JP5795002B2 - スパッタリング方法 - Google Patents
スパッタリング方法 Download PDFInfo
- Publication number
- JP5795002B2 JP5795002B2 JP2012545603A JP2012545603A JP5795002B2 JP 5795002 B2 JP5795002 B2 JP 5795002B2 JP 2012545603 A JP2012545603 A JP 2012545603A JP 2012545603 A JP2012545603 A JP 2012545603A JP 5795002 B2 JP5795002 B2 JP 5795002B2
- Authority
- JP
- Japan
- Prior art keywords
- target
- substrate
- sputtering
- magnetic field
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/351—Sputtering by application of a magnetic field, e.g. magnetron sputtering using a magnetic field in close vicinity to the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3492—Variation of parameters during sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (2)
- 真空チャンバ内でターゲットに処理すべき基板を対向配置し、
所定真空度に達した真空チャンバ内にスパッタガスを導入し、
基板からターゲットに向かう方向を上として、ターゲットの上方に設けた磁石ユニットより当該ターゲットのスパッタ面の下方空間に磁場を発生させた状態でターゲットに所定の電力を投入して真空チャンバ内にプラズマを形成してこのターゲットをスパッタリングし、基板表面に所定の薄膜を成膜するスパッタリング方法において、
スパッタリング中、基板全面に亘って垂直な静磁場を作用させ、
ターゲットの侵食量に応じて前記静磁場の強度を段階的に上昇させ、前記薄膜の基板面内における膜厚分布を調節することを特徴とするスパッタリング方法。 - 前記静磁場を真空チャンバに付設した少なくとも1個の電磁石により発生させ、ターゲットに電力投入したときの積算電力から電磁石のコイルへの通電電流を制御して前記静磁場の強度を段階的に上昇させることを特徴とする請求項1記載のスパッタリング方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012545603A JP5795002B2 (ja) | 2010-11-24 | 2011-11-14 | スパッタリング方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010261817 | 2010-11-24 | ||
JP2010261817 | 2010-11-24 | ||
PCT/JP2011/006340 WO2012070195A1 (ja) | 2010-11-24 | 2011-11-14 | スパッタリング方法 |
JP2012545603A JP5795002B2 (ja) | 2010-11-24 | 2011-11-14 | スパッタリング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2012070195A1 JPWO2012070195A1 (ja) | 2014-05-19 |
JP5795002B2 true JP5795002B2 (ja) | 2015-10-14 |
Family
ID=46145566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012545603A Active JP5795002B2 (ja) | 2010-11-24 | 2011-11-14 | スパッタリング方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5795002B2 (ja) |
TW (1) | TW201235497A (ja) |
WO (1) | WO2012070195A1 (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60136230A (ja) * | 1983-12-24 | 1985-07-19 | Ulvac Corp | 基板表面の整形装置 |
JPS61246368A (ja) * | 1985-04-24 | 1986-11-01 | Nec Corp | 金属膜の堆積方法 |
JPS6383258A (ja) * | 1986-09-25 | 1988-04-13 | Tokyo Electron Ltd | スパツタリング装置 |
JPH03150355A (ja) * | 1989-11-02 | 1991-06-26 | Nec Corp | スパッタリング装置 |
JP2000144404A (ja) * | 1998-10-30 | 2000-05-26 | Applied Materials Inc | スパッタリング装置及び成膜方法 |
WO2009150997A1 (ja) * | 2008-06-11 | 2009-12-17 | 株式会社アルバック | スパッタリング装置 |
WO2009157439A1 (ja) * | 2008-06-26 | 2009-12-30 | 株式会社アルバック | スパッタリング装置及びスパッタリング方法 |
WO2010134346A1 (ja) * | 2009-05-20 | 2010-11-25 | 株式会社アルバック | 成膜方法及び成膜装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000144411A (ja) * | 1998-10-30 | 2000-05-26 | Applied Materials Inc | スパッタリング装置および成膜方法 |
JP2003313662A (ja) * | 2002-04-25 | 2003-11-06 | Mutsuo Yamashita | スパッタリング装置 |
-
2011
- 2011-11-14 JP JP2012545603A patent/JP5795002B2/ja active Active
- 2011-11-14 WO PCT/JP2011/006340 patent/WO2012070195A1/ja active Application Filing
- 2011-11-23 TW TW100142895A patent/TW201235497A/zh unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60136230A (ja) * | 1983-12-24 | 1985-07-19 | Ulvac Corp | 基板表面の整形装置 |
JPS61246368A (ja) * | 1985-04-24 | 1986-11-01 | Nec Corp | 金属膜の堆積方法 |
JPS6383258A (ja) * | 1986-09-25 | 1988-04-13 | Tokyo Electron Ltd | スパツタリング装置 |
JPH03150355A (ja) * | 1989-11-02 | 1991-06-26 | Nec Corp | スパッタリング装置 |
JP2000144404A (ja) * | 1998-10-30 | 2000-05-26 | Applied Materials Inc | スパッタリング装置及び成膜方法 |
WO2009150997A1 (ja) * | 2008-06-11 | 2009-12-17 | 株式会社アルバック | スパッタリング装置 |
WO2009157439A1 (ja) * | 2008-06-26 | 2009-12-30 | 株式会社アルバック | スパッタリング装置及びスパッタリング方法 |
WO2010134346A1 (ja) * | 2009-05-20 | 2010-11-25 | 株式会社アルバック | 成膜方法及び成膜装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2012070195A1 (ja) | 2012-05-31 |
JPWO2012070195A1 (ja) | 2014-05-19 |
TW201235497A (en) | 2012-09-01 |
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