JP6071663B2 - 環状フレーム - Google Patents
環状フレーム Download PDFInfo
- Publication number
- JP6071663B2 JP6071663B2 JP2013049419A JP2013049419A JP6071663B2 JP 6071663 B2 JP6071663 B2 JP 6071663B2 JP 2013049419 A JP2013049419 A JP 2013049419A JP 2013049419 A JP2013049419 A JP 2013049419A JP 6071663 B2 JP6071663 B2 JP 6071663B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- annular frame
- protective film
- spinner table
- film coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000001681 protective effect Effects 0.000 claims description 40
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 40
- 239000007788 liquid Substances 0.000 claims description 26
- 239000005871 repellent Substances 0.000 claims description 24
- 239000011347 resin Substances 0.000 claims description 23
- 229920005989 resin Polymers 0.000 claims description 23
- 230000002940 repellent Effects 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 82
- 239000007888 film coating Substances 0.000 description 27
- 238000009501 film coating Methods 0.000 description 27
- 238000004140 cleaning Methods 0.000 description 22
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- 230000005291 magnetic effect Effects 0.000 description 6
- 238000003825 pressing Methods 0.000 description 5
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 4
- 239000003302 ferromagnetic material Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 229920001223 polyethylene glycol Polymers 0.000 description 4
- 229920002451 polyvinyl alcohol Polymers 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910009372 YVO4 Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Landscapes
- Dicing (AREA)
Description
F 環状フレーム
T ダイシングテープ
2 レーザー加工装置
18 チャックテーブル
24 レーザービーム照射ユニット
28 集光器
30 保護膜被覆装置
48 スピンナテーブル
66 液状樹脂塗布手段
68 吐出ノズル
74 撥水剤塗付手段
78,80 ノズル
90 スプレー缶
Claims (1)
- ウエーハを収容する開口部を有し、ダイシングテープの外周部が貼着されるとともに該開口部にウエーハを位置付けてダイシングテープに貼着し、ウエーハの加工面に液状の樹脂を塗布して保護膜を形成する際に用いる環状フレームであって、
上面、外周面及び下面に撥水処理が施されていることを特徴とする環状フレーム。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013049419A JP6071663B2 (ja) | 2013-03-12 | 2013-03-12 | 環状フレーム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013049419A JP6071663B2 (ja) | 2013-03-12 | 2013-03-12 | 環状フレーム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014175610A JP2014175610A (ja) | 2014-09-22 |
JP6071663B2 true JP6071663B2 (ja) | 2017-02-01 |
Family
ID=51696513
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013049419A Active JP6071663B2 (ja) | 2013-03-12 | 2013-03-12 | 環状フレーム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6071663B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08164517A (ja) * | 1994-12-14 | 1996-06-25 | Nikon Corp | 洗浄水撥水剤及びそれを用いたダイシング方法 |
KR100538158B1 (ko) * | 2004-01-09 | 2005-12-22 | 삼성전자주식회사 | 웨이퍼 레벨 적층 칩 접착 방법 |
JP4784604B2 (ja) * | 2005-05-30 | 2011-10-05 | Jsr株式会社 | 固定剤付きウエハの製造方法 |
JP2012156292A (ja) * | 2011-01-26 | 2012-08-16 | Seiko Epson Corp | 基板の加工方法 |
JP5715859B2 (ja) * | 2011-03-18 | 2015-05-13 | 株式会社ディスコ | 保護膜被覆方法及び保護膜被覆装置 |
-
2013
- 2013-03-12 JP JP2013049419A patent/JP6071663B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2014175610A (ja) | 2014-09-22 |
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