JP4644434B2 - 研磨用組成物 - Google Patents
研磨用組成物 Download PDFInfo
- Publication number
- JP4644434B2 JP4644434B2 JP2004087261A JP2004087261A JP4644434B2 JP 4644434 B2 JP4644434 B2 JP 4644434B2 JP 2004087261 A JP2004087261 A JP 2004087261A JP 2004087261 A JP2004087261 A JP 2004087261A JP 4644434 B2 JP4644434 B2 JP 4644434B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polishing composition
- initial
- conductor layer
- rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 title claims description 242
- 239000000203 mixture Substances 0.000 title claims description 80
- 239000004020 conductor Substances 0.000 claims description 54
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 22
- 239000003112 inhibitor Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 239000006061 abrasive grain Substances 0.000 claims description 14
- 230000004888 barrier function Effects 0.000 claims description 13
- 239000007800 oxidant agent Substances 0.000 claims description 13
- 230000009467 reduction Effects 0.000 claims description 13
- 239000002738 chelating agent Substances 0.000 claims description 10
- 239000003795 chemical substances by application Substances 0.000 claims description 10
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 9
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 9
- 229920001218 Pullulan Polymers 0.000 claims description 7
- 239000004373 Pullulan Substances 0.000 claims description 7
- 235000019423 pullulan Nutrition 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000227 grinding Methods 0.000 claims description 3
- 239000003082 abrasive agent Substances 0.000 claims description 2
- 239000000654 additive Substances 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 15
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 14
- 239000002245 particle Substances 0.000 description 12
- 230000007423 decrease Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 11
- 230000000996 additive effect Effects 0.000 description 9
- 239000008119 colloidal silica Substances 0.000 description 8
- 229960002449 glycine Drugs 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000007517 polishing process Methods 0.000 description 8
- 239000004471 Glycine Substances 0.000 description 7
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 7
- 239000012964 benzotriazole Substances 0.000 description 7
- 238000012423 maintenance Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 150000004676 glycans Chemical class 0.000 description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 6
- 238000002156 mixing Methods 0.000 description 6
- 229920001282 polysaccharide Polymers 0.000 description 6
- 239000005017 polysaccharide Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- QNAYBMKLOCPYGJ-REOHCLBHSA-N L-alanine Chemical compound C[C@H](N)C(O)=O QNAYBMKLOCPYGJ-REOHCLBHSA-N 0.000 description 4
- 235000004279 alanine Nutrition 0.000 description 4
- 235000001014 amino acid Nutrition 0.000 description 4
- 229940024606 amino acid Drugs 0.000 description 4
- 150000001413 amino acids Chemical class 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000001737 promoting effect Effects 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- AYFVYJQAPQTCCC-UHFFFAOYSA-N Threonine Natural products CC(O)C(N)C(O)=O AYFVYJQAPQTCCC-UHFFFAOYSA-N 0.000 description 3
- -1 aminoacetic acid Chemical class 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 150000007524 organic acids Chemical class 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 2
- CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 238000004220 aggregation Methods 0.000 description 2
- 235000008206 alpha-amino acids Nutrition 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 229910021485 fumed silica Inorganic materials 0.000 description 2
- 125000003630 glycyl group Chemical group [H]N([H])C([H])([H])C(*)=O 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 150000003852 triazoles Chemical class 0.000 description 2
- MTCFGRXMJLQNBG-REOHCLBHSA-N (2S)-2-Amino-3-hydroxypropansäure Chemical compound OC[C@H](N)C(O)=O MTCFGRXMJLQNBG-REOHCLBHSA-N 0.000 description 1
- LJGHYPLBDBRCRZ-UHFFFAOYSA-N 3-(3-aminophenyl)sulfonylaniline Chemical compound NC1=CC=CC(S(=O)(=O)C=2C=C(N)C=CC=2)=C1 LJGHYPLBDBRCRZ-UHFFFAOYSA-N 0.000 description 1
- 229920000945 Amylopectin Polymers 0.000 description 1
- 239000004475 Arginine Substances 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- LEVWYRKDKASIDU-QWWZWVQMSA-N D-cystine Chemical compound OC(=O)[C@H](N)CSSC[C@@H](N)C(O)=O LEVWYRKDKASIDU-QWWZWVQMSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- WJJMNDUMQPNECX-UHFFFAOYSA-N Dipicolinic acid Natural products OC(=O)C1=CC=CC(C(O)=O)=N1 WJJMNDUMQPNECX-UHFFFAOYSA-N 0.000 description 1
- WHUUTDBJXJRKMK-UHFFFAOYSA-N Glutamic acid Natural products OC(=O)C(N)CCC(O)=O WHUUTDBJXJRKMK-UHFFFAOYSA-N 0.000 description 1
- 229920002527 Glycogen Polymers 0.000 description 1
- 229920002488 Hemicellulose Polymers 0.000 description 1
- XUJNEKJLAYXESH-REOHCLBHSA-N L-Cysteine Chemical compound SC[C@H](N)C(O)=O XUJNEKJLAYXESH-REOHCLBHSA-N 0.000 description 1
- ONIBWKKTOPOVIA-BYPYZUCNSA-N L-Proline Chemical compound OC(=O)[C@@H]1CCCN1 ONIBWKKTOPOVIA-BYPYZUCNSA-N 0.000 description 1
- AGPKZVBTJJNPAG-UHNVWZDZSA-N L-allo-Isoleucine Chemical compound CC[C@@H](C)[C@H](N)C(O)=O AGPKZVBTJJNPAG-UHNVWZDZSA-N 0.000 description 1
- ODKSFYDXXFIFQN-BYPYZUCNSA-P L-argininium(2+) Chemical compound NC(=[NH2+])NCCC[C@H]([NH3+])C(O)=O ODKSFYDXXFIFQN-BYPYZUCNSA-P 0.000 description 1
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 1
- WHUUTDBJXJRKMK-VKHMYHEASA-N L-glutamic acid Chemical compound OC(=O)[C@@H](N)CCC(O)=O WHUUTDBJXJRKMK-VKHMYHEASA-N 0.000 description 1
- HNDVDQJCIGZPNO-YFKPBYRVSA-N L-histidine Chemical compound OC(=O)[C@@H](N)CC1=CN=CN1 HNDVDQJCIGZPNO-YFKPBYRVSA-N 0.000 description 1
- AGPKZVBTJJNPAG-WHFBIAKZSA-N L-isoleucine Chemical compound CC[C@H](C)[C@H](N)C(O)=O AGPKZVBTJJNPAG-WHFBIAKZSA-N 0.000 description 1
- ROHFNLRQFUQHCH-YFKPBYRVSA-N L-leucine Chemical compound CC(C)C[C@H](N)C(O)=O ROHFNLRQFUQHCH-YFKPBYRVSA-N 0.000 description 1
- FFEARJCKVFRZRR-BYPYZUCNSA-N L-methionine Chemical compound CSCC[C@H](N)C(O)=O FFEARJCKVFRZRR-BYPYZUCNSA-N 0.000 description 1
- COLNVLDHVKWLRT-QMMMGPOBSA-N L-phenylalanine Chemical compound OC(=O)[C@@H](N)CC1=CC=CC=C1 COLNVLDHVKWLRT-QMMMGPOBSA-N 0.000 description 1
- AYFVYJQAPQTCCC-GBXIJSLDSA-N L-threonine Chemical compound C[C@@H](O)[C@H](N)C(O)=O AYFVYJQAPQTCCC-GBXIJSLDSA-N 0.000 description 1
- QIVBCDIJIAJPQS-VIFPVBQESA-N L-tryptophane Chemical compound C1=CC=C2C(C[C@H](N)C(O)=O)=CNC2=C1 QIVBCDIJIAJPQS-VIFPVBQESA-N 0.000 description 1
- OUYCCCASQSFEME-QMMMGPOBSA-N L-tyrosine Chemical compound OC(=O)[C@@H](N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-QMMMGPOBSA-N 0.000 description 1
- KZSNJWFQEVHDMF-BYPYZUCNSA-N L-valine Chemical compound CC(C)[C@H](N)C(O)=O KZSNJWFQEVHDMF-BYPYZUCNSA-N 0.000 description 1
- ROHFNLRQFUQHCH-UHFFFAOYSA-N Leucine Natural products CC(C)CC(N)C(O)=O ROHFNLRQFUQHCH-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- SIOXPEMLGUPBBT-UHFFFAOYSA-N Picolinic acid Natural products OC(=O)C1=CC=CC=N1 SIOXPEMLGUPBBT-UHFFFAOYSA-N 0.000 description 1
- ONIBWKKTOPOVIA-UHFFFAOYSA-N Proline Natural products OC(=O)C1CCCN1 ONIBWKKTOPOVIA-UHFFFAOYSA-N 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- MTCFGRXMJLQNBG-UHFFFAOYSA-N Serine Natural products OCC(N)C(O)=O MTCFGRXMJLQNBG-UHFFFAOYSA-N 0.000 description 1
- 229910020177 SiOF Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 229920002472 Starch Polymers 0.000 description 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 239000004473 Threonine Substances 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QIVBCDIJIAJPQS-UHFFFAOYSA-N Tryptophan Natural products C1=CC=C2C(CC(N)C(O)=O)=CNC2=C1 QIVBCDIJIAJPQS-UHFFFAOYSA-N 0.000 description 1
- KZSNJWFQEVHDMF-UHFFFAOYSA-N Valine Natural products CC(C)C(N)C(O)=O KZSNJWFQEVHDMF-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 229960003767 alanine Drugs 0.000 description 1
- 125000003295 alanine group Chemical group N[C@@H](C)C(=O)* 0.000 description 1
- 150000001370 alpha-amino acid derivatives Chemical class 0.000 description 1
- 150000001371 alpha-amino acids Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- BTBJBAZGXNKLQC-UHFFFAOYSA-N ammonium lauryl sulfate Chemical compound [NH4+].CCCCCCCCCCCCOS([O-])(=O)=O BTBJBAZGXNKLQC-UHFFFAOYSA-N 0.000 description 1
- 229940063953 ammonium lauryl sulfate Drugs 0.000 description 1
- 230000002421 anti-septic effect Effects 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000003429 antifungal agent Substances 0.000 description 1
- 229940121375 antifungal agent Drugs 0.000 description 1
- 229940064004 antiseptic throat preparations Drugs 0.000 description 1
- ODKSFYDXXFIFQN-UHFFFAOYSA-N arginine Natural products OC(=O)C(N)CCCNC(N)=N ODKSFYDXXFIFQN-UHFFFAOYSA-N 0.000 description 1
- 235000003704 aspartic acid Nutrition 0.000 description 1
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 235000018417 cysteine Nutrition 0.000 description 1
- XUJNEKJLAYXESH-UHFFFAOYSA-N cysteine Natural products SCC(N)C(O)=O XUJNEKJLAYXESH-UHFFFAOYSA-N 0.000 description 1
- 229960003067 cystine Drugs 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 235000013922 glutamic acid Nutrition 0.000 description 1
- 239000004220 glutamic acid Substances 0.000 description 1
- 235000013905 glycine and its sodium salt Nutrition 0.000 description 1
- 229940096919 glycogen Drugs 0.000 description 1
- HNDVDQJCIGZPNO-UHFFFAOYSA-N histidine Natural products OC(=O)C(N)CC1=CN=CN1 HNDVDQJCIGZPNO-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- AGPKZVBTJJNPAG-UHFFFAOYSA-N isoleucine Natural products CCC(C)C(N)C(O)=O AGPKZVBTJJNPAG-UHFFFAOYSA-N 0.000 description 1
- 229960000310 isoleucine Drugs 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 229960003136 leucine Drugs 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229930182817 methionine Natural products 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000003002 pH adjusting agent Substances 0.000 description 1
- 239000001814 pectin Substances 0.000 description 1
- 229920001277 pectin Polymers 0.000 description 1
- 235000010987 pectin Nutrition 0.000 description 1
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 description 1
- 150000004968 peroxymonosulfuric acids Chemical class 0.000 description 1
- COLNVLDHVKWLRT-UHFFFAOYSA-N phenylalanine Natural products OC(=O)C(N)CC1=CC=CC=C1 COLNVLDHVKWLRT-UHFFFAOYSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000002335 preservative effect Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- LOAUVZALPPNFOQ-UHFFFAOYSA-N quinaldic acid Chemical compound C1=CC=CC2=NC(C(=O)O)=CC=C21 LOAUVZALPPNFOQ-UHFFFAOYSA-N 0.000 description 1
- UBDIMPWXBMWVTC-UHFFFAOYSA-N quinoline-2-carboxylic acid Chemical compound C1=CC=CC2=NC(C(=O)O)=CC=C21.C1=CC=CC2=NC(C(=O)O)=CC=C21 UBDIMPWXBMWVTC-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- UQDJGEHQDNVPGU-UHFFFAOYSA-N serine phosphoethanolamine Chemical compound [NH3+]CCOP([O-])(=O)OCC([NH3+])C([O-])=O UQDJGEHQDNVPGU-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- VXKWYPOMXBVZSJ-UHFFFAOYSA-N tetramethyltin Chemical compound C[Sn](C)(C)C VXKWYPOMXBVZSJ-UHFFFAOYSA-N 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- OUYCCCASQSFEME-UHFFFAOYSA-N tyrosine Natural products OC(=O)C(N)CC1=CC=C(O)C=C1 OUYCCCASQSFEME-UHFFFAOYSA-N 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 239000004474 valine Substances 0.000 description 1
- 229960004295 valine Drugs 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
Description
請求項3に記載の発明は、請求項1又は請求項2に記載の発明において、前記砥粒は、酸化アルミニウム及び二酸化ケイ素のうち少なくともいずれか1種であることを要旨とする。
半導体デバイスの導体配線を形成する際には、図1(a)に示すように、まず半導体基板上に積層形成された絶縁層11の表面に、公知のリソグラフィ及びエッチング等により回路設計に基づく配線溝12が形成される。絶縁層11を構成する絶縁材料としては、一般にSiO2や、SiOF、SiOC等が使用され、これらの絶縁層11はTEOS、BSG、PSG、BPSG等を出発原料として、CVD法等によって形成される。
また、第3の研磨工程では、図1(d)に示すように、絶縁層11が露出するまでバリア層13が研磨されることにより、導体配線15が配線溝12内に形成される。ここで、第2及び第3の研磨工程は、仕上研磨の工程に相当し、そこで使用される仕上研磨用組成物は、半導体基板の表面品質を高くするように調製されている。このため、仕上研磨用組成物は、研磨の促進に係る各種添加剤の他に、導体配線15に生じる表面段差の改善、表面品質の向上等に係る各種添加剤を含有している。例えば、導体金属の腐食を防止し、かつ被研磨面にディッシングやエロージョンが発生するのを抑制するために、ベンゾトリアゾール、ベンゾイミダゾール、トリアゾール、イミダゾール及びトリルトリアゾール、ならびにその誘導体等の防食剤を含有している。
研磨速度低下抑制剤は、仕上研磨等の他工程で使用される研磨用組成物に含まれる添加剤の混入による導体層14の研磨速度の低下を抑制するために含有されている。研磨速度低下抑制剤としては、多糖類及びポリビニルアルコールのうち少なくともいずれか1種が使用される。この場合、多糖類としては、例えば、澱粉、アミロペクチン、グリコゲン等の貯蔵多糖類、セルロース、ペクチン、ヘミセルロース等の構造多糖類、プルラン、エルシナン等の細胞外多糖類等のうち少なくとも1種が好ましい。これらのうち、研磨速度の低下を十分に抑制し、かつ安定化させるという観点からプルランがより好ましい。初期研磨用組成物中における研磨速度低下抑制剤の含有量は、研磨速度の低下を十分に抑制するという観点から0.01質量%以上が好ましく、0.05質量%以上がより好ましい。一方、研磨速度低下抑制剤の含有量は、研磨速度を安定化させるという観点から10質量%以下が好ましく、5質量%以下がより好ましい。
酸化剤は、化学的研磨作用により、導体層14の研磨を促進する特性を有している。酸化剤の具体例としては、過酸化水素、過硫酸、過ヨウ素酸、過塩素酸、過酢酸、過蟻酸及び硝酸、並びにそれらの塩のうち少なくとも1種が挙げられるが、安価でかつ金属不純物の少ないものを容易に入手できることから、過酸化水素が好ましい。初期研磨用組成物中における酸化剤の含有量は、導体層14の十分な研磨速度を得るという観点から0.1質量%以上が好ましく、1質量%以上がより好ましい。一方、酸化剤の含有量は、過剰な添加によっても一定以上の研磨速度の向上は期待できないという観点から10質量%以下が好ましく、5質量%以下がより好ましい。
・本発明の研磨用組成物は研磨速度低下抑制剤を含有しており、仕上研磨用組成物に含まれている表面品質を高めるための添加剤が混入したとしても、導体層14の研磨速度が低下することを抑制することができる。このため、半導体デバイスの製造工程において、スループットを向上させることができ、コストダウンを図ることができる。
(実施例1〜21及び比較例1〜20)
まず、表1に示す各成分を水に分散、或いは溶解させることにより、実施例1〜21及び比較例1〜20の初期研磨用組成物を調製した。そして、各初期研磨用組成物を用いて、銅のブランケットウエハ(電解めっき法により銅を成膜した8インチシリコンウエハ)を下記の研磨条件で1分間研磨し、下記計算式に基づいて研磨速度(無添加)を求めた。
研磨機:片面CMP用研磨機(Mirra;アプライドマテリアルズ社製)、研磨パッド:ポリウレタン製の積層研磨パッド(IC−1000/Suba400;ロデール社製)、研磨圧力:28kPa(=約2psi)、定盤回転数:100min-1、研磨用組成物の供給速度:200ml/min、キャリア回転数:100min-1
尚、研磨加工前後のブランケットウエハの厚みはシート抵抗測定器(VR−120;国際電気システムサービス株式会社製)を用いて測定した。
研磨速度[nm/min]=(研磨加工前の膜の厚み[nm]−研磨加工後の膜の厚み[nm])/研磨時間[min]
そして、下記計算式に基づいて研磨速度維持率を求めた。この研磨速度維持率の値が大きいほど、添加剤が混入することによる研磨速度の低下が少ないことを示す。
研磨速度維持率[%]=(研磨速度(無添加)[nm/min])/(研磨速度(X1,X1,Y1,Y2)[nm/min])×100
これらの結果を表1に示す。
・研磨用組成物は、導体層14の研磨に用いられるものであれば、第1(初期)の研磨工程だけでなく、第2の研磨工程以降の研磨に使用してもよく、また、研磨工程は3回に限定されず、2回でもよく、さらに4回以上に細分化して行ってもよい。
さらに、実施形態より把握できる技術的思想について以下に記載する。
Claims (3)
- 砥粒と研磨速度低下抑制剤を含有し、研磨速度低下抑制剤がプルラン及びポリビニルアルコールのうち少なくともいずれか1種であり、
基板上に配線溝を有する絶縁層、配線溝に埋設される導体層、及び絶縁層と導体層との間にバリア層を備えた配線構造体の研磨に使用される研磨用組成物であって、前記配線構造体の研磨が導体層を研磨するための初期研磨と、配線溝以外の絶縁層が露出するまで導体層及びバリア層のうち少なくともいずれかを研磨するための仕上研磨とに分けて実施される場合において、その初期研磨で使用される研磨用組成物。 - 更にキレート剤、酸化剤及び防食剤のうち少なくともいずれか1種を含む請求項1に記載の研磨用組成物。
- 前記砥粒は、酸化アルミニウム及び二酸化ケイ素のうち少なくともいずれか1種である請求項1又は2に記載の研磨用組成物。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004087261A JP4644434B2 (ja) | 2004-03-24 | 2004-03-24 | 研磨用組成物 |
TW094108575A TWI447213B (zh) | 2004-03-24 | 2005-03-21 | 研磨用組成物及研磨方法 |
TW102122527A TWI466991B (zh) | 2004-03-24 | 2005-03-21 | 硏磨用組成物及硏磨方法 |
US11/085,612 US7550388B2 (en) | 2004-03-24 | 2005-03-21 | Polishing composition and polishing method |
CN2005100624063A CN1837320B (zh) | 2004-03-24 | 2005-03-22 | 抛光用组合物及抛光方法 |
SG200502192A SG115831A1 (en) | 2004-03-24 | 2005-03-22 | Polishing composition and polishing method |
EP05006273A EP1580248A1 (en) | 2004-03-24 | 2005-03-22 | Polishing composition and polishing method |
CN2009101652482A CN101638556B (zh) | 2004-03-24 | 2005-03-22 | 抛光用组合物及抛光方法 |
KR1020050023764A KR101110719B1 (ko) | 2004-03-24 | 2005-03-22 | 연마용 조성물 및 연마방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004087261A JP4644434B2 (ja) | 2004-03-24 | 2004-03-24 | 研磨用組成物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005277043A JP2005277043A (ja) | 2005-10-06 |
JP4644434B2 true JP4644434B2 (ja) | 2011-03-02 |
Family
ID=34858438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004087261A Expired - Lifetime JP4644434B2 (ja) | 2004-03-24 | 2004-03-24 | 研磨用組成物 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7550388B2 (ja) |
EP (1) | EP1580248A1 (ja) |
JP (1) | JP4644434B2 (ja) |
KR (1) | KR101110719B1 (ja) |
CN (2) | CN101638556B (ja) |
SG (1) | SG115831A1 (ja) |
TW (2) | TWI466991B (ja) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4316406B2 (ja) * | 2004-03-22 | 2009-08-19 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
JP4814502B2 (ja) * | 2004-09-09 | 2011-11-16 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いた研磨方法 |
JP2006086462A (ja) * | 2004-09-17 | 2006-03-30 | Fujimi Inc | 研磨用組成物およびそれを用いた配線構造体の製造法 |
US8551202B2 (en) * | 2006-03-23 | 2013-10-08 | Cabot Microelectronics Corporation | Iodate-containing chemical-mechanical polishing compositions and methods |
CN101410956B (zh) * | 2006-04-03 | 2010-09-08 | Jsr株式会社 | 化学机械研磨用水系分散体和化学机械研磨方法 |
US20080096385A1 (en) * | 2006-09-27 | 2008-04-24 | Hynix Semiconductor Inc. | Slurry composition for forming tungsten pattern and method for manufacturing semiconductor device using the same |
KR100948814B1 (ko) * | 2006-09-27 | 2010-03-24 | 테크노세미켐 주식회사 | 텅스텐 배선 형성용 슬러리 조성물 및 이를 이용한 반도체소자의 제조 방법 |
TW200916564A (en) * | 2007-01-31 | 2009-04-16 | Advanced Tech Materials | Stabilization of polymer-silica dispersions for chemical mechanical polishing slurry applications |
JP2008290169A (ja) * | 2007-05-23 | 2008-12-04 | Tdk Corp | アルミナ膜研磨用組成物およびそれを用いる化学機械研磨方法 |
CN103045099B (zh) * | 2007-09-14 | 2015-03-25 | 安集微电子(上海)有限公司 | 用于抛光多晶硅的化学机械抛光液 |
