JP5239026B2 - 粒子を電界放出する装置および製作方法 - Google Patents
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- H01J37/02—Details
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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Description
Claims (10)
- 粒子を放出するための少なくとも1個の電界放出尖端部(4)を有する、真空室(2)内に配置されているかまたは真空室(2)内に向いている少なくとも1個の粒子エミッタ(3)と、少なくとも1個の粒子エミッタ(3)に付設された、放出された粒子流(5)を集束するための磁界発生器(6)とを備えている、特に電子顕微鏡またはイオン顕微鏡のようなための装置において、
粒子エミッタ(3)の電界放出尖端部(4)が、磁界発生器(6)とは反対の基板(8)の側の表面(7)上に製作された導電性層(9)上に、粒子ビーム蒸着によって形成され、
基板(8)が真空室(2)と真空室(2)の外側にある大気室(10)との間の隔壁として形成され、
磁界発生器(6)が、真空室(2)の外側で、導電性層(9)とは反対の基板(8)の側(14)に配置され、
磁界発生器(6)が発生する磁界が、粒子流(5)をスクリーン開口に向けて集束し、
基板(8)の表面(7)上または表面内に製作された導電性層(9)がマイクロ電気機械システム技術によって製作され、電界放出端部(4)が50nmよりも小さな曲率半径(r)を有することを特徴とすることを特徴とする装置。 - 放出された粒子流(5)を集束するための磁界発生器(6)によって発生した磁界の作用範囲が、導電性層(9)の表面から約10mmよりも小さく、磁界発生器(6)が、少なくとも大部分が電界尖端部(4)の場所で導電性層(9)の表面に対してほぼ垂直である磁界を発生することを特徴とする請求項1に記載の装置。
- 磁界発生器(6)とは反対の基板(8)の側の表面(7)上または表面内に形成された微小構造体(11)の導電性層(9)の少なくとも一部が、真空室(2)と絶縁体(12)が占める領域を越えて、周囲大気寄りの領域まで延在し、微小構造体(11)のこの導電性層(9)が電気的な接触のための導電性面(21)を形成していることを特徴とする請求項1または2に記載の装置。
- 磁界発生器(6)の磁界を発生する面の幅が10mmよりも小さい寸法を有する永久磁石からなり、磁界発生器(6)によって発生した磁界の作用範囲は、10mmよりも小さいことを特徴とする請求項1乃至3のいずれか一項に記載の装置。
- 磁界発生器(6)が永久磁石および1個または複数個のコイルからなり、コイルが永久磁石によって発生した磁界を微調節および空間的に調整する働きをすることを特徴とする請求項1乃至3のいずれか一項に記載の装置。
- 粒子を放出するための少なくとも1個の電界放出尖端部を有する、真空室内に配置されているかまたは真空室内に向いている少なくとも1個の粒子エミッタと、少なくとも1個の粒子エミッタに付設された、放出された粒子流を集束するための磁界発生器とを備えている、特に電子顕微鏡またはイオン顕微鏡のような粒子光学的機器用の、粒子をスクリーン開口を介して電界放出するための粒子エミッタを製作する方法において、
粒子エミッタ(3)の電界放出尖端部(4)が、磁界発生器(6)とは反対の基板(8)の側の表面(7)上に製作された導電性層(9)上に、粒子ビーム蒸着によって形成され、
基板(8)が真空室(2)と真空室(2)の外側にある大気室(10)との間の隔壁としての働きをし、
磁界発生器(6)が真空室(2)の外側で、導電性層(9)とは反対の基板(8)の側(14)に配置され、
磁界発生器(6)が発生する磁界が、粒子流(5)をスクリーン開口に向けて集束し、
磁界発生器(6)とは反対の基板(8)の側の表面(7)上または表面内に形成された微小構造体(11)の導電性層(9)の少なくとも一部が、真空室(2)と絶縁体(12)が占める領域を越えて、周囲大気寄りの領域まで形成され、微小構造体(11)のこの導電性層(9)が電気的な接触のための導電性面(17)を形成している
ことを特徴とする方法。 - 基板(8)の表面(7)上または表面内に製作された導電性層(9)がマイクロ電気機械システム技術によって製作され、電界放出端部(4)の曲率半径(r)が50nmよりも小さいことを特徴とする請求項6に記載の方法。
- 放出された粒子流(5)を集束するために磁界発生器(6)によって発生した磁界の平均飛程が、導電性層(9)の表面から約10mmよりも小さく、磁界発生器(6)が、少なくとも大部分が電界放出尖端部(4)の場所で導電性層(9)の表面に対してほぼ垂直である磁界を発生することを特徴とする請求項6または7に記載の方法。
- 磁界発生器が永久磁石および1個または複数個のコイルからなり、コイルが永久磁石によって発生した磁界を微調節および/または空間的に調整する働きをすることを特徴とする請求項6乃至8のいずれか一項に記載の方法。
- 少なくとも一部の導電性層(18)が、基板(8)上に帯状に形成され、
粒子エミッタ(3)の電界放出尖端部(4)が、帯状の導電性層(18)上に形成される請求項1に記載の装置。
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DE102007010463.6 | 2007-03-01 | ||
DE102007010463A DE102007010463B4 (de) | 2007-03-01 | 2007-03-01 | Vorrichtung zur Feldemission von Teilchen |
PCT/EP2008/001583 WO2008104393A2 (de) | 2007-03-01 | 2008-02-28 | Vorrichtung zur feldemission von teilchen und verfahren zur herstellung |
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JP5239026B2 true JP5239026B2 (ja) | 2013-07-17 |
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DE102007010463A1 (de) | 2008-09-04 |
DE102007010463B4 (de) | 2010-08-26 |
WO2008104393A2 (de) | 2008-09-04 |
US20100090579A1 (en) | 2010-04-15 |
JP2010520581A (ja) | 2010-06-10 |
US8242674B2 (en) | 2012-08-14 |
WO2008104393A3 (de) | 2009-03-26 |
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