JP6464021B2 - 測定装置 - Google Patents

測定装置 Download PDF

Info

Publication number: JP6464021B2
Authority: JP; Japan
Prior art keywords: corner cube; measurement; measurement object; objective lens; microscope
Prior art date: 2015-04-22
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

JP2015087388A

Other languages

English (en)

Japanese (ja)

Other versions

JP2016205985A (ja

Inventor

和規田中

真一郎鶴野

Original Assignee

新東エスプレシジョン株式会社

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2015-04-22

Filing date

2015-04-22

Publication date

2019-02-06

2015-04-22 Application filed by 新東エスプレシジョン株式会社 filed Critical 新東エスプレシジョン株式会社

2015-04-22 Priority to JP2015087388A priority Critical patent/JP6464021B2/ja

2016-03-28 Priority to TW105109599A priority patent/TWI597474B/zh

2016-03-29 Priority to KR1020160037693A priority patent/KR101833611B1/ko

2016-03-31 Priority to CN201610195695.2A priority patent/CN106066158B/zh

2016-12-08 Publication of JP2016205985A publication Critical patent/JP2016205985A/ja

2019-02-06 Application granted granted Critical

2019-02-06 Publication of JP6464021B2 publication Critical patent/JP6464021B2/ja

Status Active legal-status Critical Current

2035-04-22 Anticipated expiration legal-status Critical

Links

238000005259 measurement Methods 0.000 claims description 56
238000003384 imaging method Methods 0.000 claims description 14
239000011521 glass Substances 0.000 claims description 5
239000000758 substrate Substances 0.000 claims description 5
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
239000002184 metal Substances 0.000 claims description 4
239000011347 resin Substances 0.000 claims description 4
229920005989 resin Polymers 0.000 claims description 4
229910052710 silicon Inorganic materials 0.000 claims description 4
239000010703 silicon Substances 0.000 claims description 4
230000003287 optical effect Effects 0.000 description 15
238000005286 illumination Methods 0.000 description 9
239000005357 flat glass Substances 0.000 description 6
238000000034 method Methods 0.000 description 4
238000000691 measurement method Methods 0.000 description 1

Images

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Length Measuring Devices By Optical Means (AREA)
Instruments For Measurement Of Length By Optical Means (AREA)

JP2015087388A 2015-04-22 2015-04-22 測定装置 Active JP6464021B2 (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP2015087388A JP6464021B2 (ja)	2015-04-22	2015-04-22	測定装置
TW105109599A TWI597474B (zh)	2015-04-22	2016-03-28	Measuring device
KR1020160037693A KR101833611B1 (ko)	2015-04-22	2016-03-29	측정 장치
CN201610195695.2A CN106066158B (zh)	2015-04-22	2016-03-31	测定装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2015087388A JP6464021B2 (ja)	2015-04-22	2015-04-22	測定装置

Publications (2)

Publication Number	Publication Date
JP2016205985A JP2016205985A (ja)	2016-12-08
JP6464021B2 true JP6464021B2 (ja)	2019-02-06

Family

ID=57419015

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2015087388A Active JP6464021B2 (ja)	2015-04-22	2015-04-22	測定装置

Country Status (4)

Country	Link
JP (1)	JP6464021B2 (ko)
KR (1)	KR101833611B1 (ko)
CN (1)	CN106066158B (ko)
TW (1)	TWI597474B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN108050934B (zh) *	2017-12-25	2020-07-14	武汉比天科技有限责任公司	一种带倒角工件的视觉垂直定位方法
CN108195319B (zh) *	2017-12-25	2020-07-14	武汉比天科技有限责任公司	一种带倒角工件的视觉倾斜定位方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0633142U (ja) *	1992-09-25	1994-04-28	安藤電気株式会社	２カメラ撮像機構
US6404544B1 (en) *	1999-06-01	2002-06-11	Optical Perspectives Group, Llc	Wavelength multiplexed quantitative differential interference contrast microscopy
JP2001241921A (ja) *	2000-03-01	2001-09-07	Nippon Electric Glass Co Ltd	板ガラスの寸法測定方法
US6624894B2 (en) *	2001-06-25	2003-09-23	Veeco Instruments Inc.	Scanning interferometry with reference signal
DE10223107A1 (de) *	2002-05-22	2003-12-04	Zeiss Carl Jena Gmbh	Vorrichtung zur Abbildung von Gegenständen
JP2007240503A (ja) *	2005-04-08	2007-09-20	Hitachi Kokusai Electric Inc	顕微鏡撮像装置及び寸法測定装置
JP4652883B2 (ja) *	2005-04-28	2011-03-16	日本発條株式会社	測定装置及び測定方法
CN101339144B (zh) *	2008-08-14	2010-12-29	中国印钞造币总公司	硬币双面自动检测装置
JP2010267665A (ja) *	2009-05-12	2010-11-25	Sumitomo Electric Ind Ltd	光送信モジュール
JP2014085296A (ja) *	2012-10-26	2014-05-12	Tokyo Seimitsu Co Ltd	ウェーハ形状測定装置
JP2016085034A (ja) *	2013-02-19	2016-05-19	旭硝子株式会社	透明板状体表面検査用撮像システム

2015
- 2015-04-22 JP JP2015087388A patent/JP6464021B2/ja active Active
2016
- 2016-03-28 TW TW105109599A patent/TWI597474B/zh active
- 2016-03-29 KR KR1020160037693A patent/KR101833611B1/ko active IP Right Grant
- 2016-03-31 CN CN201610195695.2A patent/CN106066158B/zh active Active

Also Published As

Publication number	Publication date
KR101833611B1 (ko)	2018-02-28
CN106066158A (zh)	2016-11-02
TWI597474B (zh)	2017-09-01
TW201638554A (zh)	2016-11-01
KR20160125884A (ko)	2016-11-01
JP2016205985A (ja)	2016-12-08
CN106066158B (zh)	2018-11-02

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