JP6232349B2 - 基板収納容器および基板収納容器載置台 - Google Patents
基板収納容器および基板収納容器載置台 Download PDFInfo
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- JP6232349B2 JP6232349B2 JP2014156806A JP2014156806A JP6232349B2 JP 6232349 B2 JP6232349 B2 JP 6232349B2 JP 2014156806 A JP2014156806 A JP 2014156806A JP 2014156806 A JP2014156806 A JP 2014156806A JP 6232349 B2 JP6232349 B2 JP 6232349B2
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- substrate storage
- storage container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67376—Closed carriers characterised by sealing arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Engineering & Computer Science (AREA)
- Packaging Frangible Articles (AREA)
- Mechanical Engineering (AREA)
Description
図1(a)〜(d)は、実施の一形態による基板収納容器の概略構成を示す図の例である。図1(a)は本実施形態の基板収納容器の外観を示す斜視図であり、図1(b)は図1(a)のA−A切断線による断面図である。また、図1(c)は本実施形態の基板収納容器の一運用例を示す斜視図であり、図1(d)は図1(c)のA−A切断線による断面図である。
(1)実施形態1
図2は、実施形態1による基板収納容器載置台を示す図の例である。図2(a)は本実施形態の基板収納容器載置台10の斜視図の一例であり、図2(b)は図2(a)のB−B切断線による断面図の一例である。
図8は、実施形態2による基板収納容器載置台を示す図の例である。図8(a)は本実施形態の基板収納容器載置台12の斜視図の一例であり、図8(b)は図8(a)のC−C切断線による断面図の一例である。
Claims (1)
- 基板を取り込みまたは取り出すための開口を有する基板収納部と、
前記基板収納部を覆い、前記開口の周縁に沿った空洞を有する第1の筐体と、
前記開口を塞ぐ蓋と、
前記空洞内に収容可能な第2の筐体と、前記第2の筐体に連結して前記空洞内に設けられ前記蓋の開放に応じて前記第2の筐体を前記空洞外部へ押し出す弾性部材と、で構成された外気進入防止手段と、を備え、
前記外気進入防止手段は、外部の製造装置と該基板収納容器との空隙を遮蔽する、基板収納容器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014156806A JP6232349B2 (ja) | 2014-07-31 | 2014-07-31 | 基板収納容器および基板収納容器載置台 |
US14/656,182 US9698034B2 (en) | 2014-07-31 | 2015-03-12 | Substrate storage container and substrate storage container mounting table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014156806A JP6232349B2 (ja) | 2014-07-31 | 2014-07-31 | 基板収納容器および基板収納容器載置台 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016033984A JP2016033984A (ja) | 2016-03-10 |
JP6232349B2 true JP6232349B2 (ja) | 2017-11-15 |
Family
ID=55180789
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014156806A Active JP6232349B2 (ja) | 2014-07-31 | 2014-07-31 | 基板収納容器および基板収納容器載置台 |
Country Status (2)
Country | Link |
---|---|
US (1) | US9698034B2 (ja) |
JP (1) | JP6232349B2 (ja) |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3722604B2 (ja) * | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | 基板処理装置 |
JP3193026B2 (ja) | 1999-11-25 | 2001-07-30 | 株式会社半導体先端テクノロジーズ | 基板処理装置のロードポートシステム及び基板の処理方法 |
JP2001250853A (ja) * | 2000-03-03 | 2001-09-14 | Canon Inc | 基板搬送装置、基板搬送方法、容器供給装置、半導体製造装置及び半導体デバイス生産方法 |
JP2001358197A (ja) | 2000-06-16 | 2001-12-26 | Tokyo Electron Ltd | 基板処理装置 |
US6530736B2 (en) * | 2001-07-13 | 2003-03-11 | Asyst Technologies, Inc. | SMIF load port interface including smart port door |
JP3697478B2 (ja) | 2001-08-20 | 2005-09-21 | ソニー株式会社 | 基板の移送方法及びロードポート装置並びに基板移送システム |
US7326565B2 (en) * | 2002-11-19 | 2008-02-05 | Sanyo Electric Co., Ltd. | Storage apparatus |
JP4043444B2 (ja) * | 2004-02-18 | 2008-02-06 | 東京エレクトロン株式会社 | 塗布処理装置及び塗布処理方法 |
US8821099B2 (en) | 2005-07-11 | 2014-09-02 | Brooks Automation, Inc. | Load port module |
JP4227137B2 (ja) | 2005-12-22 | 2009-02-18 | 株式会社東芝 | 基板収納容器 |
JP2009088437A (ja) | 2007-10-03 | 2009-04-23 | Tokyo Electron Ltd | 被処理体の導入ポート機構及び処理システム |
JP4464439B2 (ja) * | 2007-11-19 | 2010-05-19 | 東京エレクトロン株式会社 | 基板処理装置 |
JP2011159833A (ja) | 2010-02-01 | 2011-08-18 | Yaskawa Electric Corp | クリーンゲートを備えたロードポート並びに搬送装置 |
JP4919123B2 (ja) | 2010-03-08 | 2012-04-18 | Tdk株式会社 | 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム |
JP5925474B2 (ja) | 2011-12-06 | 2016-05-25 | 株式会社日立ハイテクマニファクチャ&サービス | ウエハ処理装置 |
WO2013186912A1 (ja) * | 2012-06-15 | 2013-12-19 | ミライアル株式会社 | 埃などの侵入を抑制する基板収納容器 |
-
2014
- 2014-07-31 JP JP2014156806A patent/JP6232349B2/ja active Active
-
2015
- 2015-03-12 US US14/656,182 patent/US9698034B2/en active Active
Also Published As
Publication number | Publication date |
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JP2016033984A (ja) | 2016-03-10 |
US9698034B2 (en) | 2017-07-04 |
US20160035606A1 (en) | 2016-02-04 |
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