JP4692598B2 - Vibrator support mechanism and vibrator unit - Google Patents

Vibrator support mechanism and vibrator unit Download PDF

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JP4692598B2
JP4692598B2 JP2008221029A JP2008221029A JP4692598B2 JP 4692598 B2 JP4692598 B2 JP 4692598B2 JP 2008221029 A JP2008221029 A JP 2008221029A JP 2008221029 A JP2008221029 A JP 2008221029A JP 4692598 B2 JP4692598 B2 JP 4692598B2
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vibrator
elastic mechanism
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arm
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裕介 木下
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Seiko Epson Corp
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Description

本発明は、物体の姿勢、速度及び位置を検出するためのジャイロ振動子のような振動子を支持するための支持機構、並びに前記振動子及び前記支持機構を含む振動子ユニットに関する。   The present invention relates to a support mechanism for supporting a vibrator such as a gyro vibrator for detecting the posture, speed, and position of an object, and a vibrator unit including the vibrator and the support mechanism.

上記したジャイロ振動子は、一の方向に沿った自己の振動中に外部から加えられた回転に対応してコリオリ力が作用する駆動部、及び前記コリオリ力を検出すべく前記コリオリ力に連動して振動する検出部の両部を支持する支持部を有する。前記ジャイロ振動子は、当該支持部が前記ジャイロ振動子を載置するための基板に設けられた支持機構に支持されることにより前記基板に載置されている。   The gyro vibrator described above is linked to the Coriolis force in order to detect the Coriolis force, and a drive unit in which the Coriolis force acts in response to rotation applied from the outside during its own vibration along one direction. It has a support part which supports both parts of the detecting part which vibrates. The gyro vibrator is placed on the substrate by the support portion being supported by a support mechanism provided on the substrate for placing the gyro vibrator.

しかしながら、上記した支持機構は、前記ジャイロ振動子を固定的に支持していることから、前記ジャイロ振動子の前記駆動部あるいは検出部の振動が規制又は阻害されるという問題があった。加えて、前記振動の阻害を緩和することのみを企図して前記支持機構の剛性を低下させると、耐衝撃性を始めとする信頼性を低下させてしまうという問題があった。   However, since the above-described support mechanism supports the gyro vibrator fixedly, there is a problem that vibration of the drive unit or the detection unit of the gyro vibrator is restricted or inhibited. In addition, if the rigidity of the support mechanism is reduced only in order to alleviate the inhibition of the vibration, there is a problem that reliability including impact resistance is lowered.

上記課題を解決すべく、本発明に係る第１の振動子の支持機構は、自己の振動により、与えられた回転に応じて第１の方向にコリオリ力が作用する駆動部と、前記駆動部に作用するコリオリ力の大きさの検出のために前記コリオリ力に応じて前記第１の方向と同一又は垂直な第２の方向に振動する検出部と、前記駆動部及び前記検出部を支持するための支持部とを含む前記振動子を前記支持部を介して支持すべく前記振動子を設置するための基板に設けられた振動子の支持機構であって、前記支持機構は、前記第１の方向及び前記第２の方向のうちの少なくとも一つの方向に沿った振動の固有共振周波数が、前記一つの方向以外の方向に沿った振動の固有共振周波数より低いことを特徴とする。   In order to solve the above problems, a support mechanism for a first vibrator according to the present invention includes a drive unit in which a Coriolis force acts in a first direction according to a given rotation due to its own vibration, and the drive unit. A detection unit that vibrates in a second direction that is the same as or perpendicular to the first direction according to the Coriolis force, and that supports the drive unit and the detection unit. A support mechanism for a vibrator provided on a substrate for installing the vibrator to support the vibrator including the support section for supporting the vibrator through the support section. The natural resonance frequency of vibration along at least one of the second direction and the second direction is lower than the natural resonance frequency of vibration along a direction other than the one direction.

本発明に係る第２の振動子の支持機構は、第１の方向に沿った振動により、前記第１の方向に垂直な第２の方向を軸として与えられた回転に応じて前記第１の方向及び前記第２の方向に垂直な第３の方向にコリオリ力が作用する駆動部と、前記駆動部に作用するコリオリ力の大きさの検出のために前記コリオリ力に応じて前記第１の方向に沿って振動する検出部と、前記駆動部及び前記検出部を支持するための支持部とを含む前記振動子を前記支持部を介して支持すべく前記振動子を設置するための基板に設けられた振動子の支持機構であって、前記支持機構は、前記第１の方向に沿った振動の固有共振周波数が、前記第３の方向に沿った振動の固有共振周波数より低いことを特徴とする。   The support mechanism for the second vibrator according to the present invention may be configured such that the vibration in the first direction causes the first vibrator to rotate according to a rotation given about a second direction perpendicular to the first direction. A drive unit in which a Coriolis force acts in a third direction perpendicular to the direction and the second direction, and the first unit according to the Coriolis force for detecting the magnitude of the Coriolis force acting on the drive unit. A substrate for installing the vibrator to support the vibrator including the detection section that vibrates along a direction and a support section for supporting the drive section and the detection section via the support section. A support mechanism for a vibrator provided, wherein the support mechanism has a natural resonance frequency of vibration along the first direction lower than a natural resonance frequency of vibration along the third direction. And

本発明に係る第３の振動子の支持構造は、第１の方向に沿った振動により、前記第１の方向に垂直な第２の方向を軸として与えられた回転に応じて前記第１の方向及び前記第２の方向に垂直な第３の方向にコリオリ力が作用する駆動部と、前記駆動部に作用するコリオリ力の大きさの検出のために前記コリオリ力に応じて前記第１の方向に沿って振動する検出部と、前記駆動部及び前記検出部を支持するための支持部とを含む前記振動子を前記支持部を介して支持すべく前記振動子を設置するための基板に設けられた前記支持機構であって、
前記駆動部は、前記第３の方向に沿って互いに平行に配置された棒状の第１の駆動腕部と第２の駆動腕部を有し、
前記検出部は、前記第１の駆動腕部及び前記第２の駆動腕部間で前記両駆動腕部に平行に配置された棒状の検出腕部を有し、
前記振動子は、さらに、一端が前記第１の駆動腕部の中心に接続され、他端が前記第２の駆動腕部の中心に接続され、中心が前記検出腕部の中心に接続された、前記第１の方向に平行な棒状の腕支持部を含み、
前記支持機構は、前記腕支持部及び前記検出腕部が接続される前記両部の中心で前記両部を支持すべく、前記第３の方向に沿って前記支持部を支持する第１の弾性機構と、前記第１の方向に沿って前記支持部を支持する第２の弾性機構を備えることを特徴とする。
 The support structure of the third vibrator according to the present invention has the first vibrator according to the rotation given about the second direction perpendicular to the first direction by the vibration along the first direction. A drive unit in which a Coriolis force acts in a third direction perpendicular to the direction and the second direction, and the first unit according to the Coriolis force for detecting the magnitude of the Coriolis force acting on the drive unit. A substrate for installing the vibrator to support the vibrator including the detection section that vibrates along a direction and a support section for supporting the drive section and the detection section via the support section. The support mechanism provided,
The drive unit includes a rod-shaped first drive arm unit and a second drive arm unit arranged in parallel to each other along the third direction,
The detection unit includes a rod-shaped detection arm unit disposed between the first drive arm unit and the second drive arm unit in parallel with the two drive arm units,
The vibrator further has one end connected to the center of the first drive arm, the other end connected to the center of the second drive arm, and the center connected to the center of the detection arm. A rod-like arm support portion parallel to the first direction,
The support mechanism includes a first elastic member that supports the support portion along the third direction so as to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. A mechanism and a second elastic mechanism for supporting the support portion along the first direction are provided.

前記支持機構は、前記第２の弾性機構による前記第１の方向に沿った振動の固有共振周波数が、前記第１の弾性機構による前記第３の方向に沿った振動の固有共振周波数より低いことを特徴とする。
In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. It is characterized by.

前記第２の弾性機構の幅は、前記第１の弾性機構の幅より狭いことを特徴とする。
The width of the second elastic mechanism is narrower than the width of the first elastic mechanism.

前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が相互に異なる部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has portions having different widths.

前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が不均一であることを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width.

前記第１の弾性機構及び前記第２の弾性機構の各々は、くびれ部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a constricted portion.

前記第１の弾性機構及び前記第２の弾性機構の各々は、中空部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a hollow portion.

前記第１の弾性機構及び前記第２の弾性機構の各々は、屈曲部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a bent portion.

前記第１の弾性機構を構成する材料と前記第２の弾性機構を構成する材料とは、前記第２の弾性機構の固有共振周波数を前記第１の弾性機構の固有共振周波数より低くする関係にあることを特徴とする。
The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. It is characterized by being.

本発明に係る第３の振動子ユニットは、第１の方向に沿った振動により、前記第１の方向に垂直な第２の方向を軸として与えられた回転に応じて前記第１の方向及び前記第２の方向に垂直な第３の方向にコリオリ力が作用する駆動部であって、前記第３の方向に平行に配置され、互いに平行に配置された棒状の第１の駆動腕部と第２の駆動腕部からなる駆動部と、
前記駆動部に作用するコリオリ力の大きさの検出のために前記コリオリ力に応じて前記第１の方向に沿って振動する検出部であって、前記第１の駆動腕部及び前記第２の駆動腕部間で前記両駆動腕部に平行に配置された棒状の検出腕部からなる検出部と、
前記駆動部及び前記検出部を支持するための支持部と、
一端が前記第１の駆動腕部の中心に接続され、他端が前記第２の駆動腕部の中心に接続され、中心が前記検出腕部の中心に接続された、前記第１の方向に平行な棒状の腕支持部を含む振動子と、
前記振動子を設置するための基板とを備え、
前記腕支持部及び前記検出腕部が接続される前記両部の中心で前記両部を支持すべく、一端が前記支持部に接続され、他端が前記基板に接続され、前記第３の方向に沿って前記支持部を支持する第１の弾性機構と、前記第１の方向に沿って前記支持部を支持する第２の弾性機構を含む支持機構を含むことを特徴とする。
The third vibrator unit according to the present invention has the first direction according to the rotation given about the second direction perpendicular to the first direction by the vibration along the first direction and the second direction. A drive unit in which Coriolis force acts in a third direction perpendicular to the second direction, and is arranged in parallel with the third direction and has a rod-shaped first drive arm unit arranged in parallel with each other; A drive unit comprising a second drive arm unit;
A detection unit that vibrates along the first direction in accordance with the Coriolis force to detect the magnitude of the Coriolis force acting on the drive unit, the first drive arm unit and the second drive unit A detection unit composed of a rod-shaped detection arm unit disposed between the drive arm units in parallel with the two drive arm units;
A support unit for supporting the drive unit and the detection unit;
One end is connected to the center of the first drive arm, the other end is connected to the center of the second drive arm, and the center is connected to the center of the detection arm in the first direction. A vibrator including parallel rod-shaped arm support portions;
A substrate for installing the vibrator,
One end is connected to the support portion, the other end is connected to the substrate, and the third direction is supported to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. A support mechanism including a first elastic mechanism that supports the support portion along the first direction and a second elastic mechanism that supports the support portion along the first direction.

前記支持機構は、前記第２の弾性機構による前記第１の方向に沿った振動の固有共振周波数が、前記第１の弾性機構による前記第３の方向に沿った振動の固有共振周波数より低いことを特徴とする。
In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. It is characterized by.

前記第２の弾性機構の幅は、前記第１の弾性機構の幅より狭いことを特徴とする。
The width of the second elastic mechanism is narrower than the width of the first elastic mechanism.

前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が相互に異なる部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has portions having different widths.

前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が不均一であることを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width.

前記第１の弾性機構及び前記第２の弾性機構の各々は、くびれ部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a constricted portion.

前記第１の弾性機構及び前記第２の弾性機構の各々は、中空部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a hollow portion.

前記第１の弾性機構及び前記第２の弾性機構の各々は、屈曲部分を有することを特徴とする。
Each of the first elastic mechanism and the second elastic mechanism has a bent portion.

前記第１の弾性機構を構成する材料と前記第２の弾性機構を構成する材料とは、前記第２の弾性機構の固有共振周波数を前記第１の弾性機構の固有共振周波数より低くする関係にあることを特徴とする。
以上

The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. It is characterized by being.
more than

図３は、駆動アームの動作とコリオリ力との関係を示す。図３に示されるように、第１の駆動アーム１１Ａが点線で示された形状から実線で示された形状へ変化しており、第２の駆動アーム１１Ｂも点線で示された形状から実線で示された形状へ変化しているとき、紙面内時計回り方向の回転が加えられると、コリオリ力は、図３の矢印１９Ａ、１９Ｂで示される方向に発生する。他方で、第１の駆動アーム１１Ａが実線で示された形状から点線で示された形状へ変化し、第２の駆動アーム１１Ｂが実線で示された形状から点線で示された形状へ変化しているとき、紙面内時計回り方向の回転が加えられると、コリオリ力は、図３の矢印１９Ａ、１９Ｂとは反対方向に発生する。   FIG. 3 shows the relationship between the operation of the drive arm and the Coriolis force. As shown in FIG. 3, the first drive arm 11A is changed from the shape shown by the dotted line to the shape shown by the solid line, and the second drive arm 11B is changed from the shape shown by the dotted line to the solid line. When changing to the shape shown, if a clockwise rotation in the paper is applied, a Coriolis force is generated in the direction indicated by arrows 19A, 19B in FIG. On the other hand, the first drive arm 11A changes from the shape indicated by the solid line to the shape indicated by the dotted line, and the second drive arm 11B changes from the shape indicated by the solid line to the shape indicated by the dotted line. When a clockwise rotation in the paper is applied, the Coriolis force is generated in the direction opposite to the arrows 19A and 19B in FIG.

検出アーム１２は、第１の駆動アーム１１Ａ及び第２の駆動アーム１１Ｂと同様に、図示のＹ方向に沿って延在している、所定長を有する板部材である。即ち、第１の駆動アーム１１Ａ、第２の駆動アーム１１Ｂ、及び検出アーム１２は、相互に平行である。検出アーム１２は、第１及び第２の駆動アーム１１Ａ、１１Ｂに働く前記コリオリ力を検出すべく、第１及び第２の駆動アーム１１Ａ、１１Ｂからアーム支持部１３を経て伝播される前記コリオリ力に応答して、当該コリオリ力の大きさに対応する振動を行なう。   Similar to the first drive arm 11A and the second drive arm 11B, the detection arm 12 is a plate member having a predetermined length extending along the Y direction shown in the drawing. That is, the first drive arm 11A, the second drive arm 11B, and the detection arm 12 are parallel to each other. The detection arm 12 transmits the Coriolis force transmitted from the first and second drive arms 11A and 11B via the arm support portion 13 so as to detect the Coriolis force acting on the first and second drive arms 11A and 11B. In response to this, vibration corresponding to the magnitude of the Coriolis force is performed.

図４は、検出アームの動作を示す。検出アーム１２は、図４（Ａ）〜（Ｃ）に示されるように、図３（Ａ）〜（Ｃ）で示した第１及び第２の駆動アーム１１Ａ、１１Ｂの屈曲動作と同様に、概ねＳ字状及び逆Ｓ字状に変形するという屈曲動作を行なう。検出アーム１２による前記屈曲動作回転により発生する電気信号を検出することにより前記コリオリ力の大きさを知得し、これにより、前記物品に加えれた回転の大きさを認識する。   FIG. 4 shows the operation of the detection arm. As shown in FIGS. 4 (A) to (C), the detection arm 12 is similar to the bending operation of the first and second drive arms 11A and 11B shown in FIGS. 3 (A) to (C). A bending operation of deforming into an approximately S shape and an inverted S shape is performed. The magnitude of the Coriolis force is obtained by detecting an electrical signal generated by the rotation of the bending motion by the detection arm 12, thereby recognizing the magnitude of the rotation applied to the article.

図１（Ａ）に戻り、アーム支持部１３は、一端が第１の駆動アーム１１Ａの中心に接続されており、他端が第２の駆動アーム１１Ｂの中心に接続されており、検出アーム１２は、その中心がアーム支持部１３の中心と一致するように接続されている。支持板１４は、アーム支持部１３と検出アーム１２との接続点を含む所定の面積を有する板状部材である。   Returning to FIG. 1A, the arm support portion 13 has one end connected to the center of the first drive arm 11A and the other end connected to the center of the second drive arm 11B. Are connected so that the center thereof coincides with the center of the arm support portion 13. The support plate 14 is a plate-like member having a predetermined area including a connection point between the arm support portion 13 and the detection arm 12.

Ｘ方向に延在するリード線１５Ａ、１５Ｂ及びＹ方向に延在する１６Ａ、及び１６Ｂは、相互に同一の形状を有する帯状部材である。また、リード線１５Ａ、１５Ｂは、図１（Ｂ）に示されるように、一端が支持板１４の対応する辺の近傍に接続されており、他端が支持基板１７に接続されており、振動子１０と支持基板１７が接触しないように成型されている。リード線１６Ａ、１６Ｂもリード線１５Ａ、１５Ｂと同様に、一端が支持板１４に接続され、他端が支持基板１７に接続されており、振動子１０と支持基板１７が接触しないように成型されている。支持基板１７は、例えば、従来知られたポリイミド樹脂など絶縁体からなる基板であり、その中央には、リード線１５Ａ等の成型のための開口部１８が規定されている。   Lead wires 15A and 15B extending in the X direction and 16A and 16B extending in the Y direction are belt-like members having the same shape. In addition, as shown in FIG. 1B, the lead wires 15A and 15B have one end connected to the vicinity of the corresponding side of the support plate 14 and the other end connected to the support substrate 17 so as to vibrate. The child 10 and the support substrate 17 are molded so as not to contact each other. Similarly to the lead wires 15A and 15B, the lead wires 16A and 16B have one end connected to the support plate 14 and the other end connected to the support substrate 17 so that the vibrator 10 and the support substrate 17 are not in contact with each other. ing. The support substrate 17 is, for example, a conventionally known substrate made of an insulator such as polyimide resin, and an opening 18 for molding the lead wire 15A and the like is defined in the center thereof.

Ｘ方向に沿って設けられたリード線１５Ａ及び１５Ｂは、その固有共振周波数が、Ｙ方向に沿って設けられたリード線１６Ａ及び１６Ｂのそれよりも低くなるような材料を有する。即ち、リード線１５Ａ、１５ＢがＸ方向についてジャイロ振動子１０を支持する剛性は、リード線１６Ａ、１６ＢがＹ方向についてジャイロ振動子１０を支持する剛性より低くなっている。   The lead wires 15A and 15B provided along the X direction have a material whose natural resonance frequency is lower than that of the lead wires 16A and 16B provided along the Y direction. That is, the rigidity with which the lead wires 15A and 15B support the gyro vibrator 10 in the X direction is lower than the rigidity with which the lead wires 16A and 16B support the gyro vibrator 10 in the Y direction.

上記したように、実施例１の振動子ユニットによれば、支持機構のＸ方向の固有共振周波数がＹ方向のそれより低いことから、駆動アーム１１Ａ、１１Ｂに働くコリオリ力の検出のために検出アーム１２が行なうＸ方向に沿った振動を妨げることを回避し、これにより、外部から前記物体に与えられた回転の大きさを従来に比して高精度に検出することが可能となる。   As described above, according to the vibrator unit of the first embodiment, since the natural resonance frequency in the X direction of the support mechanism is lower than that in the Y direction, it is detected for detecting the Coriolis force acting on the drive arms 11A and 11B. This prevents the arm 12 from interfering with the vibration along the X direction, and thereby the magnitude of the rotation applied to the object from the outside can be detected with higher accuracy than in the past.

［実施例２］
図５（Ａ）及び図５（Ｂ）は、実施例２の振動子ユニットを示す。図５（Ａ）に示されるように、実施例２のジャイロ振動子２０は、図１（Ａ）に示されたジャイロ振動子１０を構成する第１の駆動アーム１１Ａ、第２の駆動アーム１１Ｂ、検出アーム１２、アーム支持部１３、及び支持板１４の各々と同様な機能を有する、第１の駆動アーム２１Ａ、第２の駆動アーム２１Ｂ、検出アーム２２、アーム支持部２３、及び支持板２４を有する。ジャイロ振動子２０は、ジャイロ振動子１０の支持板１４を支持するリード線１５Ａ、１５Ｂ、１６Ａ、及び１６Ｂと同様に、Ｘ方向にジャイロ振動子２０を支持するリード線２５Ａ及び２５Ｂ、並びにＹ方向にジャイロ振動子２０を支持する２６Ａ及び２６Ｂにより支持されている。 [Example 2]
5A and 5B show the vibrator unit of the second embodiment. As shown in FIG. 5A, the gyro vibrator 20 of the second embodiment includes a first drive arm 11A and a second drive arm 11B that constitute the gyro vibrator 10 shown in FIG. The first drive arm 21A, the second drive arm 21B, the detection arm 22, the arm support unit 23, and the support plate 24 having the same functions as the detection arm 12, the arm support unit 13, and the support plate 14, respectively. Have Similarly to the lead wires 15A, 15B, 16A, and 16B that support the support plate 14 of the gyro vibrator 10, the gyro vibrator 20 includes lead wires 25A and 25B that support the gyro vibrator 20 in the X direction, and the Y direction. The gyro vibrator 20 is supported by 26A and 26B.

第２の弾性機構であるリード線２５Ａ、２５Ｂの幅は、第１の弾性機構である２６Ａ、及び２６Ｂのそれより狭い。これにより、支持機構のＸ方向についての振動の固有振動周波数は、Ｙ方向についてのそれより低くなることから、駆動アーム２１Ａ及び２１Ｂに働くコリオリ力の検出のための、検出アーム２２によるＸ方向に沿った振動を妨害しない。   The widths of the lead wires 25A and 25B as the second elastic mechanism are narrower than those of the first elastic mechanisms 26A and 26B. As a result, the natural vibration frequency of the vibration in the X direction of the support mechanism is lower than that in the Y direction, so that the detection arm 22 detects the Coriolis force acting on the drive arms 21A and 21B in the X direction. Do not disturb the vibration along.

実施例２の他のジャイロ振動子３０は、図５（Ｂ）に示されるように、図１（Ａ）に示されたジャイロ振動子１０を構成する第１の駆動アーム１１Ａ、第２の駆動アーム１１Ｂ、検出アーム１２、アーム支持部１３、及び支持板１４と同様な機能を有する、第１の駆動アーム３１Ａ、第２の駆動アーム３１Ｂ、検出アーム３２、アーム支持部３３、及び支持板３４を有する。ジャイロ振動子３０は、ジャイロ振動子１０の支持板１４をＹ方向に支持するリード線１６Ａ及び１６Ｂと同様に、Ｙ方向にジャイロ振動子３０を支持する３５Ａ、３５Ｂ、３６Ａ、及び３６Ｂのみにより支持されており、Ｘ方向には支持されていない。   As shown in FIG. 5B, the other gyro vibrator 30 of the second embodiment includes a first drive arm 11A and a second drive that constitute the gyro vibrator 10 shown in FIG. The first drive arm 31A, the second drive arm 31B, the detection arm 32, the arm support portion 33, and the support plate 34 having the same functions as the arm 11B, the detection arm 12, the arm support portion 13, and the support plate 14. Have The gyro vibrator 30 is supported only by 35A, 35B, 36A, and 36B that supports the gyro vibrator 30 in the Y direction, similarly to the lead wires 16A and 16B that support the support plate 14 of the gyro vibrator 10 in the Y direction. Is not supported in the X direction.

第１の弾性機構である、相互に平行なリード線３５Ａ、３５Ｂ、並びに相互に平行な３５Ａ、及び３５Ｂは、Ｙ方向のみについてジャイロ振動子３０を支持する。従って、駆動アーム３１Ａ及び３１Ｂに働くコリオリ力の検出のために検出アーム３２がＸ方向について行なう振動は、何ら妨げを受けない。   The lead wires 35A and 35B parallel to each other and the mutually parallel leads 35A and 35B, which are the first elastic mechanism, support the gyro vibrator 30 only in the Y direction. Therefore, the vibration that the detection arm 32 performs in the X direction for detecting the Coriolis force acting on the drive arms 31A and 31B is not hindered at all.

上記したように、実施例２の振動子ユニットによれば、ジャイロ振動子２０は、Ｙ方向については、リード線２６Ａ及び２６Ｂにより支持され、Ｘ方向については、その固有共振周波数がリード線２６Ａ及び２６Ｂのそれより低いリード線２５Ａ及び２５Ｂにより支持されることから、第１の実施例の振動子ユニット１００の検出アーム１２と同様に、検出アーム２２によるＸ方向に沿った振動を阻害せず、これにより、外部から加えられる回転を従来より精度高く検出することが可能になる。   As described above, according to the vibrator unit of the second embodiment, the gyro vibrator 20 is supported by the lead wires 26A and 26B in the Y direction, and its natural resonance frequency is the lead wire 26A and the lead wire 26A in the X direction. Since it is supported by the lead wires 25A and 25B lower than that of 26B, similarly to the detection arm 12 of the transducer unit 100 of the first embodiment, the vibration along the X direction by the detection arm 22 is not inhibited, This makes it possible to detect rotation applied from the outside with higher accuracy than in the past.

また、実施例２の他の振動子ユニットによれば、ジャイロ振動子３０は、Ｙ方向についてのみリード線３５Ａ、３５Ｂ、３６Ａ、及び３６Ｂにより支持され、Ｘ方向については何ら支持されず、即ちＸ方向については動作の規制を何ら受けないことから、Ｘ方向に沿った検出アーム３２の振動を阻まず、この結果、外部から加えられた回転を従来に比して高精度に検出することが可能になる。   Further, according to another vibrator unit of the second embodiment, the gyro vibrator 30 is supported by the lead wires 35A, 35B, 36A, and 36B only in the Y direction, and is not supported at all in the X direction, that is, X Since the direction is not subject to any movement restriction, the vibration of the detection arm 32 along the X direction is not obstructed, and as a result, the externally applied rotation can be detected with higher accuracy than in the past. become.

［実施例３］
図６（Ａ）〜（Ｄ）は、実施例３のジャイロ振動子を支持するリード線の構成を示す。図６（Ａ）に示されるように、実施例１のリード線１５Ａ等の機能と同様な機能を有するリード線４０は、リード線１５Ａ等より厚さ（紙面の奥行き方向の長さ）が小さい。 [Example 3]
6A to 6D show the configuration of a lead wire that supports the gyro vibrator of the third embodiment. As shown in FIG. 6A, the lead wire 40 having the same function as the lead wire 15A of the first embodiment has a smaller thickness (length in the depth direction of the paper surface) than the lead wire 15A or the like. .

図６（Ｂ）に示されるように、実施例１のリード線１５Ａ等の機能と同様な機能を有するリード線５０は、その長手方向に沿ってくびれた部分を少なくとも１つ以上有する。換言すれば、くびれを有しない箇所の幅とくびれを有する箇所の幅とが異なっており、即ち、リード線５０の幅が不均一となっている。くびれの例としては、例えば、図示された湾曲状のくびれ、及びくさび型のくびれが挙げられる。   As shown in FIG. 6B, the lead wire 50 having a function similar to that of the lead wire 15A and the like of the first embodiment has at least one portion narrowed along the longitudinal direction. In other words, the width of the portion having no constriction is different from the width of the portion having constriction, that is, the width of the lead wire 50 is not uniform. Examples of the constriction include, for example, the illustrated curved constriction and a wedge-shaped constriction.

図６（Ｃ）に示されるように、実施例１のリード線１５Ａと同様な機能を有するリード線６０は、その長手方向に沿って中空である部分６１を有する。   As shown in FIG. 6C, the lead wire 60 having the same function as the lead wire 15A of the first embodiment has a portion 61 that is hollow along its longitudinal direction.

図６（Ｄ）に示されるように、実施例１のリード線１５Ａ等と同様な機能を有するリード線７０は、図６（Ｃ）に図示された長手方向に沿った中空６１に代えて、その中央に菱形状の中空７１を有する。   As shown in FIG. 6D, the lead wire 70 having the same function as the lead wire 15A of the first embodiment is replaced with the hollow 61 along the longitudinal direction shown in FIG. A diamond-shaped hollow 71 is provided at the center.

上記したように、実施例３のリード線を有する振動子ユニットによれば、ジャイロ振動子は、屈曲し易い構造を有するリード線４０、５０、６０、又は７０により支持されることから、実施例１及び実施例２の振動子ユニットと同様に、検出アームによる検出のための振動を阻害せず、これにより、外部からの回転を従来に比して高精度に検出することが可能になる。   As described above, according to the vibrator unit having the lead wire of the third embodiment, the gyro vibrator is supported by the lead wires 40, 50, 60, or 70 having a structure that is easily bent. Similar to the vibrator unit of the first and second embodiments, the vibration for detection by the detection arm is not hindered, and this makes it possible to detect rotation from the outside with higher accuracy than in the past.

［実施例４］
図７は、実施例４の振動子ユニットの構成を示す断面図である。図７に示されるように、実施例４の振動子ユニットは、実施例１の図１（Ｂ）に示されるジャイロ振動子１０、リード線１５Ａ及び１５Ｂ、並びに支持基板１７と同様な機能を有する、ジャイロ振動子７０、リード線７５Ａ及び７５Ｂ、並びに支持基板７７を有する。 [Example 4]
FIG. 7 is a cross-sectional view illustrating a configuration of the vibrator unit according to the fourth embodiment. As shown in FIG. 7, the vibrator unit of the fourth embodiment has the same functions as the gyro vibrator 10, the lead wires 15A and 15B, and the support substrate 17 shown in FIG. 1B of the first embodiment. , Gyro vibrator 70, lead wires 75A and 75B, and support substrate 77.

リード線７５Ａ及び７５Ｂは、概ねＺ形状に屈曲しており、実施例１のリード線１６Ａ及び１６Ｂに相当するリード線（図示せず）も同様に屈曲している。当該屈曲は、例えば、支持基板７７に取り付けられたリード線７５Ａ及び７５Ｂにジャイロ振動子７０を載置した後に、ジャイロ振動子７０を支持基板７７の方向に押し下げることにより得ることができる。   The lead wires 75A and 75B are bent substantially in a Z shape, and lead wires (not shown) corresponding to the lead wires 16A and 16B of the first embodiment are bent similarly. The bending can be obtained, for example, by pressing the gyro vibrator 70 in the direction of the support substrate 77 after placing the gyro vibrator 70 on the lead wires 75A and 75B attached to the support substrate 77.

図８は、実施例４の他の振動子ユニットの構成を示す平面図である。図８に示されるように、実施例４の他のジャイロ振動子８０は、図１（Ａ）に示されたジャイロ振動子１０を構成する第１の駆動アーム１１Ａ、第２の駆動アーム１１Ｂ、検出アーム１２、アーム支持部１３、及び支持板１４の各々と同様な機能を有する、第１の駆動アーム８１Ａ、第２の駆動アーム８１Ｂ、検出アーム８２、アーム支持部８３、及び支持板８４を有する。   FIG. 8 is a plan view illustrating a configuration of another transducer unit according to the fourth embodiment. As shown in FIG. 8, another gyro vibrator 80 according to the fourth embodiment includes a first drive arm 11A, a second drive arm 11B, and the like that constitute the gyro vibrator 10 shown in FIG. The first drive arm 81A, the second drive arm 81B, the detection arm 82, the arm support portion 83, and the support plate 84 having the same functions as those of the detection arm 12, the arm support portion 13, and the support plate 14 are provided. Have.

ジャイロ振動子８０は、ジャイロ振動子１０の支持板１４を支持するリード線１５Ａ、１５Ｂ、１６Ａ、及び１６Ｂと同様に、Ｘ方向にジャイロ振動子８０を支持するリード線８５Ａ及び８５Ｂ、並びにＹ方向にジャイロ振動子８０を支持する８６Ａ及び８６Ｂにより支持されている。リード線８５Ａ、８５Ｂ、８６Ａ、及び８６Ｂは、概ねＺ形状に屈曲している。即ち、リード線７５Ａ及び７５Ｂが垂直方向に沿って屈曲していることとは対照的に、リード線８５Ａ、８５Ｂ、８６Ａ、及び８６Ｂは、水平方向に沿って屈曲している。   The gyro vibrator 80 is similar to the lead wires 15A, 15B, 16A, and 16B that support the support plate 14 of the gyro vibrator 10, and the lead wires 85A and 85B that support the gyro vibrator 80 in the X direction and the Y direction. Are supported by 86A and 86B which support the gyro vibrator 80. The lead wires 85A, 85B, 86A, and 86B are bent in a generally Z shape. That is, in contrast to the lead wires 75A and 75B being bent along the vertical direction, the lead wires 85A, 85B, 86A, and 86B are bent along the horizontal direction.

上記したように、実施例４の振動子ユニット及び他の振動子ユニットによれば、リード線７５Ａ等及びリード線８５Ａ等が屈曲していることから、リード線７５Ａ等及びリード線８５Ａ等の固有共振周波数が、屈曲形状を有しない従来のリード線のそれより低くなる。これにより、検出アームが駆動アームに働くコリオリ力の検出のために行なうＸ方向に沿った振動を妨げることが回避されることから、外部から与えられた回転の大きさを従来に比して高精度に検出することが可能となる。   As described above, according to the vibrator unit of the fourth embodiment and other vibrator units, since the lead wire 75A and the lead wire 85A are bent, the lead wire 75A and the lead wire 85A are unique. The resonance frequency is lower than that of the conventional lead wire having no bent shape. This prevents the detection arm from interfering with the vibration along the X direction for detecting the Coriolis force acting on the drive arm. It becomes possible to detect with accuracy.

なお、高さ方向に即ち鉛直方向にＺ字形状を有するリード線７５Ａ及び７５Ｂに代えて、水平方向にＺ字形状を有するリード線を用いることにより、上記と同様な効果を得ることが可能になる。   It is possible to obtain the same effect as described above by using a lead wire having a Z-shape in the horizontal direction instead of the lead wires 75A and 75B having a Z-shape in the height direction, that is, the vertical direction. Become.

本発明に係る振動子の支持機構によれば、前記第１の方向及び前記第２の方向のうちの少なくとも一つの方向に沿った振動の固有共振周波数が、前記一つの方向以外の方向に沿った振動の固有共振周波数より低い。従って、前記支持機構は、前記振動子による前記一つの方向に沿った振動を規制又は阻害することなく、しかも、前記一つの方向で比較的高い固有共振周波数の弾性機構により耐衝撃性を始めとする信頼性を低下させることなく、前記振動子を支持することが可能となる。   According to the vibrator supporting mechanism of the present invention, the natural resonance frequency of vibration along at least one of the first direction and the second direction is along a direction other than the one direction. Lower than the natural resonance frequency of the vibration. Therefore, the support mechanism does not restrict or inhibit the vibration along the one direction by the vibrator, and the shock resistance is started by an elastic mechanism having a relatively high natural resonance frequency in the one direction. It is possible to support the vibrator without deteriorating the reliability.

ジャイロ振動子が搭載された実施例１の振動子ユニット及び断面を示す図。FIG. 3 is a diagram illustrating a vibrator unit and a cross section of the first embodiment in which a gyro vibrator is mounted. 駆動アームの動作を示す図。The figure which shows operation | movement of a drive arm. 駆動アームの動作とコリオリ力との関係を示す図。The figure which shows the relationship between operation | movement of a drive arm, and Coriolis force. 検出アームの動作を示す図。The figure which shows operation | movement of a detection arm. 実施例２の振動子ユニットを示す図。FIG. 6 is a diagram illustrating a vibrator unit according to the second embodiment. 実施例３のジャイロ振動子を支持するリード線の構成を示す図。FIG. 6 is a diagram illustrating a configuration of a lead wire that supports a gyro vibrator according to a third embodiment. 実施例４の振動子ユニットの構成を示す断面図。FIG. 6 is a cross-sectional view illustrating a configuration of a vibrator unit according to a fourth embodiment. 実施例４の他の振動子ユニットの構成を示す平面図。FIG. 10 is a plan view illustrating a configuration of another vibrator unit according to the fourth embodiment.

符号の説明Explanation of symbols

１０…ジャイロ振動子、１１Ａ…第１の駆動アーム、１１Ｂ…第１の駆動アーム、１２…検出アーム、１３…アーム支持部、１４…支持板、１５Ａ，１５Ｂ…第１のリード線、１６Ａ，１６Ｂ…第２のリード線、１７…支持基板、１８…開口部、１００…振動子ユニット。   DESCRIPTION OF SYMBOLS 10 ... Gyro vibrator, 11A ... 1st drive arm, 11B ... 1st drive arm, 12 ... Detection arm, 13 ... Arm support part, 14 ... Support plate, 15A, 15B ... 1st lead wire, 16A, 16B ... 2nd lead wire, 17 ... Support substrate, 18 ... Opening part, 100 ... Vibrator unit.

Claims (18)

第１の方向に沿った振動により、前記第１の方向に垂直な第２の方向を軸として与えられた回転に応じて前記第１の方向及び前記第２の方向に垂直な第３の方向にコリオリ力が作用する駆動部と、前記駆動部に作用するコリオリ力の大きさの検出のために前記コリオリ力に応じて前記第１の方向に沿って振動する検出部と、前記駆動部及び前記検出部を支持するための支持部とを含む前記振動子を前記支持部を介して支持すべく前記振動子を設置するための基板に設けられた前記支持機構であって、
前記駆動部は、前記第３の方向に沿って互いに平行に配置された棒状の第１の駆動腕部と第２の駆動腕部を有し、
前記検出部は、前記第１の駆動腕部及び前記第２の駆動腕部間で前記両駆動腕部に平行に配置された棒状の検出腕部を有し、
前記振動子は、さらに、一端が前記第１の駆動腕部の中心に接続され、他端が前記第２の駆動腕部の中心に接続され、中心が前記検出腕部の中心に接続された、前記第１の方向に平行な棒状の腕支持部を含み、
前記支持機構は、前記腕支持部及び前記検出腕部が接続される前記両部の中心で前記両部を支持すべく、前記第３の方向に沿って前記支持部を支持する第１の弾性機構と、前記第１の方向に沿って前記支持部を支持する第２の弾性機構を備えることを特徴とする振動子の支持機構。 A third direction perpendicular to the first direction and the second direction in response to a rotation given about a second direction perpendicular to the first direction as a result of vibration along the first direction. A drive unit on which the Coriolis force acts, a detection unit that vibrates along the first direction according to the Coriolis force for detection of the magnitude of the Coriolis force acting on the drive unit, the drive unit, A support mechanism provided on a substrate for installing the vibrator to support the vibrator including the support part for supporting the detection part via the support part;
The drive unit includes a rod-shaped first drive arm unit and a second drive arm unit arranged in parallel to each other along the third direction,
The detection unit includes a rod-shaped detection arm unit disposed between the first drive arm unit and the second drive arm unit in parallel with the two drive arm units,
The vibrator further has one end connected to the center of the first drive arm, the other end connected to the center of the second drive arm, and the center connected to the center of the detection arm. A rod-like arm support portion parallel to the first direction,
The support mechanism includes a first elastic member that supports the support portion along the third direction so as to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. mechanism and the first second elastic mechanism vibrator supporting mechanism, characterized in that it comprises supporting said support portion along a direction. 請求項１記載の振動子の支持機構であって、
前記支持機構は、前記第２の弾性機構による前記第１の方向に沿った振動の固有共振周波数が、前記第１の弾性機構による前記第３の方向に沿った振動の固有共振周波数より低いことを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. A vibrator support mechanism characterized by the above. 請求項１記載の振動子の支持機構であって、
前記第２の弾性機構の幅は、前記第１の弾性機構の幅より狭いことを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
The vibrator support mechanism, wherein the second elastic mechanism has a width smaller than that of the first elastic mechanism. 請求項１記載の振動子の支持機構であって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が相互に異なる部分を有することを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
Each of said 1st elastic mechanism and said 2nd elastic mechanism has a part from which width | variety mutually differs, The support mechanism of the vibrator | oscillator characterized by the above-mentioned. 請求項１記載の振動子の支持機構であって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が不均一であることを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width. 請求項１記載の振動子の支持機構であって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、くびれ部分を有することを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a constricted portion. 請求項１記載の振動子の支持機構であって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、中空部分を有することを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a hollow portion. 請求項１記載の振動子の支持機構であって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、屈曲部分を有することを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a bent portion. 請求項１記載の振動子の支持機構であって、
前記第１の弾性機構を構成する材料と前記第２の弾性機構を構成する材料とは、前記第２の弾性機構の固有共振周波数を前記第１の弾性機構の固有共振周波数より低くする関係にあることを特徴とする振動子の支持機構。 A vibrator support mechanism according to claim 1 ,
The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. A support mechanism for a vibrator characterized by being. 第１の方向に沿った振動により、前記第１の方向に垂直な第２の方向を軸として与えられた回転に応じて前記第１の方向及び前記第２の方向に垂直な第３の方向にコリオリ力が作用する駆動部であって、前記第３の方向に平行に配置され、互いに平行に配置された棒状の第１の駆動腕部と第２の駆動腕部からなる駆動部と、
前記駆動部に作用するコリオリ力の大きさの検出のために前記コリオリ力に応じて前記第１の方向に沿って振動する検出部であって、前記第１の駆動腕部及び前記第２の駆動腕部間で前記両駆動腕部に平行に配置された棒状の検出腕部からなる検出部と、
前記駆動部及び前記検出部を支持するための支持部と、
一端が前記第１の駆動腕部の中心に接続され、他端が前記第２の駆動腕部の中心に接続され、中心が前記検出腕部の中心に接続された、前記第１の方向に平行な棒状の腕支持部を含む振動子と、
前記振動子を設置するための基板とを備え、
前記腕支持部及び前記検出腕部が接続される前記両部の中心で前記両部を支持すべく、一端が前記支持部に接続され、他端が前記基板に接続され、前記第３の方向に沿って前記支持部を支持する第１の弾性機構と、前記第１の方向に沿って前記支持部を支持する第２の弾性機構を含む支持機構を含むことを特徴とする振動子ユニット。 A third direction perpendicular to the first direction and the second direction in response to a rotation given about a second direction perpendicular to the first direction as a result of vibration along the first direction. A drive unit in which a Coriolis force acts on the drive unit, which is arranged in parallel with the third direction and includes a rod-shaped first drive arm unit and a second drive arm unit arranged in parallel with each other;
A detection unit that vibrates along the first direction in accordance with the Coriolis force to detect the magnitude of the Coriolis force acting on the drive unit, the first drive arm unit and the second drive unit A detection unit composed of a rod-shaped detection arm unit disposed between the drive arm units in parallel with the two drive arm units;
A support unit for supporting the drive unit and the detection unit;
One end is connected to the center of the first drive arm, the other end is connected to the center of the second drive arm, and the center is connected to the center of the detection arm in the first direction. A vibrator including parallel rod-shaped arm support portions;
A substrate for installing the vibrator,
One end is connected to the support portion, the other end is connected to the substrate, and the third direction is supported to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. A vibrator unit comprising: a support mechanism including a first elastic mechanism that supports the support portion along the first direction; and a second elastic mechanism that supports the support portion along the first direction. 請求項１０記載の振動子ユニットであって、
前記支持機構は、前記第２の弾性機構による前記第１の方向に沿った振動の固有共振周波数が、前記第１の弾性機構による前記第３の方向に沿った振動の固有共振周波数より低いことを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. A vibrator unit characterized by 請求項１０記載の振動子ユニットであって、
前記第２の弾性機構の幅は、前記第１の弾性機構の幅より狭いことを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
The vibrator unit, wherein the width of the second elastic mechanism is narrower than the width of the first elastic mechanism. 請求項１０記載の振動子ユニットであって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が相互に異なる部分を有することを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has portions having different widths from each other. 請求項１０記載の振動子ユニットであって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、幅が不均一であることを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width. 請求項１０記載の振動子ユニットであって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、くびれ部分を有することを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a constricted portion. 請求項１０記載の振動子ユニットであって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、中空部分を有することを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a hollow portion. 請求項１０記載の振動子ユニットであって、
前記第１の弾性機構及び前記第２の弾性機構の各々は、屈曲部分を有することを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a bent portion. 請求項１０記載の振動子ユニットであって、
前記第１の弾性機構を構成する材料と前記第２の弾性機構を構成する材料とは、前記第２の弾性機構の固有共振周波数を前記第１の弾性機構の固有共振周波数より低くする関係にあることを特徴とする振動子ユニット。 The vibrator unit according to claim 10 , wherein
The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. A vibrator unit characterized by being.
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