JP5066090B2 - 金属(m1)酸化物粒子の表面に金属(m2)酸化物超微粒子をコートする方法 - Google Patents
金属(m1)酸化物粒子の表面に金属(m2)酸化物超微粒子をコートする方法 Download PDFInfo
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- JP5066090B2 JP5066090B2 JP2008529911A JP2008529911A JP5066090B2 JP 5066090 B2 JP5066090 B2 JP 5066090B2 JP 2008529911 A JP2008529911 A JP 2008529911A JP 2008529911 A JP2008529911 A JP 2008529911A JP 5066090 B2 JP5066090 B2 JP 5066090B2
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- 239000002245 particle Substances 0.000 title claims description 66
- 229910052751 metal Inorganic materials 0.000 title claims description 50
- 239000002184 metal Substances 0.000 title claims description 50
- 238000000034 method Methods 0.000 title claims description 28
- 239000011882 ultra-fine particle Substances 0.000 title claims description 28
- 238000000576 coating method Methods 0.000 title claims description 27
- 239000011248 coating agent Substances 0.000 title claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 17
- 239000007864 aqueous solution Substances 0.000 claims description 13
- 150000003839 salts Chemical class 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 5
- 229910052746 lanthanum Inorganic materials 0.000 claims description 5
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical group [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 4
- 229910052684 Cerium Inorganic materials 0.000 claims description 4
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052788 barium Inorganic materials 0.000 claims description 4
- 238000001354 calcination Methods 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910052744 lithium Inorganic materials 0.000 claims description 4
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 230000001376 precipitating effect Effects 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052712 strontium Inorganic materials 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 239000011259 mixed solution Substances 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 claims description 2
- 229910052693 Europium Inorganic materials 0.000 claims description 2
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 2
- 229910002651 NO3 Inorganic materials 0.000 claims description 2
- 229910052779 Neodymium Inorganic materials 0.000 claims description 2
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052772 Samarium Inorganic materials 0.000 claims description 2
- 150000001413 amino acids Chemical class 0.000 claims description 2
- 229910052793 cadmium Inorganic materials 0.000 claims description 2
- 150000001735 carboxylic acids Chemical class 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N nitrate group Chemical group [N+](=O)([O-])[O-] NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 37
- 150000004706 metal oxides Chemical class 0.000 description 37
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 29
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 13
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 13
- 238000000445 field-emission scanning electron microscopy Methods 0.000 description 8
- 239000010419 fine particle Substances 0.000 description 7
- HSJPMRKMPBAUAU-UHFFFAOYSA-N cerium(3+);trinitrate Chemical compound [Ce+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O HSJPMRKMPBAUAU-UHFFFAOYSA-N 0.000 description 6
- 239000011247 coating layer Substances 0.000 description 6
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- 230000000052 comparative effect Effects 0.000 description 5
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 239000006183 anode active material Substances 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 239000011268 mixed slurry Substances 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- UJVRJBAUJYZFIX-UHFFFAOYSA-N nitric acid;oxozirconium Chemical compound [Zr]=O.O[N+]([O-])=O.O[N+]([O-])=O UJVRJBAUJYZFIX-UHFFFAOYSA-N 0.000 description 4
- 229910008337 ZrO(NO3)2.2H2O Inorganic materials 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
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- 239000000126 substance Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910012851 LiCoO 2 Inorganic materials 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 150000001255 actinides Chemical group 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000011258 core-shell material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical group [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 239000003440 toxic substance Substances 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910004631 Ce(NO3)3.6H2O Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007602 hot air drying Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 239000005300 metallic glass Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000012266 salt solution Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000001694 spray drying Methods 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
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- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
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- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
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Description
O-2、iv)分散性が改善されて半導体ウエハーの化学機械研磨用スラリーに使用できる
、SiO2がコートされたCeO2などを挙げることができる。
A、VIIB、VIII、遷移金属、ランタン族、およびアクチニド族のグループから選ばれた
少なくとも1種を含む。特に、本発明に有用な金属は、Si、Al、Li、Mg、Ca、Sr、Ba、Y、Nb、La、Ti、Zr、Cr、Mo、W、Mn、Fe、Co、Ni、Cu、Zn、Ce、およびPrの中から選ばれた少なくとも1種が例示される。
焼させる工程が追加できる。400℃以下ではか焼効果が少なく、1500℃以上では焼結が過度になる。
O2、iv)分散性が改善されて半導体ウエハーの化学機械研磨用スラリーに使用できる、SiO2がコートされたCeO2などを挙げることができる。
以下、実施例によって本発明をさらに具体的に説明する。ところが、本発明は下記実施例に限定されるものではない。
比表面積24m2/gのCeO2微粒子(粒子サイズ20〜50nm)70gを水に分散させて1.0kgのスラリーを作り、ここにジルコニル硝酸塩(ZrO(NO3)2・2H2O)65.1gを添加して混合した。この混合スラリーを分当たり8gずつ外径1
/4インチのチューブを介してポンピングし、250barで加圧した。さらに、純水を分当たり96gずつ外径1/4インチのチューブを介してポンピング、加熱、加圧して250bar、550℃で予熱し、予熱された純水と混合スラリーを加圧状態で連続式ライン反応器にポンピングし、瞬間的に混合して温度が400℃となるようにした。反応の後、生成された粒子を冷却し、分離して粒子を得た。得られた粒子を濾過し、100℃で10時間乾燥させてXRF、FESEMおよびBET比表面積を分析した。XRFで組成を分析した結果、CeO265.7wt%、ZrO234.3wt%であった。FESEM分析結果、図1に示すように、セリア結晶の表面にジルコニア微粒子がよく分散していることが分かり、乾燥粒子のBET比表面積は83m2/gと比較的大きい値を持つことが分かった。コアのセリア粒子の大きさは50nm〜200nmであり、シェルのジルコニア粒子の大きさは2nm〜10nmであった。
比表面積24m2/gのCeO2微粒子(粒子サイズ20〜50nm)70g、高分子系界面活性剤(Disperbyk 154、BYK Chemie社製)5.6gを水に分散させて1.0kgのスラリーを作り、ここにジルコニル硝酸塩(ZrO(NO3)2・2H2O)65.1gを添加して混合スラリーを作った後、実施例1と同一の方法で粒子を得た。得られた粒子を濾過し、100℃で10時間乾燥させ、そのXRF、FESEMおよびBET比表面積を分析した。XRFで組成を分析した結果、CeO261.2wt%、ZrO-238.8wt%であった。FESEM分析結果、図2に示すように、セ
リア結晶の表面にジルコニア微粒子がよく分散しており、乾燥粒子のBET比表面積は89m2/gと比較的大きい値を持つことが分かった。コアのセリア粒子の大きさは50nm〜200nmであり、シェルのジルコニア粒子の大きさは2nm〜10nmであった。
比表面積24m2/gのCeO2微粒子(粒子サイズ20〜50nm)70gを水に分散させて1.0kgのスラリーを作り、ここにジルコニル硝酸塩(ZrO(NO3)2・2H2O)65.1gを添加して混合した。この混合スラリーを噴霧乾燥機を用いて噴霧させて粒子を得た。表面のジルコニル化合物をジルコニア形態で酸化させるために、得られた粒子を600℃で6時間か焼した。か焼粒子のXRF、FESEMおよびBET比表面積を分析した。XRFで組成を分析した結果、CeO268.5wt%、ZrO231.5wt%であった。FESEM分析結果、図3に示すように、セリア結晶の表面にジルコニア層が焼結されており、比表面積は29m2/gであって、供給されたCeO2の比表面積と類似であった。よって、大きい比表面積が要求される分野に適用し難い。表面のジルコニアが過度に焼結されて、コアとシェルを構成する粒子のサイズが分かり難かった。
セリウム硝酸塩(Ce(NO3)3・6H2O)11.18重量%の水溶液を分当たり8gずつ外径1/4インチのチューブを介してポンピングし、250barで加圧した。アンモニア水(NH328wt%)13重量%を分当たり8gずつ外径1/4インチのチューブを介してポンピングし、250barで加圧した。加圧されたセリウム硝酸塩水溶液とアンモニア水をチューブ状の連続式ライン混合器1にポンピングして瞬間的に混合し、約20秒間滞留させて沈澱が起こるようにした。ジルコニル硝酸塩4.06重量%水溶液を分当たり8gずつ外径1/4インチのチューブを介してポンピングし、250barで加圧し、ライン混合器2にポンピングして、ライン混合器1で作られた混合沈澱物と瞬間的に混合し、約20秒間滞留させて沈澱が起こるようにした。純水を分当たり96gずつ外径1/4インチのチューブを介してポンピング、加熱、加圧して250bar、550℃で予熱し、予熱された純水とライン混合器2で生成された混合沈澱物を加圧状態で連続式ライン反応器にポンピングして瞬間的に混合することにより温度が400℃となるよ
