JP5876292B2 - 薄層を溶液コーティングするための装置および方法 - Google Patents
薄層を溶液コーティングするための装置および方法 Download PDFInfo
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- JP5876292B2 JP5876292B2 JP2011510642A JP2011510642A JP5876292B2 JP 5876292 B2 JP5876292 B2 JP 5876292B2 JP 2011510642 A JP2011510642 A JP 2011510642A JP 2011510642 A JP2011510642 A JP 2011510642A JP 5876292 B2 JP5876292 B2 JP 5876292B2
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- JP
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- Prior art keywords
- slot die
- die coater
- coating
- substrate
- coater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- FVSKHRXBFJPNKK-UHFFFAOYSA-N propionitrile Chemical compound CCC#N FVSKHRXBFJPNKK-UHFFFAOYSA-N 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 150000003220 pyrenes Chemical class 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- ZJMWRROPUADPEA-UHFFFAOYSA-N sec-butylbenzene Chemical compound CCC(C)C1=CC=CC=C1 ZJMWRROPUADPEA-UHFFFAOYSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007767 slide coating Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- IAHFWCOBPZCAEA-UHFFFAOYSA-N succinonitrile Chemical compound N#CCCC#N IAHFWCOBPZCAEA-UHFFFAOYSA-N 0.000 description 1
- 150000003871 sulfonates Chemical class 0.000 description 1
- 125000000542 sulfonic acid group Chemical group 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229950011008 tetrachloroethylene Drugs 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- ISXOBTBCNRIIQO-UHFFFAOYSA-N tetrahydrothiophene 1-oxide Chemical compound O=S1CCCC1 ISXOBTBCNRIIQO-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- GBNDTYKAOXLLID-UHFFFAOYSA-N zirconium(4+) ion Chemical compound [Zr+4] GBNDTYKAOXLLID-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/15—Deposition of organic active material using liquid deposition, e.g. spin coating characterised by the solvent used
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
- B05B15/555—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids discharged by cleaning nozzles
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Description
1.供給システム中のコーティング流体を充填してスロットダイコーターを満たす。スロットダイコーターのエッジからプライミングロールの表面接線までの距離を測定または推測する。
2.基体を固定するチャック上に基体を搭載する。一実施形態では、基体の湾曲を防止するためにチャックに真空系が使用される。
3.スロットダイコーターのエッジからコーティングされる基体表面(すなわち、チャックとは反対側にある表面)までの距離を測定または推測する。通常、コーティングは垂直方向に下に向かって基体上に塗布される。
4.必要であればクリーニングステーション内のスロットダイコーターのクリーニングを行う。
5.溶液スロットダイコーターのスロットを介してプライミングロール上に圧送することによってスロットダイコーターのプライミングを行う。スロットダイコーターのエッジとプライミングロールの上面との間の間隙は、スロットダイコーターのエッジと基体との間の間隙と同じ場合も異なる場合もある。典型的にはプライミングロールは回転し、そのためプライミングロールの表面がスロットダイコーターの端部を通過して、コーティング溶液を受け取る。典型的にはこの回転は、基体のコーティングをシミュレートする方向の回転である。プライミングロールの表面速度は、基体上のコーティング速度と同じ場合も異なる場合もある。
6.開始間隙において、基体をコーティングするための開始位置にスロットダイコーターを移動させる。コーティング間隙に液体溶液を満たす。基体に対してスロットダイコーターを最初に移動させる前または最中にコーティング間隙を調節する。
7.基体にコーティングする。
8.所望のコーティング領域の端部またはその付近の位置でスロットダイコーターへの液体溶液流を停止させる。所望のコーティング領域の端部またはその付近の位置でスロットダイコーターを基体から上昇させる。スロットダイコーターからしたたり落ちることなくコーティングをきれいに中断しながら、不均一なコーティングのために無駄になる基体の量を最小限にするために、コーティング終了時に、流量および間隙を同時にまたは逐次調節することができる。
9.場合により、基体をその場で乾燥させることができる。
10.コーティングされた基体をチャックから取り外す。ダイをクリーニングステーションに戻す。
11.上記ステップ2に進む。
コーティングステーション200は、液体溶液などの種々の異なる材料を堆積するために使用することができる。以下の段落は、使用可能な材料の一部のみを含んでおり、すべてではない。一実施形態においては、電子デバイス内の有機層または無機層のための1つ以上の材料がコーティングステーション200を使用して形成される。
Claims (10)
- 基体に溶液コーティングするための装置であって:
クリーニングステーションと、
該クリーニングステーションにおいてクリーニングされることが可能なスロットダイコーターと;
前記スロットダイコーターに対して配置されることができる真空補助装置であって、該真空補助装置は、前記クリーニングステーションにおいて減圧雰囲気を形成せず、前記クリーニングステーションにおいて前記スロットダイコーターがクリーニングされた後、前記クリーニングステーションにおいて該スロットダイコーターにガスの逆流を送ることができる、真空補助装置と;
