JP6351525B2 - クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法 - Google Patents

クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法 Download PDF

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Publication number
JP6351525B2
JP6351525B2 JP2015042523A JP2015042523A JP6351525B2 JP 6351525 B2 JP6351525 B2 JP 6351525B2 JP 2015042523 A JP2015042523 A JP 2015042523A JP 2015042523 A JP2015042523 A JP 2015042523A JP 6351525 B2 JP6351525 B2 JP 6351525B2
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Japan
Prior art keywords
cryopump
temperature
discharge
regeneration
completion condition
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JP2015042523A
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English (en)
Japanese (ja)
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JP2016160884A (ja
Inventor
健 及川
健 及川
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2015042523A priority Critical patent/JP6351525B2/ja
Priority to TW105105957A priority patent/TWI599722B/zh
Priority to KR1020160025176A priority patent/KR101781075B1/ko
Priority to CN201610117467.3A priority patent/CN105937486B/zh
Priority to US15/059,945 priority patent/US10001117B2/en
Publication of JP2016160884A publication Critical patent/JP2016160884A/ja
Application granted granted Critical
Publication of JP6351525B2 publication Critical patent/JP6351525B2/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
JP2015042523A 2015-03-04 2015-03-04 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法 Active JP6351525B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2015042523A JP6351525B2 (ja) 2015-03-04 2015-03-04 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法
TW105105957A TWI599722B (zh) 2015-03-04 2016-02-26 Cryogenic pump system, cryogenic pump control device and cryogenic pump regeneration method
KR1020160025176A KR101781075B1 (ko) 2015-03-04 2016-03-02 크라이오펌프 시스템, 크라이오펌프 제어장치 및 크라이오펌프 재생방법
CN201610117467.3A CN105937486B (zh) 2015-03-04 2016-03-02 低温泵***、低温泵控制装置及低温泵再生方法
US15/059,945 US10001117B2 (en) 2015-03-04 2016-03-03 Cryopump system, cryopump controller, and method for regenerating the cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015042523A JP6351525B2 (ja) 2015-03-04 2015-03-04 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法

Publications (2)

Publication Number Publication Date
JP2016160884A JP2016160884A (ja) 2016-09-05
JP6351525B2 true JP6351525B2 (ja) 2018-07-04

Family

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Family Applications (1)

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JP2015042523A Active JP6351525B2 (ja) 2015-03-04 2015-03-04 クライオポンプシステム、クライオポンプ制御装置、及びクライオポンプ再生方法

Country Status (5)

Country Link
US (1) US10001117B2 (zh)
JP (1) JP6351525B2 (zh)
KR (1) KR101781075B1 (zh)
CN (1) CN105937486B (zh)
TW (1) TWI599722B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11846575B2 (en) 2018-12-31 2023-12-19 Teknologian Tutkimuskeskus Vtt Oy Sampling arrangement

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6762672B2 (ja) * 2017-03-10 2020-09-30 住友重機械工業株式会社 クライオポンプ
CN108050043A (zh) * 2018-01-04 2018-05-18 湘潭大学 一种抽真空装置、抽真空***及其抽真空方法
KR102019941B1 (ko) 2019-02-08 2019-09-09 한국알박크라이오(주) 크라이오펌프 장치 및 그 운용 방법
JP7455040B2 (ja) 2020-10-05 2024-03-25 住友重機械工業株式会社 クライオポンプおよびクライオポンプの再生方法

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US5261250A (en) * 1993-03-09 1993-11-16 Polycold Systems International Method and apparatus for recovering multicomponent vapor mixtures
DE69528913T2 (de) * 1994-04-28 2003-09-04 Ebara Corp., Tokio/Tokyo Kryopumpe
US5477692A (en) * 1994-05-31 1995-12-26 Southeastern Universities Research Metal sponge for cryosorption pumping applications
DE19781645B4 (de) 1996-03-20 2005-12-01 Helix Technology Corp., Mansfield Reinigungs- und Grob- bzw. Vorvakuum-Cryopumpenregenerationsverfahren, Cryopumpe und Steuer- bzw. Regeleinrichtung
US5819545A (en) 1997-08-28 1998-10-13 Helix Technology Corporation Cryopump with selective condensation and defrost
WO2005052369A1 (ja) 2003-11-28 2005-06-09 Sumitomo Heavy Industries, Ltd. 水の再生方法及び装置
KR100706818B1 (ko) * 2005-11-07 2007-04-12 박병직 크라이오 펌프
JP4927642B2 (ja) 2007-05-28 2012-05-09 キヤノンアネルバ株式会社 二段式冷凍機の運転制御方法、二段式冷凍機を用いたクライオポンプの運転制御方法、二段式冷凍機及びクライオポンプ
JP4751410B2 (ja) * 2008-02-20 2011-08-17 住友重機械工業株式会社 クライオポンプ及び真空排気方法
JP4642156B2 (ja) * 2008-09-30 2011-03-02 キヤノンアネルバ株式会社 真空排気システム、真空排気システムの運転方法、冷凍機、冷凍機の運転方法、基板処理装置、電子デバイスの製造方法
JP5679910B2 (ja) * 2011-06-03 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法
JP5679913B2 (ja) * 2011-06-14 2015-03-04 住友重機械工業株式会社 クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプ監視方法
JP5404702B2 (ja) * 2011-07-15 2014-02-05 住友重機械工業株式会社 真空排気システム
JP5846966B2 (ja) * 2012-03-01 2016-01-20 住友重機械工業株式会社 クライオポンプ及びその再生方法
JP6124626B2 (ja) * 2013-03-12 2017-05-10 住友重機械工業株式会社 クライオポンプ及びその再生方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11846575B2 (en) 2018-12-31 2023-12-19 Teknologian Tutkimuskeskus Vtt Oy Sampling arrangement

Also Published As

Publication number Publication date
KR20160108185A (ko) 2016-09-19
CN105937486B (zh) 2017-12-22
CN105937486A (zh) 2016-09-14
TW201632729A (zh) 2016-09-16
JP2016160884A (ja) 2016-09-05
US10001117B2 (en) 2018-06-19
KR101781075B1 (ko) 2017-09-22
TWI599722B (zh) 2017-09-21
US20160258429A1 (en) 2016-09-08

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