JP6066138B2 - カラーフィルタ及びフォトダイオードのパターニング構成 - Google Patents
カラーフィルタ及びフォトダイオードのパターニング構成 Download PDFInfo
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- JP6066138B2 JP6066138B2 JP2015085559A JP2015085559A JP6066138B2 JP 6066138 B2 JP6066138 B2 JP 6066138B2 JP 2015085559 A JP2015085559 A JP 2015085559A JP 2015085559 A JP2015085559 A JP 2015085559A JP 6066138 B2 JP6066138 B2 JP 6066138B2
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- 238000000059 patterning Methods 0.000 title 1
- 230000005540 biological transmission Effects 0.000 claims description 45
- 239000003086 colorant Substances 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 10
- 230000004044 response Effects 0.000 claims description 4
- 239000012780 transparent material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 description 17
- 238000010521 absorption reaction Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000001788 irregular Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000009429 electrical wiring Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14667—Colour imagers
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Color Television Image Signal Generators (AREA)
- Optical Filters (AREA)
Description
本出願は、2014年4月22日に出願された米国仮特許出願第61/982,562号の利益を主張するものであり、この仮特許出願は引用により本明細書に組み入れられる。
表1
シリコンでは、緑色に比べて青色の方が多く吸収され、赤色に比べて緑色の方が多く吸収される。
表2
表3
Claims (7)
- 撮像装置であって、
各々が受光光に応答して電気信号を生成するように構成された光検出器の配列と、
前記光検出器の配列上に配置されたカラーフィルタの配列と、
を含み、前記光検出器は、前記カラーフィルタを通過する光を受光し、
前記カラーフィルタの各々は、色伝送特性を有し、
前記カラーフィルタの一部の前記色伝送特性は、前記カラーフィルタの残りの色伝送特性と異なり、
前記カラーフィルタのうちの複数の第1のカラーフィルタの各々は、前記光検出器のうちの複数の光検出器上に配置され、
前記カラーフィルタのうちの複数の第2のカラーフィルタの各々は、前記光検出器のうちのたった1つの光検出器上に配置され、
前記複数の第1のカラーフィルタは、前記カラーフィルタの配列の端部に沿って配置され、前記複数の第2のカラーフィルタは、前記カラーフィルタの配列の内側領域に配置される、ことを特徴とする撮像装置。 - 前記複数の第1のカラーフィルタは、第1の色伝送特性を有する複数の第1のサブカラーフィルタと、第2の色伝送特性を有する複数の第2のサブカラーフィルタと、第3の色伝送特性を有する複数の第3のサブカラーフィルタとから成り、前記第1、第2及び第3の色伝送特性は互いに異なる、ことを特徴とする請求項1に記載の撮像装置。
- 前記複数の第2のカラーフィルタは、前記第1の色伝送特性を有する複数の第1のサブカラーフィルタと、前記第2の色伝送特性を有する複数の第2のサブカラーフィルタと、前記第3の色伝送特性を有する複数の第3のサブカラーフィルタとから成り、
ことを特徴とする請求項2に記載の撮像装置。 - 前記第1の色伝送特性は、赤色伝送特性であり、
前記第2の色伝送特性は、緑色伝送特性であり、
前記第3の色伝送特性は、青色伝送特性である、
ことを特徴とする請求項3に記載の撮像装置。 - 前記複数の第1のカラーフィルタは、前記第1、第2及び第3の色伝送特性とは異なる第4の色伝送特性を有する複数の第4のサブカラーフィルタを含み、
前記複数の第2のカラーフィルタは、前記第1の色伝送特性を有する複数の第1のサブカラーフィルタと、前記第2の色伝送特性を有する複数の第2のサブカラーフィルタと、前記第3の色伝送特性を有する複数の第3のサブカラーフィルタと、前記第4の色伝送特性を有する複数の第4のサブカラーフィルタとから成る、
ことを特徴とする請求項2に記載の撮像装置。 - 前記第1の色伝送特性は、赤色伝送特性であり、
前記第2の色伝送特性は、緑色伝送特性であり、
前記第3の色伝送特性は、青色伝送特性であり、
前記第4の色伝送特性は、白色伝送特性である、
ことを特徴とする請求項5に記載の撮像装置。 - 前記白色伝送特性を有する前記カラーフィルタの各々は、全ての色の可視光を透過させるように透明材料又はアパーチャで形成される、
ことを特徴とする請求項6に記載の撮像装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461982562P | 2014-04-22 | 2014-04-22 | |
US61/982,562 | 2014-04-22 | ||
US14/618,510 US9985063B2 (en) | 2014-04-22 | 2015-02-10 | Imaging device with photo detectors and color filters arranged by color transmission characteristics and absorption coefficients |
US14/618,510 | 2015-02-10 |
Related Child Applications (1)
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JP2016123221A Division JP6094936B2 (ja) | 2014-04-22 | 2016-06-22 | カラーフィルタ及びフォトダイオードのパターニング構成 |
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JP2015207000A JP2015207000A (ja) | 2015-11-19 |
JP6066138B2 true JP6066138B2 (ja) | 2017-01-25 |
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JP2015085559A Active JP6066138B2 (ja) | 2014-04-22 | 2015-04-20 | カラーフィルタ及びフォトダイオードのパターニング構成 |
JP2016123221A Active JP6094936B2 (ja) | 2014-04-22 | 2016-06-22 | カラーフィルタ及びフォトダイオードのパターニング構成 |
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Country Status (6)
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US (1) | US9985063B2 (ja) |
JP (2) | JP6066138B2 (ja) |
KR (2) | KR101706845B1 (ja) |
CN (1) | CN105047679B (ja) |
HK (1) | HK1217380A1 (ja) |
TW (1) | TWI581411B (ja) |
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2015
- 2015-02-10 US US14/618,510 patent/US9985063B2/en active Active
- 2015-03-04 TW TW104106861A patent/TWI581411B/zh active
- 2015-04-10 KR KR1020150051081A patent/KR101706845B1/ko active IP Right Grant
- 2015-04-20 JP JP2015085559A patent/JP6066138B2/ja active Active
- 2015-04-22 CN CN201510193426.8A patent/CN105047679B/zh active Active
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2016
- 2016-05-10 HK HK16105272.0A patent/HK1217380A1/zh unknown
- 2016-06-22 JP JP2016123221A patent/JP6094936B2/ja active Active
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HK1217380A1 (zh) | 2017-01-06 |
CN105047679A (zh) | 2015-11-11 |
US9985063B2 (en) | 2018-05-29 |
CN105047679B (zh) | 2018-05-15 |
KR20170001949A (ko) | 2017-01-05 |
JP6094936B2 (ja) | 2017-03-15 |
KR101706845B1 (ko) | 2017-02-14 |
KR20150122064A (ko) | 2015-10-30 |
TWI581411B (zh) | 2017-05-01 |
JP2016181932A (ja) | 2016-10-13 |
US20150303231A1 (en) | 2015-10-22 |
TW201605032A (zh) | 2016-02-01 |
KR101770079B1 (ko) | 2017-08-21 |
JP2015207000A (ja) | 2015-11-19 |
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