封止要素と
を含み、
前記真空補助装置が前記スロットダイコーターの上流部分に配置されることでコーター組立体が形成され、前記スロットダイコーターの上流部分にチャンバーを形成するように前記封止要素は前記コーター組立体と関係があり、該チャンバーは前記溶液コーティング中に前記真空補助装置により減圧雰囲気を有することができ、
該コーター組立体は、前記コーティング前に、該コーティングをシミュレートするように、プライミングステーションのプライミングロール上に溶液を送る、
装置。 - 前記コーター組立体が、前記クリーニングステーションおよび前記プライミングステーションに着脱自在に取り付け可能である、請求項1に記載の装置。
- 前記スロットダイコーターのスロット幅が50〜80μmの間である、請求項1に記載の装置。
- 前記スロットダイコーターのエッジと前記基体との間の距離が50〜200μmの間である、請求項1に記載の装置。
- 基体に溶液コーティングする方法であって:
スロットダイコーターであって真空補助装置に隣接して配置されることでコーター組立体を形成するスロットダイコーター中に前記溶液を投入するステップと;
前記スロットダイコーターのエッジとプライミングロールの上面との間で第1の距離を確立するステップと;
前記基体をチャック上に搭載するステップと;
前記スロットダイコーターの前記エッジと前記基体の上面との間で第2の距離を確立するステップと;
コーティングをシミュレートするように前記溶液を前記スロットダイコーターから前記プライミングロール上に供給することによって前記スロットダイコーターのプライミングを行うステップと;
前記基体の上に前記第2の距離に前記スロットダイコーターを配置するステップと;
前記スロットダイコーターから前記溶液を前記基体にコーティングするステップと;
前記真空補助装置により前記コーティングステップ中に前記基体周囲に減圧環境を提供するステップと;
前記基体への溶液の流れを停止させるステップと、
前記コーター組立体をクリーニングステーションに移動させるステップと
を含み、
前記真空補助装置は、前記クリーニングステーションにおいて減圧雰囲気を形成せず、前記クリーニングステーションにおいて前記スロットダイコーターがクリーニングされた後、前記クリーニングステーションにおいて該スロットダイコーターにガスの逆流を送ることができる、
方法。 - 前記コーティングされた基体を前記チャックから取り外すステップをさらに含む、請求項5に記載の方法。
- 前記スロットダイコーターの上流部分にチャンバーを形成するように、封止要素は前記コーター組立体とともに機能し、前記減圧環境を提供するステップにおいて該チャンバーは前記真空補助装置により減圧雰囲気を有することができる、請求項5に記載の方法。
- 前記溶液の少なくとも1つの成分が極性溶媒である、請求項5に記載の方法。
- 前記極性溶媒が水である、請求項8に記載の方法。
- 前記溶液が0.1%を超える固形分を有する懸濁液である、請求項9に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5430608P | 2008-05-19 | 2008-05-19 | |
US61/054,306 | 2008-05-19 | ||
PCT/US2009/044487 WO2009143132A2 (en) | 2008-05-19 | 2009-05-19 | Apparatus and method for solution coating thin layers |
Publications (3)
Publication Number | Publication Date |
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JP2011523891A JP2011523891A (ja) | 2011-08-25 |
JP2011523891A5 JP2011523891A5 (ja) | 2012-08-16 |
JP5876292B2 true JP5876292B2 (ja) | 2016-03-02 |
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JP2011510642A Expired - Fee Related JP5876292B2 (ja) | 2008-05-19 | 2009-05-19 | 薄層を溶液コーティングするための装置および方法 |
Country Status (5)
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US (1) | US9138771B2 (ja) |
JP (1) | JP5876292B2 (ja) |
KR (1) | KR20110011695A (ja) |
TW (1) | TW201016325A (ja) |
WO (1) | WO2009143132A2 (ja) |
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JP2006273792A (ja) * | 2005-03-30 | 2006-10-12 | Dainippon Printing Co Ltd | 有機電荷輸送性化合物及びその製造方法、並びに有機電子デバイス |
CN101267894B (zh) * | 2005-11-10 | 2010-11-03 | 株式会社爱发科 | 涂布装置、分散液移动方法 |
JP2007237127A (ja) * | 2006-03-10 | 2007-09-20 | Fujifilm Corp | 塗布方法及び装置 |
JP2007283181A (ja) * | 2006-04-14 | 2007-11-01 | Toray Ind Inc | 塗布方法と塗布装置並びに液晶ディスプレイ用部材の製造方法 |
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2009
- 2009-05-19 JP JP2011510642A patent/JP5876292B2/ja not_active Expired - Fee Related
- 2009-05-19 KR KR1020107028514A patent/KR20110011695A/ko not_active Application Discontinuation
- 2009-05-19 US US12/992,992 patent/US9138771B2/en active Active
- 2009-05-19 WO PCT/US2009/044487 patent/WO2009143132A2/en active Application Filing
- 2009-05-19 TW TW098116628A patent/TW201016325A/zh unknown
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WO2009143132A3 (en) | 2010-03-04 |
TW201016325A (en) | 2010-05-01 |
WO2009143132A2 (en) | 2009-11-26 |
KR20110011695A (ko) | 2011-02-08 |
US20110086164A1 (en) | 2011-04-14 |
JP2011523891A (ja) | 2011-08-25 |
US9138771B2 (en) | 2015-09-22 |
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