JP5658704B2 - シフトレジスタ型メモリおよびその駆動方法 - Google Patents
シフトレジスタ型メモリおよびその駆動方法 Download PDFInfo
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- JP5658704B2 JP5658704B2 JP2012056242A JP2012056242A JP5658704B2 JP 5658704 B2 JP5658704 B2 JP 5658704B2 JP 2012056242 A JP2012056242 A JP 2012056242A JP 2012056242 A JP2012056242 A JP 2012056242A JP 5658704 B2 JP5658704 B2 JP 5658704B2
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/155—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements with cylindrical configuration
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/165—Auxiliary circuits
- G11C11/1675—Writing or programming circuits or methods
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
- G11C19/02—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
- G11C19/02—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements
- G11C19/08—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure
- G11C19/0808—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure using magnetic domain propagation
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
- G11C19/02—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements
- G11C19/08—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure
- G11C19/0808—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure using magnetic domain propagation
- G11C19/0833—Digital stores in which the information is moved stepwise, e.g. shift registers using magnetic elements using thin films in plane structure using magnetic domain propagation using magnetic domain interaction
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N59/00—Integrated devices, or assemblies of multiple devices, comprising at least one galvanomagnetic or Hall-effect element covered by groups H10N50/00 - H10N52/00
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
Description
図1は、第1の実施形態に従った磁性体ピラー10の構成を示す図である。磁性体ピラー10は、複数の磁性体層20と複数の非磁性体層30とを含み、磁性体層20と非磁性体層30とが交互に積層されることによって形成されている。磁性体層20は、逆磁歪効果を有する材料、例えば、Ni膜等を用いて形成されている。非磁性体層30は、例えば、Ru膜等の非絶縁性導電膜を用いて形成されている。
図10は、第2の実施形態に従ったシフトレジスタ型メモリのレイアウトを示す平面図である。第2の実施形態では、磁性体ピラー10の径が第1の実施形態のそれよりも小さいため、磁性体ピラー10は、ストラップ電極90を介してコンタクト100に接続されている。磁性体ピラー10は、マトリクス状に二次元配置されている。従って、互いに隣接する磁性体ピラー10のカラムはロウ方向においてずれておらず、揃っている。また、磁性体ピラー10の下端のMTJ素子は、コンタクト120を介することなくセルトランジスタCTの他端に直接接続されている。
図12は、第3の実施形態に従ったシフトレジスタ型メモリの構成を示す斜視図である。第3の実施形態では、磁性体ピラー10は、層間絶縁膜ILD内に形成されたホール130内に設けられている。磁性体ピラー10とホール130の内壁との間には、空隙がある。磁性体ピラー10の上端は、ホール130の開口部に沿って転がるように形成されている。これにより、磁性体ピラー10は、下端15を支点としてコマのように回転することができる。
Claims (3)
- 複数の磁性体層と、互いに隣接する前記磁性体層間に設けられた非磁性体層とを含む磁性体ピラーと、
前記磁性体ピラーに応力を印加する応力印加部と、
前記磁性体ピラーに静磁場を印加する磁場印加部とを備え、
複数の前記磁性体ピラーが配列されており、
前記磁場印加部は、隣接する前記磁性体ピラー間に充填された永久磁石または強磁性体であり、
前記応力印加部が前記磁性体ピラーに応力を印加することによって、前記複数の磁性体層の磁化状態を前記複数の磁性体層の積層方向に転送することを特徴とするシフトレジスタ型メモリ。 - 前記応力印加部は、前記磁性体ピラーの周囲に設けられた強誘電体膜で形成されていることを特徴とする請求項1に記載のシフトレジスタ型メモリ。
- 前記応力印加部は、複数の前記磁性体ピラーのそれぞれの周囲に設けられており、
前記応力印加部は、複数の前記磁性体ピラーに電圧を与えることによって生じる電界によって前記磁性体ピラーに応力を印加することを特徴とする請求項1または請求項2に記載のシフトレジスタ型メモリ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012056242A JP5658704B2 (ja) | 2012-03-13 | 2012-03-13 | シフトレジスタ型メモリおよびその駆動方法 |
US13/599,228 US8743584B2 (en) | 2012-03-13 | 2012-08-30 | Shift register memory and driving method thereof |
CN201210332585.8A CN103310847B (zh) | 2012-03-13 | 2012-09-10 | 移位寄存器存储器及其驱动方法 |
US14/268,701 US9111855B2 (en) | 2012-03-13 | 2014-05-02 | Shift register memory and driving method thereof |
Applications Claiming Priority (1)
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JP2012056242A JP5658704B2 (ja) | 2012-03-13 | 2012-03-13 | シフトレジスタ型メモリおよびその駆動方法 |
Publications (2)
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JP2013191692A JP2013191692A (ja) | 2013-09-26 |
JP5658704B2 true JP5658704B2 (ja) | 2015-01-28 |
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JP2012056242A Active JP5658704B2 (ja) | 2012-03-13 | 2012-03-13 | シフトレジスタ型メモリおよびその駆動方法 |
Country Status (3)
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US (2) | US8743584B2 (ja) |
JP (1) | JP5658704B2 (ja) |
CN (1) | CN103310847B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5615310B2 (ja) * | 2012-03-16 | 2014-10-29 | 株式会社東芝 | 磁気メモリ |
US9190167B2 (en) | 2013-02-28 | 2015-11-17 | Kabushiki Kaisha Toshiba | Shift register and shift register type magnetic memory |
KR102192205B1 (ko) * | 2014-04-28 | 2020-12-18 | 삼성전자주식회사 | 메모리 장치 |
US9520444B1 (en) * | 2015-08-25 | 2016-12-13 | Western Digital Technologies, Inc. | Implementing magnetic memory pillar design |
JP2018045733A (ja) * | 2017-12-26 | 2018-03-22 | 大日本印刷株式会社 | 決済システム及びプログラム |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6834005B1 (en) * | 2003-06-10 | 2004-12-21 | International Business Machines Corporation | Shiftable magnetic shift register and method of using the same |
US7108797B2 (en) * | 2003-06-10 | 2006-09-19 | International Business Machines Corporation | Method of fabricating a shiftable magnetic shift register |
JP2005123488A (ja) | 2003-10-20 | 2005-05-12 | Rikogaku Shinkokai | 磁化反転方法、磁化反転装置、磁気メモリ及び磁気メモリの製造方法 |
US7236386B2 (en) * | 2004-12-04 | 2007-06-26 | International Business Machines Corporation | System and method for transferring data to and from a magnetic shift register with a shiftable data column |
JP2006237183A (ja) * | 2005-02-24 | 2006-09-07 | Internatl Business Mach Corp <Ibm> | 磁気シフト・レジスタ・メモリ・デバイスにおいて用いるデータ・トラックの製造方法 |
KR100695171B1 (ko) * | 2006-02-23 | 2007-03-14 | 삼성전자주식회사 | 마그네틱 도메인 이동을 이용하는 자기 메모리 장치 |
JP4969981B2 (ja) * | 2006-10-03 | 2012-07-04 | 株式会社東芝 | 磁気記憶装置 |
JP2008130995A (ja) * | 2006-11-24 | 2008-06-05 | Toshiba Corp | 半導体記憶装置 |
FR2925747B1 (fr) * | 2007-12-21 | 2010-04-09 | Commissariat Energie Atomique | Memoire magnetique a ecriture assistee thermiquement |
KR101435516B1 (ko) * | 2008-02-14 | 2014-08-29 | 삼성전자주식회사 | 자구벽 이동을 이용한 정보저장장치 및 그 동작방법 |
US7936597B2 (en) * | 2008-03-25 | 2011-05-03 | Seagate Technology Llc | Multilevel magnetic storage device |
JP2009253036A (ja) * | 2008-04-07 | 2009-10-29 | Toshiba Corp | 半導体メモリ |
US8102691B2 (en) * | 2008-06-24 | 2012-01-24 | Seagate Technology Llc | Magnetic tracks with domain wall storage anchors |
US8228706B2 (en) * | 2008-07-07 | 2012-07-24 | International Business Machines Corporation | Magnetic shift register memory device |
GB2465370A (en) | 2008-11-13 | 2010-05-19 | Ingenia Holdings | Magnetic data storage comprising a synthetic anti-ferromagnetic stack arranged to maintain solitons |
CN101752003B (zh) * | 2008-11-28 | 2012-11-07 | 财团法人工业技术研究院 | 磁性移位寄存存储器以及数据存取方法 |
US8050074B2 (en) * | 2009-02-17 | 2011-11-01 | Samsung Electronics Co., Ltd. | Magnetic packet memory storage devices, memory systems including such devices, and methods of controlling such devices |
JP4945592B2 (ja) * | 2009-03-13 | 2012-06-06 | 株式会社東芝 | 半導体記憶装置 |
KR20100104044A (ko) | 2009-03-16 | 2010-09-29 | 삼성전자주식회사 | 정보저장장치 및 그의 동작방법 |
JP5435026B2 (ja) * | 2009-05-19 | 2014-03-05 | 富士電機株式会社 | 磁気メモリ素子およびそれを用いる記憶装置 |
TWI428914B (zh) * | 2009-06-29 | 2014-03-01 | Ind Tech Res Inst | 堆疊式磁性移位暫存記憶體 |
JP2011233206A (ja) * | 2010-04-28 | 2011-11-17 | Toshiba Corp | シフトレジスタ型記憶装置及びデータ記憶方法 |
JP2012009786A (ja) * | 2010-06-28 | 2012-01-12 | Sony Corp | メモリ素子 |
JP2012204399A (ja) * | 2011-03-23 | 2012-10-22 | Toshiba Corp | 抵抗変化メモリ |
JP2012256693A (ja) * | 2011-06-08 | 2012-12-27 | Toshiba Corp | 半導体記憶装置 |
JP5653379B2 (ja) * | 2012-03-23 | 2015-01-14 | 株式会社東芝 | 磁気記憶素子、磁気メモリ及び磁気記憶装置 |
-
2012
- 2012-03-13 JP JP2012056242A patent/JP5658704B2/ja active Active
- 2012-08-30 US US13/599,228 patent/US8743584B2/en active Active
- 2012-09-10 CN CN201210332585.8A patent/CN103310847B/zh active Active
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2014
- 2014-05-02 US US14/268,701 patent/US9111855B2/en active Active
Also Published As
Publication number | Publication date |
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CN103310847A (zh) | 2013-09-18 |
US20140231889A1 (en) | 2014-08-21 |
JP2013191692A (ja) | 2013-09-26 |
US8743584B2 (en) | 2014-06-03 |
US9111855B2 (en) | 2015-08-18 |
US20130242634A1 (en) | 2013-09-19 |
CN103310847B (zh) | 2016-06-08 |
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