JP4860991B2 - 光デバイス用検査装置 - Google Patents
光デバイス用検査装置 Download PDFInfo
- Publication number
- JP4860991B2 JP4860991B2 JP2005343488A JP2005343488A JP4860991B2 JP 4860991 B2 JP4860991 B2 JP 4860991B2 JP 2005343488 A JP2005343488 A JP 2005343488A JP 2005343488 A JP2005343488 A JP 2005343488A JP 4860991 B2 JP4860991 B2 JP 4860991B2
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- JP
- Japan
- Prior art keywords
- lens unit
- optical device
- probe card
- main board
- inspection apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Solid State Image Pick-Up Elements (AREA)
Description
2 センサ領域
3 電極パッド
4 光デバイス用検査装置
5 プローブカード
6 レンズユニット
7 プローブ
8 メイン基板
9 リングブッシュ
10 サブ基板
11 補強板
12 ガイド板
13 ウエハ
14 光源装置
15 カンチレバー型プローブ
16 プローブカード
17 光学装置
18 検査装置
19 レンズユニット
20 ガイド板により遮られた光の領域
21 照射領域
Claims (2)
- プローブカードとレンズユニットを備えた、受光素子を検査するための光デバイス用検査装置であって、上記プローブカードと上記レンズユニットは一体的に組み合わされ、上記プローブカードが、メイン基板、リングブッシュにより上記メイン基板に固定されたサブ基板、上記メイン基板を補強する補強板、および垂直型プローブが挿入され、保持されているガイド板からなり、上記メイン基板および上記補強板に設けられた開口部に上記レンズユニットが一体的に組み合わされており、上記レンズユニットから照射される光は、上記ガイド板の開口を通過することを特徴とする光デバイス用検査装置。
- 上記レンズユニットによって形成される照射領域が、上記ガイド板によって制限されることを特徴とする請求項1に記載の光デバイス用検査装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005343488A JP4860991B2 (ja) | 2005-11-29 | 2005-11-29 | 光デバイス用検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005343488A JP4860991B2 (ja) | 2005-11-29 | 2005-11-29 | 光デバイス用検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007150033A JP2007150033A (ja) | 2007-06-14 |
JP4860991B2 true JP4860991B2 (ja) | 2012-01-25 |
Family
ID=38211061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005343488A Active JP4860991B2 (ja) | 2005-11-29 | 2005-11-29 | 光デバイス用検査装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4860991B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017133081A1 (en) * | 2016-02-05 | 2017-08-10 | Dongfang Jingyuan Electron Limited | Multi-stage/multi-chamber electron-beam inspection system |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101277471B1 (ko) * | 2006-11-15 | 2013-06-20 | 재팬 일렉트로닉 메트리얼스 코오포레이숀 | 광 디바이스용 검사장치 |
JP5530122B2 (ja) * | 2009-05-18 | 2014-06-25 | 株式会社日本マイクロニクス | 光センサの試験装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0290645A (ja) * | 1988-09-28 | 1990-03-30 | Hitachi Ltd | 撮像素子の検査方法及びそれに使用する検査装置 |
JPH1126521A (ja) * | 1997-07-08 | 1999-01-29 | Sony Corp | 固体撮像素子の評価装置 |
JP2002164395A (ja) * | 2000-11-28 | 2002-06-07 | Sony Corp | 固体撮像素子の製造方法、固体撮像素子の測定方法及び測定装置 |
JP2004266250A (ja) * | 2003-02-12 | 2004-09-24 | Inter Action Corp | 固体撮像素子の試験装置、中継装置および光学モジュール |
-
2005
- 2005-11-29 JP JP2005343488A patent/JP4860991B2/ja active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017133081A1 (en) * | 2016-02-05 | 2017-08-10 | Dongfang Jingyuan Electron Limited | Multi-stage/multi-chamber electron-beam inspection system |
Also Published As
Publication number | Publication date |
---|---|
JP2007150033A (ja) | 2007-06-14 |
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