JP5282005B2 - マルチチップモジュール - Google Patents
マルチチップモジュール Download PDFInfo
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- JP5282005B2 JP5282005B2 JP2009239489A JP2009239489A JP5282005B2 JP 5282005 B2 JP5282005 B2 JP 5282005B2 JP 2009239489 A JP2009239489 A JP 2009239489A JP 2009239489 A JP2009239489 A JP 2009239489A JP 5282005 B2 JP5282005 B2 JP 5282005B2
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- 239000000758 substrate Substances 0.000 claims description 40
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 22
- 229910052710 silicon Inorganic materials 0.000 description 19
- 239000010703 silicon Substances 0.000 description 19
- 230000008054 signal transmission Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- IRYJRGCIQBGHIV-UHFFFAOYSA-N trimethadione Chemical compound CN1C(=O)OC(C)(C)C1=O IRYJRGCIQBGHIV-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/66—High-frequency adaptations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0655—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Structure Of Printed Boards (AREA)
Description
20 シリコンインタポーザ(配線基板)
30A〜30D チップ(LSIチップ)
100 マルチチップモジュール
Claims (3)
- 基板と、
前記基板上に配置され、配線パターンを有する配線基板と、
前記配線基板上に配置された複数のチップと、を備え、
前記複数のチップは、マトリクス状に配列された4つのチップを含み、
前記4つのチップは、該4つのチップのうち、他の全てのチップと近接している部分において、前記配線パターンを介して他のチップの少なくとも一つと接続され、
前記複数のチップと前記基板とは、前記配線基板の前記配線パターン以外の部分を介して電気的に接続されていることを特徴とするマルチチップモジュール。 - 前記配線パターンは、半導体製造装置により製造されたパターンであることを特徴とする請求項1に記載のマルチチップモジュール。
- 前記複数のチップ間の配線長は、1.5mm以下であることを特徴とする請求項1又は2に記載のマルチチップモジュール。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009239489A JP5282005B2 (ja) | 2009-10-16 | 2009-10-16 | マルチチップモジュール |
DE102010047609.9A DE102010047609B4 (de) | 2009-10-16 | 2010-10-07 | Multichipmodul |
US12/902,527 US8446020B2 (en) | 2009-10-16 | 2010-10-12 | Multi-chip module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009239489A JP5282005B2 (ja) | 2009-10-16 | 2009-10-16 | マルチチップモジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011086820A JP2011086820A (ja) | 2011-04-28 |
JP5282005B2 true JP5282005B2 (ja) | 2013-09-04 |
Family
ID=43796995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009239489A Active JP5282005B2 (ja) | 2009-10-16 | 2009-10-16 | マルチチップモジュール |
Country Status (3)
Country | Link |
---|---|
US (1) | US8446020B2 (ja) |
JP (1) | JP5282005B2 (ja) |
DE (1) | DE102010047609B4 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8803269B2 (en) * | 2011-05-05 | 2014-08-12 | Cisco Technology, Inc. | Wafer scale packaging platform for transceivers |
KR101966328B1 (ko) * | 2016-03-29 | 2019-04-05 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
US11824009B2 (en) | 2018-12-10 | 2023-11-21 | Preferred Networks, Inc. | Semiconductor device and data transferring method for semiconductor device |
US11094654B2 (en) * | 2019-08-02 | 2021-08-17 | Powertech Technology Inc. | Package structure and method of manufacturing the same |
DE102020105005A1 (de) | 2020-02-26 | 2021-08-26 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Substrat und halbleiterlaser |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4222402A1 (de) * | 1992-07-08 | 1994-01-13 | Daimler Benz Ag | Anordnung für die Mehrfachverdrahtung von Mulichipmodulen |
JP3318786B2 (ja) | 1993-03-29 | 2002-08-26 | ソニー株式会社 | マルチチップモジュールの構造 |
JP2907127B2 (ja) * | 1996-06-25 | 1999-06-21 | 日本電気株式会社 | マルチチップモジュール |
JPH1117052A (ja) * | 1997-06-23 | 1999-01-22 | Seiko Epson Corp | 半導体集積回路の実装方法 |
JP3823636B2 (ja) | 1999-09-22 | 2006-09-20 | カシオ計算機株式会社 | 半導体チップモジュール及びその製造方法 |
JP2001284520A (ja) * | 2000-04-04 | 2001-10-12 | Matsushita Electric Ind Co Ltd | 半導体チップ搭載用の配線基板、配線基板の製造方法、中継接続用の配線基板、半導体装置および半導体装置間接続構造 |
JP3788268B2 (ja) * | 2001-05-14 | 2006-06-21 | ソニー株式会社 | 半導体装置の製造方法 |
JP3892774B2 (ja) * | 2002-08-13 | 2007-03-14 | 富士通株式会社 | 半導体装置の製造方法 |
JP2004039689A (ja) * | 2002-06-28 | 2004-02-05 | Sony Corp | 電子回路装置 |
JP4380130B2 (ja) * | 2002-09-13 | 2009-12-09 | ソニー株式会社 | 半導体装置 |
JP4581768B2 (ja) * | 2005-03-16 | 2010-11-17 | ソニー株式会社 | 半導体装置の製造方法 |
KR20070039398A (ko) * | 2005-10-07 | 2007-04-11 | 히다치 막셀 가부시키가이샤 | 반도체장치, 반도체 모듈 및 반도체 모듈의 제조방법 |
JP4963969B2 (ja) * | 2007-01-10 | 2012-06-27 | ルネサスエレクトロニクス株式会社 | 配線基板 |
US7474540B1 (en) * | 2008-01-10 | 2009-01-06 | International Business Machines Corporation | Silicon carrier including an integrated heater for die rework and wafer probe |
-
2009
- 2009-10-16 JP JP2009239489A patent/JP5282005B2/ja active Active
-
2010
- 2010-10-07 DE DE102010047609.9A patent/DE102010047609B4/de active Active
- 2010-10-12 US US12/902,527 patent/US8446020B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US8446020B2 (en) | 2013-05-21 |
US20110089579A1 (en) | 2011-04-21 |
DE102010047609A1 (de) | 2011-04-28 |
DE102010047609B4 (de) | 2017-03-16 |
JP2011086820A (ja) | 2011-04-28 |
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