TW504580B - Apparatus for examining switch matrix - Google Patents

Abstract

The present invention provides the apparatus and method for examining the switch matrix of the semiconductor equipment and its ring connector. The switch matrix contains a test fixture adapter and the ring connector, in which a plurality of the first set of connecting pins are provided with on one end of the ring connector. In the method, a base station, which is provided with plural test pins corresponding respectively to each one of the first set connecting pins, is first placed on the test fixture adapter. Then, a resistor is connected in between two adjacent test pins, and each one of the first set of the connecting pins is connected with its corresponding test pin. Finally, a test circuit is used to conduct a test onto each resistor so as to judge if the machine platen is normal.

Description

504580 五、發明說明（1) 發明之領域 本發明提供一種檢測一半導體設備中開關矩陣 s w i t c h m a t r i X )的裝置，尤指一種檢測該開關矩陣之環 形轉接器（r i ng connector )的裝置以及其檢測之方法。 背景說明 在半導體製程中，當晶圓處理（例如薄膜沈積、摻雜 等製程）的前段工程完成後，隨即必須對這些晶圓進行電 性檢查，檢查完畢合格之晶圓始再由後段的晶圓裝配工程 中加以切割、封裝。晶圓的電性檢查一方面係用來進行晶 片良品以及不良品之區隔挑選，以確保出廠晶圓上各個半 導體元件電性功能處於正常的狀態。另一方面，晶圓試驗 的測試結果回饋作為製程數據，將可促進有關製程或生產 線上之合格率或可靠度。 開關矩陣是一種半導體產業中常用來作晶圓測試工程 的機台。測試方法是將晶圓置放於機台的測試台的基座上 後，以探針（p r 〇 b e )觸碰進行晶片的電性測試。當探針觸 碰單一個晶片時，其預定的電性特值（例如電阻大小）必 須符合控制單元内預設程式之標準，否則該晶片即會被判 定為不合格（f a i 1 ure )的晶片而加以淘汰。透過開關矩陣 之運作，可以控制探針以類似矩陣排列的方式對一個個晶504580 V. Description of the invention (1) Field of the invention The present invention provides a device for detecting a switch matrix (switchmatri X) in a semiconductor device, particularly a device for detecting a ring adapter (ri ng connector) of the switch matrix and its detection. Method. Background: In the semiconductor manufacturing process, after the first stage of wafer processing (such as thin film deposition, doping and other processes) is completed, these wafers must be electrically inspected. After the inspection is completed, the wafers that pass the inspection are passed from the later stage crystals. Cut and encapsulate in the circle assembly process. On the one hand, the electrical inspection of the wafer is used to select the good and defective wafers to ensure that the electrical functions of each semiconductor element on the wafer are in a normal state. On the other hand, the feedback of the test results of the wafer test as process data will promote the pass rate or reliability of the relevant process or production line. The switch matrix is a machine commonly used in the semiconductor industry for wafer test engineering. The test method is to place the wafer on the base of the test stand of the machine, and then touch the probe (p) to perform electrical test of the wafer. When a probe touches a single chip, its predetermined electrical characteristics (such as the resistance) must meet the standard of the preset program in the control unit, otherwise the chip will be judged as a failed chip (fai 1 ure). And eliminated. Through the operation of the switch matrix, the probes can be controlled to

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具轉:般習知設有開關矩陣之測試機台内包含有一測試夾 〜測（test fixture adapter)，一環形連接器，以及 試央ί爽具（teSt fixtUre)尊之主要機構元件。其中該測 環形=上另包含有一個別基板（PerS〇nality b〇ard)，而 (· 接器的兩端則分別設有複數個第一組連接針腳 來連,及複數個第二組連接針腳，第一組連接針腳係用 板。試夾具轉接器，第二組連針腳則是連接於個 玫於匕戶”行之晶圓，式*先將以進行測試之晶圓置 器將演Ιϊί具轉接!ί之接ί襯塾上，接著再利用環形轉接 試爽罝夹具轉接益與測试爽具連接’也就是說，先使測 再ii料Ϊ形轉接器以及測試爽具轉接器相互密合之後， %針來對各晶片進行電性測試。 形轉接器 。而該環 連接針腳 的兩機構 為4 8針腳 導電性質 ’若環形 無法立即 試機台並 係用 形轉 個數 部份 (48 之多 轉接 得知 且以 來 在習知設有開關矩陣之測試機台中，環 接，連，測試夾具轉接器與測試夾具的部‘ 不=通常如前文所述設有兩端，而且兩端的 得^ ’環形轉接器的功用即在使不同針腳數 ’·以順利連接，例如以60針腳（60 Pin)欲轉 情形，所以環形轉接器兩端係使用具 器^ ¥線來連接。但是習知進行晶圓測試時 ^ θ某—針腳或某一連接導線發生故障，並 續發生處並加以排除，而必須停頓整個测Tool transfer: Generally, a test machine with a switch matrix includes a test fixture adapter, a ring connector, and the main mechanism components of the test center teSt fixtUre. Among them, the test ring = also includes an individual substrate (PerSonality b〇ard), and the two ends of the connector are provided with a plurality of first sets of connection pins to connect, and a plurality of second sets of connection pins The first group of connecting pins is a board. The test fixture adapter is used, and the second group of connecting pins is connected to a wafer that is connected to a rose. Ιϊί Adapter! Ί the connection to the lining, and then use the ring adapter to test the connection between the fixture and the test fixture. After the cooler adapters are tightly attached to each other, the% pin is used to conduct electrical tests on each chip. The adapter is shaped. The two mechanisms of the ring connecting pins are 48-pin conductive properties. The number of parts with shape rotation (48 as many as the transfer is known, and in the conventional test machine equipped with a switch matrix, the ring connection, connection, test fixture adapter and test fixture parts are not equal to the previous ones. The two ends are provided, and the function of the ring adapter at both ends is to make use of The same number of pins' · for a smooth connection, for example, with 60 pins (60 Pin) want to turn, so the two ends of the ring adapter are connected with a tool ^ ¥ wire. But when performing wafer testing ^ θ— Failure of a pin or a connecting wire, which continues to occur and is eliminated, and the entire test must be stopped

504580 五、發明說明（3) 該機台廠商所提供之程式重新執行一次，或以人工檢查方 式始能找出問題所在，這些方法不但執行不易，且相當耗 費時間成本，造成整個測試行程延宕。 發明概述 因此本發明之主要目的在提供一種檢測一半導體設備 中開關矩陣以及其環形轉接器的裝置及方法，以解決上述 習知技術之問題。 在本發明之最佳實施例中，該開關矩陣包含有一測試 夾具轉接器以及該環形連接器，該環形連接器之一端設有 複數個第一組連接針腳。該方法是先將一底座置於該測試 夾具轉接器之上，該底座上設有複數個測試針腳，分別相 對應於各該第一組連接針腳。接著於兩相鄰測試針腳之間 各連接一電阻，並將各該第一組連接針腳與各相對應之測 試針腳連接。最後利用一測試電路對各該電阻進行測試， 以判斷機台是否正常。 本發明提供之檢測裝置以及檢測方法，經由各測試針 腳間連接的電阻以及測試電路中之預設程式，可以迅速找 出環形轉接器的問題發生處並加以排除。 發明之詳細說明504580 V. Description of the invention (3) The program provided by the machine manufacturer is re-executed again, or the problem can be found out by manual inspection. These methods are not only difficult to implement, but also consume time and cost, causing the entire test journey to be delayed. SUMMARY OF THE INVENTION Therefore, the main object of the present invention is to provide a device and a method for detecting a switch matrix and a ring adapter thereof in a semiconductor device, so as to solve the problems of the conventional techniques described above. In a preferred embodiment of the present invention, the switch matrix includes a test fixture adapter and the circular connector. One end of the circular connector is provided with a plurality of first sets of connection pins. In this method, a base is first placed on the test fixture adapter, and the base is provided with a plurality of test pins, respectively corresponding to the first group of connection pins. Then, a resistor is connected between two adjacent test pins, and each of the first group of connection pins is connected to a corresponding test pin. Finally, a test circuit is used to test each of the resistors to determine whether the machine is normal. The detection device and the detection method provided by the present invention can quickly find out the problem of the ring adapter and eliminate it through the resistance connected between the test pins and the preset program in the test circuit. Detailed description of the invention

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請參考圖一及圖 圖 w -立向 ^ 、 為本發明開關矩陣測試機台 轉接ΐ :二ί為本發明開關矩陣測試機台10中之環形 如圖一所示，機台10内包含有-測試 i: ” if則試夾具“，以及一測試台16等之主要 機構几件。其中測試夾具14上另包含有一個 圖二所顯示之環形連接器 第一組連接針腳2 2以及複數個 連接針腳2 2用來連接測試夾具 連接於個別基板1 8。 2 0的兩端則分別設有複數個 弟—•組連接针腳2 4，第一組 轉接器12，第二組連針腳24 ♦測試機台1 〇的環形轉接 接器1 2與測試夾具1 4的部份 針腳個數不一，透過環形轉 部份得以順利連接，例如以 (48 pin)的情形，所以環形 導電性質之多數條導線2 6來 進行晶圓之測試時，首 於測試夾具轉接器1 2之接合 器2 0將測试夹具轉接器1 2與 试夾具1 4、環形轉接器2 0以 之後，再以探針對各晶片進 器2 0係用來電連接測試夾具轉 。而環形轉接器2 0的兩端連接 接器2 0使不同針腳數的兩機構 6 0針腳（6 0 p i η )欲轉為4 8針腳 轉接恭20兩端22、24係使用具 連接。 先將預定進行測試之晶圓置放 襯墊上，接著再利用環形轉接 測試夾具1 4連接，亦即先使測 及測試爽具轉接^§ 1 2相互密合 行電性測試。Please refer to FIG. 1 and FIG. W-vertical direction ^, which is the switch matrix test machine switch of the present invention: Second, the ring in the switch matrix test machine 10 of the present invention is shown in Fig. 1, and the machine 10 contains Yes-test i: "if then test fixture", and a few pieces of the main mechanism such as a test bench 16. The test fixture 14 further includes a circular connector shown in FIG. 2. The first group of connection pins 22 and a plurality of connection pins 22 are used to connect the test fixture to the individual substrates 18. Two ends of 2 0 are provided with a plurality of younger brothers— • group connection pin 24, the first group of adapters 12 and the second group of pins 24 ♦ Test the ring adapter 1 of the machine 1 〇 The number of pins of the test fixture 14 is different, and they can be connected smoothly through the ring-turning part. For example, in the case of (48 pin), so the majority of the wires with ring-like conductive properties 26 are used for wafer testing. After the test fixture adapter 12 of the adapter 2 0, the test fixture adapter 12 and the test fixture 1 4 and the ring adapter 2 0 and later, and then use the probe to each wafer feeder 2 0 for electrical Connect the test fixture turn. The two ends of the ring adapter 20 are connected to the connector 20, so that the two mechanisms with different pin numbers of 60 pins (60 0 pi η) are to be converted into 4 8-pin adapters. Both ends 22 and 24 of Gong 20 are connected with tools. . The wafer to be tested is placed on the pad first, and then connected with the ring transfer test fixture 14, that is, the test and test fixtures are first transferred ^ § 1 2 to perform electrical test in close contact with each other.

504580 五、發明說明（5) 檢测裝置3 0之示意圖。檢 個測試針腳3 4，以及複數 相對應於測試夾具轉接器 放於測試夾具轉接器1 2上 )。測試針腳3 4則設於底 環形連接器2 0第一組連接 鄰測試針腳之間係分別使 連接，當然亦可以其他不 選擇不同大小的電阻來相 _ 請參考圖二’圖三為本發明 測裝置3 0包含有一底座3 2，複數 個電阻3 6。底座3 2的形狀設計成 1 2的形狀，以利將檢測裝置3 〇置 (即原來測试晶圓所置放之位置 座3 2之上，其針腳數係相對應於 針腳22的數目。本發明之任^相 用一 1 00歐姆（ohm)之電阻36相互 同大小電阻代替，或是各針腳間 連接。504580 V. Description of the invention (5) Schematic diagram of the detection device 30. Check the number of test pins 3 4 and the number corresponding to the test fixture adapter and place it on the test fixture adapter 12). The test pins 3 and 4 are located at the bottom ring connector 20, and the first group of adjacent test pins are connected separately. Of course, other resistors of different sizes can also be used. _ Please refer to FIG. 2 ′ FIG. 3 is the present invention The test device 30 includes a base 32 and a plurality of resistors 36. The shape of the base 32 is designed to be 12 to facilitate the placement of the detection device 30 (that is, the position where the test wafer was originally placed on the base 32, and the number of pins corresponds to the number of pins 22. Any phase of the present invention is replaced by a 100 ohm resistor 36 of the same size as each other, or the pins are connected.

檢測裝置3 0另包含有一：目丨丨#兩 N 電路内設有-記憶體以及一控;路（未2: U 試 設程式，·制單元將利用該恃：：丄J 2 : 2 : 3 環形連接器20之檢測程序，並Ξ體内之預5又紅式以進仃該 或導線26。 序並错以判斷故障之針腳22、24 本發明進行測試的方法县 於測試夹具轉接器12之上。^ ^ ^檢測裝置30之底座32置 修 第一組連接針腳22與底座If Ϊ形轉接器20上的各個 接。然後利用該測試電路對ii:;應”試針腳34連 一電壓，並量測通過該電』2 =針腳34間的Ϊ阻36輸人 經歐姆定律計算之電阻值來判斷二流值，以计异是否符合 求W斷％形轉接器2 0的針腳2 2、The detection device 30 also includes one: 目 丨 丨 # The two N circuits are provided with a memory and a control circuit (not 2: U trial setting program, the control unit will use this 恃 :: 丄 J 2: 2: 3 The test procedure of the circular connector 20, and the pre-5 in the body and the red type to enter the or lead 26. The sequence is wrong to determine the faulty pins 22, 24 The method of testing according to the present invention is to transfer the test fixture Above the device 12. ^ ^ ^ The base 32 of the detection device 30 repairs the first set of connecting pins 22 to each of the If-shaped adapters 20 on the base. Then use this test circuit to ii :; Connect a voltage and measure the electric current through 2 = the resistance between pins 34 and 36. The resistance value calculated by Ohm's Law is used to determine the second-rate value to determine whether the difference meets the requirement of the W-shaped% adapter 2 0. Pin 2 2.

504580 五、發明說明（6) 2 4或導線2 6之電性功能是否正常。 利用本發明之檢測裝置3 0進行晶圓測試時，若環形轉 接器2 0中某一針腳或某一連接導線發生故障，可以立即得 知問題發生處並加以排除。本發明之檢測裝置3 0設計簡 單，經由測試電路中預設程式利用歐姆定律原理運算即可 迅速找出環形轉接器2 0的問題點，不但不需執行該機台廠 商所提供複雜且耗費時間的程式，而且亦不需以人工方式 對一個個針腳或一條條導線檢查，因此可以大幅降低時間 成本，進而使整個測試行程得以順利進行。 相較於習知方法僅能以人工方式檢查環形轉接器接線 的故障點，本發明提供之檢測裝置以及檢測方法，經由各 測試針腳間連接的電阻以及測試電路中之預設程式，可以 迅速找出環形轉接器的問題發生處並加以排除，增加產能 (throughout) 〇 以上所述僅本發明之較佳實施例，凡依本發明申請專 利範圍所做之均等變化與修飾，皆應屬本發明專利之涵蓋 範圍。 m504580 V. Description of the invention (6) Whether the electrical function of 24 or wire 2 6 is normal. When a wafer test is performed using the detection device 30 of the present invention, if a certain pin or a certain connecting wire of the ring adapter 20 fails, the problem can be immediately known and eliminated. The design of the detection device 30 of the present invention is simple, and the problem of the ring adapter 20 can be quickly found out by using a preset program in the test circuit to calculate using the principle of Ohm's law. It does not need to implement the complexity and cost provided by the machine manufacturer. The program of time does not need to manually check each pin or each wire, so it can greatly reduce the time cost, and then make the entire test journey smoothly. Compared to the conventional method, which can only manually check the fault points of the ring adapter wiring, the detection device and detection method provided by the present invention can quickly detect the resistance between the test pins and the preset program in the test circuit. Find out where the problem of the ring adapter occurs and eliminate it, and increase throughput. The above is only the preferred embodiment of the present invention. Any equal changes and modifications made in accordance with the scope of the patent application of the present invention should belong to The scope of the invention patent. m

第9頁 504580 圖式簡單說明 圖示之簡單說明 圖一為本發明開關矩陣測試機台之示意圖。 圖二為本發明開關矩陣測試機台中之環形轉接器之示 意圖。 圖三為本發明檢測裝置之示意圖。 圖示之符號說明 10 測 試 機 台 12 測 試 夾 具 轉 接 器 14 測 試 夾 具 16 測 試 台 18 個 別 基 板 20 環 形 轉 接 器 22 第 一 組 連接針腳 24 第 二 組 連 接 針 腳 26 導 線 30 檢 測 裝 置 32 底 座 34 測 言式 針 腳 36 電 阻Page 9 504580 Brief description of the diagrams Brief description of the diagrams Figure 1 is a schematic diagram of the switch matrix test machine of the present invention. Fig. 2 is a schematic view of a ring adapter in a switch matrix tester according to the present invention. FIG. 3 is a schematic diagram of a detection device of the present invention. Explanation of the symbols in the figure 10 Test machine 12 Test fixture adapter 14 Test fixture 16 Test stand 18 Individual substrate 20 Ring adapter 22 First group of connecting pins 24 Second group of connecting pins 26 Lead 30 Testing device 32 Base 34 Testing Speech Pin 36 Resistor

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Claims (1)

504580 六、申請專利範圍 1. 一種一半導體設備中開關矩陣（switch matrix)之環 形轉接器（r i ng connec·!^!·)的檢測裝置，該開關矩陣包含 有一測試夾具轉接器（test fixture adapter)，以及該環 开7連接器’且該環形連接器之一端設有複數個第一組連接 針腳（p i η)，該檢測裝置包含有： 一底座，相對應於該測試夾具轉接器之形狀； 複數個測試針腳’設於該底座之上並分別相對 該第一組連接針腳；以及 〜於各 複數個電阻，分別電連接兩相鄰測試針腳之間。 2. 如申請專利範圍第1項之檢測裝置，其中該 另包含有一測試夾具（test fixtuFf〇，u 1關矩陣 1 1入τ u r e) ’以及一個別真 (personality board)設於該測試夾呈之 a』丞板 測裝置進行該環形轉接器之檢測時/、該曰利用該檢 夹具轉接器分別連接於該環形韓技π Χ “ β Z /、與該測試 付钱器之兩端。 3.如申請專利範圍第2項之檢測裝 器之另一端設有複數個第二蚯违拉\罝’八中s亥環形連接 板。 、&針腳連接於該個別基 4·如申請專利範圍第1項之檢測裝 另包含有一測試電路，用來連接於x ’八中該檢測裝置 以利用各該電阻進行環形轉接哭」 該兩相鄰測試針腳， 1 文裔之檢測。504580 6. Application Patent Scope 1. A detection device for a ring adapter (ri ng connec ·! ^! ·) Of a switch matrix in a semiconductor device, the switch matrix includes a test fixture adapter (test fixture adapter), and the loop-open 7 connector ', and one end of the ring connector is provided with a plurality of first sets of connection pins (pi η), and the detection device includes: a base, corresponding to the test fixture transfer The shape of the device; a plurality of test pins are disposed on the base and are respectively opposite to the first group of connection pins; and each of the plurality of resistors is electrically connected between two adjacent test pins. 2. If the testing device of the scope of application for the first item of patent application, which further includes a test fixture (test fixtuFf0, u 1 off matrix 1 1 into τ ure) 'and a personality board set in the test clip A ”When the plate test device performs the test of the ring adapter /, the test fixture adapter is used to connect to the ring Hanji π χ“ β Z /, and both ends of the test payer 3. If the other end of the detection device in the scope of the application for a patent is provided with a plurality of second looped connection plates, the & pins are connected to the individual base 4. If applied The detection device of the first scope of the patent also includes a test circuit for connecting to the detection device of the X 'eight to use each of the resistors to perform a ring transfer cry. "The two adjacent test pins, a detection of the ethnic origin. 504580 六、申請專利範圍 Μ 有 2 u體以及一控制早元，該記憶體内設有一預 ;ΐ i薄ϊ=r元利用該記憶體内之預設程式進行該環 々連接器檢測並判斷故障之針腳。 包設備中開關矩陣的方法，該開關矩 ^ 3有一測试夾具轉接器，以及一環形連接器， ΐίί;了端設有複數個第-組連接針腳，該方法"包含有 滿叙:^底座置於該測試失具轉接器之上，該底座上冰有 複數式針腳，☆別相對應於各該第-组連接s ^兩相鄰測試針腳之間各連接-電阻；腳， 以及字各該第一組連接針腳與各相對應之測試針腳連接； 否正常。彳式電路對各該電阻進行測試，以判斷機台是 i·如申請專利範圍第6項之方 當利用該]ί ί!行二:^基板設於該测試關夾矩具陣之另上包 測試夹具轉接器分接時器= 另-端設有複數：項連之接方二，1中該環形連接器之 聊運接於該個別基板。 504580 六、申請專利範圍 9. 如申請專利範圍第6項之方法，其中該測試電路中包 含有一記憶體以及一控制單元，該記憶體内設有一預設程 式，該控制單元利用該記憶體内之預設程式進行該環形連 接器並判斷故障之針腳。 m504580 VI. The scope of the patent application M has 2 u body and a control early element, and a pre-set in the memory; ΐ iϊΐ = r element uses the preset program in the memory to detect and judge the ring connector. Faulty pins. A method of switching a matrix in a package device. The switching moment ^ 3 has a test fixture adapter and a ring connector. The terminal is provided with a plurality of first-group connection pins. The method includes: ^ The base is placed on the test adapter, and there are multiple pins on the base. ☆ Do not correspond to each of the -group connections. ^ Each connection-resistance between two adjacent test pins; And the first set of connection pins are connected to the corresponding test pins; otherwise, it is normal. The test circuit tests each of these resistors to determine whether the machine is i. If you apply for item 6 of the scope of the patent, you should use this] ί! Line two: ^ The base plate is set at the test gate clamp matrix. Tap-up test fixture adapter tapping timer = the other end is provided with a plurality of: the connection side of item two, the ring connector in 1 is connected to the individual substrate. 504580 VI. Application for patent scope 9. For the method of patent application scope item 6, the test circuit includes a memory and a control unit, a preset program is set in the memory, and the control unit uses the memory. The default program performs the circular connector and determines the faulty pin. m 第13頁Page 13