うにし、10秒以内で滞留させた。反応の後に生成されたスラリーを冷却し、粒子を分離した。分離した粒子を100℃のオーブンで乾燥させてXRF、FESEMおよびBET比表面積を分析した。XRFで組成を分析した結果、CeO265wt%、ZrO235wt%であった。比表面積は62m2/gであった。FESEM分析結果、図4に示すように、セリア(八面体角形の大粒子)とジルコニア(球形の凝集された微細粒子)の2種類の金属酸化物がそれぞれ別個に混在することが分かる。セリア粒子の大きさは50nm〜600nmであり、混在しているジルコニア粒子の大きさは過度な凝集によって分かり難かった。
比較的大きい比表面積を持つ触媒などとして有用な、実施例1〜2および比較例2で製造された試料1gを常温の70%硝酸水溶液100mLに仕込み、76時間攪拌した。この溶液をガラスフィルターに注ぎ、フィルター残留物を乾燥させて重量を測定し、その測定結果を表1に示した。セリアは70%硝酸水溶液に少しずつ溶解される性質がある反面、ジルコニアはそうではない。したがって、表面にジルコニアがよくコートされている場合、表面のジルコニアがコアのセリアと硝酸水溶液との接触を遮断するため、硝酸水溶液で処理した後、濾過残留量が多くなる。実施例1〜2の試料の場合、コーティング層のジルコニアの保護によってセリアの溶解が少なくて比較的残留量が高いが、比較例2の場合、コアのセリアが一部溶解されて残留量が少ないことが分かる。
Claims (10)
- i)金属(M1)酸化物粒子を、被覆させようとする金属(M2)塩の水溶液と接触処理させて混合液を作製する段階と、
ii)前記金属(M1)酸化物粒子の表面上に粒径1nm〜100nmにて金属(M2)酸化物超微粒子を形成するために、前記接触処理された混合液を超臨界水と連続的に混合して200〜700℃の反応温度および180〜550barの反応圧力下で反応させる段階とを含むことを特徴とする、金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。 - 前記段階i)と前記段階ii)との間に、沈澱剤を添加する段階をさらに含むことを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記沈澱剤はアンモニア水であることを特徴とする、請求項2に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記金属(M1)酸化物粒子の金属(M1)は、Si、Al、Li、Mg、Ca、Sr、Ba、Y、Nb、La、Ti、Zr、Cr、Mo、W、Mn、Fe、Co、Ni、Cu、Zn、Ce、およびPrの中から選ばれた少なくとも1種であることを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記金属(M2)塩の金属(M2)は、Si、Al、Sc、Ga、Li、Mg、Ca、Sr、Ba、Y、Nb、La、Ti、Zr、Cr、Mo、W、Mn、Fe、Ru、Rh、Pd、Ir、Pt、Co、Ni、Cu、Ag、Zn、Cd、Ce、Pr、Nd、Sm、Eu、およびGdの中から選ばれた少なくとも1種であることを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記金属(M2)塩は硝酸塩、シュウ酸塩、またはクエン酸塩であることを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記段階i)でアクリル酸、カルボン酸、アミノ酸、およびこれらのポリマーまたは塩、またはこれらの混合物をさらに添加することを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記段階ii)は、連続式ライン混合器を用いて行われることを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記方法は、乾燥、か焼させる段階をさらに含むことを特徴とする、請求項1に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
- 前記金属(M1)酸化物粒子の粒径が5nm〜5μmであることを特徴とする、請求項1〜9のいずれか1項に記載の金属(M1)酸化物粒子の表面に金属(M2)酸化物超微粒子をコートする方法。
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JP5470751B2 (ja) * | 2008-02-13 | 2014-04-16 | Tdk株式会社 | 活物質及び電極の製造方法、活物質及び電極 |
CA2739991A1 (en) * | 2008-10-13 | 2010-05-27 | Innovnano - Materiais Av Ancados, S.A. | Ceramic powders coated with a nanoparticle layer and process for obtaining thereof |
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CN107221668B (zh) * | 2017-07-11 | 2020-07-31 | 深圳市贝特瑞纳米科技有限公司 | 一种复合层状正极材料、其制备方法及用途 |
KR102479603B1 (ko) * | 2017-12-27 | 2022-12-22 | 주식회사 케이씨텍 | 표면개질된 산화 세륨 연마입자의 제조방법 및 이를 포함하는 연마 슬러리 조성물 |
JP7142498B2 (ja) * | 2018-06-28 | 2022-09-27 | 日本パーカライジング株式会社 | 金属材料用表面処理剤並びに、表面処理被膜付金属材料及びその製造方法 |
CN109939684A (zh) * | 2019-03-13 | 2019-06-28 | 徐州工程学院 | 一种改善负载型催化剂金属-载体相互作用的方法 |
CN112420997B (zh) * | 2019-08-20 | 2022-07-01 | 中国科学院化学研究所 | 一种溶液相中构筑厚度可控的金属氧化物包覆层的方法 |
CN112830799B (zh) * | 2021-01-21 | 2022-08-09 | 西安建筑科技大学 | 一种CaCO3包覆刚玉骨料及其制备方法和应用 |
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JP3670395B2 (ja) * | 1996-06-10 | 2005-07-13 | 日鉄鉱業株式会社 | 多層膜被覆粉体およびその製造方法 |
JPH1067503A (ja) * | 1996-08-28 | 1998-03-10 | Nittetsu Mining Co Ltd | 金属酸化物膜被覆粉体の製造方法 |
US5789027A (en) * | 1996-11-12 | 1998-08-04 | University Of Massachusetts | Method of chemically depositing material onto a substrate |
WO1999010167A1 (fr) * | 1997-08-27 | 1999-03-04 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Objet enrobe et procede de fabrication de cet objet |
FR2791580B1 (fr) | 1999-04-02 | 2001-05-04 | Centre Nat Rech Scient | Procede pour l'enrobage de particules |
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JP4035654B2 (ja) * | 2001-06-29 | 2008-01-23 | 株式会社デンソー | 触媒粒子およびその製造方法 |
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