JP5915665B2 - 光導波路素子モジュール - Google Patents
光導波路素子モジュール Download PDFInfo
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- JP5915665B2 JP5915665B2 JP2013551851A JP2013551851A JP5915665B2 JP 5915665 B2 JP5915665 B2 JP 5915665B2 JP 2013551851 A JP2013551851 A JP 2013551851A JP 2013551851 A JP2013551851 A JP 2013551851A JP 5915665 B2 JP5915665 B2 JP 5915665B2
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0121—Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Description
本発明の光導波路素子モジュールは、図3に示すように、光導波路(不図示)と、該光導波路を伝搬する光波を制御するための制御電極(E1〜E4)とが形成された導波路基板1と、該導波路基板の近傍に配置され、該制御電極に電気的に接続される配線回路(TM1,C1)を備えた外部基板(21〜24)と、該導波路基板と該外部基板とを収容する筐体3と、該筐体に設けられ、該制御電極に対して電気信号を供給又は導出するための外部電気回路(不図示)と接続される端子(T21〜T24)とを有する光導波路素子モジュールにおいて、該導波路基板1又は該外部基板(21〜24)のいずれか一部に、該制御電極又は該配線回路とは電気的に独立し、かつ、ボンディング配線を中継するために設けられた中継用電極パッド(CP1,CP4)が形成され、該制御電極と該端子、又は該配線回路と該端子とを接続する少なくとも一つのボンディング配線(W21,W22,W41,W42)は、該中継用電極パッドを経由して行われていることを特徴とする。
2,21〜25 外部基板
3 筐体
E,E1〜E4 制御電極(信号電極)
C,C1 電気回路
W,W1〜W42 ボンディング配線
O1,O2 入出力用光ファイバ
CP1,CP4 中継用電極パッド
T1〜T24 接続端子
TM1 終端抵抗回路
Claims (5)
- 光導波路と、該光導波路を伝搬する光波を制御するための制御電極とが形成された導波路基板と、該導波路基板の近傍に配置され、該制御電極に電気的に接続される配線回路を備えた外部基板と、該導波路基板と該外部基板とを収容する筐体と、該筐体に設けられ、該制御電極に対して電気信号を供給又は導出するための外部電気回路と接続される端子とを有する光導波路素子モジュールにおいて、
該導波路基板又は該外部基板のいずれか一部に、該制御電極又は該配線回路とは電気的に独立し、かつ、ボンディング配線を中継するために設けられた中継用電極パッドが形成され、
該制御電極と該端子、又は該配線回路と該端子とを接続する少なくとも一つのボンディング配線は、該中継用電極パッドを経由して行われていることを特徴とする光導波路素子素子モジュール。 - 請求項1に記載の光導波路素子モジュールにおいて、該中継用電極パッドを経由するボンディング配線は、該制御電極に、低周波信号又は直流信号を供給する配線であることを特徴とする光導波路素子モジュール。
- 請求項1又は2に記載の光導波路素子モジュールにおいて、該外部基板が、該制御電極に高周波信号を供給する中継基板、又は該制御電極から導出される高周波信号を終端処理する終端基板であることを特徴とする光導波路素子モジュール。
- 請求項1乃至3のいずれかに記載の光導波路素子モジュールにおいて、該光導波路は、2つ以上のマッハツェンダー型光導波路を集積した形状を備えていることを特徴とする光導波路素子モジュール。
- 請求項2に記載の光導波路素子モジュールにおいて、
該外部基板の少なくとも1つが終端基板であり、
当該終端基板の配線回路には、バイアス制御用の低周波信号又はバイアス電圧の直流信号を該制御電極に供給する回路が設けられ、
該低周波信号又は該直流信号を供給する配線は、該導波路基板又は他の外部基板に設けられた中継用電極パッドを経由するボンディング配線であることを特徴とする光導波路素子モジュール。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2011287227 | 2011-12-28 | ||
JP2011287227 | 2011-12-28 | ||
PCT/JP2012/084040 WO2013100119A1 (ja) | 2011-12-28 | 2012-12-28 | 光導波路素子モジュール |
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JPWO2013100119A1 JPWO2013100119A1 (ja) | 2015-05-11 |
JP5915665B2 true JP5915665B2 (ja) | 2016-05-11 |
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JP2013551851A Active JP5915665B2 (ja) | 2011-12-28 | 2012-12-28 | 光導波路素子モジュール |
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US (1) | US9335570B2 (ja) |
JP (1) | JP5915665B2 (ja) |
CN (1) | CN104024926B (ja) |
WO (1) | WO2013100119A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5835392B2 (ja) * | 2014-03-31 | 2015-12-24 | 住友大阪セメント株式会社 | 光導波路素子モジュール |
US9250388B1 (en) * | 2014-07-17 | 2016-02-02 | Intel Corporation | Optical device using echelle grating that provides total internal reflection of light |
JP6459722B2 (ja) * | 2015-03-31 | 2019-01-30 | 住友大阪セメント株式会社 | 電気回路基板 |
JP6705354B2 (ja) * | 2016-09-30 | 2020-06-03 | 住友大阪セメント株式会社 | 光変調器モジュール |
JP6354874B1 (ja) * | 2017-01-31 | 2018-07-11 | 住友大阪セメント株式会社 | 光変調器 |
JP6319490B1 (ja) * | 2017-03-23 | 2018-05-09 | 住友大阪セメント株式会社 | 光変調器 |
JP6764132B2 (ja) * | 2017-03-30 | 2020-09-30 | 住友大阪セメント株式会社 | 光制御素子モジュール |
US10197737B2 (en) | 2017-06-19 | 2019-02-05 | Intel Corporation | Low back reflection echelle grating |
JP6922473B2 (ja) * | 2017-06-27 | 2021-08-18 | 住友大阪セメント株式会社 | 光変調器 |
JP7087360B2 (ja) * | 2017-11-30 | 2022-06-21 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
JP7098930B2 (ja) * | 2017-12-28 | 2022-07-12 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
JP7013942B2 (ja) * | 2018-02-28 | 2022-02-01 | 住友大阪セメント株式会社 | 光変調器、及び光伝送装置 |
JP7059749B2 (ja) * | 2018-03-28 | 2022-04-26 | 住友大阪セメント株式会社 | 光導波路素子モジュール |
JP7135382B2 (ja) * | 2018-03-30 | 2022-09-13 | 住友大阪セメント株式会社 | 光変調器、及び光送信装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US6192167B1 (en) * | 1998-07-24 | 2001-02-20 | Uniphase Telecommunications Products | Differential drive optical modulator |
JP3955764B2 (ja) * | 2002-02-08 | 2007-08-08 | 富士通株式会社 | 電気光学効果により光位相を変化させる素子を搭載した光変調器 |
JP3642762B2 (ja) | 2002-03-28 | 2005-04-27 | 住友大阪セメント株式会社 | 光変調器モジュール |
JP5055947B2 (ja) * | 2006-10-20 | 2012-10-24 | 富士通オプティカルコンポーネンツ株式会社 | 光変調器および送信装置 |
JP5056040B2 (ja) * | 2007-02-08 | 2012-10-24 | 富士通株式会社 | 光変調器 |
WO2010021193A1 (ja) * | 2008-08-22 | 2010-02-25 | 日本碍子株式会社 | 光変調器 |
JP5120341B2 (ja) * | 2009-06-15 | 2013-01-16 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイス |
JP5487774B2 (ja) * | 2009-07-27 | 2014-05-07 | 富士通オプティカルコンポーネンツ株式会社 | 光デバイスおよび光送信機 |
JP5263210B2 (ja) | 2010-03-29 | 2013-08-14 | 住友大阪セメント株式会社 | 光導波路素子モジュール |
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2012
- 2012-12-28 WO PCT/JP2012/084040 patent/WO2013100119A1/ja active Application Filing
- 2012-12-28 US US14/369,511 patent/US9335570B2/en active Active
- 2012-12-28 CN CN201280065155.2A patent/CN104024926B/zh active Active
- 2012-12-28 JP JP2013551851A patent/JP5915665B2/ja active Active
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Publication number | Publication date |
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CN104024926B (zh) | 2017-03-01 |
JPWO2013100119A1 (ja) | 2015-05-11 |
WO2013100119A1 (ja) | 2013-07-04 |
CN104024926A (zh) | 2014-09-03 |
US20150063743A1 (en) | 2015-03-05 |
US9335570B2 (en) | 2016-05-10 |
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