JP5996126B2 - 電力半導体装置 - Google Patents
電力半導体装置 Download PDFInfo
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Description
図1は、本発明の実施の形態1における電力半導体装置の構成を示す分解斜視図であり、図2は、本発明の実施の形態1における電力半導体装置の断面図である。実施の形態1における電力半導体装置1は、モールド部10と、放熱フィン11と、金属部材(導電性部材)12とを有する。
また、突起35の数をここではベース板22の短辺側にそれぞれ2つとしたが、これに限定されるものではなく、1つの辺に1か所または3か所以上の複数か所に突起35を設けてもよい。突起35の数は、望ましくは、金属部材12がベース板22に十分に強固に固定され、ベース板22と金属部材12の間の電気的抵抗が十分に小さくなり得る必要最小限の数である。
なお、金属部材12は切欠き42がなく突起35の幅分切除部を広げた構成であっても、突起35を変形後金属部材が固定され、導通が確保でき、電力半導体素子からの放射ノイズを低減し、電力半導体素子の誤動作を抑制する効果を高めることができる。
図8は、本発明の実施の形態2における電力半導体装置の構成を示す分解斜視図である。実施の形態1と異なる点は、突起35の形状が、実施の形態1では半円柱形であったのが、実施の形態2では円柱形としたことである。突起36を円柱形とした場合、ベース板22の凸部31の側面と一体となった面積が小さくなるため、突起36を塑性変形させるために必要な荷重を減らすことができる。
図12は、本発明の実施の形態3における電力半導体装置の構成を示す分解斜視図であり、図13は、本発明の実施の形態3における金属部材12とベース板22を組み立てた後の突起37付近の拡大断面図である。実施の形態3では、突起37の形状を板状とする。図13に示すように、この突起37を金属部材12の表面に倒すように塑性変形させる。つまり、他の実施の形態においては、突起37を変形させるのに、ベース板22の平坦面33に垂直な荷重をかけていたが、本実施の形態においてはベース板22の平坦面33に略水平方向に荷重をかけることで突起37を変形することができるので、ベース板22の下方に配置される電力半導体装置に大きな荷重が加わることを抑制することができる。また、突起37の断面は、荷重により傾く方向の厚みよりも、荷重をかける方向に対し直行する辺が長い。これにより突起37を塑性変形させる際の荷重をより小さくでき、しかも金属部材12がベース板22に十分に強固に固定され、ベース板22と金属部材12の間の電気的抵抗が十分に小さくなり得る構成となる。上記構成とすることにより、突起37を塑性変形させるための荷重による電力半導体装置への影響をより小さくすることができる。
図14は、本発明の実施の形態4における電力半導体装置の構成を示す分解斜視図であり、図15は金属部材12の斜視図である。実施の形態1と異なる点は、金属部材12が、実施の形態1では略矩形状の切除部41によりベース板22の凸部31、及び複数の突起35を挿入可能であったところ、実施の形態4では、図15に示したように、円形でその中心に突起35のみを嵌め合わせる切欠き45(穴)があるワッシャ形状であり、一つの突起35を1枚の金属部材12で嵌め合わせる構成とした点である。図14においては、2つの金属部材12を2箇所の突起35に嵌め合わせた場合の構成を図示しているが、一箇所でも三箇所以上でも良く、導通が十分確保できる個数を選択すれば良い。ワッシャ形状の金属部材12を突起35に嵌め合わせた後は、実施の形態1と同様に、突起35を変形させベース板と金属部材12とを固定し、金属部材12をそれぞれアース接続する。これにより、実施の形態1と同様、電力半導体素子からの放射ノイズが低減され、電力半導体素子の誤動作を抑制することができる。なお、金属部材12の形状はワッシャ形状に限定されるものでは無く、ベース板22に設けられた突起35に嵌め合う切欠き45(穴の場合も含む)が設けられた形状であれば良い。また、突起の形状も他の実施の形態で説明した形状でも良い。
図16は、本発明の実施の形態5における電力半導体装置の構成を示す分解斜視図である。実施の形態1と異なる点は、金属部材12に凸部31を挿入する切除部はあるが、切欠きがない点である。つまり、ベース板22の突起が凸部31の内側になるように形成されている。図16のように、ベース板22には実施の形態1の突起35を設けていた箇所に、位置決め部51が凸部31を削り取って形成され、図示しない突起38がベース板の位置決め部51の内側に形成されている。金属部材12の位置決め部50は、実施の形態1の切欠き42の箇所に設けられる。
11 放熱フィン
12 金属部材(導電性部材)
21 電力半導体素子
22 ベース板
31 凸部
32 溝
35、36、37、38 突起
41 切除部
42、43、44、45 切欠き
Claims (7)
- 電力半導体素子と、
突起を備え、導電性材料から成り、前記電力半導体素子の発熱を放熱フィンに伝導するよう前記電力半導体素子と熱的に接続されたベース板と、
前記ベース板に固定されると共に前記ベース板と導通し、アースに接続された導電性部材とを備え、
前記ベース板に設けられた突起を、前記導電性部材に設けられた切欠きに嵌め合うと共に、前記突起を変形させることで、前記導電性部材が前記ベース板に固定され、導通が得られることを特徴とする電力半導体装置。
- 電力半導体素子と、
突起を備え、導電性材料から成り、前記電力半導体素子の発熱を放熱フィンに伝導するよう前記電力半導体素子と熱的に接続されたベース板と、
前記ベース板に固定されると共に前記ベース板と導通し、アースに接続された導電性部材とを備え、
前記ベース板に設けられた突起を変形させることで、前記導電性部材の外周に前記突起が密着し、前記導電性部材が前記ベース板に固定され、導通が得られることを特徴とする電力半導体装置。
- 前記ベース板は放熱フィンを支える凸部とこの凸部の周辺に平坦面を備え、
前記導電性部材は前記凸部を挿入する切除部を備え、
前記凸部を前記切除部に挿入し、前記導電性部材の裏面と前記平坦面が接することで、前記導電性部材を前記ベース板に位置決めすることを特徴とする請求項1または2に記載の電力半導体装置。
- 前記突起は、前記ベース板と前記導電性部材と重ね合わせる方向に荷重をかけられることにより変形され、前記突起の形状は円柱形であることを特徴とする、請求項1または3に記載の電力半導体装置。
- 前記突起は板状であり、導電性部材側に覆いかぶせるように荷重をかけられることにより変形され、前記突起の断面は、荷重により傾く方向の厚みよりも、荷重をかける方向に対し直行する辺が長いことを特徴とする、請求項1または3に記載の電力半導体装置。
- 前記突起は中空状であることを特徴とする、請求項1または3に記載の電力半導体装置。
- 前記突起は底面のみがベース板と一体化していることを特徴とする、請求項1または3に記載の電力半導体装置。
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PCT/JP2013/007153 WO2015083201A1 (ja) | 2013-12-05 | 2013-12-05 | 電力半導体装置 |
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JP6503224B2 (ja) * | 2015-05-19 | 2019-04-17 | Apsジャパン株式会社 | ヒートシンク |
US10224268B1 (en) * | 2016-11-28 | 2019-03-05 | CoolStar Technology, Inc. | Enhanced thermal transfer in a semiconductor structure |
CN106876348A (zh) * | 2017-03-07 | 2017-06-20 | 中航华东光电有限公司 | 芯片封装结构及其制造方法 |
WO2020174584A1 (ja) * | 2019-02-26 | 2020-09-03 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法および電力変換装置 |
US20210235581A1 (en) * | 2019-04-23 | 2021-07-29 | Qing Ding Precision Electronics (Huaian) Co.,Ltd | Adapter board and method for making adaptor board |
CN112290338A (zh) * | 2019-07-24 | 2021-01-29 | 庆鼎精密电子(淮安)有限公司 | 转接板的制作方法 |
CN114342069B (zh) * | 2019-08-29 | 2023-03-24 | 三菱电机株式会社 | 功率半导体装置及其制造方法 |
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- 2013-12-05 CN CN201380081426.8A patent/CN106170855B/zh active Active
- 2013-12-05 JP JP2015551265A patent/JP5996126B2/ja active Active
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WO2015083201A1 (ja) | 2015-06-11 |
CN106170855B (zh) | 2018-11-13 |
DE112013007667T5 (de) | 2016-08-25 |
JPWO2015083201A1 (ja) | 2017-03-16 |
US9685399B2 (en) | 2017-06-20 |
CN106170855A (zh) | 2016-11-30 |
US20160300785A1 (en) | 2016-10-13 |
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