JP5314317B2 - 検査方法及び試液 - Google Patents
検査方法及び試液 Download PDFInfo
- Publication number
- JP5314317B2 JP5314317B2 JP2008099856A JP2008099856A JP5314317B2 JP 5314317 B2 JP5314317 B2 JP 5314317B2 JP 2008099856 A JP2008099856 A JP 2008099856A JP 2008099856 A JP2008099856 A JP 2008099856A JP 5314317 B2 JP5314317 B2 JP 5314317B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- film
- inspection method
- opening
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2202—Preparing specimens therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/22—Optical or photographic arrangements associated with the tube
- H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
- H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2002—Controlling environment of sample
- H01J2237/2003—Environmental cells
- H01J2237/2004—Biological samples
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
- H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
- H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2808—Cathodoluminescence
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Description
Claims (10)
- 枠状部材の開口を覆う膜の第一の面に、検査対象物と該検査対象物を包含する試液とを含む試料を保持し、該膜の第二の面から該膜を介して該試料に一次線を照射し、該一次線の照射により該試料から発生する二次的信号を検出する検査方法であって、該試液には、該開口の少なくとも一部を塞ぐことのできる大きさを備える閉塞物質が混入されていることを特徴とする検査方法。
- 枠状部材の開口を覆う膜の第一の面に、検査対象物と該検査対象物を包含する試液とを含む試料を保持する工程と、該開口の少なくとも一部を塞ぐことのできる大きさを備える閉塞物質を該試液に混入させる工程と、該膜の第二の面から該膜を介して該試料に一次線を照射する工程と、該一次線の照射により該試料から発生する二次的信号を検出する工程とを有する検査方法。
- 前記枠状部材は、その開口内部に格子構造を備えており、前記閉塞物質は、該格子構造の格子内部の少なくとも一部を塞ぐことを特徴とする請求項1又は2記載の検査方法。
- 前記閉塞物質は、前記格子構造の格子内部を通過しない大きさを備えることを特徴とする請求項3記載の検査方法。
- 前記一次線は、電子線又はイオン線であり、前記二次的信号は、反射電子、二次電子、X線、カソードルミネッセンス光、吸収電流のうちの何れかであることを特徴とする請求項1乃至4何れか記載の検査方法。
- 前記膜の第一の面が上面となっており、前記膜の第二の面が下面となっていることを特徴とする請求項1乃至5何れか記載の検査方法。
- 前記閉塞物質は、ポリテトラフルオルエチレン、ラテックス、アルミナ、ポリスチレン、ポリメチルメタルクリレート、シリカ、ガラスのうちの何れかから成ることを特徴とする請求項1乃至6何れか記載の検査方法。
- 前記閉塞物質の密度が、前記試液の液体成分密度の0.9倍〜1.1倍の間にあることを特徴とする請求項1乃至7何れか記載の検査方法。
- 前記閉塞物質の前記試液中における濃度が、0.001個/μl〜1個/μlであることを特徴とする請求項1乃至8何れか記載の検査方法。
- 前記試液は、水、リン酸緩衝液、液体培地のうちの少なくとも何れか一つを含むことを特徴とする請求項1乃至9何れか記載の検査方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008099856A JP5314317B2 (ja) | 2008-04-08 | 2008-04-08 | 検査方法及び試液 |
US12/335,143 US7906760B2 (en) | 2008-04-08 | 2008-12-15 | Inspection method and reagent solution |
EP20080254161 EP2108946B1 (en) | 2008-04-08 | 2008-12-24 | Inspection method and reagent solution |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008099856A JP5314317B2 (ja) | 2008-04-08 | 2008-04-08 | 検査方法及び試液 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009250813A JP2009250813A (ja) | 2009-10-29 |
JP5314317B2 true JP5314317B2 (ja) | 2013-10-16 |
Family
ID=40934940
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008099856A Expired - Fee Related JP5314317B2 (ja) | 2008-04-08 | 2008-04-08 | 検査方法及び試液 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7906760B2 (ja) |
EP (1) | EP2108946B1 (ja) |
JP (1) | JP5314317B2 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1936363A3 (en) * | 2006-12-19 | 2010-12-08 | JEOL Ltd. | Sample inspection apparatus, sample inspection method, and sample inspection system |
JP5318364B2 (ja) * | 2007-01-31 | 2013-10-16 | 日本電子株式会社 | 試料保持体、試料検査装置及び試料検査方法、並びに試料保持体の製造方法 |
JP2010002300A (ja) * | 2008-06-20 | 2010-01-07 | Jeol Ltd | 試料保持体、試料検査装置及び試料検査方法 |
US10505234B2 (en) | 2011-03-14 | 2019-12-10 | Battelle Memorial Institute | Battery cell and n situ battery electrode analysis method |
US9274059B2 (en) | 2011-03-14 | 2016-03-01 | Battelle Memorial Institute | Microfluidic electrochemical device and process for chemical imaging and electrochemical analysis at the electrode-liquid interface in-situ |
US10598609B2 (en) | 2011-03-14 | 2020-03-24 | Battelle Memorial Institute | Universal liquid sample device and process for high resolution transmission electron microscope imaging and multimodal analyses of liquid sample materials |
US8519333B2 (en) * | 2011-05-03 | 2013-08-27 | Hermes Microvision Inc. | Charged particle system for reticle/wafer defects inspection and review |
CN106770405A (zh) * | 2016-12-09 | 2017-05-31 | 清华大学 | 一种完全大气压下超光学衍射成像装置 |
JP6796611B2 (ja) * | 2018-03-26 | 2020-12-09 | 日本電子株式会社 | 液体試料を観察または分析する方法および電子顕微鏡 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4724961U (ja) | 1971-04-14 | 1972-11-20 | ||
EP0339980B1 (en) * | 1988-04-26 | 1994-07-20 | Nippon Telegraph And Telephone Corporation | Magnetic micro-particles, method and apparatus for collecting specimens for use in labelling immune reactions, and method and device for preparing specimens |
JP3359703B2 (ja) * | 1992-08-27 | 2002-12-24 | オリンパス光学工業株式会社 | X線顕微鏡用試料容器及び試料保持方法 |
JP2781320B2 (ja) | 1993-01-18 | 1998-07-30 | 株式会社蛋白工学研究所 | 電子顕微鏡等の試料ホルダ |
CA2436237A1 (en) * | 2000-12-01 | 2002-06-06 | Yeda Research And Development Co. Ltd. | Device and method for the examination of samples in a non-vacuum environment using a scanning electron microscope |
DE10064827A1 (de) * | 2000-12-22 | 2002-06-27 | Dade Behring Marburg Gmbh | Nachweisverfahren |
US6777674B2 (en) * | 2002-09-23 | 2004-08-17 | Omniprobe, Inc. | Method for manipulating microscopic particles and analyzing |
JP2007292702A (ja) * | 2006-04-27 | 2007-11-08 | Jeol Ltd | 試料検査装置及び試料検査方法並びに試料検査システム |
JP2007294365A (ja) * | 2006-04-27 | 2007-11-08 | Jeol Ltd | 試料検査方法、試料保持体、及び試料検査装置並びに試料検査システム |
-
2008
- 2008-04-08 JP JP2008099856A patent/JP5314317B2/ja not_active Expired - Fee Related
- 2008-12-15 US US12/335,143 patent/US7906760B2/en not_active Expired - Fee Related
- 2008-12-24 EP EP20080254161 patent/EP2108946B1/en not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
US7906760B2 (en) | 2011-03-15 |
EP2108946B1 (en) | 2013-02-20 |
JP2009250813A (ja) | 2009-10-29 |
US20090250609A1 (en) | 2009-10-08 |
EP2108946A2 (en) | 2009-10-14 |
EP2108946A3 (en) | 2011-03-16 |
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