JP6272587B1 - ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法 - Google Patents
ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法 Download PDFInfo
- Publication number
- JP6272587B1 JP6272587B1 JP2017548316A JP2017548316A JP6272587B1 JP 6272587 B1 JP6272587 B1 JP 6272587B1 JP 2017548316 A JP2017548316 A JP 2017548316A JP 2017548316 A JP2017548316 A JP 2017548316A JP 6272587 B1 JP6272587 B1 JP 6272587B1
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mirror surface
- galvano
- reinforcing portion
- galvanometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title description 21
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 24
- 239000013078 crystal Substances 0.000 claims abstract description 13
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 10
- 239000004917 carbon fiber Substances 0.000 claims description 10
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 10
- 238000005304 joining Methods 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000006104 solid solution Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 2
- 239000005011 phenolic resin Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910002804 graphite Inorganic materials 0.000 claims 1
- 239000010439 graphite Substances 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 abstract description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 27
- 229910010271 silicon carbide Inorganic materials 0.000 description 27
- 230000000052 comparative effect Effects 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000004918 carbon fiber reinforced polymer Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 238000005219 brazing Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005496 eutectics Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910000952 Be alloy Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/435—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material
- B41J2/47—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of radiation to a printing material or impression-transfer material using the combination of scanning and modulation of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
- H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
図1は、本発明の実施の形態1におけるガルバノミラー10を用いたレーザ加工機1の模式図である。図1に示すように、レーザ加工機1は、レーザ発振器300と、ガルバノミラー10を有する2台のガルバノスキャナ100A及び100Bと、fθレンズ400を有している。
Claims (5)
- 鏡面を有するミラーサーフェイス部と、
前記鏡面の裏面側に接合される背面補強部とを有するガルバノミラーであって、
前記ミラーサーフェイス部は、単結晶SiCウェハにより構成されており、
前記背面補強部は、C/SiC材により構成されており、
前記ミラーサーフェイス部と前記背面補強部とは、
金とシリコンとの体積比率が4:1である固溶体により一体に接合されている、
ガルバノミラー。 - 請求項1に記載のガルバノミラーを用いた、
ガルバノスキャナ。 - 請求項1に記載のガルバノミラーを用いた、
レーザ加工機。 - ミラーサーフェイス部と背面補強部とからなるガルバノミラーの製造方法であって、
単結晶ウェハの一方の面を鏡面加工する工程と、
前記単結晶ウェハの他方の面をメタライズして、前記ミラーサーフェイス部を形成する工程と、
PAN系炭素繊維と、ピッチ系炭素繊維と、フェノール樹脂と、黒鉛を混合して炭素繊維強化樹脂を形成する工程と、
前記炭素繊維強化樹脂を熱処理して炭素化する工程と、
前記炭素化した前記炭素繊維強化樹脂に、金属シリコンを含浸させて、C/SiC化を行う工程と、
前記C/SiC化させた前記炭素繊維強化樹脂を、前記背面補強部の形状に加工する工程と、
前記背面補強部の、前記ミラーサーフェイス部と接合する面をメタライズする工程と、
前記ミラーサーフェイス部と、前記背面補強部とを接合する工程と、
を有するガルバノミラーの製造方法。 - 前記単結晶ウェハに、単結晶SiCウェハを用いる、
請求項4に記載のガルバノミラーの製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/014986 WO2018189828A1 (ja) | 2017-04-12 | 2017-04-12 | ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6272587B1 true JP6272587B1 (ja) | 2018-01-31 |
JPWO2018189828A1 JPWO2018189828A1 (ja) | 2019-04-18 |
Family
ID=61074883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017548316A Active JP6272587B1 (ja) | 2017-04-12 | 2017-04-12 | ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6272587B1 (ja) |
KR (1) | KR102273981B1 (ja) |
CN (1) | CN110494789B (ja) |
TW (1) | TWI654461B (ja) |
WO (1) | WO2018189828A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110398795A (zh) * | 2018-04-17 | 2019-11-01 | 通快激光有限责任公司 | 扫描镜、扫描装置和照射装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102020200270A1 (de) * | 2020-01-10 | 2021-07-15 | AM App GmbH | Spiegel mit Spiegelhalter und Spiegelrotor in Leichtbauweise und Bauteil oder Körper in Leichtbauweise mit interner Versteifungsrippenstruktur |
CN112269261A (zh) * | 2020-09-30 | 2021-01-26 | 广州新可激光设备有限公司 | 一种高速往复转动振镜的制造工艺 |
CN116165797B (zh) * | 2022-12-08 | 2023-12-08 | 江苏泽景汽车电子股份有限公司 | 反射镜传动***及抬头显示设备 |
CN116579183B (zh) * | 2023-06-27 | 2024-04-05 | 季华实验室 | 反射镜加工分析方法、装置、电子设备及存储介质 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07181414A (ja) * | 1993-12-22 | 1995-07-21 | Omron Corp | 光スキャナ |
JPH08240782A (ja) * | 1995-03-02 | 1996-09-17 | Omron Corp | 光スキャナ、光センサ装置及び符号情報読み取り装置並びに符号情報読み取り方法 |
JPH09236762A (ja) * | 1996-02-29 | 1997-09-09 | Seiko Epson Corp | 空間光変調器およびその製造方法、並びにその空間光変調器を用いた電子機器 |
JP2001116911A (ja) * | 1999-10-21 | 2001-04-27 | Matsushita Electric Ind Co Ltd | 光学ミラーと光学スキャナーおよびレーザ加工機 |
JP2003131161A (ja) * | 2001-07-11 | 2003-05-08 | Canon Inc | 光偏向器及びその製造方法、それを用いた光学機器そしてねじれ揺動体 |
JP2009515228A (ja) * | 2005-11-08 | 2009-04-09 | ポコ グラファイト、インコーポレイテッド | 前駆体副コンポーネントをユニタリモノリスに変換接合するためのシステム、方法、及び装置 |
JP2010537235A (ja) * | 2007-08-20 | 2010-12-02 | オプトシク ゲーエムベーハー | 炭化ケイ素の走査および光学ミラーの製造および加工方法 |
JP2014016387A (ja) * | 2012-07-05 | 2014-01-30 | Canon Electronics Inc | 振動装置、光走査装置、映像投影装置および画像形成装置 |
US20140211473A1 (en) * | 2013-01-25 | 2014-07-31 | University Of Central Florida Research Foundation Inc. | Optical component, method and application |
JP2015125219A (ja) * | 2013-12-26 | 2015-07-06 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置およびヘッドマウントディスプレイ |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS531554A (en) | 1976-06-26 | 1978-01-09 | Boeicho Gijutsu Kenkyu Honbuch | Distance measuring apparatus |
JPH0753624B2 (ja) * | 1986-01-17 | 1995-06-07 | 日本ハイブリツドテクノロジ−ズ株式会社 | 炭化珪素系セラミックス表面の金属化組成物 |
US5565052A (en) * | 1992-03-05 | 1996-10-15 | Industrieanlagen-Betriebsgesellschaft Gmbh | Method for the production of a reflector |
JPH11183822A (ja) | 1997-12-22 | 1999-07-09 | Minolta Co Ltd | 共振光学装置 |
DE19883004T1 (de) | 1998-08-10 | 2001-07-12 | Mitsubishi Electric Corp | Device for Inspecting Printed Boards |
CN1201911C (zh) * | 2001-04-28 | 2005-05-18 | 中国科学院长春光学精密机械与物理研究所 | 碳化硅反射镜坯体成型工艺方法及胀缩模具 |
JP4475045B2 (ja) * | 2004-07-20 | 2010-06-09 | 三菱電機株式会社 | 反射鏡およびその製造方法 |
CN100345007C (zh) * | 2005-06-29 | 2007-10-24 | 中国人民解放军国防科学技术大学 | 蜂窝夹层结构碳化硅基复合材料反射镜的制备方法 |
JP5371335B2 (ja) * | 2008-09-08 | 2013-12-18 | 三菱電機株式会社 | 両面反射鏡及びその製造方法 |
CN103253988B (zh) * | 2012-02-16 | 2014-10-08 | 比亚迪股份有限公司 | 一种陶瓷表面选择性金属化方法 |
US20150003997A1 (en) * | 2013-07-01 | 2015-01-01 | United Technologies Corporation | Method of forming hybrid metal ceramic components |
CN106507710B (zh) * | 2013-07-12 | 2016-03-16 | 中国科学院上海硅酸盐研究所 | 提高SiC基复合材料支撑结构环境适应性的原位结合工艺 |
JP6187405B2 (ja) * | 2014-07-07 | 2017-08-30 | 株式会社Jvcケンウッド | 光偏向器 |
US10276816B2 (en) * | 2014-12-11 | 2019-04-30 | International Business Machines Corporation | Illumination sensitive current control device |
CN105622119A (zh) * | 2015-12-31 | 2016-06-01 | 中物功能材料研究院有限公司 | 陶瓷基复合涂层及其制备方法 |
-
2017
- 2017-04-12 JP JP2017548316A patent/JP6272587B1/ja active Active
- 2017-04-12 KR KR1020197029144A patent/KR102273981B1/ko active IP Right Grant
- 2017-04-12 WO PCT/JP2017/014986 patent/WO2018189828A1/ja active Application Filing
- 2017-04-12 CN CN201780088522.3A patent/CN110494789B/zh active Active
