JP5023614B2 - 半導体チップの製造方法及び半導体ウエハの処理方法 - Google Patents
半導体チップの製造方法及び半導体ウエハの処理方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 189
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 238000003672 processing method Methods 0.000 title claims description 10
- 239000007789 gas Substances 0.000 claims description 43
- 238000000034 method Methods 0.000 claims description 38
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 35
- 229910001882 dioxygen Inorganic materials 0.000 claims description 35
- 238000001020 plasma etching Methods 0.000 claims description 29
- 238000009499 grossing Methods 0.000 claims description 25
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 21
- 239000011737 fluorine Substances 0.000 claims description 21
- 229910052731 fluorine Inorganic materials 0.000 claims description 21
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 238000005520 cutting process Methods 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 230000007261 regionalization Effects 0.000 claims description 5
- 238000004380 ashing Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 104
- 238000013500 data storage Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 235000002918 Fraxinus excelsior Nutrition 0.000 description 1
- 229910018503 SF6 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002956 ash Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Dicing (AREA)
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Description
となっている。下部電極32は真空チャンバ31内において半導体ウエハ1の保持面を上にして設けられており、上部電極33の下面は下部電極32の上方において上部電極32の上面と対向するように設けられている。
行う。レーザ加工装置10のワークデータ記憶部20には境界溝5の位置に関するデータが記憶されており、制御部17はこのワークデータ記憶部20に記憶されたデータに基づいてレーザ照射部13を移動させる。具体的には、制御部17は、カメラ14及び認識部18を介して得られたレーザ光13aの照射位置と、ワークデータ記憶部20に記憶された境界溝5の位置のデータとを比較し、レーザ光13aの照射位置がワークデータ記憶部20に記憶された境界溝5上を移動するように移動機構15を駆動する。また、ワークデータ記憶部20には境界溝5の幅のデータも記憶されており、制御部17はレーザ照射部13からレーザ光13aを照射させる際、レーザ照射部13の出力を変化させてレーザ光13aのビーム径を調節し、実際に形成される境界溝5の幅がワークデータ記憶部20に記憶された境界溝5の幅よりもやや狭くなるようにする。
ト膜4の灰化は進行するが、この境界溝表面平滑化工程S5においてレジスト膜4を酸素ガスのプラズマPo中に曝露する時間は、レジスト膜4の境界溝5の表面が平滑化されるのに必要な最小限度のものとする。目安として、曝露時間はレジスト膜4の表面が1〜3μm程度除去されるものであることが好ましい。
1′ 半導体チップ
1a 回路パターン形成面
1b 露出した半導体ウエハの表面(境界溝の表面)
2 半導体素子
4 レジスト膜
4a レジスト膜の切断面(境界溝の表面)
4b 凹凸部
4c 残渣
5 境界溝
10 レーザ加工装置
13a レーザ光
30 プラズマ処理装置
31 真空チャンバ
Claims (6)
- 複数の半導体素子が形成された半導体ウエハの一方の面に有機物であるレジスト膜を形成するレジスト膜形成工程と、レジスト膜の半導体素子同士の境界部にレーザ光を照射してレジスト膜に半導体素子同士を区分する境界溝を形成し、その境界溝に半導体ウエハの表面を露出させるレーザ加工工程と、境界溝に露出した半導体ウエハの表面をフッ素系ガスのプラズマによりエッチングし、半導体ウエハを境界溝に沿って個々の半導体チップに切り分けるプラズマエッチング工程とを含み、
前記レーザ加工工程と前記プラズマエッチング工程の間に、前記レーザ加工工程において凹凸形状となった境界溝の表面の凹凸部を酸素ガス若しくは酸素を主成分とする混合ガスのプラズマにより灰化して平滑化する境界溝表面平滑化工程を実行することを特徴とする半導体チップの製造方法。 - 境界溝表面平滑化工程における境界溝の表面の平滑化は、境界溝の表面の凹凸部を酸素ガス若しくは酸素を主成分とする混合ガスのプラズマにより均して凹凸部の凹凸周期を大きくして行うことを特徴とする請求項1に記載の半導体チップの製造方法。
- プラズマエッチング工程の後、レジスト膜を酸素ガス若しくは酸素を主成分とする混合ガスのプラズマにより除去するレジスト膜除去工程を実行することを特徴とする請求項1又は2に記載の半導体チップの製造方法。
- レジスト膜を半導体ウエハの半導体素子が形成された回路パターン形成面とは反対側の面に形成することを特徴とする請求項1乃至3のいずれかに記載の半導体チップの製造方法。
- 複数の半導体素子が形成された半導体ウエハの一方の面に有機物であるレジスト膜を形成するレジスト膜形成工程と、レジスト膜の半導体素子同士の境界部にレーザ光を照射してレジスト膜に半導体素子同士を区分する境界溝を形成し、その境界溝に半導体ウエハの表面を露出させるレーザ加工工程と、レーザ加工工程が済んだ半導体ウエハをプラズマ処理装置の真空チャンバ内に搬入するウエハ搬入工程と、真空チャンバ内に発生させた酸素ガス若しくは酸素を主成分とする混合ガスのプラズマにより前記レーザ加工工程において凹凸形状となった境界溝の表面の凹凸部を灰化して平滑化する境界溝表面平滑化工程と、境界溝平滑化工程の後、境界溝に露出した半導体ウエハの表面をフッ素系ガスのプラズマによりエッチングし、半導体ウエハを境界溝に沿って個々の半導体チップに切り分けるプラズマエッチング工程と、プラズマエッチング工程が済んだ半導体ウエハを真空チャンバから搬出するウエハ搬出工程とを含むことを特徴とする半導体ウエハの処理方法。
- 前記プラズマエッチング工程と前記ウエハ搬出工程の間に、真空チャンバ内に発生させた酸素ガスもしくは酸素を主成分とする混合ガスのプラズマによりレジスト膜を除去するレジスト膜除去工程を実行することを特徴とする請求項5に記載の半導体ウエハの処理方法。
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JP2006227647A JP5023614B2 (ja) | 2006-08-24 | 2006-08-24 | 半導体チップの製造方法及び半導体ウエハの処理方法 |
PCT/JP2007/066960 WO2008023849A1 (en) | 2006-08-24 | 2007-08-24 | Method for manufacturing semiconductor chip and method for processing semiconductor wafer |
US12/373,813 US7964449B2 (en) | 2006-08-24 | 2007-08-24 | Method for manufacturing semiconductor chip and method for processing semiconductor wafer |
TW096131423A TW200811948A (en) | 2006-08-24 | 2007-08-24 | Method for manufacturing semiconductor chip and method for processing semiconductor wafer |
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JP2006227647A JP5023614B2 (ja) | 2006-08-24 | 2006-08-24 | 半導体チップの製造方法及び半導体ウエハの処理方法 |
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JP2008053417A JP2008053417A (ja) | 2008-03-06 |
JP5023614B2 true JP5023614B2 (ja) | 2012-09-12 |
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JP (1) | JP5023614B2 (ja) |
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US8802545B2 (en) | 2011-03-14 | 2014-08-12 | Plasma-Therm Llc | Method and apparatus for plasma dicing a semi-conductor wafer |
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US10818553B2 (en) | 2018-03-26 | 2020-10-27 | Panasonic Intellectual Property Management Co., Ltd. | Method for cutting element chip by laser scribing |
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