JP5885394B2 - 複合型回折光学素子の製造方法 - Google Patents

複合型回折光学素子の製造方法 Download PDF

Info

Publication number: JP5885394B2
Authority: JP; Japan
Prior art keywords: diffraction grating; substrate; mold; optical element; diffractive optical
Prior art date: 2011-04-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

JP2011094647A

Other languages

English (en)

Japanese (ja)

Other versions

JP2012226187A (ja

Inventor

俊一宮沢

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Canon Inc

Original Assignee

Canon Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2011-04-21

Filing date

2011-04-21

Publication date

2016-03-15

2011-04-21 Application filed by Canon Inc filed Critical Canon Inc

2011-04-21 Priority to JP2011094647A priority Critical patent/JP5885394B2/ja

2012-04-09 Priority to US13/442,276 priority patent/US20120268821A1/en

2012-04-20 Priority to CN201210118994.8A priority patent/CN102744813B/zh

2012-11-15 Publication of JP2012226187A publication Critical patent/JP2012226187A/ja

2016-03-15 Application granted granted Critical

2016-03-15 Publication of JP5885394B2 publication Critical patent/JP5885394B2/ja

2016-11-22 Priority to US15/358,457 priority patent/US20170075047A1/en

Status Expired - Fee Related legal-status Critical Current

2031-04-21 Anticipated expiration legal-status Critical

Links

230000003287 optical effect Effects 0.000 title claims description 35
239000002131 composite material Substances 0.000 title claims description 31
238000004519 manufacturing process Methods 0.000 title claims description 17
238000000034 method Methods 0.000 title description 15
239000000758 substrate Substances 0.000 claims description 89
239000011347 resin Substances 0.000 claims description 61
229920005989 resin Polymers 0.000 claims description 61
238000001816 cooling Methods 0.000 claims description 55
230000002093 peripheral effect Effects 0.000 claims description 20
238000000465 moulding Methods 0.000 claims description 14
238000010438 heat treatment Methods 0.000 claims description 2
239000007921 spray Substances 0.000 description 11
230000008602 contraction Effects 0.000 description 7
238000005452 bending Methods 0.000 description 4
238000002347 injection Methods 0.000 description 3
239000007924 injection Substances 0.000 description 3
QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
229910052753 mercury Inorganic materials 0.000 description 2
230000001595 contractor effect Effects 0.000 description 1
238000005520 cutting process Methods 0.000 description 1
230000001678 irradiating effect Effects 0.000 description 1
230000014759 maintenance of location Effects 0.000 description 1
230000010355 oscillation Effects 0.000 description 1
238000003825 pressing Methods 0.000 description 1
238000000820 replica moulding Methods 0.000 description 1

Images

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/50—Removing moulded articles
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/52—Heating or cooling
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/00769—Producing diffraction gratings
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Mechanical Engineering (AREA)
Health & Medical Sciences (AREA)
Manufacturing & Machinery (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Oral & Maxillofacial Surgery (AREA)
Thermal Sciences (AREA)
Ophthalmology & Optometry (AREA)
Toxicology (AREA)
Diffracting Gratings Or Hologram Optical Elements (AREA)
Casting Or Compression Moulding Of Plastics Or The Like (AREA)

JP2011094647A 2011-04-21 2011-04-21 複合型回折光学素子の製造方法 Expired - Fee Related JP5885394B2 (ja)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
JP2011094647A JP5885394B2 (ja)	2011-04-21	2011-04-21	複合型回折光学素子の製造方法
US13/442,276 US20120268821A1 (en)	2011-04-21	2012-04-09	Production method for composite type diffractive optical element, and composite type diffractive optical element
CN201210118994.8A CN102744813B (zh)	2011-04-21	2012-04-20	复合型衍射光学元件的制造方法，和复合型衍射光学元件
US15/358,457 US20170075047A1 (en)	2011-04-21	2016-11-22	Production method for composite type diffractive optical element, and composite type diffractive optical element

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2011094647A JP5885394B2 (ja)	2011-04-21	2011-04-21	複合型回折光学素子の製造方法

Publications (2)

Publication Number	Publication Date
JP2012226187A JP2012226187A (ja)	2012-11-15
JP5885394B2 true JP5885394B2 (ja)	2016-03-15

Family

ID=47021158

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2011094647A Expired - Fee Related JP5885394B2 (ja)	2011-04-21	2011-04-21	複合型回折光学素子の製造方法

Country Status (3)

Country	Link
US (2)	US20120268821A1 (zh)
JP (1)	JP5885394B2 (zh)
CN (1)	CN102744813B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20210001538A1 (en) *	2018-03-08	2021-01-07	Daicel Corporation	Mold-release method for molded article, and mold-release device
CN108957611B (zh) *	2018-07-13	2021-05-14	歌尔股份有限公司	一种光栅片的制造方法、光栅片及显示设备
US10809448B1 (en) *	2019-04-18	2020-10-20	Facebook Technologies, Llc	Reducing demolding stress at edges of gratings in nanoimprint lithography
JP7358113B2 (ja) *	2019-08-19	2023-10-10	キヤノン株式会社	モールド、インプリント装置および物品の製造方法
JP2022092347A (ja) *	2020-12-10	2022-06-22	キヤノン株式会社	平坦化装置、平坦化方法及び物品の製造方法
CN114637063A (zh) *	2022-03-11	2022-06-17	中国科学院长春光学精密机械与物理研究所	中阶梯光栅复制分离装置及其使用方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01152015A (ja) *	1987-11-24	1989-06-14	Hitachi Ltd	樹脂成形品の離型方法
JP3114988B2 (ja) *	1990-09-21	2000-12-04	大日本印刷株式会社	レンズシートの製造装置
JP3566635B2 (ja) *	2000-08-22	2004-09-15	キヤノン株式会社	光学物品の製造方法
JP4673120B2 (ja) *	2004-04-28	2011-04-20	キヤノン株式会社	回折光学素子及びこれを有する光学系
JP2006088640A (ja) *	2004-09-27	2006-04-06	Canon Inc	複合型光学素子の製造方法および複合型光学素子
KR101174180B1 (ko) *	2005-02-22	2012-08-14	가부시키가이샤 니콘	회절 광학 소자
JP4678026B2 (ja) *	2005-02-28	2011-04-27	日本ゼオン株式会社	硬化性樹脂成形体の製造方法
FI20070622L (fi) *	2007-08-17	2009-04-15	Outokumpu Oy	Menetelmä ja laitteisto tasaisuuden kontrolloimiseksi ruostumatonta terästä olevan nauhan jäähdytyksessä
JP5424623B2 (ja) *	2008-01-21	2014-02-26	キヤノン株式会社	樹脂組成物およびそれにより成形された光学素子、回折光学素子及び積層型回折光学素子

2011
- 2011-04-21 JP JP2011094647A patent/JP5885394B2/ja not_active Expired - Fee Related
2012
- 2012-04-09 US US13/442,276 patent/US20120268821A1/en not_active Abandoned
- 2012-04-20 CN CN201210118994.8A patent/CN102744813B/zh not_active Expired - Fee Related
2016
- 2016-11-22 US US15/358,457 patent/US20170075047A1/en not_active Abandoned

Also Published As

Publication number	Publication date
CN102744813B (zh)	2015-11-25
US20170075047A1 (en)	2017-03-16
US20120268821A1 (en)	2012-10-25
JP2012226187A (ja)	2012-11-15
CN102744813A (zh)	2012-10-24

Legal Events

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2013-03-01	RD04	Notification of resignation of power of attorney	Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20130228
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2015-02-25	A977	Report on retrieval	Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150225
2015-03-04	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150303
2015-05-07	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150507
2015-10-14	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20151013
2015-12-09	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151209
2016-01-04	TRDD	Decision of grant or rejection written
2016-01-13	A01	Written decision to grant a patent or to grant a registration (utility model)	Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160112
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2023-02-19	LAPS	Cancellation because of no payment of annual fees

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