JP5423811B2 - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
- Publication number
- JP5423811B2 JP5423811B2 JP2011548892A JP2011548892A JP5423811B2 JP 5423811 B2 JP5423811 B2 JP 5423811B2 JP 2011548892 A JP2011548892 A JP 2011548892A JP 2011548892 A JP2011548892 A JP 2011548892A JP 5423811 B2 JP5423811 B2 JP 5423811B2
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- Prior art keywords
- rectifying
- semiconductor module
- arm
- elements
- stacking
- Prior art date
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- Expired - Fee Related
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2089—Modifications to facilitate cooling, ventilating, or heating for power electronics, e.g. for inverters for controlling motor
- H05K7/20927—Liquid coolant without phase change
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
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- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/071—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next and on each other, i.e. mixed assemblies
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/003—Constructional details, e.g. physical layout, assembly, wiring or busbar connections
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
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- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
- H01L2224/331—Disposition
- H01L2224/3318—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/33181—On opposite sides of the body
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Thermal Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Inverter Devices (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Description
1A スイッチング素子積層部
1B 整流素子積層部
2 上アーム
3 下アーム
4A,4B 冷却器
5A,5B スイッチング素子
6A,6B 整流素子
21 冷媒流路。
Claims (2)
- それぞれスイッチング素子及び整流素子を有する上アームと下アームとを備えた半導体モジュールであって、
前記上アームと前記下アームとの前記スイッチング素子同士を重ね合わせたスイッチング素子積層部と、
前記上アームと前記下アームとの前記整流素子同士を重ね合わせた整流素子積層部と、
少なくとも前記スイッチング素子同士及び前記整流素子同士の積層方向の両側に設けられ、前記スイッチング素子積層部及び前記整流素子積層部を冷却する冷却部と、を備え、
前記冷却部は、冷媒と前記冷媒を流通させるための冷媒流路とを有し、
前記冷媒流路は、前記スイッチング素子同士及び前記整流素子同士の積層方向の両側にそれぞれ設けられ、前記整流素子積層部側で折り返されていることを特徴とする半導体モジュール。 - 前記冷却部の内部であって前記スイッチング素子又は前記整流素子の直下位置には、前記冷媒流路の一部である空間が形成されていることを特徴とする請求項1に記載の半導体モジュール。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2010/050130 WO2011083578A1 (ja) | 2010-01-08 | 2010-01-08 | 半導体モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011083578A1 JPWO2011083578A1 (ja) | 2013-05-13 |
JP5423811B2 true JP5423811B2 (ja) | 2014-02-19 |
Family
ID=44305322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011548892A Expired - Fee Related JP5423811B2 (ja) | 2010-01-08 | 2010-01-08 | 半導体モジュール |
Country Status (4)
Country | Link |
---|---|
US (1) | US8755185B2 (ja) |
JP (1) | JP5423811B2 (ja) |
CN (1) | CN102612747B (ja) |
WO (1) | WO2011083578A1 (ja) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5581131B2 (ja) * | 2010-06-30 | 2014-08-27 | 日立オートモティブシステムズ株式会社 | パワーモジュール及びそれを用いた電力変換装置 |
JP5506749B2 (ja) * | 2011-07-25 | 2014-05-28 | 日立オートモティブシステムズ株式会社 | 電力変換装置 |
JP2013225622A (ja) | 2012-04-23 | 2013-10-31 | Jtekt Corp | モーター制御用多層回路基板 |
JP2014072385A (ja) * | 2012-09-28 | 2014-04-21 | Toyota Motor Corp | 半導体装置 |
JP5726215B2 (ja) * | 2013-01-11 | 2015-05-27 | 株式会社豊田中央研究所 | 冷却型スイッチング素子モジュール |
JP5821890B2 (ja) * | 2013-04-17 | 2015-11-24 | トヨタ自動車株式会社 | 電力変換装置 |
DE102013219192A1 (de) * | 2013-09-24 | 2015-03-26 | Conti Temic Microelectronic Gmbh | Leistungsmodul, Stromrichter und Antriebsanordnung mit einem Leistungsmodul |
JP2015076440A (ja) * | 2013-10-07 | 2015-04-20 | トヨタ自動車株式会社 | 半導体モジュール |
DE102014221124A1 (de) * | 2014-10-17 | 2016-04-21 | Robert Bosch Gmbh | Modul mit zwei Leistungshalbleitern |
JP6409556B2 (ja) * | 2014-12-19 | 2018-10-24 | 富士通株式会社 | 冷却機構付き基板及び電子機器 |
US20170094836A1 (en) * | 2015-09-30 | 2017-03-30 | Delphi Technologies, Inc. | Double-sided heat exchanger for fluid-cooled electronics with a flat coplanar series-wise coolant flow path |
KR102443261B1 (ko) * | 2015-10-08 | 2022-09-13 | 현대모비스 주식회사 | 직접냉각유로를 갖는 전력반도체 양면 냉각 장치 |
JP6634945B2 (ja) * | 2016-04-19 | 2020-01-22 | 株式会社デンソー | 半導体モジュール |
DE102016114303A1 (de) * | 2016-08-02 | 2018-02-08 | Infineon Technologies Ag | Packung mit teilweise gekapseltem Kühlkanal zum Kühlen eines gekapselten Chips |
JP6696407B2 (ja) * | 2016-11-01 | 2020-05-20 | トヨタ自動車株式会社 | スイッチングモジュール |
JP6540665B2 (ja) * | 2016-11-21 | 2019-07-10 | トヨタ自動車株式会社 | 両面冷却器 |
CN109219880B (zh) * | 2016-12-20 | 2022-06-14 | 富士电机株式会社 | 半导体模块 |
DE102018112601A1 (de) * | 2017-05-31 | 2018-12-06 | Hanon Systems | Elektroelement-Kühlungsmodul |
KR102325110B1 (ko) * | 2017-05-31 | 2021-11-11 | 한온시스템 주식회사 | 전기소자 냉각용 열교환기 |
US10292316B2 (en) * | 2017-09-08 | 2019-05-14 | Hamilton Sundstrand Corporation | Power module with integrated liquid cooling |
JP2019140332A (ja) * | 2018-02-14 | 2019-08-22 | トヨタ自動車株式会社 | 半導体装置 |
JP7159620B2 (ja) * | 2018-05-30 | 2022-10-25 | 富士電機株式会社 | 半導体装置、冷却モジュール、電力変換装置及び電動車両 |
IT201800007387A1 (it) | 2018-07-20 | 2020-01-20 | Caricabatterie per veicoli | |
KR20200134492A (ko) * | 2019-05-22 | 2020-12-02 | 현대자동차주식회사 | 열전모듈이 구비된 열교환기 및 이를 포함하는 배터리 열관리 시스템 |
JP2021019487A (ja) * | 2019-07-24 | 2021-02-15 | 株式会社デンソー | 半導体モジュール構造 |
JP7318615B2 (ja) * | 2020-09-11 | 2023-08-01 | トヨタ自動車株式会社 | 電力変換装置 |
FR3116412B1 (fr) * | 2020-11-18 | 2023-12-22 | Valeo Siemens Eautomotive France Sas | Module de refroidissement en U pour un équipement électrique de puissance |
KR20230168522A (ko) * | 2022-06-07 | 2023-12-14 | 현대모비스 주식회사 | 파워모듈 팩 |
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JPH01278058A (ja) * | 1988-04-30 | 1989-11-08 | Hitachi Ltd | 半導体装置 |
JP2004158489A (ja) * | 2002-11-01 | 2004-06-03 | Honda Motor Co Ltd | 圧接型半導体装置 |
JP2005311046A (ja) * | 2004-04-21 | 2005-11-04 | Denso Corp | 冷却器 |
JP2009176871A (ja) * | 2008-01-23 | 2009-08-06 | Mitsubishi Electric Corp | ヒートシンクおよび電気機器 |
JP2009295794A (ja) * | 2008-06-05 | 2009-12-17 | Mitsubishi Electric Corp | 樹脂封止型半導体装置とその製造方法 |
Family Cites Families (8)
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JPH11346480A (ja) * | 1998-06-02 | 1999-12-14 | Hitachi Ltd | インバータ装置 |
US6414867B2 (en) * | 2000-02-16 | 2002-07-02 | Hitachi, Ltd. | Power inverter |
JP4848187B2 (ja) * | 2006-01-17 | 2011-12-28 | 日立オートモティブシステムズ株式会社 | 電力変換装置 |
JP4857017B2 (ja) * | 2006-04-27 | 2012-01-18 | 日立オートモティブシステムズ株式会社 | 電力変換装置 |
JP5227532B2 (ja) * | 2007-04-02 | 2013-07-03 | 日立オートモティブシステムズ株式会社 | インバータ回路用の半導体モジュール |
US7936100B2 (en) | 2007-04-02 | 2011-05-03 | Hitachi, Ltd. | Stator for rotating machine and rotating machine using the same |
JP5002568B2 (ja) * | 2008-10-29 | 2012-08-15 | 日立オートモティブシステムズ株式会社 | 電力変換装置 |
JP5162518B2 (ja) | 2009-04-10 | 2013-03-13 | 日立オートモティブシステムズ株式会社 | 電力変換装置 |
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2010
- 2010-01-08 JP JP2011548892A patent/JP5423811B2/ja not_active Expired - Fee Related
- 2010-01-08 CN CN201080052039.8A patent/CN102612747B/zh not_active Expired - Fee Related
- 2010-01-08 WO PCT/JP2010/050130 patent/WO2011083578A1/ja active Application Filing
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Patent Citations (5)
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JPH01278058A (ja) * | 1988-04-30 | 1989-11-08 | Hitachi Ltd | 半導体装置 |
JP2004158489A (ja) * | 2002-11-01 | 2004-06-03 | Honda Motor Co Ltd | 圧接型半導体装置 |
JP2005311046A (ja) * | 2004-04-21 | 2005-11-04 | Denso Corp | 冷却器 |
JP2009176871A (ja) * | 2008-01-23 | 2009-08-06 | Mitsubishi Electric Corp | ヒートシンクおよび電気機器 |
JP2009295794A (ja) * | 2008-06-05 | 2009-12-17 | Mitsubishi Electric Corp | 樹脂封止型半導体装置とその製造方法 |
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WO2011083578A1 (ja) | 2011-07-14 |
US8755185B2 (en) | 2014-06-17 |
US20120250253A1 (en) | 2012-10-04 |
CN102612747A (zh) | 2012-07-25 |
CN102612747B (zh) | 2014-12-03 |
JPWO2011083578A1 (ja) | 2013-05-13 |
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