US7922926B2 (en) * | 2008-01-08 | 2011-04-12 | Cabot Microelectronics Corporation | Composition and method for polishing nickel-phosphorous-coated aluminum hard disks |
WO2010037730A1 (en) * | 2008-10-03 | 2010-04-08 | Basf Se | Chemical mechanical polishing (cmp) polishing solution with enhanced performance |
KR101279964B1 (ko) * | 2008-12-29 | 2013-07-05 | 제일모직주식회사 | 구리 배선 연마용 cmp 슬러리 조성물 및 이를 이용한 연마 방법 |
US8226841B2 (en) * | 2009-02-03 | 2012-07-24 | Cabot Microelectronics Corporation | Polishing composition for nickel-phosphorous memory disks |
DE102009028762A1 (de) * | 2009-08-20 | 2011-03-03 | Rena Gmbh | Verfahren zum Ätzen von Siliziumoberflächen |
JP5587620B2 (ja) * | 2010-01-25 | 2014-09-10 | 株式会社フジミインコーポレーテッド | 研磨用組成物及びそれを用いた研磨方法 |
JP5516184B2 (ja) * | 2010-07-26 | 2014-06-11 | 信越化学工業株式会社 | 合成石英ガラス基板の製造方法 |
CN101934493B (zh) * | 2010-08-10 | 2011-07-13 | 天津中环领先材料技术有限公司 | 超薄区熔硅抛光片的抛光工艺 |
US9039914B2 (en) | 2012-05-23 | 2015-05-26 | Cabot Microelectronics Corporation | Polishing composition for nickel-phosphorous-coated memory disks |
US9388330B2 (en) * | 2012-12-17 | 2016-07-12 | Fuji Engineering Co., Ltd. | Bag containing blasting material |
KR102209690B1 (ko) * | 2014-06-27 | 2021-01-29 | 동우 화인켐 주식회사 | 금속막의 식각액 조성물 및 이를 이용한 액정표시장치용 어레이 기판의 제조방법 |
SG10201602672UA (en) * | 2015-04-06 | 2016-11-29 | Cabot Microelectronics Corp | Cmp composition and method for polishing rigid disks |
KR102463863B1 (ko) | 2015-07-20 | 2022-11-04 | 삼성전자주식회사 | 연마용 조성물 및 이를 이용한 반도체 장치의 제조 방법 |
JP7010229B2 (ja) * | 2016-09-21 | 2022-01-26 | 昭和電工マテリアルズ株式会社 | スラリ及び研磨方法 |
CN108250977B (zh) * | 2016-12-28 | 2021-08-27 | 安集微电子科技(上海)股份有限公司 | 一种用于阻挡层平坦化的化学机械抛光液 |
CN107474744A (zh) * | 2017-08-04 | 2017-12-15 | 江苏云瀚股份有限公司 | 一种汽车用玻璃剥光剂及其制备方法 |
US11273120B2 (en) * | 2019-11-18 | 2022-03-15 | Actera Ingredients, Inc. | Hair treatments |
EP4294357A1 (en) * | 2021-02-19 | 2023-12-27 | The Procter & Gamble Company | Oral care compositions comprising peroxide and alumina |
CN115873508A (zh) * | 2022-12-26 | 2023-03-31 | 博力思(天津)电子科技有限公司 | 去除速率高且表面粗糙度低的SiC衬底抛光液及抛光工艺 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001144051A (ja) * | 1999-11-15 | 2001-05-25 | Hitachi Chem Co Ltd | 金属用研磨液及びそれを用いた基板の研磨方法 |
WO2004012248A1 (ja) * | 2002-07-25 | 2004-02-05 | Hitachi Chemical Co., Ltd. | 研磨液及び研磨方法 |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5428721A (en) * | 1990-02-07 | 1995-06-27 | Kabushiki Kaisha Toshiba | Data processing apparatus for editing image by using image conversion |
US5391258A (en) * | 1993-05-26 | 1995-02-21 | Rodel, Inc. | Compositions and methods for polishing |
JP3556978B2 (ja) | 1993-12-14 | 2004-08-25 | 株式会社東芝 | 銅系金属の研磨方法 |
US5575885A (en) * | 1993-12-14 | 1996-11-19 | Kabushiki Kaisha Toshiba | Copper-based metal polishing solution and method for manufacturing semiconductor device |
JP3397501B2 (ja) * | 1994-07-12 | 2003-04-14 | 株式会社東芝 | 研磨剤および研磨方法 |
US5858813A (en) * | 1996-05-10 | 1999-01-12 | Cabot Corporation | Chemical mechanical polishing slurry for metal layers and films |
US5954997A (en) * | 1996-12-09 | 1999-09-21 | Cabot Corporation | Chemical mechanical polishing slurry useful for copper substrates |
US6309560B1 (en) | 1996-12-09 | 2001-10-30 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
US6126853A (en) * | 1996-12-09 | 2000-10-03 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
US5759917A (en) * | 1996-12-30 | 1998-06-02 | Cabot Corporation | Composition for oxide CMP |
