JP4751032B2 - 変位検出装置 - Google Patents
変位検出装置 Download PDFInfo
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- JP4751032B2 JP4751032B2 JP2004127205A JP2004127205A JP4751032B2 JP 4751032 B2 JP4751032 B2 JP 4751032B2 JP 2004127205 A JP2004127205 A JP 2004127205A JP 2004127205 A JP2004127205 A JP 2004127205A JP 4751032 B2 JP4751032 B2 JP 4751032B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
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- G05B2219/37112—Several scales with one device
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
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Description
λ/4波長板(WP2)と、光検出器(PD1〜4)とからなる。
y=rsinωt
x=rcosωt
の関係があるので、縦軸にsin、横軸にcosの値をとってある。
但し、下位アドレス≧上位アドレス又は
内挿データ=内挿数/4−arctan(上位アドレス/下位アドレス)・内挿数/2π
但し、下位アドレス<上位アドレス
この状態で得られる内挿データは、例えば、1周期移動したとしても、0〜1/4周期のデータが4回出力されるだけなので、1周期分のデータを得るにはオフセットを象限毎に加算すればよい。
Claims (7)
- 所定ピッチの目盛を記録したスケールと、
上記スケールに対して相対変位可能であり上記所定ピッチに応じた、90°位相が異なりsin(正弦波)とcos(余弦波)の関係になっているアナログの周期性信号を検出する第1のヘッドと、
上記スケールに対して相対変位可能であり上記所定ピッチに応じた上記アナログの周期性信号を検出する第2のヘッドと、
上記第1のヘッドが検出したアナログの周期性信号を所定クロックに同期してサンプリングして得た1回前の位置データと現在の位置データとの第1の差分値を検出する第1の処理手段と、
上記第2のヘッドが検出したアナログの周期性信号を上記所定クロックに同期してサンプリングして得た1回前の位置データと現在の位置データとの第2の差分値を検出する第2の処理手段と、
上記第1の処理手段が検出した第1の差分値又は上記第2の処理手段が検出した差分値を選択的に切り換える切り換え手段と、
光電スイッチで構成され、発光側から受光側に向かう光が遮光板により遮断されたか否かによって、上記第1のヘッド及び第2のヘッドに対して上記スケールが所定の位置に達したことを検出するスケール位置検出手段と、
上記スケール位置検出手段によって上記スケールが上記第1のヘッド及び第2のヘッドに対して所定の位置に達したことが検出されたときには上記切り換え手段に差分値の切り換えを選択的に行わせる切り換え制御手段と、
上記切り換え制御手段によって選択的に切り換えられて出力される第1の差分値又は第2の差分値を先の差分値に加算して位置情報を出力する加算手段と
を備え、
上記第1の処理手段及び上記第2の処理手段が上記位置データをサンプリングするのに用いるクロックを、位置検出対象の可動部が、上記第1の処理手段及び第2の処理手段のA/D変換器におけるA/D変換の量子化単位分移動するのに必要な時間に対応する周波数よりも高い周波数の同一クロックとし、
上記位置データ、上記第1の差分値及び上記第2の差分値の分解能を、上記加算手段から出力される位置情報の分解能よりも高くし、
上記第1のヘッドと上記第2のヘッドは、上記スケールの長さよりも短い間隔で離間されている変位検出装置。 - 上記スケール位置検出手段が上記第1のヘッド及び第2のヘッドに対して上記スケールが所定の位置に達したことを検出したとき、上記第1の処理手段及び第2の処理手段は第1の差分値及び第2の差分値を検出している請求項1記載の変位検出装置。
- 所定ピッチの目盛を記録したスケールと、
上記スケールに対して相対変位可能であり上記所定ピッチに応じた、90°位相が異なりsin(正弦波)とcos(余弦波)の関係になっているアナログの周期性信号を検出する3個以上のヘッドと、
上記3個以上のヘッドに各々接続し、該3個以上のヘッドが検出した上記アナログの周期性信号を所定クロックに同期してサンプリングして得た1回前の位置データと現在の位置データとの各差分値を検出する3個以上の処理手段と、
上記3個以上の処理手段が検出した各差分値を選択的に切り換える切り換え手段と、
光電スイッチで構成され、発光側から受光側に向かう光が遮光板により遮断されたか否かによって、上記3個以上のヘッドの内の隣合う2個のヘッドに対して上記スケールが所定の位置に達したことを検出するスケール位置検出手段と、
上記スケール位置検出手段によって上記スケールが上記隣合う2個のヘッドに対して所定の位置に達したことが検出されたときには上記切り換え手段に差分値の切り換えを選択的に行わせる切り換え制御手段と、
上記切り換え制御手段によって選択的に切り換えられて出力される差分値を先の差分値に加算して位置情報を出力する加算手段と
を備え、
上記3個以上の処理手段が上記位置データをサンプリングするのに用いるクロックを、位置検出対象の可動部が、該3個以上の処理手段のA/D変換器におけるA/D変換の量子化単位分移動するのに必要な時間に対応する周波数よりも高い周波数の同一クロックとし、
上記位置データ及び上記各差分値の分解能を、上記加算手段から出力される位置情報の分解能よりも高くし、
上記3個以上のヘッドの内の隣合う2個のヘッドは、上記スケールの長さよりも短い間隔で離間されている変位検出装置。 - 上記スケール位置検出手段が上記隣合う2個のヘッドに対して上記スケールが所定の位置に達したことを検出したとき、上記隣合う2個のヘッドに接続している2個の処理手段は差分値を検出している請求項3記載の変位検出装置。
- 所定ピッチの目盛を記録した複数m(mは自然数)個のスケールと、
上記複数のスケールに対して相対変位可能であり上記所定ピッチに応じた、90°位相が異なりsin(正弦波)とcos(余弦波)の関係になっているアナログの周期性信号を検出する複数n(nは自然数)個のヘッドと、
上記複数n個のヘッドに各々接続し、該n個のヘッドが検出した上記アナログの周期性信号を所定クロックに同期してサンプリングして得た1回前の位置データと現在の位置データとの各差分値を検出する複数n個の処理手段と、
上記複数n個の処理手段が検出した各差分値を選択的に切り換える切り換え手段と、
光電スイッチで構成され、発光側から受光側に向かう光が遮光板により遮断されたか否かによって、上記複数n個のヘッドの内の隣合う2個のヘッドに対して上記複数m個の内のいずれか一つのスケールが所定の位置に達したことを検出するスケール位置検出手段と、
上記スケール位置検出手段によって上記いずれか一つのスケールが上記隣合う2個のヘッドに対して所定の位置に達したことが検出されたときには上記切り換え手段に差分値の切り換えを選択的に行わせる切り換え制御手段と、
上記切り換え制御手段によって選択的に切り換えられて出力される差分値を先の差分値に加算して位置情報を出力する加算手段と
を備え、
上記複数n個の処理手段が上記位置データをサンプリングするのに用いるクロックを、位置検出対象の可動部が、該複数n個の処理手段のA/D変換器におけるA/D変換の量子化単位分移動するのに必要な時間に対応する周波数よりも高い周波数の同一クロックとし、
上記位置データ及び上記各差分値の分解能を、上記加算手段から出力される位置情報の分解能よりも高くし、
上記複数m個のスケールは同じ測定長を有し、上記複数n個のヘッドの内の隣合う2個のヘッドの間隔は、上記スケールの測定長よりも短い間隔で離間されている変位検出装置。 - 上記スケール位置検出手段が上記隣合う2個のヘッドに対して上記いずれかのスケールが所定の位置に達したことを検出したとき、上記隣合う2個のヘッドに接続している2個の処理手段は差分値を検出している請求項5記載の変位検出装置。
- 上記複数m個のスケールの内の隣合う二つのスケールは、上記隣合う2個のヘッドの間隔よりも短い間隔で離間されている請求項5記載の変位検出装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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JP2004127205A JP4751032B2 (ja) | 2004-04-22 | 2004-04-22 | 変位検出装置 |
TW094112270A TWI260395B (en) | 2004-04-22 | 2005-04-18 | Displacement detecting device |
KR1020050032325A KR101117241B1 (ko) | 2004-04-22 | 2005-04-19 | 변위 검출 장치 |
US11/109,911 US7238931B2 (en) | 2004-04-22 | 2005-04-19 | Displacement detection apparatus |
DE102005018807.9A DE102005018807B4 (de) | 2004-04-22 | 2005-04-22 | Verschiebungsermittlungsvorrichtung |
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JP2004127205A JP4751032B2 (ja) | 2004-04-22 | 2004-04-22 | 変位検出装置 |
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JP2005308592A JP2005308592A (ja) | 2005-11-04 |
JP4751032B2 true JP4751032B2 (ja) | 2011-08-17 |
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US (1) | US7238931B2 (ja) |
JP (1) | JP4751032B2 (ja) |
KR (1) | KR101117241B1 (ja) |
DE (1) | DE102005018807B4 (ja) |
TW (1) | TWI260395B (ja) |
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EP3270226A1 (en) * | 2006-02-21 | 2018-01-17 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
SG182982A1 (en) | 2006-08-31 | 2012-08-30 | Nikon Corp | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
TWI416269B (zh) | 2006-08-31 | 2013-11-21 | 尼康股份有限公司 | Mobile body driving method and moving body driving system, pattern forming method and apparatus, exposure method and apparatus, and component manufacturing method |
CN103645608B (zh) | 2006-08-31 | 2016-04-20 | 株式会社尼康 | 曝光装置及方法、组件制造方法以及决定方法 |
KR101452524B1 (ko) | 2006-09-01 | 2014-10-21 | 가부시키가이샤 니콘 | 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
TWI596656B (zh) | 2006-09-01 | 2017-08-21 | 尼康股份有限公司 | Moving body driving method and moving body driving system, pattern forming method and apparatus, exposure method and apparatus, element manufacturing method, and correction method |
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US8547527B2 (en) | 2007-07-24 | 2013-10-01 | Nikon Corporation | Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method |
WO2009013905A1 (ja) | 2007-07-24 | 2009-01-29 | Nikon Corporation | 位置計測システム、露光装置、位置計測方法、露光方法及びデバイス製造方法、並びに工具及び計測方法 |
JP5177449B2 (ja) | 2007-07-24 | 2013-04-03 | 株式会社ニコン | 移動体駆動方法及び移動体駆動システム、パターン形成方法及び装置、露光方法及び装置、並びにデバイス製造方法 |
US8194232B2 (en) | 2007-07-24 | 2012-06-05 | Nikon Corporation | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method |
US8711327B2 (en) * | 2007-12-14 | 2014-04-29 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
US8115906B2 (en) * | 2007-12-14 | 2012-02-14 | Nikon Corporation | Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method |
US8792079B2 (en) * | 2007-12-28 | 2014-07-29 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body |
US8237916B2 (en) * | 2007-12-28 | 2012-08-07 | Nikon Corporation | Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method |
NL1036662A1 (nl) * | 2008-04-08 | 2009-10-09 | Asml Netherlands Bv | Stage system and lithographic apparatus comprising such stage system. |
US8228482B2 (en) * | 2008-05-13 | 2012-07-24 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
US8817236B2 (en) | 2008-05-13 | 2014-08-26 | Nikon Corporation | Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method |
US8786829B2 (en) * | 2008-05-13 | 2014-07-22 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
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