- 2017-06-05 TW TW106118514A patent/TWI654461B/zh active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07181414A (ja) * | 1993-12-22 | 1995-07-21 | Omron Corp | 光スキャナ |
JPH08240782A (ja) * | 1995-03-02 | 1996-09-17 | Omron Corp | 光スキャナ、光センサ装置及び符号情報読み取り装置並びに符号情報読み取り方法 |
JPH09236762A (ja) * | 1996-02-29 | 1997-09-09 | Seiko Epson Corp | 空間光変調器およびその製造方法、並びにその空間光変調器を用いた電子機器 |
JP2001116911A (ja) * | 1999-10-21 | 2001-04-27 | Matsushita Electric Ind Co Ltd | 光学ミラーと光学スキャナーおよびレーザ加工機 |
JP2003131161A (ja) * | 2001-07-11 | 2003-05-08 | Canon Inc | 光偏向器及びその製造方法、それを用いた光学機器そしてねじれ揺動体 |
JP2009515228A (ja) * | 2005-11-08 | 2009-04-09 | ポコ グラファイト、インコーポレイテッド | 前駆体副コンポーネントをユニタリモノリスに変換接合するためのシステム、方法、及び装置 |
JP2010537235A (ja) * | 2007-08-20 | 2010-12-02 | オプトシク ゲーエムベーハー | 炭化ケイ素の走査および光学ミラーの製造および加工方法 |
JP2014016387A (ja) * | 2012-07-05 | 2014-01-30 | Canon Electronics Inc | 振動装置、光走査装置、映像投影装置および画像形成装置 |
US20140211473A1 (en) * | 2013-01-25 | 2014-07-31 | University Of Central Florida Research Foundation Inc. | Optical component, method and application |
JP2015125219A (ja) * | 2013-12-26 | 2015-07-06 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置およびヘッドマウントディスプレイ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110398795A (zh) * | 2018-04-17 | 2019-11-01 | 通快激光有限责任公司 | 扫描镜、扫描装置和照射装置 |
CN110398795B (zh) * | 2018-04-17 | 2023-08-22 | 通快激光有限责任公司 | 扫描镜、扫描装置和照射装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20190126364A (ko) | 2019-11-11 |
CN110494789A (zh) | 2019-11-22 |
WO2018189828A1 (ja) | 2018-10-18 |
TWI654461B (zh) | 2019-03-21 |
TW201837521A (zh) | 2018-10-16 |
KR102273981B1 (ko) | 2021-07-06 |
JPWO2018189828A1 (ja) | 2019-04-18 |
CN110494789B (zh) | 2021-07-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6272587B1 (ja) | ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法 | |
CN104308153B (zh) | 一种基于选区激光熔化的高熵合金涡轮发动机热端部件的制造方法 | |
KR20190119154A (ko) | 금속 적층 가공을 사용하여 스트레인 웨이브 기어 플렉스플라인들을 제조하기 위한 방법 | |
US11123796B2 (en) | Method of making a pre-sintered preform | |
JP6238880B2 (ja) | ガルバノスキャナ用ロータシャフト、ロータシャフトの製造方法、およびガルバノスキャナ用ロータシャフトを用いたガルバノスキャナ | |
JP7376050B2 (ja) | 摩擦攪拌接合方法 | |
CN104953740B (zh) | 转子轴及其制造方法、使用该转子轴的电扫描器 | |
JP2015506839A (ja) | 耐高温性接合体の製造方法 | |
JP4099135B2 (ja) | 反射ミラーの製造方法 | |
JP2017094474A (ja) | 超硬合金製刃物及びその製造方法 | |
JP4460325B2 (ja) | 天体望遠鏡用ミラー | |
US5178647A (en) | Wear-resistant member | |
CN106353869A (zh) | 一种动态轴镜架 | |
WO2003015968A1 (en) | Ultra high-pressure sintered cutter with recess or groove, holding mechanism for the cutter, and method of manufacturing the cutter | |
JP3461054B2 (ja) | 複合材料 | |
EP3859410B1 (en) | Optical mirrors made of carbon fiber composite material | |
WO2007056015A1 (en) | System, method and apparatus for conversion bonding of precursor subcomponents into a unitary monolith | |
JPH10182256A (ja) | 繊維強化セラミックス基複合材およびその製造方法 | |
JPH05246764A (ja) | 高純度緻密質炭化珪素焼結体及び反射ミラー用基板とその製造方法 | |
JP5052101B2 (ja) | 接合方法 | |
JPH0866803A (ja) | 工作機械の主軸 | |
JPH05174520A (ja) | 記憶装置用高剛性支持体及び記憶装置 | |
US7404647B1 (en) | Method for optimal material selection and processing for dynamic mirror applications | |
CN117735992B (zh) | 一种轻量化陶瓷反射镜的制备方法 | |
JP2001089269A (ja) | 金属−セラミックス複合材料及びその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170913 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20170913 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20170913 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20171128 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20171205 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20171228 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6272587 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |