JP6464021B2 - 測定装置 - Google Patents
測定装置 Download PDFInfo
- Publication number
- JP6464021B2 JP6464021B2 JP2015087388A JP2015087388A JP6464021B2 JP 6464021 B2 JP6464021 B2 JP 6464021B2 JP 2015087388 A JP2015087388 A JP 2015087388A JP 2015087388 A JP2015087388 A JP 2015087388A JP 6464021 B2 JP6464021 B2 JP 6464021B2
- Authority
- JP
- Japan
- Prior art keywords
- corner cube
- measurement
- measurement object
- objective lens
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 claims description 56
- 238000003384 imaging method Methods 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 15
- 238000005286 illumination Methods 0.000 description 9
- 239000005357 flat glass Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015087388A JP6464021B2 (ja) | 2015-04-22 | 2015-04-22 | 測定装置 |
TW105109599A TWI597474B (zh) | 2015-04-22 | 2016-03-28 | Measuring device |
KR1020160037693A KR101833611B1 (ko) | 2015-04-22 | 2016-03-29 | 측정 장치 |
CN201610195695.2A CN106066158B (zh) | 2015-04-22 | 2016-03-31 | 测定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015087388A JP6464021B2 (ja) | 2015-04-22 | 2015-04-22 | 測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016205985A JP2016205985A (ja) | 2016-12-08 |
JP6464021B2 true JP6464021B2 (ja) | 2019-02-06 |
Family
ID=57419015
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015087388A Active JP6464021B2 (ja) | 2015-04-22 | 2015-04-22 | 測定装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6464021B2 (ko) |
KR (1) | KR101833611B1 (ko) |
CN (1) | CN106066158B (ko) |
TW (1) | TWI597474B (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108050934B (zh) * | 2017-12-25 | 2020-07-14 | 武汉比天科技有限责任公司 | 一种带倒角工件的视觉垂直定位方法 |
CN108195319B (zh) * | 2017-12-25 | 2020-07-14 | 武汉比天科技有限责任公司 | 一种带倒角工件的视觉倾斜定位方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0633142U (ja) * | 1992-09-25 | 1994-04-28 | 安藤電気株式会社 | 2カメラ撮像機構 |
US6404544B1 (en) * | 1999-06-01 | 2002-06-11 | Optical Perspectives Group, Llc | Wavelength multiplexed quantitative differential interference contrast microscopy |
JP2001241921A (ja) * | 2000-03-01 | 2001-09-07 | Nippon Electric Glass Co Ltd | 板ガラスの寸法測定方法 |
US6624894B2 (en) * | 2001-06-25 | 2003-09-23 | Veeco Instruments Inc. | Scanning interferometry with reference signal |
DE10223107A1 (de) * | 2002-05-22 | 2003-12-04 | Zeiss Carl Jena Gmbh | Vorrichtung zur Abbildung von Gegenständen |
JP2007240503A (ja) * | 2005-04-08 | 2007-09-20 | Hitachi Kokusai Electric Inc | 顕微鏡撮像装置及び寸法測定装置 |
JP4652883B2 (ja) * | 2005-04-28 | 2011-03-16 | 日本発條株式会社 | 測定装置及び測定方法 |
CN101339144B (zh) * | 2008-08-14 | 2010-12-29 | 中国印钞造币总公司 | 硬币双面自动检测装置 |
JP2010267665A (ja) * | 2009-05-12 | 2010-11-25 | Sumitomo Electric Ind Ltd | 光送信モジュール |
JP2014085296A (ja) * | 2012-10-26 | 2014-05-12 | Tokyo Seimitsu Co Ltd | ウェーハ形状測定装置 |
JP2016085034A (ja) * | 2013-02-19 | 2016-05-19 | 旭硝子株式会社 | 透明板状体表面検査用撮像システム |
-
2015
- 2015-04-22 JP JP2015087388A patent/JP6464021B2/ja active Active
-
2016
- 2016-03-28 TW TW105109599A patent/TWI597474B/zh active
- 2016-03-29 KR KR1020160037693A patent/KR101833611B1/ko active IP Right Grant
- 2016-03-31 CN CN201610195695.2A patent/CN106066158B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
KR101833611B1 (ko) | 2018-02-28 |
CN106066158A (zh) | 2016-11-02 |
TWI597474B (zh) | 2017-09-01 |
TW201638554A (zh) | 2016-11-01 |
KR20160125884A (ko) | 2016-11-01 |
JP2016205985A (ja) | 2016-12-08 |
CN106066158B (zh) | 2018-11-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104111524B (zh) | 数码显微镜以及优化数码显微镜中工作流程的方法 | |
KR100634652B1 (ko) | 기판 검사 장치 | |
TWI580948B (zh) | 檢測部件之方法及設備 | |
JP5198535B2 (ja) | ガラス基板の切断面検査装置 | |
US20080088833A1 (en) | Visual inspection apparatus, visual inspection method, and peripheral edge inspection unit that can be mounted on visual inspection apparatus | |
JP7462095B2 (ja) | 半導体デバイスの側面の検査装置 | |
JP2015230393A (ja) | 撮像装置の制御方法および撮像システム | |
CN113219622A (zh) | 一种用于面板缺陷检测的物镜对焦方法、装置及*** | |
JP2018516371A5 (ko) | ||
JP6464021B2 (ja) | 測定装置 | |
US20100128285A1 (en) | Three dimensional profile inspecting apparatus | |
JP2013034127A (ja) | 撮像装置 | |
JP2007033202A (ja) | 外観検査装置および外観検査方法 | |
JP2007218846A (ja) | 寸法計測方法、撮像装置、制御装置および寸法計測装置 | |
JP2003294419A (ja) | 微小寸法測定装置 | |
JP2020101743A (ja) | 共焦点顕微鏡、及びその撮像方法 | |
JP2000275594A (ja) | 基板検査装置 | |
JP5133709B2 (ja) | レーザリペア装置 | |
WO2016111025A1 (ja) | 外観検査装置 | |
JP5399580B2 (ja) | 顕微鏡システム、観察方法および観察プログラム | |
KR101896303B1 (ko) | 렌즈의 배열 방법 및 이를 탑재한 장치 | |
JP5208292B2 (ja) | 対象物の処理方法 | |
HU231068B1 (hu) | Objektívváltó- és fókuszáló berendezés mikroszkóphoz, valamint ilyen objektívváltó- és fókuszáló berendezést tartalmazó mikroszkóp | |
CN112710665A (zh) | 外观检查装置 | |
JP2009204306A (ja) | 複数のカメラを用いた撮像方法および計測装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180402 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20181128 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20181225 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190107 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6464021 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |