JP5047250B2 - 半導体素子の製造方法 - Google Patents
半導体素子の製造方法 Download PDFInfo
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- JP5047250B2 JP5047250B2 JP2009231557A JP2009231557A JP5047250B2 JP 5047250 B2 JP5047250 B2 JP 5047250B2 JP 2009231557 A JP2009231557 A JP 2009231557A JP 2009231557 A JP2009231557 A JP 2009231557A JP 5047250 B2 JP5047250 B2 JP 5047250B2
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- Prior art keywords
- film
- layer
- adhesive layer
- plug
- contact hole
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
- H10B53/30—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the memory core region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76895—Local interconnects; Local pads, as exemplified by patent document EP0896365
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
32、52 層間絶縁膜
33、53 プラグ埋込層
33a、53a ポリシリコンプラグ
34、54 接着層
35、55 チタニウムシリサイド
36a、56a チタニウムナイトライド
37、57 拡散バリヤ膜
38、58 下部電極
39、59 誘電体膜
40、60 上部電極
Claims (6)
- トランジスタが形成された半導体基板上面に層間絶縁膜を成長させる層間絶縁膜成長工程と、
前記層間絶縁膜をパターニングして、前記半導体基板の所定領域の表面を露出させる層間膜コンタクトホールを形成する層間膜コンタクトホール形成工程と、
前記層間膜コンタクトホール内、及び前記層間絶縁膜の上面に、シリコン含有物質からなるプラグ埋込層を成長させ、前記層間膜コンタクトホール内にプラグを形成するプラグ形成工程と、
前記プラグ埋込層の上面をエッチバック法で平坦化して、前記プラグ埋込層を前記プラグ及び前記層間絶縁膜の上面に残留させ、所定の厚さを有する反応予備膜とする反応予備膜形成工程と、
前記反応予備膜の上面にイリジウム含有物質を含むイリジウム反応層を成長させ、前記反応予備膜のシリコンと前記イリジウム反応層のイリジウムとを反応させて、前記プラグ及び前記層間絶縁膜の上面に、シリコン及びイリジウムを含有する接着層を成長させる接着層成長工程と、
前記接着層をパターニングして、前記プラグの上面を露出させる接着層コンタクトホールを形成する接着層コンタクトホール形成工程と、
前記接着層コンタクトホール内、及び前記接着層上面に導電性のバリヤ埋込層を成長させるバリヤ埋込層成長工程と、
前記接着層の表面が露出するまで、前記バリヤ埋込層を平坦化して、バリヤ層を形成するバリヤ埋込層平坦化工程と、
前記バリヤ層及び前記接着層の上面に第1電極と、誘電体膜と、第2電極とを含んで構成されるキャパシタを形成するキャパシタ形成工程とを含むことを特徴とする半導体素子の製造方法。 - 前記接着層形成工程を、約500℃〜約800℃の温度範囲で前記イリジウム反応層を成長させる条件で行うことを特徴とする請求項1記載の半導体素子の製造方法。
- 前記プラグ形成工程が、
前記プラグ埋込層としてポリシリコン層を成長させることを特徴とする請求項1記載の半導体素子の製造方法。 - 前記反応予備膜を、約10Å〜約1000Åの範囲内の厚さに形成することを特徴とする請求項1記載の半導体素子の製造方法。
- 前記バリヤ埋込層平坦化工程を、CMP法により、前記バリヤ層と前記接着層との研磨選択比が約50:1〜80:1の範囲内となる条件で行うことを特徴とする請求項1記載の半導体素子の製造方法。
- 前記キャパシタ形成工程が、前記第1電極を形成する第1電極形成工程と、前記第2電極を形成する第2電極形成工程とを含み、前記第1電極形成工程または前記第2電極形成工程が、TiN、RuTiN、IrTiN、Ir、IrOx、Ru、RuOx、Rh、RhOx、Pt及びこれらを組み合わせたもののうち、いずれかの物質を成長させる処理を含むことを特徴とする請求項1記載の半導体素子の製造方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2001-056143 | 2001-09-12 | ||
KR1020010056143A KR20030023142A (ko) | 2001-09-12 | 2001-09-12 | 반도체 소자 제조 방법 |
KR2001-057368 | 2001-09-17 | ||
KR10-2001-0057368A KR100415539B1 (ko) | 2001-09-17 | 2001-09-17 | 반도체 소자의 제조 방법 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002265456A Division JP4467229B2 (ja) | 2001-09-12 | 2002-09-11 | 半導体素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010004082A JP2010004082A (ja) | 2010-01-07 |
JP5047250B2 true JP5047250B2 (ja) | 2012-10-10 |
Family
ID=26639338
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002265456A Expired - Fee Related JP4467229B2 (ja) | 2001-09-12 | 2002-09-11 | 半導体素子の製造方法 |
JP2009231557A Expired - Fee Related JP5047250B2 (ja) | 2001-09-12 | 2009-10-05 | 半導体素子の製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002265456A Expired - Fee Related JP4467229B2 (ja) | 2001-09-12 | 2002-09-11 | 半導体素子の製造方法 |
Country Status (2)
Country | Link |
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US (1) | US6818935B2 (ja) |
JP (2) | JP4467229B2 (ja) |
Families Citing this family (24)
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US7146007B1 (en) * | 2000-03-29 | 2006-12-05 | Sony Corporation | Secure conditional access port interface |
AR028948A1 (es) * | 2000-06-20 | 2003-05-28 | Astrazeneca Ab | Compuestos novedosos |
US6908639B2 (en) * | 2001-04-02 | 2005-06-21 | Micron Technology, Inc. | Mixed composition interface layer and method of forming |
KR100561839B1 (ko) * | 2001-11-10 | 2006-03-16 | 삼성전자주식회사 | 강유전체 커패시터 및 그 제조방법 |
KR100440072B1 (ko) * | 2001-12-10 | 2004-07-14 | 주식회사 하이닉스반도체 | 반도체소자의 캐패시터 형성방법 |
KR100988082B1 (ko) * | 2003-05-21 | 2010-10-18 | 삼성전자주식회사 | 스택형 커패시터, 그를 구비한 반도체 메모리 소자 및 그제조방법 |
US20050070097A1 (en) * | 2003-09-29 | 2005-03-31 | International Business Machines Corporation | Atomic laminates for diffusion barrier applications |
CN100377357C (zh) * | 2003-10-22 | 2008-03-26 | 松下电器产业株式会社 | 半导体装置及其制造方法 |
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US7151314B2 (en) * | 2004-11-17 | 2006-12-19 | Oki Electric Industry Co., Ltd. | Semiconductor device with superimposed poly-silicon plugs |
JP4375561B2 (ja) * | 2004-12-28 | 2009-12-02 | セイコーエプソン株式会社 | 半導体記憶装置及びその製造方法 |
JP2006324363A (ja) * | 2005-05-17 | 2006-11-30 | Elpida Memory Inc | キャパシタおよびその製造方法 |
JP2006352082A (ja) * | 2005-05-19 | 2006-12-28 | Renesas Technology Corp | 半導体記憶装置及びその製造方法 |
KR100705397B1 (ko) * | 2005-07-13 | 2007-04-10 | 삼성전자주식회사 | 저 저항의 텅스텐막 형성 방법 |
CN101253620B (zh) * | 2005-08-31 | 2011-02-16 | 富士通半导体股份有限公司 | 半导体器件及其制造方法 |
KR100647468B1 (ko) * | 2005-11-04 | 2006-11-23 | 삼성전자주식회사 | 반도체 장치의 배선 구조물 및 그 제조 방법. |
JP4954614B2 (ja) * | 2006-05-30 | 2012-06-20 | セイコーエプソン株式会社 | 強誘電体メモリ装置の製造方法 |
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JP2014053557A (ja) | 2012-09-10 | 2014-03-20 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2015046623A (ja) * | 2014-11-04 | 2015-03-12 | ユニサンティス エレクトロニクス シンガポール プライベート リミテッドUnisantis Electronics Singapore Pte Ltd. | 半導体装置の製造方法、及び、半導体装置 |
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-
2002
- 2002-09-11 US US10/238,710 patent/US6818935B2/en not_active Expired - Lifetime
- 2002-09-11 JP JP2002265456A patent/JP4467229B2/ja not_active Expired - Fee Related
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2009
- 2009-10-05 JP JP2009231557A patent/JP5047250B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2010004082A (ja) | 2010-01-07 |
JP2003179164A (ja) | 2003-06-27 |
US6818935B2 (en) | 2004-11-16 |
JP4467229B2 (ja) | 2010-05-26 |
US20030057445A1 (en) | 2003-03-27 |
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