JP5559551B2 - 検査装置 - Google Patents
検査装置 Download PDFInfo
- Publication number
- JP5559551B2 JP5559551B2 JP2010009343A JP2010009343A JP5559551B2 JP 5559551 B2 JP5559551 B2 JP 5559551B2 JP 2010009343 A JP2010009343 A JP 2010009343A JP 2010009343 A JP2010009343 A JP 2010009343A JP 5559551 B2 JP5559551 B2 JP 5559551B2
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- solder
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- 238000007689 inspection Methods 0.000 title claims description 111
- 229910000679 solder Inorganic materials 0.000 claims description 129
- 239000000758 substrate Substances 0.000 claims description 99
- 238000001514 detection method Methods 0.000 claims description 27
- 238000003384 imaging method Methods 0.000 claims description 8
- 238000010191 image analysis Methods 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- 230000005855 radiation Effects 0.000 description 42
- 239000011800 void material Substances 0.000 description 36
- 238000000034 method Methods 0.000 description 18
- 230000005540 biological transmission Effects 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 230000002159 abnormal effect Effects 0.000 description 6
- 238000012360 testing method Methods 0.000 description 5
- 238000004422 calculation algorithm Methods 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000007476 Maximum Likelihood Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 102220353742 c.41G>A Human genes 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000002601 radiography Methods 0.000 description 1
- 102220248506 rs104894625 Human genes 0.000 description 1
- 102220209086 rs1057520682 Human genes 0.000 description 1
- 102220075807 rs202025584 Human genes 0.000 description 1
- 102200158393 rs5030732 Human genes 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/66—Testing of connections, e.g. of plugs or non-disconnectable joints
- G01R31/70—Testing of connections between components and printed circuit boards
- G01R31/71—Testing of solder joints
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0008—Industrial image inspection checking presence/absence
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30152—Solder
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Description
Claims (2)
- 基板および電子部品を含む被検査体の断面画像を画像解析し、前記断面画像の中から基板表面を映し出す表面画像を特定する基板表面検出部と、
前記表面画像を基準として前記断面画像に映し出されている前記基板と前記電子部品とを接合するはんだの領域を特定し、前記はんだを映し出す前記断面画像を積み上げることにより擬似的に撮像範囲に厚みを持たせた疑似断面画像を生成する疑似断面画像生成部と、
前記表面画像に映し出された前記はんだの領域および前記疑似断面画像に映し出された前記はんだの領域を画像解析することにより、前記はんだの接合状態の良否を推定する検査部とを含み、
前記検査部は、前記表面画像を画像解析することにより、はんだの溶融不足によって基板と部品との間の接合が不足しているか否かを特定する溶融状態検査部を含み、
前記溶融状態検査部は、前記表面画像を画像解析することにより、前記表面画像に映し出されている前記はんだの領域を特定し、前記はんだの溶融状態が良好の場合に前記はんだの溶融状態が不良の場合と比較して前記領域の境界部分に顕著に出現するアーティファクトの有無を調べることにより、前記はんだの溶融状態を検査する境界検出部を含むことを特徴とする検査装置。 - 前記溶融状態検査部は、前記表面画像を画像解析することにより、前記表面画像に映し出されている前記はんだの領域を特定し、前記はんだ領域の大きさがはんだの溶融状態の良否を判断するために定められた基準の大きさ以上であるか否かを測定することにより、前記はんだの溶融状態を検査する測定部を含むことを特徴とする請求項1に記載の検査装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010009343A JP5559551B2 (ja) | 2010-01-19 | 2010-01-19 | 検査装置 |
US13/522,753 US9084386B2 (en) | 2010-01-19 | 2010-03-30 | Inspection of ball grid array soldering with boundary detection using tomographic artifact |
PCT/JP2010/002319 WO2011089657A1 (ja) | 2010-01-19 | 2010-03-30 | 検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010009343A JP5559551B2 (ja) | 2010-01-19 | 2010-01-19 | 検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011149737A JP2011149737A (ja) | 2011-08-04 |
JP5559551B2 true JP5559551B2 (ja) | 2014-07-23 |
Family
ID=44306481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010009343A Active JP5559551B2 (ja) | 2010-01-19 | 2010-01-19 | 検査装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9084386B2 (ja) |
JP (1) | JP5559551B2 (ja) |
WO (1) | WO2011089657A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101614061B1 (ko) * | 2012-03-29 | 2016-04-20 | 주식회사 고영테크놀러지 | 조인트 검사 장치 |
JP5949480B2 (ja) * | 2012-11-14 | 2016-07-06 | オムロン株式会社 | X線検査装置およびx線検査方法 |
JP6230520B2 (ja) * | 2014-10-29 | 2017-11-15 | キヤノン株式会社 | プリント回路板及び電子機器 |
US9841387B2 (en) | 2015-07-22 | 2017-12-12 | Test Research, Inc. | Inspection method and device |
JP6676023B2 (ja) * | 2017-09-28 | 2020-04-08 | 株式会社サキコーポレーション | 検査位置の特定方法及び検査装置 |
CN111247424A (zh) * | 2017-09-28 | 2020-06-05 | 株式会社先机 | 检查位置确定方法、三维图像生成方法以及检查装置 |
JP2019060809A (ja) * | 2017-09-28 | 2019-04-18 | 株式会社サキコーポレーション | 3次元画像の生成方法及び検査装置 |
DE102019202420A1 (de) * | 2019-02-22 | 2020-08-27 | Siemens Aktiengesellschaft | Verfahren zum zerstörungsfreien Detektieren von Alterungserscheinungen eines regelmäßig wiederkehrende Strukturen aufweisenden Bauteils |
WO2022250584A1 (en) * | 2021-05-24 | 2022-12-01 | Telefonaktiebolaget Lm Ericsson (Publ) | A method and an electronic device for analysing an image |
US20220414860A1 (en) * | 2021-06-25 | 2022-12-29 | Subcom, Llc | Imaging device and system for inspecting cables and cable joints |
KR102421127B1 (ko) * | 2021-12-23 | 2022-07-15 | 주식회사 뷰온 | 에어리어 카메라가 구비된 검사 장치 및 에어리어 카메라가 구비된 검사 장치를 이용한 검사 방법 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2113752C (en) * | 1994-01-19 | 1999-03-02 | Stephen Michael Rooks | Inspection system for cross-sectional imaging |
US5687209A (en) * | 1995-04-11 | 1997-11-11 | Hewlett-Packard Co. | Automatic warp compensation for laminographic circuit board inspection |
US7013038B1 (en) * | 1999-11-08 | 2006-03-14 | Teradyne, Inc. | Method for inspecting a BGA joint |
US6665433B2 (en) * | 2001-07-31 | 2003-12-16 | Agilent Technologies, Inc. | Automatic X-ray determination of solder joint and view Delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography |
JP3657242B2 (ja) * | 2002-05-30 | 2005-06-08 | オーエヌ電子株式会社 | X線透過検査装置 |
JP4631460B2 (ja) * | 2005-02-18 | 2011-02-16 | パナソニック株式会社 | X線検査方法 |
JP4834373B2 (ja) * | 2005-10-24 | 2011-12-14 | 名古屋電機工業株式会社 | X線検査装置、x線検査方法およびx線検査プログラム |
JP4610590B2 (ja) * | 2007-09-04 | 2011-01-12 | 名古屋電機工業株式会社 | X線検査装置、x線検査方法およびx線検査プログラム |
-
2010
- 2010-01-19 JP JP2010009343A patent/JP5559551B2/ja active Active
- 2010-03-30 WO PCT/JP2010/002319 patent/WO2011089657A1/ja active Application Filing
- 2010-03-30 US US13/522,753 patent/US9084386B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9084386B2 (en) | 2015-07-14 |
JP2011149737A (ja) | 2011-08-04 |
US20120294508A1 (en) | 2012-11-22 |
WO2011089657A1 (ja) | 2011-07-28 |
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