JP5319907B2 - ソケット基板上にスイッチ素子を有するテスト装置 - Google Patents
ソケット基板上にスイッチ素子を有するテスト装置 Download PDFInfo
- Publication number
- JP5319907B2 JP5319907B2 JP2007278983A JP2007278983A JP5319907B2 JP 5319907 B2 JP5319907 B2 JP 5319907B2 JP 2007278983 A JP2007278983 A JP 2007278983A JP 2007278983 A JP2007278983 A JP 2007278983A JP 5319907 B2 JP5319907 B2 JP 5319907B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- integrated circuit
- socket
- substrate
- testing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 157
- 239000000758 substrate Substances 0.000 title claims description 56
- 239000002184 metal Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010998 test method Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000011990 functional testing Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
集積回路素子をテストするソケット基板を主に提供する。
320:半導体素子をソケット基板上のソケットに電気的に接続する。
330:スイッチ素子を切り替え、第1回路と導通させる。
340:被試験集積回路素子のテストを行い、テスト完了後にハンドラで分類を行う。
350:次のロットのピン規格が同じであるがピンの電気特性が異なる被試験集積回路素子をテストソケットに入れる。
360:スイッチ素子を切り替え、第2回路と導通させる。
370:被試験集積回路素子のテストを行い、テスト完了後にハンドラで分類を行う。
Claims (1)
- 基板本体を含み、かつ前記基板本体に複数のテストソケットが配置され、前記テストソケット上の複数の導電素子を介し、同じピン規格を有する複数の被試験集積回路素子上の複数の金属端点をソケット基板の底部に電気的に接続する集積回路素子をテストするソケット基板であって、
前記ソケット基板の底部に、複数セットのテスト回路と、少なくとも1つのスイッチ素子とが配置され、
前記スイッチ素子は、前記複数セットのテスト回路の間を切り替えることができ、
前記スイッチ素子が、前記複数セットのテスト回路を切り替えることにより、異なるロットの同じピン規格を有するが各ピンの電気特性が異なる、複数の被試験集積回路素子のテストを、前記ソケット基板を変えずに行うことができることを特徴とする、
集積回路素子をテストするソケット基板。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096135872 | 2007-09-27 | ||
TW96135872A TWI339270B (en) | 2007-09-27 | 2007-09-27 | Socket boards with switch components on a testing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009085934A JP2009085934A (ja) | 2009-04-23 |
JP5319907B2 true JP5319907B2 (ja) | 2013-10-16 |
Family
ID=40659522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007278983A Active JP5319907B2 (ja) | 2007-09-27 | 2007-10-26 | ソケット基板上にスイッチ素子を有するテスト装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5319907B2 (ja) |
TW (1) | TWI339270B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI407125B (zh) * | 2011-02-18 | 2013-09-01 | Chroma Ate Inc | 一種電子元件測試系統及其切換裝置 |
CN104991097B (zh) * | 2015-06-29 | 2018-05-29 | 上海华力微电子有限公司 | 一种探针卡 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07244115A (ja) * | 1994-03-04 | 1995-09-19 | Fujitsu Ltd | 半導体チップの試験装置 |
JPH09145788A (ja) * | 1995-11-28 | 1997-06-06 | Advantest Corp | Icテストシステム |
JPH11161511A (ja) * | 1997-11-25 | 1999-06-18 | Suzuka Fuji Xerox Co Ltd | 電気的特性測定装置 |
JP2001349925A (ja) * | 2000-06-09 | 2001-12-21 | Mitsubishi Electric Corp | 半導体集積回路の検査装置および検査方法 |
JP3667645B2 (ja) * | 2001-02-05 | 2005-07-06 | 旺宏電子股▲ふん▼有限公司 | 汎用型バーンインボード |
JP2003028919A (ja) * | 2001-07-13 | 2003-01-29 | Canon Inc | 寿命試験用治具及び寿命試験方法 |
WO2007007658A1 (ja) * | 2005-07-07 | 2007-01-18 | Advantest Corporation | 試験装置 |
-
2007
- 2007-09-27 TW TW96135872A patent/TWI339270B/zh active
- 2007-10-26 JP JP2007278983A patent/JP5319907B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
TW200914856A (en) | 2009-04-01 |
JP2009085934A (ja) | 2009-04-23 |
TWI339270B (en) | 2011-03-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7046027B2 (en) | Interface apparatus for semiconductor device tester | |
TWI518332B (zh) | 晶圓級探針卡總成 | |
US9329227B2 (en) | Method and apparatus for testing interconnection reliability of a ball grid array on a testing printed circuit board | |
JP2014062925A (ja) | 信号測定装置 | |
US7915720B2 (en) | Semiconductor integrated circuit device and test method thereof | |
CN101452030B (zh) | 插座基板上具有开关元件的测试装置 | |
US7768283B1 (en) | Universal socketless test fixture | |
JP5319907B2 (ja) | ソケット基板上にスイッチ素子を有するテスト装置 | |
US7352197B1 (en) | Octal/quad site docking compatibility for package test handler | |
WO2008001651A1 (fr) | Procédé d'inspection de carte et dispositif d'inspection de carte | |
US6507205B1 (en) | Load board with matrix card for interfacing to test device | |
CN115267496A (zh) | 一种芯片测试装置及测试方法 | |
JP2007322127A (ja) | 基板検査方法及び基板検査装置 | |
US7498180B2 (en) | Method for manufacturing semiconductor device | |
KR100977060B1 (ko) | 반도체칩 테스터용 프로브 카드와 이를 사용하는 테스터 및그 테스터를 이용한 반도체칩의 검사방법 | |
JP2008286773A (ja) | 混合信号処理回路を有するプローブカードおよび被試験カード | |
CN217085118U (zh) | 新型老化板 | |
JP6520127B2 (ja) | 基板検査装置、基板検査方法及び基板検査用治具 | |
TWI755342B (zh) | 用於檢測記憶體控制器的檢測裝置 | |
JP4137082B2 (ja) | 半導体装置の試験装置 | |
CN1979204A (zh) | 应用于高压矩阵检测的检测装置、检测电路板及检测*** | |
JPH0354842A (ja) | 集積回路素子のテスト方法 | |
TW504580B (en) | Apparatus for examining switch matrix | |
JPH10104301A (ja) | パッケージ基板の検査方法 | |
JP2018036221A (ja) | デバイス搬送用のicトレーを使用する信頼性試験ボード |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100827 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100831 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101125 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110816 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111109 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120710 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20121004 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20121010 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121031 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130702 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130712 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5319907 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |