JP5289898B2 - ステージ装置及びプローバ装置 - Google Patents
ステージ装置及びプローバ装置 Download PDFInfo
- Publication number
- JP5289898B2 JP5289898B2 JP2008286612A JP2008286612A JP5289898B2 JP 5289898 B2 JP5289898 B2 JP 5289898B2 JP 2008286612 A JP2008286612 A JP 2008286612A JP 2008286612 A JP2008286612 A JP 2008286612A JP 5289898 B2 JP5289898 B2 JP 5289898B2
- Authority
- JP
- Japan
- Prior art keywords
- axis
- support
- inclined portion
- guide rail
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/06—Work-clamping means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/262—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members with means to adjust the distance between the relatively slidable members
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
- B23Q1/66—Worktables interchangeably movable into operating positions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
- B23Q16/001—Stops, cams, or holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Description
θ1=−θ2 …(1)
Claims (6)
- ベースに対し鉛直方向に移動可能なテーブル部と、
前記ベースに設けられ、水平面に対して傾斜して延在する第1傾斜部と、
前記テーブル部に設けられ、水平面に対して前記第1傾斜部と反対側に傾斜して延在する第2傾斜部と、
前記第2傾斜部を介して前記テーブル部を支持すると共に、前記第1及び第2傾斜部に沿って移動可能な支持部と、
前記第1傾斜部に沿って前記支持部が移動するように当該支持部を駆動する駆動部と、
を備え、
前記第1傾斜部の上端の高さ位置は、少なくとも前記テーブル部が下死点に位置するとき、前記第2傾斜部の下端の高さ位置よりも高いことを特徴とするステージ装置。 - 前記駆動部は、前記支持部に第1傾斜部に沿う方向の推力を与えることを特徴とする請求項1記載のステージ装置。
- 前記駆動部は、前記支持部の鉛直方向の移動を許容するガイドを介して、前記支持部に第1傾斜部に沿う方向以外の方向の推力を与えることを特徴とする請求項1記載のステージ装置。
- 前記第1傾斜部の傾斜角度と前記第2傾斜部の傾斜角度とは、その絶対値が互いに等しいことを特徴とする請求項1〜3の何れか一項記載のステージ装置。
- 前記テーブル部は、水平方向に移動する水平テーブル部上に配設されていることを特徴とする請求項1〜4の何れか一項記載のステージ装置。
- 請求項1〜5の何れか一項記載のステージ装置を備えたことを特徴とするプローバ装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008286612A JP5289898B2 (ja) | 2008-11-07 | 2008-11-07 | ステージ装置及びプローバ装置 |
KR1020090097499A KR101133929B1 (ko) | 2008-11-07 | 2009-10-14 | 스테이지장치 및 프로버장치 |
TW098137604A TWI406733B (zh) | 2008-11-07 | 2009-11-05 | Stage device and probe device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008286612A JP5289898B2 (ja) | 2008-11-07 | 2008-11-07 | ステージ装置及びプローバ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010110870A JP2010110870A (ja) | 2010-05-20 |
JP5289898B2 true JP5289898B2 (ja) | 2013-09-11 |
Family
ID=42277288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008286612A Expired - Fee Related JP5289898B2 (ja) | 2008-11-07 | 2008-11-07 | ステージ装置及びプローバ装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5289898B2 (ja) |
KR (1) | KR101133929B1 (ja) |
TW (1) | TWI406733B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI458585B (zh) * | 2012-04-25 | 2014-11-01 | 中原大學 | 斜向驅動式平台結構 |
JP2016008404A (ja) * | 2014-06-23 | 2016-01-18 | パナソニックIpマネジメント株式会社 | スペーサー |
KR101647500B1 (ko) * | 2015-04-14 | 2016-08-10 | (주)파워텍 | 칩 컨베이어 |
JP6960352B2 (ja) | 2018-02-20 | 2021-11-05 | 株式会社日立ハイテク | ステージ装置、及び荷電粒子線装置 |
CN108296800A (zh) * | 2018-03-22 | 2018-07-20 | 广东工业大学 | 一种垂直解耦的xz高精运动平台 |
JP7180895B2 (ja) * | 2020-07-22 | 2022-11-30 | ヒーハイスト株式会社 | 位置決めテーブル |
CN112792794B (zh) * | 2021-02-04 | 2022-06-24 | 广东乐创智能科技有限公司 | 一种工业机器人安装用水平调节工装 |
CN117564973B (zh) * | 2024-01-16 | 2024-03-12 | 常州建富光电仪器有限公司 | 一种激光测距仪批量检测用智能夹持工装及方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2758340A1 (de) * | 1977-12-27 | 1979-07-05 | Pfister Waagen Gmbh | Hydrostatische stellvorrichtung |
JPS62224543A (ja) * | 1986-03-25 | 1987-10-02 | Nagase Iron Works Co Ltd | 微細送り装置 |
US4838515A (en) * | 1987-05-18 | 1989-06-13 | Teledyne, Inc. | Article positioner and method |
JPH0543469Y2 (ja) * | 1987-09-30 | 1993-11-02 | ||
JPH02225857A (ja) * | 1990-01-06 | 1990-09-07 | Canon Inc | ボールネジ装置 |
JP3216166B2 (ja) * | 1991-10-18 | 2001-10-09 | 日本精工株式会社 | Xy位置決めテーブル |
JPH07122476A (ja) * | 1993-10-22 | 1995-05-12 | Hitachi Ltd | 移動ステージの位置測定方法と位置決め方法及び装置 |
EP0972608B1 (fr) * | 1998-07-14 | 2003-12-10 | Kummer Frères SA, Fabrique de machines | Dispositif d'entraínement d'une plateforme en déplacement dans un plan |
JP3732763B2 (ja) * | 2001-07-13 | 2006-01-11 | 住友重機械工業株式会社 | ステージ装置 |
JP4300003B2 (ja) * | 2002-08-07 | 2009-07-22 | 東京エレクトロン株式会社 | 載置台の駆動装置及びプローブ方法 |
JP2005052822A (ja) * | 2003-07-18 | 2005-03-03 | Sumitomo Heavy Ind Ltd | テーブルコータ機用ステージ装置 |
TWM262638U (en) * | 2004-07-15 | 2005-04-21 | Genten Technology Co Ltd | Carrying platform structure of image inspecting and measuring system |
JP4583960B2 (ja) * | 2005-02-16 | 2010-11-17 | 倉敷化工株式会社 | 高さ調整装置及びレべリング装置 |
TWM298745U (en) * | 2006-02-08 | 2006-10-01 | Chi Lin Technology Co Ltd | Touch panel tester |
JP4836640B2 (ja) * | 2006-04-14 | 2011-12-14 | 株式会社日本マイクロニクス | プローバ |
-
2008
- 2008-11-07 JP JP2008286612A patent/JP5289898B2/ja not_active Expired - Fee Related
-
2009
- 2009-10-14 KR KR1020090097499A patent/KR101133929B1/ko not_active IP Right Cessation
- 2009-11-05 TW TW098137604A patent/TWI406733B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201036752A (en) | 2010-10-16 |
TWI406733B (zh) | 2013-09-01 |
KR20100051540A (ko) | 2010-05-17 |
KR101133929B1 (ko) | 2012-04-24 |
JP2010110870A (ja) | 2010-05-20 |
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