JP4979550B2 - 筐体カバー機構 - Google Patents
筐体カバー機構 Download PDFInfo
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- JP4979550B2 JP4979550B2 JP2007300901A JP2007300901A JP4979550B2 JP 4979550 B2 JP4979550 B2 JP 4979550B2 JP 2007300901 A JP2007300901 A JP 2007300901A JP 2007300901 A JP2007300901 A JP 2007300901A JP 4979550 B2 JP4979550 B2 JP 4979550B2
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- 230000007246 mechanism Effects 0.000 title claims description 37
- 238000004140 cleaning Methods 0.000 claims description 42
- 238000012545 processing Methods 0.000 claims description 34
- 238000000576 coating method Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 123
- 230000001681 protective effect Effects 0.000 description 47
- 239000007888 film coating Substances 0.000 description 31
- 238000009501 film coating Methods 0.000 description 31
- 239000007788 liquid Substances 0.000 description 31
- 239000011347 resin Substances 0.000 description 30
- 229920005989 resin Polymers 0.000 description 30
- 230000032258 transport Effects 0.000 description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 238000002347 injection Methods 0.000 description 14
- 239000007924 injection Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- 239000002390 adhesive tape Substances 0.000 description 8
- 238000005406 washing Methods 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 6
- 230000001678 irradiating effect Effects 0.000 description 5
- 238000004804 winding Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 239000004372 Polyvinyl alcohol Substances 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 229920002451 polyvinyl alcohol Polymers 0.000 description 3
- 229940068984 polyvinyl alcohol Drugs 0.000 description 3
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007667 floating Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Images
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- Cleaning Or Drying Semiconductors (AREA)
Description
201 筐体カバー機構
202 シート状カバー部材
203 線状部材
209 駆動手段
215 移動手段
220 保持手段
230 ウエーハ処理手段
233 筐体
233a 開口部
233m 第1の側部
233n 第2の側部
233o 筐体外壁面
Claims (1)
- ウエーハを保持する保持手段と該保持手段に保持されたウエーハの表面に洗浄或いは溶液塗布の処理を施すウエーハ処理手段とを少なくとも内蔵した筐体の上方に開口した開口部を開閉可能に覆う筐体カバー機構であって、
少なくとも前記開口部を閉塞し得る大きさを有し可撓性を有するシート状カバー部材と、
該シート状カバー部材を、前記開口部を閉塞する閉塞位置と前記開口部を開放する開放位置との間で移動させる移動手段と、
を備え、
前記移動手段は、前記シート状カバー部材の移動方向両側に連結されて移動方向に延在する一対の線状部材と、該線状部材を前記シート状カバー部材の移動方向に沿って移動させる駆動手段と、を備え、
前記線状部材は、前記開口部の対向する第1の側部から第2の側部を経て前記筐体外壁面に沿って略逆L字状に屈曲配設されて周回移動する無端帯からなることを特徴とする筐体カバー機構。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007300901A JP4979550B2 (ja) | 2007-11-20 | 2007-11-20 | 筐体カバー機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007300901A JP4979550B2 (ja) | 2007-11-20 | 2007-11-20 | 筐体カバー機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009129993A JP2009129993A (ja) | 2009-06-11 |
JP4979550B2 true JP4979550B2 (ja) | 2012-07-18 |
Family
ID=40820652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007300901A Active JP4979550B2 (ja) | 2007-11-20 | 2007-11-20 | 筐体カバー機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4979550B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5637769B2 (ja) * | 2010-08-13 | 2014-12-10 | 株式会社ディスコ | レーザー加工装置 |
JP5855428B2 (ja) * | 2011-11-11 | 2016-02-09 | 株式会社ディスコ | 筐体カバー機構 |
JP2013229462A (ja) * | 2012-04-26 | 2013-11-07 | Disco Abrasive Syst Ltd | 洗浄機構を備えた加工装置 |
KR102366283B1 (ko) * | 2020-06-22 | 2022-02-23 | 주식회사 네패스 | 반도체 패키지 및 그 제조 방법, 및 반도체 패키지 제조용 레이저 컷팅 장치 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08117704A (ja) * | 1994-10-27 | 1996-05-14 | Olympus Optical Co Ltd | 洗浄装置のシャッター |
JP2006339435A (ja) * | 2005-06-02 | 2006-12-14 | Disco Abrasive Syst Ltd | 洗浄装置を備えた加工機 |
-
2007
- 2007-11-20 JP JP2007300901A patent/JP4979550B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009129993A (ja) | 2009-06-11 |
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