JP4598639B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4598639B2 JP4598639B2 JP2005279996A JP2005279996A JP4598639B2 JP 4598639 B2 JP4598639 B2 JP 4598639B2 JP 2005279996 A JP2005279996 A JP 2005279996A JP 2005279996 A JP2005279996 A JP 2005279996A JP 4598639 B2 JP4598639 B2 JP 4598639B2
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- 239000004065 semiconductor Substances 0.000 title claims description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 32
- 238000000034 method Methods 0.000 claims description 48
- 239000007789 gas Substances 0.000 claims description 46
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 18
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
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- 229920005591 polysilicon Polymers 0.000 claims description 8
- 229910021332 silicide Inorganic materials 0.000 claims description 7
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 238000001039 wet etching Methods 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910003855 HfAlO Inorganic materials 0.000 claims description 4
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
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- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
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- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
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- 150000002367 halogens Chemical class 0.000 description 4
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- 238000009616 inductively coupled plasma Methods 0.000 description 3
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- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
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- 229910052794 bromium Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
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- 238000010894 electron beam technology Methods 0.000 description 2
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- 229910052735 hafnium Inorganic materials 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
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- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
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- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- 239000011229 interlayer Substances 0.000 description 1
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/665—Unipolar field-effect transistors with an insulated gate, i.e. MISFET using self aligned silicidation, i.e. salicide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
- H01L29/66613—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation
- H01L29/66628—Lateral single gate silicon transistors with a gate recessing step, e.g. using local oxidation recessing the gate by forming single crystalline semiconductor material at the source or drain location
Description
装置:UHF−ECR(プラズマ処理装置)
使用ガス:NH3=200(sccm)
圧力:4Pa
RFパワー:500W(ソース)/100W(アンテナ)/50W(バイアス)
基板温度:20℃
Drain )インプラ処理を行った後、サイドウォール用絶縁膜の形成を行う。その後、エッチバック処理により、図3(B)に示すように、サイドウォール124を形成する。続いて、BF2(B)、P(As)等のイオン注入を行い、ソース・ドレイン領域を形成し、不純物活性化のために1000℃での急速加熱処理(RTA:Rapid Thermal
Annealing)を行う。
装置:誘導結合プラズマ(TCP)
使用ガス:HBr/He=100/100sccm
圧力:60mTorr
RFパワー:TCP/Bot=250/50W
基板温度:60℃
112 酸化膜埋め込み層
114 Si層
116 高比誘電率絶縁膜
118 ポリシリコン層
120 レジスト層
124 サイドウォール
126 コバルト層
128 シリサイド領域
202 自然酸化膜
204 残存ポリシリコン
Claims (19)
- SOI基板上に、高比誘電率絶縁層を形成する工程と;
前記高比誘電率絶縁層上に、ゲート電極層を形成する工程と;
