JP5713512B2 - 単結晶合成ダイヤモンド材料における転位工学 - Google Patents
単結晶合成ダイヤモンド材料における転位工学 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/25—Diamond
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/25—Diamond
- C01B32/26—Preparation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
- C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
ダイヤモンドは、その並外れた硬さ及び機械的性質によって有名な材料であり、この結果、ダイヤモンドは、幾つかの用途(例えば、穴あけ)に用いられている。転位は、これらの性質、特にホモエピタキシャルCVD合成ダイヤモンド材料に悪影響を及ぼすことが知られており、転位は、通常、材料の成長方向とほぼ平行な方向に伝搬する。結果的に生じる転位の平行アレイは、材料の機械的性質に悪影響を及ぼす恐れが多分にある。
表1:(001)成長後の垂直方向にスライシングされた一次CVD層上の[001]成長は、二次層の貫通転位が[010]線方向である場合に種々の転位タイプを示す。
プラズマ暴露エッチングによって明らかにして5×103個/mm2以下の欠陥密度を有する成長面を備えた単結晶ダイヤモンド基板を用意するステップと、
成長面上に請求項1〜12のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層を成長させるステップとを含むことを特徴とする方法が提供される。
表2:(001)成長後の垂直方向にスライシングされた一次CVD層上の(001)成長は、転位がそれぞれ[110]及び[010]線方向である場合に種々の貫通転位タイプを示す。
プラズマ暴露エッチングによって明らかにして5×103個/mm2以下の欠陥密度を有する(001)成長面を備えた単結晶ダイヤモンド基板を用意するステップと、
(001)成長面上に第1の単結晶CVD合成ダイヤモンド層を成長させるステップと
第1の単結晶CVD合成ダイヤモンド層を垂直方向にスライシングして(110)成長面を形成するステップと、
(110)成長面をこれがプラズマ暴露エッチングによって明らかにして5×103個/mm2未満の欠陥密度を有するよう処理するステップと、
(110)成長面上に限度未満の<110>成長速度と<001>成長速度の比で第2の単結晶CVD合成ダイヤモンド層を成長させ、それにより非平行転位アレイが第2の単結晶CVD合成ダイヤモンド層中に生じるようにする。
2)研磨の結果として生じた欠陥(研磨線に沿ってチャター軌道を形成する転位構造及び微小割れを含む)。これらの密度は、サンプルによって相当なばらつきがある場合があり、代表的な値は、約102/mm2から研磨度が貧弱な領域又はサンプルでは最高104/mm2以上までである。
(i)主として水素を用いるが、オプションとして少量のAr及び必要な少量のO2を用いる酸素エッチング。典型的な酸素エッチング条件は、50〜450×102Paという圧力、1〜4パーセントの酸素含有量を含むエッチングガス、0〜30パーセントのアルゴン含有量及び残部水素であり、全ての割合は、体積による割合であり、基板温度は、600〜1100℃(より代表的には800℃)、代表的な持続時間は、3〜60分である。
(ii)(i)に類似しているが、酸素が存在していない水素エッチング。
(iii)アルゴン、水素及び酸素だけを利用している訳ではない別のエッチング方法、例えばハロゲン、他の不活性ガス又は窒素を利用したエッチング方法を利用することができる。
線方向 転位タイプ(<110>バーガースベクトルを仮定する)
[100] → 刃状
[100] → 混合45°
[110] → 混合60°(コアエネルギーの面最も望ましい)
[110] → 刃状
[110] → 混合45°
[110] → 螺旋(コアエネルギーの面では好ましさの度合いが最も低い)
i)基板をレーザ切断して全て<100>エッジを備えたプレートを作製するステップ、及び
ii)成長が起こる主要面をラップ仕上げして研磨するステップ。ラップ仕上げされて研磨された部品は、全ての面{100}を備えた約6.0mm×6.0mmの厚さ400μmの寸法を有する。
Claims (12)
- 非平行転位アレイを有する単結晶CVD合成ダイヤモンド層であって、前記非平行転位アレイは、X線トポグラフィ断面図又はルミネッセント条件下で見て相互交差転位のアレイを形成する複数の転位を含み、前記単結晶CVD合成ダイヤモンド層の厚さは、1μm以上であり、前記非平行転位アレイは、前記単結晶CVD合成ダイヤモンド層の全体積の少なくとも30%を占め、転位が伝搬する方向は、前記転位の全長の少なくとも30%にわたる平均方向で表して測定される、単結晶CVD合成ダイヤモンド層。
- 前記単結晶CVD合成ダイヤモンド層の厚さは、10μm以上である、請求項1記載の単結晶CVD合成ダイヤモンド層。
- 10cm-2〜1×108cm-2 の転位密度を有する、請求項1又は2記載の単結晶CVD合成ダイヤモンド層。
- 5×104以下の複屈折性を有する、請求項1〜3のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 前記単結晶CVD合成ダイヤモンド層は、{110}又は{113}方位の層である、請求項1〜4のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 前記非平行転位アレイは、前記単結晶CVD合成ダイヤモンド層の全体積の少なくとも40%を占める体積にわたって延びている、請求項1〜5のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 前記非平行転位アレイは、前記単結晶CVD合成ダイヤモンド層を通って第1の方向に伝搬する第1の組をなす転位及び前記単結晶CVD合成ダイヤモンド層を通って第2の方向に伝搬する第2の組をなす転位を含み、前記第1の方向と前記第2の方向のなす角度は、X線トポグラフィ断面図又はルミネッセント条件下で見て40°〜100°である、請求項1〜6のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 転位が伝搬する方向は、前記転位の有意長さにわたる平均方向で表して測定され、前記有意長さは、転位の全長の少なくとも40%であると共に/或いは少なくとも50μmである、請求項1〜7のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 前記非平行転位アレイは、X線トポグラフィ断面図は見えるが、ルミネッセント条件下では見えず、或いはその代わりに、前記非平行転位アレイは、ルミネッセント条件下で見えるが、X線トポグラフィ断面図では見えない、請求項1〜8のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 少なくとも100GPaの硬さを有する、請求項1〜9のうちいずれか一に記載の単結晶CVD合成ダイヤモンド層。
- 請求項1〜10のうちいずれか一に記載の単結晶ダイヤモンド層を含む単結晶CVD合成ダイヤモンド物体であって、前記単結晶ダイヤモンド層は、前記単結晶CVD合成ダイヤモンド物体の全体積の少なくとも30%を占める、単結晶CVD合成ダイヤモンド物体。
- 前記単結晶CVD合成ダイヤモンド物体は、宝石形態にカットされている、請求項11記載の単結晶CVD合成ダイヤモンド物体。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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GBGB1021985.5A GB201021985D0 (en) | 2010-12-24 | 2010-12-24 | Dislocation engineering in single crystal synthetic diamond material |
GB1021985.5 | 2010-12-24 | ||
US201161430751P | 2011-01-07 | 2011-01-07 | |
US61/430,751 | 2011-01-07 | ||
PCT/EP2011/073147 WO2012084750A1 (en) | 2010-12-24 | 2011-12-16 | Dislocation engineering in single crystal synthetic diamond material |
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EP (1) | EP2655704B1 (ja) |
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GB (2) | GB201021985D0 (ja) |
IL (1) | IL227012A (ja) |
RU (1) | RU2550197C2 (ja) |
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