JP6055701B2 - 光偏向器 - Google Patents
光偏向器 Download PDFInfo
- Publication number
- JP6055701B2 JP6055701B2 JP2013054964A JP2013054964A JP6055701B2 JP 6055701 B2 JP6055701 B2 JP 6055701B2 JP 2013054964 A JP2013054964 A JP 2013054964A JP 2013054964 A JP2013054964 A JP 2013054964A JP 6055701 B2 JP6055701 B2 JP 6055701B2
- Authority
- JP
- Japan
- Prior art keywords
- optical deflector
- mirror
- axis
- piezoelectric
- mirror portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 title claims description 96
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 230000006399 behavior Effects 0.000 description 5
- 230000001788 irregular Effects 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910016570 AlCu Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Facsimile Scanning Arrangements (AREA)
Description
Claims (4)
- 反射面を有するミラー部と、前記ミラー部を挟んで対向するように配置された1対の圧電アクチュエータとを備え、各圧電アクチュエータの一端が前記ミラー部に連結され、該1対の圧電アクチュエータにより前記ミラー部を第1軸線の周りに駆動するように構成された光偏向器であって、
前記各圧電アクチュエータは、端部が隣り合うように並んで配置されて圧電駆動により湾曲変形を行う複数の圧電カンチレバーと、隣り合う圧電カンチレバーの端部に対して折り返すように機械的に連結すると共に前記ミラー部の両側で対称位置に設定された折返し部とを有し、
前記1対の圧電アクチュエータにおいて前記対称位置に設定された折返し部のうち少なくとも1対の折返し部が連結梁で連結されていることを特徴とする光偏向器。 - 請求項1記載の光偏向器において、
前記連結梁は、前記ミラー部に最も近い1対の折返し部を連結していることを特徴とする光偏向器。 - 請求項2記載の光偏向器において、
折返し部の複数の対のうち、前記第1軸線に対して直交する方向において前記ミラー部に対して前記連結梁で連結された折返し部とは反対側にある対の折返し部が別の連結梁で連結されていることを特徴とする光偏向器。 - 請求項1〜3のいずれか1項に記載の光偏向器において、
前記ミラー部と前記圧電アクチュエータとの間に介在し前記圧電アクチュエータの先端部が外周側に結合する可動支持枠と、
前記可動支持枠と前記ミラー部との間に介在して前記ミラー部を前記第1軸線とは直角の第2軸線の周りに揺動させる内側アクチュエータとを備えることを特徴とする光偏向器。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013054964A JP6055701B2 (ja) | 2013-03-18 | 2013-03-18 | 光偏向器 |
EP14020032.0A EP2781948B1 (en) | 2013-03-18 | 2014-03-17 | Optical deflector including meander-type piezoelectric actuators coupled by crossing bars therebetween |
US14/217,102 US9323048B2 (en) | 2013-03-18 | 2014-03-17 | Optical deflector including meander-type piezoelectric actuators coupled by crossing bars therebetween |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013054964A JP6055701B2 (ja) | 2013-03-18 | 2013-03-18 | 光偏向器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014182189A JP2014182189A (ja) | 2014-09-29 |
JP6055701B2 true JP6055701B2 (ja) | 2016-12-27 |
Family
ID=50439121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013054964A Active JP6055701B2 (ja) | 2013-03-18 | 2013-03-18 | 光偏向器 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9323048B2 (ja) |
EP (1) | EP2781948B1 (ja) |
JP (1) | JP6055701B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11796793B2 (en) | 2019-11-27 | 2023-10-24 | Ricoh Company, Ltd. | Optical deflector, deflection apparatus, distance measuring apparatus, image projecting apparatus, and movable body |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3023756A1 (en) * | 2014-11-24 | 2016-05-25 | Freie Universität Berlin | Oscillating reflector with ultrasonic resonator, interferometer with an oscillating reflector and Fourier transform infrared spectrometer |
JP6516516B2 (ja) * | 2015-03-16 | 2019-05-22 | スタンレー電気株式会社 | 光偏向器 |
JP6520263B2 (ja) * | 2015-03-19 | 2019-05-29 | 株式会社リコー | 光偏向装置、光走査装置、画像形成装置、画像投影装置および画像読取装置 |
JP6974696B2 (ja) | 2017-04-28 | 2021-12-01 | ミツミ電機株式会社 | 光走査装置 |
JP6924090B2 (ja) | 2017-07-21 | 2021-08-25 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
DE102018215528A1 (de) * | 2018-09-12 | 2020-03-12 | Robert Bosch Gmbh | Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil |
JP7375471B2 (ja) | 2019-10-30 | 2023-11-08 | 株式会社リコー | 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び車両 |
WO2021193669A1 (ja) * | 2020-03-25 | 2021-09-30 | パナソニックIpマネジメント株式会社 | 光学反射素子、および光学反射システム |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4926596B2 (ja) | 2006-08-08 | 2012-05-09 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
JP4972789B2 (ja) * | 2007-09-27 | 2012-07-11 | コニカミノルタアドバンストレイヤー株式会社 | マイクロスキャナおよびそれを備える光学機器 |
JP2009223113A (ja) * | 2008-03-18 | 2009-10-01 | Panasonic Corp | 光学反射素子およびこれを用いた画像投影装置 |
JP2010263736A (ja) * | 2009-05-11 | 2010-11-18 | Mitsumi Electric Co Ltd | 圧電アクチュエータ |
JP5842467B2 (ja) | 2010-11-16 | 2016-01-13 | 株式会社リコー | アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置 |
WO2013114857A1 (ja) * | 2012-01-31 | 2013-08-08 | パナソニック株式会社 | 圧電アクチュエータデバイスとその製造方法 |
JP2013200337A (ja) * | 2012-03-23 | 2013-10-03 | Stanley Electric Co Ltd | 光偏向器 |
-
2013
- 2013-03-18 JP JP2013054964A patent/JP6055701B2/ja active Active
-
2014
- 2014-03-17 US US14/217,102 patent/US9323048B2/en active Active
- 2014-03-17 EP EP14020032.0A patent/EP2781948B1/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11796793B2 (en) | 2019-11-27 | 2023-10-24 | Ricoh Company, Ltd. | Optical deflector, deflection apparatus, distance measuring apparatus, image projecting apparatus, and movable body |
Also Published As
Publication number | Publication date |
---|---|
JP2014182189A (ja) | 2014-09-29 |
EP2781948B1 (en) | 2017-09-27 |
EP2781948A1 (en) | 2014-09-24 |
US20140268271A1 (en) | 2014-09-18 |
US9323048B2 (en) | 2016-04-26 |
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