前記ゲート電極層上に、レジスト層を形成する工程と;
前記レジスト層をマスクとして前記ゲート電極層を選択的に除去する工程と;
酸素を含まないガスを用いたアッシング処理によって前記レジスト層を除去する工程とを含むことを特徴とする半導体装置の製造方法。 - 前記アッシング処理に使用されるガスは、窒素(N2),水素(H2),アンモニア(NH3)の単独ガス又は、これらの混合ガスであることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記アッシング処理に使用されるガスに、所定の希ガスを添加することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記希ガスは、アルゴン(Ar)、ヘリウム(He)、キセノン(Xe)から選択される1以上のガスであることを特徴とする請求項3に記載の半導体装置の製造方法。
- 前記ゲート電極層を除去して前記高比誘電率絶縁層が露出した後、前記アッシング処理の前に、酸素を含まないガスによりエッチング処理を行うことを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記エッチング処理は、HBrとHeとの混合ガスを使用して行うことを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記エッチング処理により、前記高比誘電率絶縁層上に残存したゲート電極層を除去することを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記高比誘電率絶縁層を除去する工程の後に、シリサイド処理工程を行うことを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記ゲート電極層は、ポリシリコン層であることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記高比誘電率絶縁層の除去は、フッ化酸水溶液を用いたウェットエッチング処理によって行われることを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記高比誘電率絶縁層は、酸化ハフニウム(HfO2)、酸化ジルコニウム(ZrO2)、HfAlOx又は、HfSiONxから成ることを特徴とする請求項1に記載の半導体装置の製造方法。
- SOI基板上に、高比誘電率絶縁層を形成する工程と;
前記高比誘電率絶縁層上に、ゲート電極層となるポリシリコン層を形成する工程と;
前記ポリシリコン層上に、レジスト層を形成する工程と;
前記レジスト層をマスクとして前記ポリシリコン層を選択的に除去する工程と;
酸素を含まないガスを用いたアッシング処理によって前記レジスト層を除去する工程と;
フッ化酸水溶液を用いたウェットエッチング処理により、前記高比誘電率絶縁層を選択的に除去して、ゲート絶縁膜を成形する工程と;
ソース、ドレイン領域を形成する工程と;
前記ゲート電極、ソース、ドレイン領域の上にシリサイド領域を形成する工程とを含むことを特徴とする半導体装置の製造方法。 - 前記アッシング処理に使用されるガスは、窒素(N2),水素(H2),アンモニア(NH3)の単独ガス又は、これらの混合ガスであることを特徴とする請求項12に記載の半導体装置の製造方法。
- 前記アッシング処理に使用されるガスに、所定の希ガスを添加することを特徴とする請求項12に記載の半導体装置の製造方法。
- 前記希ガスは、アルゴン(Ar)、ヘリウム(He)、キセノン(Xe)から選択される1以上のガスであることを特徴とする請求項14に記載の半導体装置の製造方法。
- 前記ポリシリコン層を除去して前記高比誘電率絶縁層が露出した後、前記アッシング処理の前に、酸素を含まないガスによりエッチング処理を行うことを特徴とする請求項12に記載の半導体装置の製造方法。
- 前記エッチング処理は、HBrとHeとの混合ガスを使用して行うことを特徴とする請求項16に記載の半導体装置の製造方法。
- 前記エッチング処理により、前記高比誘電率絶縁層上に残存したゲート電極層を除去することを特徴とする請求項16に記載の半導体装置の製造方法。
- 前記高比誘電率絶縁層は、酸化ハフニウム(HfO2)、酸化ジルコニウム(ZrO2)、HfAlOx又は、HfSiONxから成ることを特徴とする請求項12に記載の半導体装置の製造方法。
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US8404124B2 (en) * | 2007-06-12 | 2013-03-26 | Micron Technology, Inc. | Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces |
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JP5547878B2 (ja) * | 2008-06-30 | 2014-07-16 | 株式会社日立ハイテクノロジーズ | 半導体加工方法 |
US8791001B2 (en) * | 2008-09-08 | 2014-07-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | N2 based plasma treatment and ash for HK metal gate protection |
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CN102820209B (zh) * | 2011-06-08 | 2015-03-25 | 中国科学院上海微***与信息技术研究所 | 一种高k介质埋层的绝缘体上材料制备方法 |
US8900963B2 (en) | 2011-11-02 | 2014-12-02 | Micron Technology, Inc. | Methods of forming semiconductor device structures, and related structures |
US9087699B2 (en) | 2012-10-05 | 2015-07-21 | Micron Technology, Inc. | Methods of forming an array of openings in a substrate, and related methods of forming a semiconductor device structure |
US9229328B2 (en) | 2013-05-02 | 2016-01-05 | Micron Technology, Inc. | Methods of forming semiconductor device structures, and related semiconductor device structures |
US9177795B2 (en) | 2013-09-27 | 2015-11-03 | Micron Technology, Inc. | Methods of forming nanostructures including metal oxides |
JP2014131086A (ja) * | 2014-04-10 | 2014-07-10 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP6980406B2 (ja) * | 2017-04-25 | 2021-12-15 | 株式会社日立ハイテク | 半導体製造装置及び半導体装置の製造方法 |
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