JP5048093B2 - 基板の回路パターン欠陥検査方法 - Google Patents
基板の回路パターン欠陥検査方法 Download PDFInfo
- Publication number
- JP5048093B2 JP5048093B2 JP2010048908A JP2010048908A JP5048093B2 JP 5048093 B2 JP5048093 B2 JP 5048093B2 JP 2010048908 A JP2010048908 A JP 2010048908A JP 2010048908 A JP2010048908 A JP 2010048908A JP 5048093 B2 JP5048093 B2 JP 5048093B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit pattern
- laser
- substrate
- inspected
- probe beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
Landscapes
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
102 プローブビーム照射部
103 レーザー
104 プローブビーム
105 基板
106 検査対象回路パターン
107 連結回路パターン
108 ビア
Claims (7)
- (A)基板の検査対象回路パターンに非接触式でレーザーを照射するためのレーザー照射部を準備する段階;
(B)前記検査対象回路パターンと電気的に連結される連結回路パターンに非接触式でプローブビームを照射するためのプローブビーム照射部を準備する段階;
(C)前記検査対象回路パターンに前記レーザー照射部から前記レーザーを照射する段階;及び
(D)前記連結回路パターンに前記プローブビーム照射部から前記プローブビームを照射して前記プローブビームの回折有無及び回折角度を測定する段階;
を含み、
前記基板の前記検査対象回路パターンと前記連結回路パターンが、ビアを介して連結されることを特徴とする基板の回路パターン欠陥検査方法。 - (E)前記プローブビームの回折有無及び回折角度によって前記基板の回路パターン欠陥有無を判別する段階;
をさらに含むことを特徴とする請求項1に記載の基板の回路パターン欠陥検査方法。 - 前記レーザーが、表面音響波発生用レーザーであることを特徴とする請求項1に記載の基板の回路パターン欠陥検査方法。
- 前記基板が、プリント基板または半導体ウェハーであることを特徴とする請求項1に記載の基板の回路パターン欠陥検査方法。
- 前記(C)段階で、前記レーザーを前記検査対象回路パターンに照射すれば、前記検査対象回路パターンに表面音響波が生じ、前記表面音響波が前記基板の内層に伝達されることを特徴とする請求項1に記載の基板の回路パターン欠陥検査方法。
- 前記レーザー照射部を多数備え、前記基板の前記検査対象回路パターンの一地点に前記レーザーを集中させて照射することを特徴とする請求項1に記載の基板の回路パターン欠陥検査方法。
- 前記レーザー照射部から照射される前記レーザーが、フェムト秒レーザーであることを特徴とする請求項1に記載の基板の回路パターン欠陥検査方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090110424A KR101184489B1 (ko) | 2009-11-16 | 2009-11-16 | 기판의 회로패턴 결함 검사방법 |
KR10-2009-0110424 | 2009-11-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011107119A JP2011107119A (ja) | 2011-06-02 |
JP5048093B2 true JP5048093B2 (ja) | 2012-10-17 |
Family
ID=44011109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010048908A Expired - Fee Related JP5048093B2 (ja) | 2009-11-16 | 2010-03-05 | 基板の回路パターン欠陥検査方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8111389B2 (ja) |
JP (1) | JP5048093B2 (ja) |
KR (1) | KR101184489B1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110053658A (ko) * | 2009-11-16 | 2011-05-24 | 삼성전기주식회사 | 기판의 회로패턴 결함 검사장치 및 검사방법 |
WO2014149213A1 (en) * | 2013-03-15 | 2014-09-25 | Rudolph Technologies, Inc. | Optical acoustic substrate assessment system and method |
SG11201702573VA (en) * | 2014-09-29 | 2017-04-27 | Manjusha Mehendale | Non-destructive acoustic metrology for void detection |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6053626B2 (ja) * | 1979-01-16 | 1985-11-26 | 松下電器産業株式会社 | 超音波検査装置 |
JPH065244B2 (ja) * | 1987-10-15 | 1994-01-19 | 名古屋大学長 | 導通形成検査装置 |
DE68910322T2 (de) * | 1989-11-28 | 1994-05-05 | Ibm | Verfahren zur Inspektion von Durchkontakt-Stiften in integrierten Schaltungspackungen mittels Photoemission. |
JP3082208B2 (ja) * | 1990-03-30 | 2000-08-28 | 株式会社日立製作所 | 光音響信号検出方法および装置並びに半導体素子内部欠陥検出方法 |
