JP5607693B2 - 基板上にナノ粒子を位置付けるための方法 - Google Patents
基板上にナノ粒子を位置付けるための方法 Download PDFInfo
- Publication number
- JP5607693B2 JP5607693B2 JP2012186579A JP2012186579A JP5607693B2 JP 5607693 B2 JP5607693 B2 JP 5607693B2 JP 2012186579 A JP2012186579 A JP 2012186579A JP 2012186579 A JP2012186579 A JP 2012186579A JP 5607693 B2 JP5607693 B2 JP 5607693B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- nanoparticles
- diameter
- nanoparticle
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/06—Multi-walled nanotubes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/36—Diameter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S423/00—Chemistry of inorganic compounds
- Y10S423/40—Fullerene composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
- Y10S977/75—Single-walled
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
- Y10T428/24372—Particulate matter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24521—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness with component conforming to contour of nonplanar surface
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24521—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness with component conforming to contour of nonplanar surface
- Y10T428/24537—Parallel ribs and/or grooves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
- Y10T428/2462—Composite web or sheet with partial filling of valleys on outer surface
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]
Description
この方法では、溶解したナノ粒子を含む溶剤を基板上に堆積し、制御しながら蒸発させることによって溶剤を除去する。溶剤が蒸発すると、ナノ粒子は組織化して結晶層を形成する。この方法は良好に組織化した膜を生成するが、膜の厚さは制御されない。溶剤が蒸発すると、様々な厚さの膜の層が形成される。
この方法では、基板をナノ粒子含有溶液に浸漬し(immerse)、放置する(allowed to sit)。時間が経つと、ナノ粒子は溶液中に拡散し、基板へと進む。この方法は均一な厚さの膜を生成するが、ナノ粒子は密集(close-packed)せず、空隙(ナノ粒子が存在しない領域)を含むことが多い。更に、この方法は、表面上にどこにでもナノ粒子を堆積させる。
この方法では、液体表面にナノ粒子膜を形成する。液体上で膜を圧縮することによって、ナノ粒子を自己組織化させることができる。液体表面上の浸漬被覆(dip coating)によって、膜を固体基板へと移す。この方法は秩序のある配列のナノ粒子層を生成するが、膜厚を制御することが難しい。多くの場合、膜は多層から成るか、または空隙を含む。また、液体から固体基板への膜移動の応力のため、膜にひびが生じる恐れがある。
この方法では、固体基板上にナノ粒子含有溶液をスピン・コート(spin-coat)する。溶剤を蒸発させた後、ナノ粒子膜が残る。この方法によって生成されたナノ粒子膜は、回転遠心鋳造プロセスの非平衡の性質のため、良好には組織化(organized)されていない。
12、22 くぼみ
14、24 ナノ粒子
16 溶剤
18 ワイパ部材
30 ナノチューブ/ナノワイヤ
Claims (9)
- パターニングされた基板上の多壁ナノチューブ又は単一壁ナノチューブのアレイであって、
前記多壁ナノチューブ又は単一壁ナノチューブは、前記パターニングされた基板の複数のくぼみに配された選択的に位置付けされたナノ粒子から用意され、
前記複数のくぼみは前記パターニングされた基板の表面上に六角形に配列されており、
前記パターニングされた基板が二酸化シリコン又はシリコンであり、
前記複数のくぼみの直径が、コンフォーマルな膜堆積によって調節されている、
前記アレイ。 - パターニングされた基板上の多壁ナノチューブ又は単一壁ナノチューブのアレイであって、
前記多壁ナノチューブ又は単一壁ナノチューブは、前記パターニングされた基板の複数のくぼみに配された選択的に位置付けされたナノ粒子から用意され、
前記複数のくぼみは前記パターニングされた基板の表面上に六角形に配列されており、
前記パターニングされた基板が二酸化シリコン又はシリコンであり、
前記複数のくぼみの直径が、熱酸化によって小さくされている、
前記アレイ。 - 前記単一壁ナノチューブの直径が、前記選択的に位置付けされたナノ粒子の直径によって制御される、請求項1又は2に記載のアレイ。
- 原子層堆積、化学気相付着、又はスパッタリングによって形成された単一壁ナノチューブである、請求項1〜3のいずれか一項に記載のアレイ。
- 前記単一壁ナノチューブの直径が、1〜50nmの平均直径を有する、請求項1〜4のいずれか一項に記載のアレイ。
- 前記単一壁ナノチューブの直径が、2〜10nmの平均直径を有する、請求項1〜5のいずれか一項に記載のアレイ。
- 前記選択的に位置付けされたナノ粒子が酸化鉄を含む、請求項1〜6のいずれか一項に記載のアレイ。
- 前記少なくとも一つのくぼみの深さが10〜40nmである、請求項1〜7のいずれか一項に記載のアレイ。
- 前記コンフォーマルな膜堆積が、原子層堆積、化学気相付着、又はスパッタリングからなるグループから選択される、請求項1に記載のアレイ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/400390 | 2006-04-10 | ||
US11/400,390 US20070237706A1 (en) | 2006-04-10 | 2006-04-10 | Embedded nanoparticle films and method for their formation in selective areas on a surface |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007098772A Division JP5147277B2 (ja) | 2006-04-10 | 2007-04-04 | 基板上にナノ粒子を位置付けるための方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013035748A JP2013035748A (ja) | 2013-02-21 |
JP5607693B2 true JP5607693B2 (ja) | 2014-10-15 |
Family
ID=38575518
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007098772A Expired - Fee Related JP5147277B2 (ja) | 2006-04-10 | 2007-04-04 | 基板上にナノ粒子を位置付けるための方法 |
JP2012186579A Expired - Fee Related JP5607693B2 (ja) | 2006-04-10 | 2012-08-27 | 基板上にナノ粒子を位置付けるための方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007098772A Expired - Fee Related JP5147277B2 (ja) | 2006-04-10 | 2007-04-04 | 基板上にナノ粒子を位置付けるための方法 |
Country Status (3)
Country | Link |
---|---|
US (6) | US20070237706A1 (ja) |
JP (2) | JP5147277B2 (ja) |
CN (1) | CN101055834A (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10060904B1 (en) | 2005-10-17 | 2018-08-28 | Stc.Unm | Fabrication of enclosed nanochannels using silica nanoparticles |
US9156004B2 (en) | 2005-10-17 | 2015-10-13 | Stc.Unm | Fabrication of enclosed nanochannels using silica nanoparticles |
US7825037B2 (en) * | 2005-10-17 | 2010-11-02 | Stc.Unm | Fabrication of enclosed nanochannels using silica nanoparticles |
US20070237706A1 (en) * | 2006-04-10 | 2007-10-11 | International Business Machines Corporation | Embedded nanoparticle films and method for their formation in selective areas on a surface |
US7714322B2 (en) * | 2006-04-19 | 2010-05-11 | Micron Technology, Inc. | Nanoparticle positioning technique |
DE102006028921A1 (de) * | 2006-06-23 | 2007-12-27 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Siliziumsubstrats mit veränderten Oberflächeneigenschaften sowie ein derartiges Siliziumsubstrat |
JP2008311585A (ja) * | 2007-06-18 | 2008-12-25 | Elpida Memory Inc | 配線構造及び半導体装置、並びにそれらの製造方法 |
FR2929756B1 (fr) * | 2008-04-08 | 2010-08-27 | Commissariat Energie Atomique | Procede de formation de materiau poreux dans une microcavite ou un micropassage par polissage mecano-chimique |
WO2010117102A1 (ko) * | 2009-04-09 | 2010-10-14 | 서강대학교 산학협력단 | 콜로이드 입자들을 단결정들로 정렬하는 방법 |
KR101161060B1 (ko) * | 2009-11-30 | 2012-06-29 | 서강대학교산학협력단 | 나노입자를 기둥형태로 조직화시키기 위한 배열장치 및 그 배열방법 |
JP5762686B2 (ja) * | 2010-02-15 | 2015-08-12 | 公益財団法人神奈川科学技術アカデミー | 微粒子の製造方法 |
EP2596152B1 (en) * | 2010-07-15 | 2019-12-18 | Commonwealth Scientific and Industrial Research Organisation | Surface treatment |
TWI453864B (zh) * | 2010-11-12 | 2014-09-21 | Ind Tech Res Inst | 半導體結構及其製作方法 |
TW201325335A (zh) * | 2011-10-29 | 2013-06-16 | Cima Nanotech Israel Ltd | 經圖案化基材上之導電網路 |
GB201207463D0 (en) | 2012-04-30 | 2012-06-13 | Ibm | Methods and apparatuses for positioning nano-objects with aspect ratios |
JP6039534B2 (ja) * | 2013-11-13 | 2016-12-07 | 東京エレクトロン株式会社 | カーボンナノチューブの生成方法及び配線形成方法 |
JP6638339B2 (ja) * | 2015-11-11 | 2020-01-29 | 住友電気工業株式会社 | カーボンナノ構造体の製造方法及びカーボンナノ構造体の製造装置 |
CN109553063B (zh) * | 2017-09-26 | 2023-09-22 | 中国科学院化学研究所 | 不同粒径的微米和/或纳米颗粒进行一维共组装的方法和基板与应用 |
CN110465339B (zh) * | 2019-09-03 | 2021-02-09 | 浙江大学 | 一种流固两相输运中颗粒定位的方法 |
EP4273541A1 (en) * | 2022-05-01 | 2023-11-08 | Vrije Universiteit Brussel | Microfluidic device |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5283927A (en) * | 1991-05-31 | 1994-02-08 | Jmk International, Inc. | Silicon rubber wiper blade with low coefficient of friction |
IL109497A (en) * | 1993-05-05 | 1998-02-22 | Hyperion Catalysis Int | Three-dimensional macroscopic clusters of randomly arranged charcoal fibrils and products containing these |
US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
US6692717B1 (en) * | 1999-09-17 | 2004-02-17 | William Marsh Rice University | Catalytic growth of single-wall carbon nanotubes from metal particles |
US6340822B1 (en) * | 1999-10-05 | 2002-01-22 | Agere Systems Guardian Corp. | Article comprising vertically nano-interconnected circuit devices and method for making the same |
JP4137794B2 (ja) * | 2001-12-18 | 2008-08-20 | イエール ユニバーシティー | 単層壁カーボン・ナノチューブの制御された成長 |
US20040005269A1 (en) * | 2002-06-06 | 2004-01-08 | Houjin Huang | Method for selectively producing carbon nanostructures |
US20040167014A1 (en) * | 2002-11-13 | 2004-08-26 | The Regents Of The Univ. Of California, Office Of Technology Transfer, University Of California | Nanostructured proton exchange membrane fuel cells |
US7282191B1 (en) * | 2002-12-06 | 2007-10-16 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube growth |
US20050196606A1 (en) * | 2003-02-20 | 2005-09-08 | Fujitsu Limited | Composite material, structure and polycrystalline structure film and method of making particles |
JPWO2004074170A1 (ja) * | 2003-02-20 | 2006-06-01 | 富士通株式会社 | 複合材、構造体およびその製造方法、多結晶構造膜並びに微小粒子の製造方法 |
FR2851737B1 (fr) * | 2003-02-28 | 2006-05-26 | Commissariat Energie Atomique | Catalyseur structure notamment pour la realisation d'ecrans plats a emission de champ |
CN1232813C (zh) | 2003-03-13 | 2005-12-21 | 东南大学 | 制备纳米管探针针尖的方法 |
US7628974B2 (en) * | 2003-10-22 | 2009-12-08 | International Business Machines Corporation | Control of carbon nanotube diameter using CVD or PECVD growth |
US6989324B2 (en) * | 2004-01-15 | 2006-01-24 | The Regents Of The University Of California | Fabrication method for arranging ultra-fine particles |
JP2005263564A (ja) * | 2004-03-19 | 2005-09-29 | Toyota Central Res & Dev Lab Inc | カーボンナノチューブの製造方法 |
US7345296B2 (en) * | 2004-09-16 | 2008-03-18 | Atomate Corporation | Nanotube transistor and rectifying devices |
JP2007141554A (ja) * | 2005-11-16 | 2007-06-07 | Sekisui Chem Co Ltd | 電子放出素子用微小体、インキ組成物及びこれを用いた電子放出素子並びに画像表示装置 |
US20070237706A1 (en) | 2006-04-10 | 2007-10-11 | International Business Machines Corporation | Embedded nanoparticle films and method for their formation in selective areas on a surface |
-
2006
- 2006-04-10 US US11/400,390 patent/US20070237706A1/en not_active Abandoned
-
2007
- 2007-04-04 JP JP2007098772A patent/JP5147277B2/ja not_active Expired - Fee Related
- 2007-04-09 CN CNA2007100963019A patent/CN101055834A/zh active Pending
-
2008
- 2008-08-25 US US12/197,688 patent/US7682591B2/en active Active
-
2010
- 2010-02-08 US US12/701,977 patent/US8187565B2/en active Active
-
2012
- 2012-02-17 US US13/399,612 patent/US8323608B2/en not_active Expired - Fee Related
- 2012-08-27 JP JP2012186579A patent/JP5607693B2/ja not_active Expired - Fee Related
- 2012-09-12 US US13/611,636 patent/US8465829B2/en active Active
-
2013
- 2013-05-13 US US13/892,801 patent/US8802047B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8465829B2 (en) | 2013-06-18 |
JP2013035748A (ja) | 2013-02-21 |
US20100203295A1 (en) | 2010-08-12 |
US20090053129A1 (en) | 2009-02-26 |
US20120148474A1 (en) | 2012-06-14 |
US20130011612A1 (en) | 2013-01-10 |
US20070237706A1 (en) | 2007-10-11 |
US8802047B2 (en) | 2014-08-12 |
US8323608B2 (en) | 2012-12-04 |
CN101055834A (zh) | 2007-10-17 |
US20130316150A1 (en) | 2013-11-28 |
JP5147277B2 (ja) | 2013-02-20 |
US8187565B2 (en) | 2012-05-29 |
US7682591B2 (en) | 2010-03-23 |
JP2007277085A (ja) | 2007-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5607693B2 (ja) | 基板上にナノ粒子を位置付けるための方法 | |
JP5412294B2 (ja) | 原子層堆積法によりサイズ制御され空間的に分散されるナノ構造の製造方法 | |
US7115305B2 (en) | Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials | |
JP5329800B2 (ja) | 触媒ナノ粒子の制御および選択的な形成 | |
KR101668691B1 (ko) | 마이크로구조화 및 나노구조화된 그래핀 및 그래파이트의 배리어 유도형 성장 방법 | |
US7777291B2 (en) | Integrated circuits having interconnects and heat dissipators based on nanostructures | |
JP5878679B2 (ja) | 基板製品を製造する方法 | |
US20050112051A1 (en) | Systems and methods for producing single-walled carbon nanotubes (SWNTS) on a substrate | |
KR100682864B1 (ko) | 탄소나노튜브의 합성을 위한 촉매층 형성방법 및 이를 이용한 탄소나노튜브 합성방법 | |
EP1945840B1 (en) | Integrated circuit comprising nanostructures | |
US20080032238A1 (en) | System and method for controlling the size and/or distribution of catalyst nanoparticles for nanostructure growth | |
JP2006052122A (ja) | 炭素ナノチューブのマトリックス構造及びその製造方法 | |
JP2007105822A (ja) | 原子スケール金属ワイヤもしくは金属ナノクラスター、およびこれらの製造方法 | |
KR100666187B1 (ko) | 나노선을 이용한 수직형 반도체 소자 및 이의 제조 방법 | |
TW200936498A (en) | Improvements in carbon nanotube growth | |
Liebau et al. | Electrical interconnects made of carbon nanotubes | |
Li et al. | Catalyst patterning for nanowire devices | |
Nihei et al. | Carbon Nanotube Via Technologies for Future LSI Interconnects |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140218 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20140219 Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140807 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20140807 |
|
RD14 | Notification of resignation of power of sub attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7434 Effective date: 20140807 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140828 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5607693 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |