JP6026084B2 - 光学位置測定装置 - Google Patents
光学位置測定装置 Download PDFInfo
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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Description
湾曲された測定方向に沿って尺度具体化部と走査ユニットの相対運動を検出する光学位置測定装置との関係において、二つの基本タイプa)とb)を区別すべきである;
a)部分円板上に配置された半径方向区分の形態の尺度具体化部を備える光学位置測定装置;
b)部分円板上に配置されたドラム区分の形態の尺度具体化部を備える光学位置測定装置。
[第一実施例]
D=尺度具体化部と波面補正器の間の有効な走査間隔
RA = 平均走査半径
λ=光源の波長
N=部分円板上の尺度具体化部の線の数
Xp1=−XL (式2.1)
Xp2=+XL (式2.2)
Yp1=Yp2=RA (式2.3)
[第二実施例]
Xp1=−XL (式3.1)
Xp2=+XL (式3.2)
Yp1=Yp2=RA (式3.3)
[第三実施例の変更態様]
f1+f2=2・DA (式4)
ここで:
f1=第一レンズの焦点幅
f2=第二レンズの焦点幅
r1=尺度具体化部の第一走査箇所の走査半径
r2=尺度具体化部の第二走査箇所の走査半径
DA =走査プレートの厚さ
f1/f2=r1/r2 (式5)
[第四実施例]
[第五実施例]
x0 =x方向における尺度具体化部の第一回折の際の走査箇所
R =区分ドラムの半径
εB =2x0 /R (式6.1)
DL =区分ドラムの頂点と走査プレートの間の走査距離
yB =(y624 .1a+y624 .2a)/2 (式8)
xD =−xB (式9.1)
yD =(y624 .1b+y624 .2b)/2 (式9.2)
εD =εB (式9.3)
[第六実施例]
尺度具体化部(第一回折)−第一波面補正器−光線方向インバーター−第二波面補正器−尺度具体化部(第二回折)。
第一波面補正器−尺度具体化部(第一回折)−光線方向インバーター−尺度具体化部(第二回折)−第二波面補正器
20;220;320;420;520....走査ユニット
2000....反射器ユニット
2100....第一波面補正器
2200....第二波面補正器
2300....光線方向インバーター
Claims (12)
- 一つの走査ユニット(20;220;320;420;520;520’;620;2000)と一つの測定尺(10;210;310;410;510;510’;610;1000)との相対位置を検出する光学位置測定装置において、走査ユニット(20;220;320;420;520;520’;620;2000)と測定尺(10;210;310;410;510;510’;610;1000)とが湾曲された測定方向(x)に沿って互いに移動できて、そして
・走査ユニット(20;220;320;420;520;520’;620;2000)が少なくとも一つの反射器ユニット(2000)と一つの検出器ユニットを有し、反射器ユニット(2000)が一つの第一波面補正器(2100)、一つの光線方向インバーター(2300)と一つの第二波面補正器(2200)から成り、
・走査ユニット(20;220;320;420;520;520’;620;2000)内の反射器ユニット(2000)は、光束がまず最初に測定尺(10;210;310;410;510;510’;610;1000)と第一波面補正器(2100)とから成る第一組合せ部を通過し、引き続いて光線方向インバーター(2300)を介して部分光束の測定尺(10;210;310;410;510;510’;610)への方向へ後方反射が行われ、次に部分光束が引き続いて検出器ユニットに衝突する前に、部分光束が測定尺(10;210;310;410;510;510’;610;1000)と第二波面補正器(2200)とから成る第二組合せ部を通過するように、配置され且つ形成されるか、又は配置されるか、或いは形成されており、
・反射器ユニット(2000)によって、測定尺(10;210;310;410;510;521’;610;1000)における第一回折によって生じる部分光束の波面変形は、測定尺(10;210;310;410;510;510’;610)における第二回折の際に部分光束の生じる波面変形を補償する波面変形に変換されることが確保されることと、
・第一波面補正器(2100)によって、測定尺(10;210;310;410;510;510’;610)と第一波面補正器(2100)とから成る第一組合せ部から生じる波面が平らな波面を備えるコリメートされた部分光束に変換することが行われ、そして
・第二波面補正器(2200)によって、測定尺(10;210;310;410;510;510’;610)と第二波面補正器(2200)とから成る第二組合せ部から生じる波面を平らな波面を備えるコリメートされた部分光束に変換することが行われるので、測定尺(10;210;310;410;510;510’;610)における第二回折後の重なるようになる部分光束の波面が重なり箇所において等しいことと、
波面補正器(2100;2200)が回折光学要素として形成されており、この波面補正器(2100;2200)がそれぞれに回折光学組合せ要素として走査格子の形態で形成されていて、この走査格子がさらに、走査格子に入射する部分光束上に次の追加的光学機能性、即ち光学偏向作用、光学分割作用或いは統合作用、反射鏡への光学焦点合せ作用の少なくとも一つを有することと、
を特徴とする光学位置測定装置。 - ・測定尺(10;210;310;410;510;510’;610)と第一波面補正器(2100)とから成る第一組合せ部は測定尺(10;210;310;410;510;521’;610)、第一波面補正器(2100)の順番に光線伝搬方向に配置されていて、そして
・測定尺(10;210;310;410;510;510’;610)と第二波面補正器(2200)とから成る第二組合せ部は、第二波面補正器(2200)、測定尺(10;210;310;410;510;510’;610)の順番に光線伝搬方向に配置されていることを特徴とする請求項1に記載の光学位置測定装置。 - ・測定尺(10;210;310;410;510;510’;610)と第一波面補正器(2100)とから成る第一組合せ部は、第一波面補正器(2100)、測定尺(10;210;310;410;510;510’;610)の順番に光線伝搬方向に配置されていて、そして
・測定尺(10;210;310;410;510;510’;610)と第二波面補正器(2200)とから成る第二組合せ部は、測定尺(10;210;310;410;510;510’;610)、第二波面補正器(2200)の順番に光線伝搬方向に配置されていることを特徴とする請求項1に記載の光学位置測定装置。 - 光線方向インバーター(2300)は、光線方向反転が光線方向インバーターから反射された部分光束に関して二つの直交方向に行われるように、形成されていることを特徴とする請求項1に記載の光学位置測定装置。
- 光線方向インバーター(2300)は三重鏡或いは三重プリズムとして形成されていることを特徴とする請求項1乃至4のいずれか一項に記載の光学位置測定装置。
- 光線方向インバーター(2300)は一つのレンズと一つの反射鏡とから成る組合せとして形成されていることを特徴とする請求項1乃至4のいずれか一項に記載の光学位置測定装置。
- 波面補正器(2100;2200)或いは光線方向インバーター(2300)のレンズの少なくとも一方が屈折光学要素として形成されていることを特徴とする請求項6に記載の光学位置測定装置。
- 波面補正器(2100;2200)と光線方向インバーター(2300)のレンズが回折光学要素として形成されていることを特徴とする請求項1乃至7のいずれか一項に記載の光学位置測定装置。
- 反射鏡と回折光学要素が透明な走査プレート(23;223;323;423;523;523’;623)の対向位置している側面に配置されていることを特徴とする請求項7又は8に記載の光学位置測定装置。
- 測定尺(10;210;310;410)が回転軸線を中心に回転する部分円板(11;211;311;411)上の半径方向区分として形成され、回転軸線を中心に同心に配置されていることを特徴とする請求項1乃至9のいずれか一項に記載の光学位置測定装置。
- 測定尺(510;510’;610)が回転する区分ドラム(511;511’;611)の外周上のドラム区分として形成されていて、回転軸線が区分ドラムの長手軸線と一致することを特徴とする請求項1乃至9のいずれか一項に記載の光学位置測定装置。
- 走査ユニット(620)内の光学要素は、光源から発射された光束が90°と異なる角度でドラム区分に入射するように、形成され且つ配置されていることを特徴とする請求項11に記載の光学位置測定装置。
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DE102010029211.7 | 2010-05-21 | ||
DE102010029211A DE102010029211A1 (de) | 2010-05-21 | 2010-05-21 | Optische Positionsmesseinrichtung |
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JP2011247886A JP2011247886A (ja) | 2011-12-08 |
JP2011247886A5 JP2011247886A5 (ja) | 2014-06-05 |
JP6026084B2 true JP6026084B2 (ja) | 2016-11-16 |
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US (1) | US9766098B2 (ja) |
EP (1) | EP2388558B1 (ja) |
JP (1) | JP6026084B2 (ja) |
CN (1) | CN102288113B (ja) |
DE (1) | DE102010029211A1 (ja) |
ES (1) | ES2699694T3 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011081879A1 (de) | 2010-11-03 | 2012-05-03 | Dr. Johannes Heidenhain Gmbh | Optische Winkelmesseinrichtung |
DE102011082570A1 (de) * | 2011-09-13 | 2013-03-14 | Dr. Johannes Heidenhain Gmbh | Rotatorische Positionsmesseinrichtung |
DE102012210309A1 (de) * | 2012-06-19 | 2013-12-19 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102013206693A1 (de) * | 2013-04-15 | 2014-10-16 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur interferentiellen Abstandsmessung |
DE102013210999A1 (de) * | 2013-06-13 | 2014-12-18 | Dr. Johannes Heidenhain Gmbh | Messeinrichtung |
DE102013221898A1 (de) * | 2013-10-29 | 2015-04-30 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur Positionsbestimmung |
DE102015209117A1 (de) * | 2014-06-05 | 2015-12-10 | Dr. Johannes Heidenhain Gmbh | Interferentielle Positionsmesseinrichtung und Verfahren zum Betrieb einer interferentiellen Positionsmesseinrichtung |
DE102014211004A1 (de) * | 2014-06-10 | 2015-12-17 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
DE102015203188A1 (de) * | 2015-02-23 | 2016-08-25 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
JP6702666B2 (ja) | 2015-07-28 | 2020-06-03 | 株式会社ミツトヨ | 変位検出装置 |
WO2017185069A1 (en) * | 2016-04-21 | 2017-10-26 | Molecular Vista, Inc. | System and method for optical drift correction |
DE102017205504A1 (de) * | 2017-03-31 | 2018-10-04 | Robert Bosch Gmbh | Optisches Scansystem |
DE102017205623A1 (de) * | 2017-04-03 | 2018-10-04 | Robert Bosch Gmbh | LIDAR-Vorrichtung und Verfahrens zum Abtasten eines Abtastwinkels |
DE102019206937A1 (de) * | 2019-05-14 | 2020-11-19 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
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GB8413955D0 (en) | 1984-05-31 | 1984-07-04 | Pa Consulting Services | Displacement measuring apparatus |
DE3905730C2 (de) | 1989-02-24 | 1995-06-14 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
US5079418A (en) | 1990-02-20 | 1992-01-07 | Dr. Johannes Heidenhain Gmbh | Position measuring apparatus with reflection |
JP2862417B2 (ja) * | 1990-11-16 | 1999-03-03 | キヤノン株式会社 | 変位測定装置及び方法 |
US5442172A (en) | 1994-05-27 | 1995-08-15 | International Business Machines Corporation | Wavefront reconstruction optics for use in a disk drive position measurement system |
JP4846909B2 (ja) * | 2000-02-15 | 2011-12-28 | キヤノン株式会社 | 光学式エンコーダ及び回折格子の変位測定方法 |
DE102004035172A1 (de) * | 2004-07-16 | 2006-02-09 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102005029917A1 (de) | 2005-06-28 | 2007-01-04 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102006042743A1 (de) * | 2006-09-12 | 2008-03-27 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102007035345A1 (de) | 2006-11-20 | 2008-05-21 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
US7858922B2 (en) * | 2006-11-20 | 2010-12-28 | Dr. Johannes Heidenhain Gmbh | Position-measuring device |
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2010
- 2010-05-21 DE DE102010029211A patent/DE102010029211A1/de not_active Withdrawn
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2011
- 2011-05-04 EP EP11164731.9A patent/EP2388558B1/de active Active
- 2011-05-04 ES ES11164731T patent/ES2699694T3/es active Active
- 2011-05-13 JP JP2011107788A patent/JP6026084B2/ja active Active
- 2011-05-16 US US13/068,659 patent/US9766098B2/en active Active
- 2011-05-20 CN CN201110131850.1A patent/CN102288113B/zh active Active
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Publication number | Publication date |
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EP2388558B1 (de) | 2018-08-29 |
JP2011247886A (ja) | 2011-12-08 |
EP2388558A2 (de) | 2011-11-23 |
ES2699694T3 (es) | 2019-02-12 |
CN102288113B (zh) | 2016-04-06 |
US9766098B2 (en) | 2017-09-19 |
EP2388558A3 (de) | 2017-04-26 |
US20110286004A1 (en) | 2011-11-24 |
DE102010029211A1 (de) | 2011-11-24 |
CN102288113A (zh) | 2011-12-21 |
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