JPH0774795B2 (ja) * | 1992-12-18 | 1995-08-09 | 工業技術院長 | バルク弾性波の発生方法 |
JPH09257755A (ja) * | 1996-03-22 | 1997-10-03 | Nippon Steel Corp | レーザー超音波検査装置及びレーザー超音波検査方法 |
KR100451379B1 (ko) | 1998-06-19 | 2005-01-13 | 엘지.필립스 엘시디 주식회사 | 액정표시장치및그제조방법 |
TW200525141A (en) * | 2003-12-26 | 2005-08-01 | Nikon Corp | Defect inspection device and defect inspection method |
US7397596B2 (en) * | 2004-07-28 | 2008-07-08 | Ler Technologies, Inc. | Surface and subsurface detection sensor |
US7669321B1 (en) * | 2005-07-13 | 2010-03-02 | Cisco Technology, Inc. | Methods for verifying correct counter-bore depth and precision on printed circuit boards |
KR100799161B1 (ko) | 2006-07-20 | 2008-01-29 | 마이크로 인스펙션 주식회사 | 비접촉 싱글사이드 프로브와 이를 이용한 패턴전극의 단선및 단락 검사장치 및 그 방법 |
-
2009
- 2009-11-16 KR KR1020090110424A patent/KR101184489B1/ko not_active IP Right Cessation
-
2010
- 2010-03-04 US US12/717,688 patent/US8111389B2/en not_active Expired - Fee Related
- 2010-03-05 JP JP2010048908A patent/JP5048093B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2011107119A (ja) | 2011-06-02 |
US8111389B2 (en) | 2012-02-07 |
US20110116084A1 (en) | 2011-05-19 |
KR20110053756A (ko) | 2011-05-24 |
KR101184489B1 (ko) | 2012-09-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4744604B2 (ja) | 半導体デバイスの検査方法および半導体デバイスの検査装置 | |
JP5175311B2 (ja) | 回路パターンの欠陥検査装置およびその検査方法 | |
JP5048093B2 (ja) | 基板の回路パターン欠陥検査方法 | |
JP2015132592A (ja) | 回路基板のめくら孔内の欠陥の検査装置、検査システム及びその検査方法 | |
KR100944535B1 (ko) | 웨이퍼 범핑 공정에서 전자빔을 이용하여 솔더 범프 형성및 전이 상태를 검사하는 장치 및 방법 | |
JP2009250761A (ja) | 基板接続検査装置 | |
JP2006214950A (ja) | 半導体チップ並びにその検査装置および検査方法 | |
JP5501735B2 (ja) | 回路基板検査装置および回路基板検査方法 | |
KR101551609B1 (ko) | 웨이퍼 홀 특성 분석 장치 및 그 제어 방법 | |
KR100683386B1 (ko) | 레이저 스캔을 이용한 반도체 소자 불량 검색 방법 및 장치 | |
KR20200115118A (ko) | 검사용 기판 및 검사 방법 | |
JP5258497B2 (ja) | プリント配線板のはんだ接合検査用配線構造 | |
JP7357826B1 (ja) | 光半導体検査装置 | |
JPH0961486A (ja) | 半田付け検査装置 | |
JP5939003B2 (ja) | 電極構造の検査方法 | |
KR20090094652A (ko) | 기판 표면 검사 장치 | |
JP2011191185A (ja) | 検査装置及び電子装置の製造方法 | |
KR100613169B1 (ko) | 무접촉 반도체 소자 테스트 장치 및 테스트 방법 | |
US8704545B2 (en) | Determination of properties of an electrical device | |
JP4287255B2 (ja) | 基板検査装置及び基板検査方法 | |
JP3080158B2 (ja) | プリント基板の検査方法及び検査装置 | |
Keenan et al. | Terahertz and laser imaging for printed circuit board failure detection | |
JP5977583B2 (ja) | 接合パッド、プローブ組立体及び接合パッドの製造方法 | |
JP2007298424A (ja) | 半導体デバイスの非破壊検査方法 | |
JP2004144759A (ja) | 検査装置及び検査方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120221 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120228 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120524 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120710 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120718 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150727 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |