JP6395666B2 - 干渉式位置測定装置および干渉式位置測定装置の作動方法 - Google Patents
干渉式位置測定装置および干渉式位置測定装置の作動方法 Download PDFInfo
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- 230000002123 temporal effect Effects 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
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- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
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- General Physics & Mathematics (AREA)
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- Signal Processing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
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Description
30;430 光源
40;140;240;354;440 切換素子
51.1〜51.3,351.1〜351.6 検出素子
Claims (15)
- 少なくとも1つの測定方向に沿って移動可能に配置された物体の位置を決定するための干渉式位置測定装置であって、光源によって放出された光線束が少なくとも2つの部分光線束に分割され、該部分光線束のうち少なくとも1つの部分光線束が物体において1つ以上の光学機能素子に入射し、続いて重畳位置で部分光線束が干渉により重畳され、生じた少なくとも1つの信号光線束が次いで評価ユニットの方向に伝播し、評価ユニットにより、位置に依存した少なくとも1つの測定信号が信号光線束から生成可能である干渉式位置測定装置において、
信号経路における重畳位置の後方および信号デジタル化装置の前方に、所定の走査時点を決定するための少なくとも1つの切換素子が配置されていることを特徴とする干渉式位置測定装置。 - 請求項1に記載の干渉式位置測定装置において、
前記少なくとも1つの切換素子が複数の経路を備え、該経路にそれぞれ1つの信号光線束が割り当てられている干渉式位置測定装置。 - 請求項1または2に記載の干渉式位置測定装置において、
前記少なくとも1つの切換素子が、重畳位置と、後方に配置された複数の光電式の検出素子(51.1〜51.3)との間に配置されており、信号光線束を光学的に変調するように構成されている干渉式位置測定装置。 - 請求項3に記載の干渉式位置測定装置において、
前記少なくとも1つの切換素子が、時間的に限定的に切換可能な透過特性を備える光学式の変調器として構成されている干渉式位置測定装置。 - 請求項3に記載の干渉式位置測定装置において、
前記少なくとも1つの切換素子が、時間的に限定的に切換可能な増幅特性を備える光学式の半導体増幅器として構成されている干渉式位置測定装置。 - 請求項1に記載の干渉式位置測定装置において、
前記少なくとも1つの切換素子が複数の光電式の検出素子の後方に配置されており、電気式切換素子として構成されており、該電気式切換素子は、前記生じた少なくとも1つの信号光線束から生成された位置に依存した少なくとも1つの測定信号を後続の信号処理素子に供給する前に電気的に変調する干渉式位置測定装置。 - 請求項1から6までのいずれか一項に記載の干渉式位置測定装置において、
光学機能素子(10)が、周期的な測定区分を備える基準器として構成されており、少なくとも2つの分割された部分光線束によって入射される干渉式位置測定装置。 - 請求項1から6までのいずれか一項に記載の干渉式位置測定装置において、
一つ又はそれ以上の光学機能素子が、第1部分光線束によって入射される反射鏡として測定アーム内に構成されており、これに対して第2部分光線束が、参照アーム内の固定された別の反射鏡に入射する干渉式位置測定装置。 - 請求項1から8までのいずれか一項に記載の干渉式位置測定装置において、
光源が、連続モードで作動するように構成されている干渉式位置測定装置。 - 少なくとも1つの測定方向に沿って移動可能に配置された物体の位置を決定するための干渉式位置測定装置の作動方法であって、光源から放出された光線束が少なくとも2つの部分光線束に分割され、該部分光線束のうちの少なくとも1つの部分光線束が物体において1つ以上の光学機能素子に入射し、続いて部分光線束が重畳位置で重畳されて干渉され、生じた少なくとも1つの信号光線束が次いで評価ユニットの方向に伝播し、該評価ユニットにより、生じた少なくとも1つの信号光線束から位置に依存した少なくとも1つの測定信号が生成される干渉式位置測定装置の作動方法において、
信号経路における重畳位置の後方および信号デジタル化装置の前方に配置された少なくとも1つの切換素子を介して、所定の走査時点を決定することを特徴とする作動方法。 - 請求項10に記載の作動方法において、
重畳位置と、該重畳位置の後方に配置された複数の光電式の検出素子との間に配置された少なくとも1つの切換素子を介して、少なくとも1つの信号光線束を光学的に変調する作動方法。 - 請求項10に記載の作動方法において、
複数の光電式の検出装置の後方に配置された切換素子を介して、生じた少なくとも1つの信号光線束から生成された位置に依存した少なくとも1つの測定信号を、後続の信号処理素子に供給される前に電気的に変調する作動方法。 - 請求項10に記載の作動方法において、
光源を連続的に作動する作動方法。 - 請求項10に記載の作動方法において、
クロック信号を介して時間的に限定的に前記少なくとも1つの切換素子をスイッチオン・オフする作動方法。 - 請求項10に記載の作動方法において、
重畳位置と、該重畳位置の後方に配置された複数の光電式の検出素子との間に配置された第1切換素子によって、生じた少なくとも1つの信号光線束を光学的に変調し、
複数の光電式の検出素子の後方に配置された第2切換素子によって、生じた少なくとも1つの信号光線束から生成された位置に依存した少なくとも1つの測定信号を、後続の信号処理素子に供給される前に電気的に変調する方法。
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US5195162A (en) * | 1987-12-16 | 1993-03-16 | General Motors Corporation | Planar polymer light guide methods and apparatus |
DE10054062A1 (de) | 2000-10-31 | 2002-05-16 | Heidenhain Gmbh Dr Johannes | Verfahren zur Positionsbestimmung und Positionsmesseinrichtung zur Ausführung des Verfahrens |
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