JP4743495B2 - 流体加熱装置 - Google Patents
流体加熱装置 Download PDFInfo
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- JP4743495B2 JP4743495B2 JP2005199899A JP2005199899A JP4743495B2 JP 4743495 B2 JP4743495 B2 JP 4743495B2 JP 2005199899 A JP2005199899 A JP 2005199899A JP 2005199899 A JP2005199899 A JP 2005199899A JP 4743495 B2 JP4743495 B2 JP 4743495B2
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- 239000012530 fluid Substances 0.000 title claims description 133
- 238000010438 heat treatment Methods 0.000 title claims description 78
- 239000003973 paint Substances 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 16
- 230000005855 radiation Effects 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000003960 organic solvent Substances 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 12
- 239000011810 insulating material Substances 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 8
- 229920003002 synthetic resin Polymers 0.000 claims description 7
- 239000000057 synthetic resin Substances 0.000 claims description 7
- 230000020169 heat generation Effects 0.000 claims description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 39
- 238000004140 cleaning Methods 0.000 description 31
- 239000007788 liquid Substances 0.000 description 25
- 229910052736 halogen Inorganic materials 0.000 description 24
- 150000002367 halogens Chemical class 0.000 description 24
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 14
- 239000012298 atmosphere Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 10
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 4
- 239000004810 polytetrafluoroethylene Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
- F24H1/162—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled using electrical energy supply
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2245/00—Coatings; Surface treatments
- F28F2245/06—Coatings; Surface treatments having particular radiating, reflecting or absorbing features, e.g. for improving heat transfer by radiation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Instantaneous Water Boilers, Portable Hot-Water Supply Apparatuses, And Control Of Portable Hot-Water Supply Apparatuses (AREA)
- Resistance Heating (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
図1は、この発明に係る流体加熱装置の第1実施形態を適用した洗浄処理システムの全体を示す概略断面図、図2は、第1実施形態の流体加熱装置の要部を示す断面図、図3は、図2のI−I線に沿う断面図(a)及び(a)のII部拡大断面図(b)である。
図4は、この発明に係る流体加熱装置の第2実施形態を示す断面図(a)及び(a)のIII−III線に沿う断面図(b)、図5は、第2実施形態の流体加熱装置の要部を示す断面図(a)及び(a)のIV部拡大断面図である。
なお、上記実施形態では、この発明に係る流体加熱装置を半導体ウエハの洗浄処理システムに適用した場合について説明したが、この発明に係る流体加熱装置は、半導体ウエハ以外の被処理体例えばLCD基板等の被処理体の洗浄処理システムにも適用でき、また、その他の処理流体を用いた処理システムにも適用できる。例えば、IPAとN2ガスの混合流体(被加熱流体)の蒸気を用いたIPA乾燥処理システムにも適用できる。
23 ハロゲンランプ(熱源ランプ)
24 流入口
25 流出口
26,26A,26B 流路管
26a 直状管
27 黒色塗料(輻射光吸収塗料)
28 伝熱性金属部材
30 温度センサ(温度検出手段)
40 電流調整器(電流調整手段)
50 CPU(制御手段)
60 光反射部材
70,70A 螺旋管
71 内装管(耐薬品性合成樹脂製部材)
72 外装管(伝熱性金属部材)
Claims (10)
- 熱源ランプと、この熱源ランプを包囲すると共に、一端に有機溶剤を含む被加熱流体の流入口を有し、他端に被加熱流体の流出口を有する流路管と、を具備し、有機溶剤の蒸気を生成する流体加熱装置であって、
上記流路管は、螺旋状の管にて形成されると共に、少なくとも上記熱源ランプと対向する面に輻射光吸収塗料が塗布され、
上記熱源ランプと流路管は筒状容器によって包囲され、上記筒状容器中にはガス供給部から不活性ガスを供給してなり、上記筒状容器の外側の上記流出口側付近に、上記流路管内を流れる流体の温度を検出する温度検出手段を配設してなる、ことを特徴とする流体加熱装置。 - 請求項1記載の流体加熱装置において、
上記筒状容器の両開口端部は、それぞれ断熱材を固定した端部材によって閉塞されており、上記流路管の一端は、上記筒状容器の一方の上記端部材及び上記断熱材を貫通して上記流入口を形成し、上記流路管の他端は、上記筒状容器の他方の上記端部材及び上記断熱材を貫通して上記流出口を形成してなる、ことを特徴とする流体加熱装置。 - 請求項1又は2記載の流体加熱装置において、
上記流路管は、上記熱源ランプの同心円上において接触する螺旋状の管にて形成されている、ことを特徴とする流体加熱装置。 - 熱源ランプと、この熱源ランプを包囲すると共に、一端に有機溶剤を含む被加熱流体の流入口を有し、他端に被加熱流体の流出口を有する流路管と、を具備し、有機溶剤の蒸気を生成する流体加熱装置であって、
上記流路管は、上記熱源ランプの同心円上に接触して配列された複数の直状管群にて形成されると共に、少なくとも上記熱源ランプと対向する面に輻射光吸収塗料が塗布され、
上記熱源ランプと流路管は筒状容器によって包囲され、上記筒状容器中にはガス供給部から不活性ガスを供給してなり、上記筒状容器の外側の上記流出口側付近に、上記流路管内を流れる流体の温度を検出する温度検出手段を配設してなる、ことを特徴とする流体加熱装置。 - 請求項4記載の流体加熱装置において、
上記筒状容器の内壁には断熱材が固定され、上記流出口は上記筒状容器の内部に配置されており、上記筒状容器の内壁及び上記断熱材を貫通して上記流入口に接続される管路に、温度検出手段を配設してなる、ことを特徴とする流体加熱装置。 - 請求項1ないし5のいずれかに記載の流体加熱装置において、
上記被加熱流体は、上記流路管の流入口に接続された混合流体生成手段によって生成される有機溶剤と不活性ガスの混合流体である、ことを特徴とする流体加熱装置。 - 請求項1ないし6のいずれかに記載の流体加熱装置において、
上記流路管を耐薬品性の合成樹脂で形成する、ことを特徴とする流体加熱装置。 - 請求項7記載の流体加熱装置において、
上記流路管の表面を被覆する伝熱性金属部材を更に具備すると共に、この伝熱性金属部材上に上記輻射光吸収塗料が塗布される、ことを特徴とする流体加熱装置。 - 請求項1ないし8のいずれかに記載の流体加熱装置において、
上記筒状容器の内壁面に配設される光反射部材を更に具備する、ことを特徴とする流体加熱装置。 - 請求項1ないし9のいずれかに記載の流体加熱装置において、
上記熱源ランプの発熱量を調整する電流調整手段と、
上記温度検出手段によって検出された温度に基づいて上記電流調整手段に制御信号を伝達して上記流体の温度を制御する制御手段と、を更に具備することを特徴とする流体加熱装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005199899A JP4743495B2 (ja) | 2005-07-08 | 2005-07-08 | 流体加熱装置 |
KR1020060059168A KR101123994B1 (ko) | 2005-07-08 | 2006-06-29 | 유체 가열 장치 |
US11/481,253 US7593625B2 (en) | 2005-07-08 | 2006-07-06 | Fluid heating apparatus |
EP06014160A EP1741995A3 (en) | 2005-07-08 | 2006-07-07 | Fluid heating apparatus |
CNB2006101054930A CN100554760C (zh) | 2005-07-08 | 2006-07-07 | 流体加热设备 |
TW095124856A TW200716923A (en) | 2005-07-08 | 2006-07-07 | Fluid heating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005199899A JP4743495B2 (ja) | 2005-07-08 | 2005-07-08 | 流体加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007017098A JP2007017098A (ja) | 2007-01-25 |
JP4743495B2 true JP4743495B2 (ja) | 2011-08-10 |
Family
ID=37124282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005199899A Active JP4743495B2 (ja) | 2005-07-08 | 2005-07-08 | 流体加熱装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7593625B2 (ja) |
EP (1) | EP1741995A3 (ja) |
JP (1) | JP4743495B2 (ja) |
KR (1) | KR101123994B1 (ja) |
CN (1) | CN100554760C (ja) |
TW (1) | TW200716923A (ja) |
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2006
- 2006-06-29 KR KR1020060059168A patent/KR101123994B1/ko active IP Right Grant
- 2006-07-06 US US11/481,253 patent/US7593625B2/en active Active
- 2006-07-07 CN CNB2006101054930A patent/CN100554760C/zh active Active
- 2006-07-07 EP EP06014160A patent/EP1741995A3/en not_active Withdrawn
- 2006-07-07 TW TW095124856A patent/TW200716923A/zh unknown
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Also Published As
Publication number | Publication date |
---|---|
KR101123994B1 (ko) | 2012-03-23 |
US20070017502A1 (en) | 2007-01-25 |
EP1741995A3 (en) | 2007-08-01 |
US7593625B2 (en) | 2009-09-22 |
EP1741995A2 (en) | 2007-01-10 |
CN100554760C (zh) | 2009-10-28 |
TWI297762B (ja) | 2008-06-11 |
JP2007017098A (ja) | 2007-01-25 |
CN1892094A (zh) | 2007-01-10 |
KR20070006558A (ko) | 2007-01-11 |
TW200716923A (en) | 2007-05-01 |
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