US6432828B2 (en) * | 1998-03-18 | 2002-08-13 | Cabot Microelectronics Corporation | Chemical mechanical polishing slurry useful for copper substrates |
CA2342332A1 (en) | 1998-08-31 | 2000-03-09 | Hiroki Terazaki | Abrasive liquid for metal and method for polishing |
US6004188A (en) * | 1998-09-10 | 1999-12-21 | Chartered Semiconductor Manufacturing Ltd. | Method for forming copper damascene structures by using a dual CMP barrier layer |
JP3781906B2 (ja) | 1998-09-18 | 2006-06-07 | 株式会社ホンダアクセス | フロアマット用止め具 |
JP4053165B2 (ja) * | 1998-12-01 | 2008-02-27 | 株式会社フジミインコーポレーテッド | 研磨用組成物およびそれを用いた研磨方法 |
EP1833085A1 (en) * | 1998-12-28 | 2007-09-12 | Hitachi Chemical Company, Ltd. | Materials for polishing liquid for metal, polishing liquid for metal, method for preparation thereof and polishing method using the same |
IL147235A0 (en) * | 1999-08-13 | 2002-08-14 | Cabot Microelectronics Corp | Chemical mechanical polishing systems and methods for their use |
TW501197B (en) | 1999-08-17 | 2002-09-01 | Hitachi Chemical Co Ltd | Polishing compound for chemical mechanical polishing and method for polishing substrate |
CN1161826C (zh) | 1999-08-26 | 2004-08-11 | 日立化成工业株式会社 | 化学机械研磨用研磨剂及研磨方法 |
US20020013122A1 (en) * | 1999-12-22 | 2002-01-31 | Nikon Corporation | Process and apparatus for chemimechanically polishing a substrate |
JP2002075927A (ja) * | 2000-08-24 | 2002-03-15 | Fujimi Inc | 研磨用組成物およびそれを用いた研磨方法 |
JP2002110596A (ja) * | 2000-10-02 | 2002-04-12 | Mitsubishi Electric Corp | 半導体加工用研磨剤およびこれに用いる分散剤、並びに上記半導体加工用研磨剤を用いた半導体装置の製造方法 |
US6623355B2 (en) * | 2000-11-07 | 2003-09-23 | Micell Technologies, Inc. | Methods, apparatus and slurries for chemical mechanical planarization |
JP2002164307A (ja) * | 2000-11-24 | 2002-06-07 | Fujimi Inc | 研磨用組成物およびそれを用いた研磨方法 |
JP3768401B2 (ja) * | 2000-11-24 | 2006-04-19 | Necエレクトロニクス株式会社 | 化学的機械的研磨用スラリー |
JP2002231666A (ja) * | 2001-01-31 | 2002-08-16 | Fujimi Inc | 研磨用組成物およびそれを用いた研磨方法 |
US7279119B2 (en) * | 2001-06-14 | 2007-10-09 | Ppg Industries Ohio, Inc. | Silica and silica-based slurry |
SG144688A1 (en) * | 2001-07-23 | 2008-08-28 | Fujimi Inc | Polishing composition and polishing method employing it |
AU2002334406A1 (en) | 2001-09-03 | 2003-03-18 | Showa Denko K.K. | Polishing composition |
JP2003100678A (ja) * | 2001-09-26 | 2003-04-04 | Sumitomo Bakelite Co Ltd | 研磨用組成物 |
JPWO2003038883A1 (ja) * | 2001-10-31 | 2005-02-24 | 日立化成工業株式会社 | 研磨液及び研磨方法 |
TWI259201B (en) * | 2001-12-17 | 2006-08-01 | Hitachi Chemical Co Ltd | Slurry for metal polishing and method of polishing with the same |
JP2003257910A (ja) * | 2001-12-28 | 2003-09-12 | Fujikoshi Mach Corp | 基板における銅層の研磨方法 |
US20030219982A1 (en) * | 2002-05-23 | 2003-11-27 | Hitachi Chemical Co., Ltd | CMP (chemical mechanical polishing) polishing liquid for metal and polishing method |
EP1517972A4 (en) | 2002-06-07 | 2009-12-16 | Showa Denko Kk | METAL POLISHING COMPOSITION, POLISHING METHOD USING THE SAME, AND METHOD OF PRODUCING SEMICONDUCTOR WAFER USING THE POLISHING METHOD |
JP4083502B2 (ja) * | 2002-08-19 | 2008-04-30 | 株式会社フジミインコーポレーテッド | 研磨方法及びそれに用いられる研磨用組成物 |
JP3981616B2 (ja) * | 2002-10-02 | 2007-09-26 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
TWI347969B (en) * | 2003-09-30 | 2011-09-01 | Fujimi Inc | Polishing composition |
ATE463838T1 (de) | 2003-09-30 | 2010-04-15 | Fujimi Inc | Polierzusammensetzung und polierverfahren |
-
2004
- 2004-03-24 JP JP2004087261A patent/JP4644434B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-21 TW TW102122527A patent/TWI466991B/zh not_active IP Right Cessation
- 2005-03-21 TW TW094108575A patent/TWI447213B/zh active
- 2005-03-21 US US11/085,612 patent/US7550388B2/en active Active
- 2005-03-22 SG SG200502192A patent/SG115831A1/en unknown
- 2005-03-22 CN CN2009101652482A patent/CN101638556B/zh active Active
- 2005-03-22 CN CN2005100624063A patent/CN1837320B/zh not_active Expired - Fee Related
- 2005-03-22 EP EP05006273A patent/EP1580248A1/en not_active Withdrawn
- 2005-03-22 KR KR1020050023764A patent/KR101110719B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001144051A (ja) * | 1999-11-15 | 2001-05-25 | Hitachi Chem Co Ltd | 金属用研磨液及びそれを用いた基板の研磨方法 |
WO2004012248A1 (ja) * | 2002-07-25 | 2004-02-05 | Hitachi Chemical Co., Ltd. | 研磨液及び研磨方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101638556B (zh) | 2012-12-26 |
TWI466991B (zh) | 2015-01-01 |
KR101110719B1 (ko) | 2012-02-29 |
US7550388B2 (en) | 2009-06-23 |
CN1837320B (zh) | 2012-05-09 |
EP1580248A1 (en) | 2005-09-28 |
CN1837320A (zh) | 2006-09-27 |
SG115831A1 (en) | 2005-10-28 |
TW201341516A (zh) | 2013-10-16 |
TW200533735A (en) | 2005-10-16 |
TWI447213B (zh) | 2014-08-01 |
CN101638556A (zh) | 2010-02-03 |
US20050215060A1 (en) | 2005-09-29 |
KR20060044569A (ko) | 2006-05-16 |
JP2005277043A (ja) | 2005-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4644434B2 (ja) | 研磨用組成物 | |
EP1152046B1 (en) | Polishing composition and polishing method employing it | |
US8337715B2 (en) | CMP slurry for metallic film, polishing method and method of manufacturing semiconductor device | |
US6702954B1 (en) | Chemical-mechanical polishing slurry and method | |
TWI437085B (zh) | Abrasive composition | |
US20020019202A1 (en) | Control of removal rates in CMP | |
JP6327326B2 (ja) | 金属用研磨液及び研磨方法 | |
JP2003124160A (ja) | 研磨用組成物およびそれを用いた研磨方法 | |
KR20070001994A (ko) | 연마제 및 연마 방법 | |
CN107109133B (zh) | 化学机械抛光(cmp)组合物在抛光包含钴和/或钴合金的基材中的用途 | |
JP2007012679A (ja) | 研磨剤および半導体集積回路装置の製造方法 | |
JP7231362B2 (ja) | コバルト用ケミカルメカニカルポリッシング方法 | |
JPWO2008132983A1 (ja) | 研磨剤組成物および半導体集積回路装置の製造方法 | |
JP2010010717A (ja) | 研磨剤および研磨方法 | |
WO2011152356A1 (ja) | 研磨剤および研磨方法 | |
JP2004259867A (ja) | 化学的機械的研磨用スラリー | |
US8551887B2 (en) | Method for chemical mechanical planarization of a copper-containing substrate | |
JP2010258416A (ja) | 化学機械研磨用水系分散体および化学機械研磨方法 | |
JP2019197887A (ja) | タングステン用の化学機械研磨方法 | |
JP2005056879A (ja) | 銅系金属用研磨液及び研磨方法 | |
KR102308353B1 (ko) | 구리 배리어층 연마용 cmp 슬러리 조성물 및 이를 이용한 연마 방법 | |
JPWO2020246471A1 (ja) | 研磨液、分散体、研磨液の製造方法及び研磨方法 | |
JP2010258417A (ja) | 化学機械研磨用水系分散体および化学機械研磨方法 | |
JP2008118112A (ja) | Cmp用研磨液及び基板の研磨方法 | |
JP2009253151A (ja) | 金属用研磨液及び基板の研磨方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070302 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090818 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090820 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20091016 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100413 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100510 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20101116 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20101206 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4644434 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131210 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |