JP6269664B2 - Led又は太陽電池セルの構造を製造する方法 - Google Patents
Led又は太陽電池セルの構造を製造する方法 Download PDFInfo
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- JP6269664B2 JP6269664B2 JP2015517701A JP2015517701A JP6269664B2 JP 6269664 B2 JP6269664 B2 JP 6269664B2 JP 2015517701 A JP2015517701 A JP 2015517701A JP 2015517701 A JP2015517701 A JP 2015517701A JP 6269664 B2 JP6269664 B2 JP 6269664B2
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Description
a)第1の基板上に、それぞれが少なくとも1つのp型層、活性区域、及びn型層を備える複数の基本LED又は光電池構造を形成するステップと、
b)基本構造上に第1の平面金属層を形成するステップと、
c)第2の平面金属層を表面の1つに備える移転基板を用意するステップと、
d)第1及び第2の金属層のボンディングによって、移転基板を用いて基本構造を組み立てるステップであって、ボンディングは室温での分子付着によって行われる、ステップと、
e)第1の基板を除去するステップと
含む製造方法に関する。
良好な抵抗率及び良好なオーム特性を得るための、1Å〜5nmの厚さを有するNi、Pd、又はPtなどの金属、
反対面に向かって出る光子(すなわち、構造が最終基板に移転されたときにp型層に向かって移動する光子であり、従って放射面はn型層12の側に見出される)を、放射面に戻すための、例えば約100nmの厚さを有するAgの層の形でのリフレクタ、
例えば20〜50nmの厚さを有するWN又はTiNの層の形での拡散バリア。
Claims (11)
- a)サファイアからなる第1の基板上に、それぞれが少なくとも1つのp型層、活性区域、及びn型層を備える複数の基本LED又は光電池構造を形成し、前記基本構造のそれぞれの露出された面に、p又はn型電気的コンタクトパッドを形成するステップと、
b)前記第1の基板の表面全体に亘って、前記基本構造上に第1の平面金属層を形成するステップと、
c)表面全体に亘って形成された第2の平面金属層を表面の1つに備える、シリコンからなる移転基板を用意するステップと、
d)前記第1及び第2の平面金属層のそれぞれの表面全体のボンディングによって、前記移転基板を用いて前記基本構造を組み立てるステップであって、ボンディングは室温での分子付着によって行われる、ステップと、
e)前記第1の基板を除去するステップと
を含む製造方法。 - 前記第1の基板上の前記基本構造が、トレンチによって互いに隔てられる、請求項1に記載の製造方法。
- ステップa)とb)の間に、
前記基本構造の間に存在する前記トレンチ内に、絶縁材料を堆積するステップ
をさらに含む、請求項2に記載の製造方法。 - 前記基本構造のそれぞれが、緩和された又は部分的に緩和された材料のアイランド上に形成される、請求項2又は3に記載の製造方法。
- 前記緩和された又は部分的に緩和された材料がInGaNである、請求項4に記載の製造方法。
- ステップb)及びc)がそれぞれ、前記第1及び第2の金属層をそれぞれ研磨して、1nm RMS以下の表面粗さを得るサブステップを含む、請求項1〜5のいずれか一項に記載の製造方法。
- ステップd)とe)の間に、100℃以下の温度においてアニールするステップをさらに含む、請求項6に記載の製造方法。
- 前記第1及び第2の金属層が、Cu、Al、Ti及びWを含む群から選択される材料において用意される、請求項1〜7のいずれか一項に記載の製造方法。
- ステップa)において形成される前記基本構造は、それぞれが少なくとも1つpn接合を備える光電池構造である、請求項1〜8のいずれか一項に記載の製造方法。
- ステップa)において形成される前記基本構造がLED構造であり、前記活性区域が発光層である、請求項1〜8のいずれか一項に記載の製造方法。
- ステップe)の後に、前記基本構造を分離するために、前記移転基板を切り離すステップをさらに含む、請求項1〜10のいずれか一項に記載の製造方法。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1255934 | 2012-06-22 | ||
FR1255934A FR2992466A1 (fr) | 2012-06-22 | 2012-06-22 | Procede de realisation de contact pour led et structure resultante |
FR1255931A FR2992465B1 (fr) | 2012-06-22 | 2012-06-22 | Procede de fabrication collective de leds et structure pour la fabrication collective de leds |
FR1255931 | 2012-06-22 | ||
FR1257617 | 2012-08-06 | ||
FR1257617A FR2992473B1 (fr) | 2012-06-22 | 2012-08-06 | Procede de fabrication de structures de led ou de cellules solaires |
PCT/EP2013/062423 WO2013189857A1 (en) | 2012-06-22 | 2013-06-14 | Method of manufacturing structures of leds or solar cells |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015526889A JP2015526889A (ja) | 2015-09-10 |
JP6269664B2 true JP6269664B2 (ja) | 2018-01-31 |
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US9478707B2 (en) | 2016-10-25 |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |