JP4649896B2 - 半導体装置及びその製造方法、並びにこの半導体装置を備えた表示装置 - Google Patents
半導体装置及びその製造方法、並びにこの半導体装置を備えた表示装置 Download PDFInfo
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- JP4649896B2 JP4649896B2 JP2004203057A JP2004203057A JP4649896B2 JP 4649896 B2 JP4649896 B2 JP 4649896B2 JP 2004203057 A JP2004203057 A JP 2004203057A JP 2004203057 A JP2004203057 A JP 2004203057A JP 4649896 B2 JP4649896 B2 JP 4649896B2
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- 239000004065 semiconductor Substances 0.000 title claims description 114
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- 239000010408 film Substances 0.000 claims description 110
- 239000012535 impurity Substances 0.000 claims description 77
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- 229910004298 SiO 2 Inorganic materials 0.000 claims description 64
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 57
- 229920005591 polysilicon Polymers 0.000 claims description 52
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66575—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate
- H01L29/6659—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET
- H01L29/66598—Lateral single gate silicon transistors where the source and drain or source and drain extensions are self-aligned to the sides of the gate with both lightly doped source and drain extensions and source and drain self-aligned to the sides of the gate, e.g. lightly doped drain [LDD] MOSFET, double diffused drain [DDD] MOSFET forming drain [D] and lightly doped drain [LDD] simultaneously, e.g. using implantation through the wings a T-shaped layer, or through a specially shaped layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78618—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure
- H01L29/78621—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device characterised by the drain or the source properties, e.g. the doping structure, the composition, the sectional shape or the contact structure with LDD structure or an extension or an offset region or characterised by the doping profile
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Thin Film Transistor (AREA)
Description
3、125;ゲート絶縁層
4、5;絶縁層
6、26、107a;ゲート電極
7、27、124;ポリシリコン層
8、28、123;不純物注入領域
9;段差
10、109;LDD領域
11;ゲート金属層
12、15、42;フォトマスク
13、14、129;サイドエッチ部
21、121;ガラス基板
22〜25、108a、112、128;SiO2層
29、127;Cr層
30、126;微結晶シリコン層
31;アモルファスシリコン層
32;レーザ光
51;携帯電話
52、54;表示部
53;パーソナルコンピュータ
101;Si基板
102;素子分離領域
103;ゲート絶縁膜
104a、106a;多結晶シリコン膜
105a;タングステンシリサイド膜
110;サイドウォール
111;高濃度不純物拡散領域
122;下地絶縁層
130;オーバーエッチ部
Claims (12)
- 透明絶縁性基板の全面に、複数の薄膜トランジスタが形成された半導体装置であって、前記複数の薄膜トランジスタのそれぞれは、前記透明絶縁性基板上に形成されたポリシリコン層と、このポリシリコン層に局部的に形成された不純物注入領域をレーザ光の照射により活性化して形成されたソース及びドレイン領域と、前記ポリシリコン層上に形成されゲート絶縁層となる第1の絶縁層と、前記ポリシリコン層における不純物注入領域間のチャネル領域の上方における前記第1の絶縁層上に形成され相互に異なる材料により形成された複数の層が積層されたゲート電極と、前記ゲート電極及び前記ゲート絶縁層を覆うように形成された第2の絶縁層と、を有し、前記ゲート電極上の前記第2の絶縁層の表面は、前記ゲート電極の周縁部で低く中央部で高くなる段差が形成されており、前記段差の幅は目合わせマージン幅と絶縁層の被覆厚さの和以上で、かつ、前記ゲート電極の幅の1/4以下に設定され、前記ゲート電極の中央部上に形成された第2の絶縁層における前記レーザ光に対する反射率が前記不純物注入領域上に形成された第1の絶縁層及び第2の絶縁層からなる第1の積層絶縁膜の前記レーザ光に対する反射率よりも高いことを特徴とする半導体装置。
- 前記ゲート電極の中央部上には、このゲート電極よりも横断面における幅が狭く、前記第2の絶縁層と同じ材料で形成された第3の絶縁層が設けられており、この第3の絶縁層及びその上に形成された第2の絶縁層からなる第2の積層絶縁膜における前記レーザ光に対する反射率が前記第1の積層絶縁膜の前記レーザ光に対する反射率よりも高いことを特徴とする請求項1に記載の半導体装置。
- 前記第1の絶縁層及び第2の絶縁層はSiO2により形成されていることを特徴とする請求項1又は2に記載の半導体装置。
- 前記ゲート電極は、微結晶シリコン層とCr層とが積層されていることを特徴とする請求項1乃至3のいずれか1項に記載の半導体装置。
- 前記不純物注入領域にLDD領域が形成されていることを特徴とする請求項1乃至4のいずれか1項に記載の半導体装置。
- 透明絶縁性基板の全面に、複数の薄膜トランジスタが形成された半導体装置を製造する方法であって、前記複数の薄膜トランジスタのそれぞれは、前記透明絶縁性基板上にポリシリコン層を形成する工程と、前記ポリシリコン層上にゲート絶縁層となる第1の絶縁層を形成する工程と、前記第1の絶縁層上に相互に異なる材料からなる層を複数層積層してゲート電極を形成する工程と、前記ポリシリコン層に前記ゲート電極に対して自己整合的に不純物を注入して前記ポリシリコン層に不純物注入領域を形成する工程と、前記ゲート電極及び前記第1の絶縁層を覆うように第2の絶縁層を形成する工程と、レーザ光を照射することにより前記不純物注入領域を活性化してソース及びドレイン領域を形成する工程を経て形成され、前記第2の絶縁層を形成する工程において、前記ゲート電極上の第2の絶縁層表面に、前記ゲート電極の周縁部で低く中央部で高くなる段差を前記段差の幅が目合わせマージン幅と絶縁層の被覆厚さの和以上で、かつ、前記ゲート電極の幅の1/4以下となるように形成すると共に、前記ゲート電極の中央部上の第2の絶縁層における前記レーザ光に対する反射率を、前記不純物注入領域上の第1の絶縁層及び第2の絶縁層からなる第1の積層絶縁膜の前記レーザ光に対する反射率よりも高くすることを特徴とする半導体装置の製造方法。
- 前記第2の絶縁層を形成する前に、前記ゲート電極の中央部上に前記第2の絶縁層と同じ材料により、前記ゲート電極よりも横断面における幅が狭い第3の絶縁層を形成し、この第3の絶縁層及びその上に形成された第2の絶縁層からなる第2の積層絶縁膜における前記レーザ光に対する反射率を前記第1の積層絶縁膜の前記レーザ光に対する反射率よりも高くすることを特徴とする請求項6に記載の半導体装置の製造方法。
- エッチング法により、前記ゲート電極の周縁部上に形成された第2の絶縁層及び前記不純物注入領域上に形成された第2の絶縁層の厚さを調節することを特徴とする請求項6に記載の半導体装置の製造方法。
- 前記第1の絶縁層及び前記第2の絶縁層をSiO2により形成することを特徴とする請求項6乃至8のいずれか1項に記載の半導体装置の製造方法。
- 微結晶シリコン層とCr層とを積層して前記ゲート電極を形成することを特徴とする請求項6乃至9のいずれか1項に記載の半導体装置の製造方法。
- 前記不純物注入領域を形成する工程は、LDDを形成する領域上をマスクで覆った状態で前記ポリシリコン層に不純物を高濃度で注入した後、前記マスクを除去して前記ポリシリコン層に前記ゲート電極に対して自己整合的に不純物を低濃度で注入することを特徴とする請求項6乃至10のいずれか1項に記載の半導体装置の製造方法。
- 請求項1乃至5のいずれか1項に記載の半導体装置を有することを特徴とする表示装置。
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JP2004203057A JP4649896B2 (ja) | 2004-07-09 | 2004-07-09 | 半導体装置及びその製造方法、並びにこの半導体装置を備えた表示装置 |
US11/176,278 US7525135B2 (en) | 2004-07-09 | 2005-07-08 | Semiconductor device and display device |
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DE102007061473A1 (de) | 2007-09-27 | 2009-04-02 | Osram Opto Semiconductors Gmbh | Strahlungsemittierende Vorrichtung |
KR101440456B1 (ko) * | 2008-03-31 | 2014-09-18 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
KR101777247B1 (ko) * | 2010-09-29 | 2017-09-12 | 삼성디스플레이 주식회사 | 유기 발광 디스플레이 장치 및 그 제조 방법 |
GB2489682B (en) | 2011-03-30 | 2015-11-04 | Pragmatic Printing Ltd | Electronic device and its method of manufacture |
US10409275B2 (en) * | 2016-10-19 | 2019-09-10 | United Technologies Corporation | Oil debris monitoring (ODM) with adaptive learning |
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KR100439345B1 (ko) * | 2000-10-31 | 2004-07-07 | 피티플러스(주) | 폴리실리콘 활성층을 포함하는 박막트랜지스터 및 제조 방법 |
JP2002151686A (ja) * | 2000-11-15 | 2002-05-24 | Nec Corp | 半導体装置およびその製造方法 |
KR100378259B1 (ko) * | 2001-01-20 | 2003-03-29 | 주승기 | 결정질 활성층을 포함하는 박막트랜지스터 제작 방법 및장치 |
JP3626734B2 (ja) * | 2002-03-11 | 2005-03-09 | 日本電気株式会社 | 薄膜半導体装置 |
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Patent Citations (2)
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JP2000138374A (ja) * | 1998-10-30 | 2000-05-16 | Nec Corp | 半導体装置及びその製造方法 |
JP2000323713A (ja) * | 1999-05-10 | 2000-11-24 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタの製造方法 |
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