JP5885394B2 - 複合型回折光学素子の製造方法 - Google Patents
複合型回折光学素子の製造方法 Download PDFInfo
- Publication number
- JP5885394B2 JP5885394B2 JP2011094647A JP2011094647A JP5885394B2 JP 5885394 B2 JP5885394 B2 JP 5885394B2 JP 2011094647 A JP2011094647 A JP 2011094647A JP 2011094647 A JP2011094647 A JP 2011094647A JP 5885394 B2 JP5885394 B2 JP 5885394B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- substrate
- mold
- optical element
- diffractive optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 35
- 239000002131 composite material Substances 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000034 method Methods 0.000 title description 15
- 239000000758 substrate Substances 0.000 claims description 89
- 239000011347 resin Substances 0.000 claims description 61
- 229920005989 resin Polymers 0.000 claims description 61
- 238000001816 cooling Methods 0.000 claims description 55
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 238000000465 moulding Methods 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007921 spray Substances 0.000 description 11
- 230000008602 contraction Effects 0.000 description 7
- 238000005452 bending Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 230000001595 contractor effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000820 replica moulding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/50—Removing moulded articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/52—Heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
- B29D11/00769—Producing diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Oral & Maxillofacial Surgery (AREA)
- Thermal Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Toxicology (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011094647A JP5885394B2 (ja) | 2011-04-21 | 2011-04-21 | 複合型回折光学素子の製造方法 |
US13/442,276 US20120268821A1 (en) | 2011-04-21 | 2012-04-09 | Production method for composite type diffractive optical element, and composite type diffractive optical element |
CN201210118994.8A CN102744813B (zh) | 2011-04-21 | 2012-04-20 | 复合型衍射光学元件的制造方法,和复合型衍射光学元件 |
US15/358,457 US20170075047A1 (en) | 2011-04-21 | 2016-11-22 | Production method for composite type diffractive optical element, and composite type diffractive optical element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011094647A JP5885394B2 (ja) | 2011-04-21 | 2011-04-21 | 複合型回折光学素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012226187A JP2012226187A (ja) | 2012-11-15 |
JP5885394B2 true JP5885394B2 (ja) | 2016-03-15 |
Family
ID=47021158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011094647A Expired - Fee Related JP5885394B2 (ja) | 2011-04-21 | 2011-04-21 | 複合型回折光学素子の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US20120268821A1 (zh) |
JP (1) | JP5885394B2 (zh) |
CN (1) | CN102744813B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210001538A1 (en) * | 2018-03-08 | 2021-01-07 | Daicel Corporation | Mold-release method for molded article, and mold-release device |
CN108957611B (zh) * | 2018-07-13 | 2021-05-14 | 歌尔股份有限公司 | 一种光栅片的制造方法、光栅片及显示设备 |
US10809448B1 (en) * | 2019-04-18 | 2020-10-20 | Facebook Technologies, Llc | Reducing demolding stress at edges of gratings in nanoimprint lithography |
JP7358113B2 (ja) * | 2019-08-19 | 2023-10-10 | キヤノン株式会社 | モールド、インプリント装置および物品の製造方法 |
JP2022092347A (ja) * | 2020-12-10 | 2022-06-22 | キヤノン株式会社 | 平坦化装置、平坦化方法及び物品の製造方法 |
CN114637063A (zh) * | 2022-03-11 | 2022-06-17 | 中国科学院长春光学精密机械与物理研究所 | 中阶梯光栅复制分离装置及其使用方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01152015A (ja) * | 1987-11-24 | 1989-06-14 | Hitachi Ltd | 樹脂成形品の離型方法 |
JP3114988B2 (ja) * | 1990-09-21 | 2000-12-04 | 大日本印刷株式会社 | レンズシートの製造装置 |
JP3566635B2 (ja) * | 2000-08-22 | 2004-09-15 | キヤノン株式会社 | 光学物品の製造方法 |
JP4673120B2 (ja) * | 2004-04-28 | 2011-04-20 | キヤノン株式会社 | 回折光学素子及びこれを有する光学系 |
JP2006088640A (ja) * | 2004-09-27 | 2006-04-06 | Canon Inc | 複合型光学素子の製造方法および複合型光学素子 |
KR101174180B1 (ko) * | 2005-02-22 | 2012-08-14 | 가부시키가이샤 니콘 | 회절 광학 소자 |
JP4678026B2 (ja) * | 2005-02-28 | 2011-04-27 | 日本ゼオン株式会社 | 硬化性樹脂成形体の製造方法 |
FI20070622L (fi) * | 2007-08-17 | 2009-04-15 | Outokumpu Oy | Menetelmä ja laitteisto tasaisuuden kontrolloimiseksi ruostumatonta terästä olevan nauhan jäähdytyksessä |
JP5424623B2 (ja) * | 2008-01-21 | 2014-02-26 | キヤノン株式会社 | 樹脂組成物およびそれにより成形された光学素子、回折光学素子及び積層型回折光学素子 |
-
2011
- 2011-04-21 JP JP2011094647A patent/JP5885394B2/ja not_active Expired - Fee Related
-
2012
- 2012-04-09 US US13/442,276 patent/US20120268821A1/en not_active Abandoned
- 2012-04-20 CN CN201210118994.8A patent/CN102744813B/zh not_active Expired - Fee Related
-
2016
- 2016-11-22 US US15/358,457 patent/US20170075047A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN102744813B (zh) | 2015-11-25 |
US20170075047A1 (en) | 2017-03-16 |
US20120268821A1 (en) | 2012-10-25 |
JP2012226187A (ja) | 2012-11-15 |
CN102744813A (zh) | 2012-10-24 |
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