JP5043539B2 - 液体噴射記録ヘッドの製造方法 - Google Patents
液体噴射記録ヘッドの製造方法 Download PDFInfo
- Publication number
- JP5043539B2 JP5043539B2 JP2007174139A JP2007174139A JP5043539B2 JP 5043539 B2 JP5043539 B2 JP 5043539B2 JP 2007174139 A JP2007174139 A JP 2007174139A JP 2007174139 A JP2007174139 A JP 2007174139A JP 5043539 B2 JP5043539 B2 JP 5043539B2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- recording head
- flow path
- jet recording
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000007788 liquid Substances 0.000 title claims description 50
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000011347 resin Substances 0.000 claims description 40
- 229920005989 resin Polymers 0.000 claims description 40
- 239000000758 substrate Substances 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 19
- 238000000576 coating method Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 2
- 239000012080 ambient air Substances 0.000 claims 1
- 239000000976 ink Substances 0.000 description 89
- 238000004528 spin coating Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- WQMWHMMJVJNCAL-UHFFFAOYSA-N 2,4-dimethylpenta-1,4-dien-3-one Chemical compound CC(=C)C(=O)C(C)=C WQMWHMMJVJNCAL-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
溶解可能な樹脂層により、前記基板上に、前記吐出エネルギー発生素子に対応する複数の液体流路のパターンを形成するとともに、該複数の液体流路のパターンの夫々を囲む土台部のパターンを該液体流路への液体種類に応じて変更して形成し、
前記基板上に前記複数の液体流路のパターンと前記土台部のパターンを被覆する被覆樹脂層を形成することで、該複数の液体流路のパターン上に形成した該被覆樹脂層の液体流路パターンの表面からオリフィス面までの厚みを、該複数の液体流路のパターン間で異ならせることを特徴とする。
図1(a)から(d)は本発明による液体噴射記録ヘッドの基本的な製造工程を示すための模式的断面図である。
2,9 溶解可能な樹脂層(土台部)
3 インク吐出エネルギー発生素子
4 基板
5 被覆樹脂層(オリフィスプレート)
6 溶解可能な樹脂層除去のための貫通口
7 インク吐出口
8 インク供給口
Claims (6)
- 吐出エネルギー発生素子が形成された基板に対して垂直方向に液滴が吐出される液体噴射記録ヘッドの製造方法において、
溶解可能な樹脂層により、前記基板上に、前記吐出エネルギー発生素子に対応する複数の液体流路のパターンを形成するとともに、該複数の液体流路のパターンの夫々を囲む土台部のパターンを該液体流路への液体種類に応じて変更して形成し、
前記基板上に前記複数の液体流路のパターンと前記土台部のパターンを被覆する被覆樹脂層を形成することで、該複数の液体流路のパターン上に形成した該被覆樹脂層の液体流路パターンの表面からオリフィス面までの厚みを、該複数の液体流路のパターン間で異ならせることを特徴とする液体噴射記録ヘッドの製造方法。 - 前記複数の液体流路のパターンの夫々を囲む土台部のパターンの夫々については、該パターンの高さまたは位置を該液体流路への液体種類に応じて変更することを特徴とする請求項1に記載の液体噴射記録ヘッドの製造方法。
- 前記複数の液体流路のパターンの夫々を囲む土台部のパターンの夫々については、該パターンの幅を該液体流路への液体種類に応じて変更することを特徴とする請求項1に記載の液体噴射記録ヘッドの製造方法。
- 前記液体流路のパターンと前記土台部のパターンを同一材料により、同一工程にて形成することを特徴とする請求項1から3のいずれか1項に記載の液体噴射記録ヘッドの製造方法。
- 前記液体噴射記録ヘッドは、前記吐出エネルギー発生素子としての発熱抵抗体を加熱することで発生した気泡を外気と連通させることにより液滴を吐出するものであることを特徴とする請求項1から4のいずれかに記載の液体噴射記録ヘッドの製造方法。
- 前記複数の液体流路のパターンの表面は、前記基板に対して平坦に形成されている請求項1から5のいずれか1項に記載の液体噴射記録ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007174139A JP5043539B2 (ja) | 2007-07-02 | 2007-07-02 | 液体噴射記録ヘッドの製造方法 |
US12/145,428 US8091233B2 (en) | 2007-07-02 | 2008-06-24 | Method of manufacturing liquid discharge head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007174139A JP5043539B2 (ja) | 2007-07-02 | 2007-07-02 | 液体噴射記録ヘッドの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009012220A JP2009012220A (ja) | 2009-01-22 |
JP5043539B2 true JP5043539B2 (ja) | 2012-10-10 |
Family
ID=40220323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007174139A Expired - Fee Related JP5043539B2 (ja) | 2007-07-02 | 2007-07-02 | 液体噴射記録ヘッドの製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8091233B2 (ja) |
JP (1) | JP5043539B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4827668B2 (ja) * | 2006-09-11 | 2011-11-30 | 富士フイルム株式会社 | 液体吐出ヘッドおよび液体吐出ヘッドの製造方法 |
JP5586978B2 (ja) * | 2010-02-09 | 2014-09-10 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
KR101376402B1 (ko) * | 2010-03-31 | 2014-03-27 | 캐논 가부시끼가이샤 | 액체 토출 헤드의 제조 방법 |
JP5591011B2 (ja) * | 2010-07-30 | 2014-09-17 | キヤノン株式会社 | 液体吐出ヘッドの製造方法。 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
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DE2626420C3 (de) * | 1976-06-12 | 1979-11-29 | Ibm Deutschland Gmbh, 7000 Stuttgart | Verfahren zum gleichzeitigen Ätzen von mehreren durchgehenden Löchern |
US4746935A (en) * | 1985-11-22 | 1988-05-24 | Hewlett-Packard Company | Multitone ink jet printer and method of operation |
US4812859A (en) * | 1987-09-17 | 1989-03-14 | Hewlett-Packard Company | Multi-chamber ink jet recording head for color use |
US5030971B1 (en) * | 1989-11-29 | 2000-11-28 | Xerox Corp | Precisely aligned mono- or multi-color roofshooter type printhead |
US5208605A (en) * | 1991-10-03 | 1993-05-04 | Xerox Corporation | Multi-resolution roofshooter printheads |
US5666140A (en) * | 1993-04-16 | 1997-09-09 | Hitachi Koki Co., Ltd. | Ink jet print head |
US6145963A (en) * | 1997-08-29 | 2000-11-14 | Hewlett-Packard Company | Reduced size printhead for an inkjet printer |
JP2000334955A (ja) * | 1999-05-27 | 2000-12-05 | Canon Inc | 液体吐出ヘッド、該液体吐出ヘッドの製造方法及び前記液体吐出ヘッドを用いた液体吐出記録装置 |
US6137502A (en) * | 1999-08-27 | 2000-10-24 | Lexmark International, Inc. | Dual droplet size printhead |
US6513896B1 (en) * | 2000-03-10 | 2003-02-04 | Hewlett-Packard Company | Methods of fabricating fit firing chambers of different drop weights on a single printhead |
US6328405B1 (en) * | 2000-03-30 | 2001-12-11 | Hewlett-Packard Company | Printhead comprising multiple types of drop generators |
US6315389B1 (en) * | 2000-04-13 | 2001-11-13 | Hewlett-Packard Company | Printhead having different center to center spacings between rows of nozzles |
US6267468B1 (en) * | 2000-04-13 | 2001-07-31 | Hewlett-Packard Company | Printhead substrate having a mixture of single and double sided elongate ink feed channels |
JP2002103637A (ja) * | 2000-09-29 | 2002-04-09 | Canon Inc | インクジェット記録装置 |
JP2002210975A (ja) * | 2001-01-15 | 2002-07-31 | Canon Inc | インクジェットプリントヘッド |
JP3848218B2 (ja) * | 2001-06-21 | 2006-11-22 | キヤノン株式会社 | インクジェット記録ヘッド |
US7108352B2 (en) * | 2003-05-16 | 2006-09-19 | Canon Kabushiki Kaisha | Liquid-jet recording head |
US6959979B2 (en) * | 2003-12-31 | 2005-11-01 | Lexmark International, Inc. | Multiple drop-volume printhead apparatus and method |
US7198353B2 (en) * | 2004-06-30 | 2007-04-03 | Lexmark International, Inc. | Integrated black and colored ink printheads |
JP2006027132A (ja) * | 2004-07-16 | 2006-02-02 | Fuji Photo Film Co Ltd | 液滴吐出ヘッド及び画像形成装置 |
JP2007125810A (ja) * | 2005-11-04 | 2007-05-24 | Canon Inc | インクジェット記録ヘッドおよびその製造方法 |
-
2007
- 2007-07-02 JP JP2007174139A patent/JP5043539B2/ja not_active Expired - Fee Related
-
2008
- 2008-06-24 US US12/145,428 patent/US8091233B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2009012220A (ja) | 2009-01-22 |
US8091233B2 (en) | 2012-01-10 |
US20090007428A1 (en) | 2009-01-08 |
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