JP5918522B2 - フィルタおよびデュプレクサ - Google Patents
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- JP5918522B2 JP5918522B2 JP2011271469A JP2011271469A JP5918522B2 JP 5918522 B2 JP5918522 B2 JP 5918522B2 JP 2011271469 A JP2011271469 A JP 2011271469A JP 2011271469 A JP2011271469 A JP 2011271469A JP 5918522 B2 JP5918522 B2 JP 5918522B2
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- 239000010409 thin film Substances 0.000 claims description 73
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
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- 229910052737 gold Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
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- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
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- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/60—Electric coupling means therefor
- H03H9/605—Electric coupling means therefor consisting of a ladder configuration
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/703—Networks using bulk acoustic wave devices
- H03H9/706—Duplexers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0471—Resonance frequency of a plurality of resonators at different frequencies
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
12 基板
14 下部電極
15 下部電極の傾斜部
16、16a 圧電膜
18、18a 上部電極
19 上部電極の傾斜部
20 第1端子電極
22 第2端子電極
24、24a、24b、24c 付加膜
26 共振領域
28 非共振領域
30、30a、30b 空隙
32 領域
34 領域
36 厚膜部
38 端子
40 音響インピーダンスが高い膜
42 音響インピーダンスが低い膜
44 音響反射膜
50 デュプレクサ
52 送信用フィルタ
54 受信用フィルタ
Claims (6)
- 基板上に設けられた下部電極と、前記下部電極上に設けられた圧電膜と、前記圧電膜上に前記下部電極に対向して設けられた上部電極と、を含む積層膜を有する複数の圧電薄膜共振子を備え、
前記複数の圧電薄膜共振子のうち少なくとも2つの圧電薄膜共振子は、前記圧電膜を挟み前記下部電極と前記上部電極とが対向する共振領域の外周部の少なくとも一部において内側部分よりも前記積層膜が厚い厚膜部を有すると共に、前記少なくとも2つの圧電薄膜共振子間で前記厚膜部の前記共振領域の縁からの長さが異なり、
前記複数の圧電薄膜共振子は、ラダー型に接続された直列共振子と並列共振子とを含み、前記直列共振子及び前記並列共振子の少なくとも一方は複数設けられていて、
前記直列共振子と前記並列共振子とで、前記厚膜部の前記共振領域の縁からの長さが異なり、
複数の設けられた前記直列共振子及び並列共振子の少なくとも一方の中で、前記厚膜部の前記共振領域の縁からの長さが異なることを特徴とするフィルタ。 - 前記圧電膜は、窒化アルミニウムを主成分とすることを特徴とする請求項1記載のフィルタ。
- 前記圧電膜は、圧電定数を高める元素を含有することを特徴とする請求項1または2記載のフィルタ。
- 請求項1から3のいずれか一項記載のフィルタを送信用フィルタ及び受信用フィルタの少なくとも一方に備えることを特徴とするデュプレクサ。
- 基板上に設けられた下部電極と、前記下部電極上に設けられた圧電膜と、前記圧電膜上に前記下部電極に対向して設けられた上部電極と、を含む積層膜を有する複数の圧電薄膜共振子を備え、前記複数の圧電薄膜共振子のうち少なくとも2つの圧電薄膜共振子は、前記圧電膜を挟み前記下部電極と前記上部電極とが対向する共振領域の外周部の少なくとも一部において内側部分よりも前記積層膜が厚い厚膜部を有すると共に、前記少なくとも2つの圧電薄膜共振子間で前記厚膜部の前記共振領域の縁からの長さが異なるフィルタを送信用フィルタ及び受信用フィルタの少なくとも一方に備え、
前記送信用フィルタ及び受信用フィルタの少なくとも一方は、前記複数の圧電薄膜共振子が含む直列共振子と並列共振子とがラダー型に接続されたラダー型フィルタであり、
前記直列共振子及び前記並列共振子のうち送信帯域と受信帯域との間のガードバンド側のスカート特性に寄与する一方の共振子の前記厚膜部の前記共振領域の縁からの長さが、他方の共振子に比べて長いことを特徴とするデュプレクサ。 - 前記直列共振子及び前記並列共振子の少なくとも一方は複数設けられていて、
複数設けられた前記直列共振子及び前記並列共振子のうち前記ガードバンド側のスカート特性に寄与する共振子の中で、前記厚膜部の前記共振領域の縁からの長さが異なることを特徴とする請求項5記載のデュプレクサ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011271469A JP5918522B2 (ja) | 2011-12-12 | 2011-12-12 | フィルタおよびデュプレクサ |
SG2012077574A SG191470A1 (en) | 2011-12-12 | 2012-10-18 | Filter and duplexer |
US13/666,524 US9071224B2 (en) | 2011-12-12 | 2012-11-01 | Filter and duplexer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011271469A JP5918522B2 (ja) | 2011-12-12 | 2011-12-12 | フィルタおよびデュプレクサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013123184A JP2013123184A (ja) | 2013-06-20 |
JP5918522B2 true JP5918522B2 (ja) | 2016-05-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011271469A Active JP5918522B2 (ja) | 2011-12-12 | 2011-12-12 | フィルタおよびデュプレクサ |
Country Status (3)
Country | Link |
---|---|
US (1) | US9071224B2 (ja) |
JP (1) | JP5918522B2 (ja) |
SG (1) | SG191470A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11563417B2 (en) | 2017-11-20 | 2023-01-24 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator |
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KR101918031B1 (ko) * | 2013-01-22 | 2018-11-13 | 삼성전자주식회사 | 스퓨리어스 공진을 감소시키는 공진기 및 공진기 제작 방법 |
JP6333540B2 (ja) * | 2013-11-11 | 2018-05-30 | 太陽誘電株式会社 | 圧電薄膜共振子、フィルタ、及び分波器 |
JP6325799B2 (ja) * | 2013-11-11 | 2018-05-16 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタおよびデュプレクサ |
JP6374653B2 (ja) * | 2013-11-18 | 2018-08-15 | 太陽誘電株式会社 | 弾性波フィルタ及び分波器 |
US10340885B2 (en) * | 2014-05-08 | 2019-07-02 | Avago Technologies International Sales Pte. Limited | Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes |
JP6603012B2 (ja) | 2014-05-21 | 2019-11-06 | 太陽誘電株式会社 | 分波器 |
JP6400970B2 (ja) * | 2014-07-25 | 2018-10-03 | 太陽誘電株式会社 | フィルタおよびデュプレクサ |
US10778180B2 (en) * | 2015-12-10 | 2020-09-15 | Qorvo Us, Inc. | Bulk acoustic wave resonator with a modified outside stack portion |
JP6515042B2 (ja) * | 2016-01-25 | 2019-05-15 | 太陽誘電株式会社 | 弾性波デバイス |
KR20180018149A (ko) | 2016-08-12 | 2018-02-21 | 삼성전기주식회사 | 체적 음향 공진기 |
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US10886888B2 (en) | 2016-10-27 | 2021-01-05 | Avago Technologies International Sales Pte. Limited | Bulk acoustic wave resonator having openings in an active area and a pillar beneath the opening |
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JP6925877B2 (ja) * | 2017-06-07 | 2021-08-25 | 太陽誘電株式会社 | 弾性波デバイス |
JP7037336B2 (ja) * | 2017-11-16 | 2022-03-16 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ |
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-
2011
- 2011-12-12 JP JP2011271469A patent/JP5918522B2/ja active Active
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- 2012-10-18 SG SG2012077574A patent/SG191470A1/en unknown
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11563417B2 (en) | 2017-11-20 | 2023-01-24 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator |
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US9071224B2 (en) | 2015-06-30 |
JP2013123184A (ja) | 2013-06-20 |
US20130147577A1 (en) | 2013-06-13 |
SG191470A1 (en) | 2013-07-31 |
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