용한 유기박막트랜지스터 및 유기 전자소자 |
JP2009289974A (ja) * | 2008-05-29 | 2009-12-10 | Toshiba Corp | 半導体装置の製造方法 |
JP2010245160A (ja) * | 2009-04-02 | 2010-10-28 | Renesas Electronics Corp | 半導体装置の製造方法 |
KR20110138343A (ko) * | 2009-04-10 | 2011-12-27 | 미쓰비시 가가꾸 가부시키가이샤 | 전계 효과 트랜지스터, 그 제조 방법 및 그것을 사용한 전자 디바이스 |
KR101450727B1 (ko) * | 2010-05-20 | 2014-10-16 | 주식회사 엘지화학 | 언더-필용 댐을 포함하는 인쇄 회로 기판 및 이의 제조 방법 |
FR2972298B1 (fr) * | 2011-03-04 | 2015-07-31 | Commissariat Energie Atomique | Procede de metallisation de surfaces texturees |
JP6406931B2 (ja) * | 2013-10-15 | 2018-10-17 | キヤノン株式会社 | 電子写真感光体、その製造方法、電子写真装置およびプロセスカートリッジ |
JP6478741B2 (ja) * | 2015-03-20 | 2019-03-06 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
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