JP5307139B2 - 炭化ケイ素のミラーの製造方法 - Google Patents
炭化ケイ素のミラーの製造方法 Download PDFInfo
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- JP5307139B2 JP5307139B2 JP2010521316A JP2010521316A JP5307139B2 JP 5307139 B2 JP5307139 B2 JP 5307139B2 JP 2010521316 A JP2010521316 A JP 2010521316A JP 2010521316 A JP2010521316 A JP 2010521316A JP 5307139 B2 JP5307139 B2 JP 5307139B2
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- Prior art keywords
- silicon carbide
- scanning
- mirror
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- optical mirror
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 73
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 64
- 238000000034 method Methods 0.000 title claims description 40
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 230000003287 optical effect Effects 0.000 claims description 61
- 239000000463 material Substances 0.000 claims description 53
- 238000005498 polishing Methods 0.000 claims description 32
- 238000000576 coating method Methods 0.000 claims description 22
- 239000011248 coating agent Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 235000012239 silicon dioxide Nutrition 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 9
- 238000002310 reflectometry Methods 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 5
- 238000007749 high velocity oxygen fuel spraying Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010286 high velocity air fuel Methods 0.000 claims 2
- 238000007750 plasma spraying Methods 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 20
- 239000010703 silicon Substances 0.000 description 20
- 238000000227 grinding Methods 0.000 description 12
- 238000012545 processing Methods 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 229910003460 diamond Inorganic materials 0.000 description 5
- 239000010432 diamond Substances 0.000 description 5
- 230000008021 deposition Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000462 isostatic pressing Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000009718 spray deposition Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
- C04B41/5096—Silicon
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5035—Silica
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/5127—Cu, e.g. Cu-CuO eutectic
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/515—Other specific metals
- C04B41/5155—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/80—Optical properties, e.g. transparency or reflexibility
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Optical Elements Other Than Lenses (AREA)
Description
Claims (10)
- 炭化ケイ素のミラーの製造方法であって、
加工された型または工具を使用して炭化ケイ素の粉末をプレスまたは型押しあるいは静水圧プレスして、走査または光学ミラーの形状および構造を形成する工程と、
次いで、焼結を行って、前記走査または光学ミラーのフェース面となる表面を形成する工程と、
次いで、前記走査または光学ミラーのフェース面に対する熱溶射プロセスによって、前記表面に対して適切な厚さのケイ素材料、銅材料、またはアルミニウム材料の層をコートまたは結合する工程と、
次いで、所望の表面品質および/または粗さおよび/または平坦度を達成するためにラッピングおよび/または研磨する工程と、
次いで、完成後の炭化ケイ素の走査または光学ミラーの最終的な用途において反射するものとして使用される1つ以上の波長に対し特有の適切な高反射率を有する光学コーティングによって反射面となる前記フェース面をコートするために、コーティング技術および材料を使用して光学的なコートを施す工程とを含む製造方法。 - 炭化ケイ素の走査または光学ミラーに付着または結合する適切な厚さの材料の層は、二酸化ケイ素である請求項1に記載の製造方法。
- 炭化ケイ素の走査または光学ミラーに付着または結合する適切な厚さの材料の層は、銅である請求項1に記載の製造方法。
- 炭化ケイ素の走査または光学ミラーに付着または結合する適切な厚さの材料の層は、アルミニウムである請求項1に記載の製造方法。
- 炭化ケイ素の走査または光学ミラーに付着する適切な厚さの材料の層は、高速の酸素燃料熱溶射プロセスまたはHVOFを使用して実現される請求項1〜4の何れか1項に記載の製造方法。
- 炭化ケイ素の走査または光学ミラーに付着する適切な厚さの材料の層は、コールドスプレー法(Cold(Gas)Spray) を使用して実現される請求項1〜4の何れか1項に記載の製造方法。
- 炭化ケイ素の走査ミラーに付着する適切な厚さの材料の層は、減圧プラズマ溶射熱溶射プロセス(a low pressure plasma spraying thermal spray process)またはLPPSを使用して実現される請求項1〜4の何れか1項に記載の製造方法。
- 炭化ケイ素の走査または光学ミラーに付着する適切な厚さの材料の層は、高速空気−燃料溶射熱溶射プロセス(high velocity air-fuel spray thermal process)またはHVAFを使用して実現される請求項1〜4の何れか1項に記載の製造方法。
- 適切な厚さの材料の層は、炭化ケイ素の走査または光学ミラーに結合された適切な基材のウエハである請求項1〜4の何れか1項に記載の製造方法。
- 炭化ケイ素のミラーは、非走査または静止ミラーである請求項1〜9の何れか1項に記載の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EPPCT/EP2007/058615 | 2007-08-20 | ||
PCT/EP2007/058615 WO2009024181A1 (en) | 2007-08-20 | 2007-08-20 | Method of manufacturing and processing silicon carbide scanning mirrors |
PCT/EP2007/061693 WO2009024193A1 (en) | 2007-08-20 | 2007-10-30 | Method of manufacturing and processing silicon carbide scanning and optical mirrors |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010537235A JP2010537235A (ja) | 2010-12-02 |
JP5307139B2 true JP5307139B2 (ja) | 2013-10-02 |
Family
ID=39226932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010521316A Active JP5307139B2 (ja) | 2007-08-20 | 2007-10-30 | 炭化ケイ素のミラーの製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20100136248A1 (ja) |
JP (1) | JP5307139B2 (ja) |
ES (1) | ES2400925T3 (ja) |
WO (2) | WO2009024181A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102012223904A1 (de) * | 2012-10-05 | 2014-04-10 | Continental Automotive Gmbh | Verfahren zum Herstellen eines elektronischen Hochstrom-Schaltkreises mittels Gasspritz-Technologie und Abdichten mit isolierendem Polymer |
SG11201508041RA (en) * | 2013-03-28 | 2015-10-29 | Ceramtec Etec Gmbh | Ceramic having a functional coating |
PL420430A1 (pl) | 2017-02-09 | 2018-08-13 | General Electric Company | Kwalifikacja procesów obróbki plastycznej na zimno i polerowania |
JP6272587B1 (ja) * | 2017-04-12 | 2018-01-31 | 三菱電機株式会社 | ガルバノミラー、ガルバノミラーを用いたガルバノスキャナ、ガルバノミラーを用いたレーザ加工機及びガルバノミラーの製造方法 |
CN112776384A (zh) * | 2020-11-30 | 2021-05-11 | 中国科学院上海高等研究院 | 一种内部冷却光学反射镜及其制备方法 |
Family Cites Families (18)
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DE3049326A1 (de) * | 1980-12-29 | 1982-07-08 | Alkem Gmbh, 6450 Hanau | "verfahren zum herstellen von presslingen aus keramischem pulver, z.b. pulverfoermigen kernreaktorbrennstoffen und presseinrichtung, insbesondere fuer dieses verfahren" |
US4814232A (en) * | 1987-03-25 | 1989-03-21 | United Technologies Corporation | Method for depositing laser mirror coatings |
US4962069A (en) * | 1988-11-07 | 1990-10-09 | Dow Corning Corporation | Highly densified bodies from preceramic polysilazanes filled with silicon carbide powders |
US5257003A (en) * | 1992-01-14 | 1993-10-26 | Mahoney John J | Thermistor and its method of manufacture |
JP2829192B2 (ja) * | 1992-05-15 | 1998-11-25 | 住友電気工業株式会社 | レ−ザビ−ムスキャナ |
JPH06281795A (ja) * | 1993-03-30 | 1994-10-07 | Toshiba Ceramics Co Ltd | 放射光・X線反射用SiCミラーの製造方法 |
JPH06300907A (ja) * | 1993-04-16 | 1994-10-28 | Nippon Steel Corp | 炭化珪素焼結体を用いた光学用及びx線用部品及びその製造方法 |
US5417803A (en) * | 1993-09-29 | 1995-05-23 | Intel Corporation | Method for making Si/SiC composite material |
JP3301249B2 (ja) * | 1995-01-26 | 2002-07-15 | 株式会社ニコン | 反射用光学素子及びその製造方法 |
GB9807992D0 (en) * | 1998-04-15 | 1998-06-17 | Unilever Plc | Water softening and detergent compositions |
DE19830449A1 (de) * | 1998-07-08 | 2000-01-27 | Zeiss Carl Fa | SiO¶2¶-beschichtetes Spiegelsubstrat für EUV |
JP2003270432A (ja) * | 2002-03-13 | 2003-09-25 | Shin Etsu Handotai Co Ltd | 可視光反射部材 |
US7129010B2 (en) * | 2002-08-02 | 2006-10-31 | Schott Ag | Substrates for in particular microlithography |
US6921177B2 (en) * | 2003-02-24 | 2005-07-26 | Raytheon Company | High precision mirror, and a method of making it |
JP4099135B2 (ja) * | 2003-10-31 | 2008-06-11 | 三菱電機株式会社 | 反射ミラーの製造方法 |
US7553385B2 (en) * | 2004-11-23 | 2009-06-30 | United Technologies Corporation | Cold gas dynamic spraying of high strength copper |
US7799111B2 (en) * | 2005-03-28 | 2010-09-21 | Sulzer Metco Venture Llc | Thermal spray feedstock composition |
JP4522315B2 (ja) * | 2005-04-28 | 2010-08-11 | 三菱電機株式会社 | スキャンミラー、その製造方法およびレーザ加工機 |
-
2007
- 2007-08-20 WO PCT/EP2007/058615 patent/WO2009024181A1/en active Application Filing
- 2007-10-30 ES ES07822047T patent/ES2400925T3/es active Active
- 2007-10-30 WO PCT/EP2007/061693 patent/WO2009024193A1/en active Application Filing
- 2007-10-30 JP JP2010521316A patent/JP5307139B2/ja active Active
- 2007-10-30 US US11/993,702 patent/US20100136248A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
ES2400925T3 (es) | 2013-04-15 |
US20100136248A1 (en) | 2010-06-03 |
WO2009024181A1 (en) | 2009-02-26 |
WO2009024193A1 (en) | 2009-02-26 |
JP2010537235A (ja) | 2010-12-02 |
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