JP4443325B2 - 弾性表面波装置 - Google Patents
弾性表面波装置 Download PDFInfo
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- JP4443325B2 JP4443325B2 JP2004190460A JP2004190460A JP4443325B2 JP 4443325 B2 JP4443325 B2 JP 4443325B2 JP 2004190460 A JP2004190460 A JP 2004190460A JP 2004190460 A JP2004190460 A JP 2004190460A JP 4443325 B2 JP4443325 B2 JP 4443325B2
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- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 3
- 239000005751 Copper oxide Substances 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910000431 copper oxide Inorganic materials 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
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- 238000005219 brazing Methods 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
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- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 5
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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Images
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Description
なお、マイグレーションとは、弾性表面波によってIDT電極に応力が生じ、歪みが生じて、それが限界を超えると電極材料であるAl原子が合金の結晶粒界を移動し、その結果、合金に突起(ヒロック)と空隙(ボイド)とを発生させる現象である。
2・・・IDT電極
3・・・電極パッド
4・・・接地用環状電極
5・・・送信用フィルタ
6・・・受信用フィルタ
7・・・抵抗体
11・・・回路基板
12・・・入出力用貫通導体
13・・・接地用環状導体
14・・・貫通導体
15・・・接地導体
21・・・封止樹脂
Claims (5)
- 圧電基板と、
前記圧電基板の一方主面に形成された第1のIDT電極を有する送信用フィルタと、
前記圧電基板の一方主面に形成された第2のIDT電極を有する受信用フィルタと、
前記圧電基板の一方主面に形成され、前記送信用フィルタを取り囲むように形成された第1の接地用環状電極と、
前記圧電基板の一方主面に形成され、前記受信用フィルタを取り囲むように形成された第2の接地用環状電極と、
前記圧電基板が実装される実装面を有し、該実装面と前記圧電基板の一方主面とが対向するようにして前記圧電基板が実装される回路基板と、
前記回路基板の実装面に、前記第1の接地用環状電極と対応するようにして形成された第1の接地用環状導体と、
前記回路基板の実装面に、前記第2の接地用環状電極と対応するようにして形成された第2の接地用環状導体と、
前記第1の接地用環状電極と前記第1の接地用環状導体との間、前記第2の接地用環状電極と前記第2の接地用環状導体との間のそれぞれに介在され、前記圧電基板と前記回路基板とを接合するろう材と、
前記第1、第2の接地用環状導体に接続される複数の貫通導体と、
前記回路基板の内部または下面に形成され、前記複数の貫通導体と接続される接地導体と、を含み、
前記第1の接地用環状電極が前記第2の接地用環状電極より大きくされており、前記第1の接地用環状導体と前記接地導体とを接続する前記貫通導体の数が前記第2の接地用環状導体と前記接地導体とを接続する前記貫通導体の数より多い弾性表面波装置。 - 前記第1、第2の接地用環状電極が四角い枠状であり、その各辺に前記貫通導体が接続されていることを特徴とする請求項1記載の弾性表面波装置。
- 前記送信用フィルタが第1の並列共振子を含むラダー型のフィルタであり、前記受信用フィルタが第2の並列共振子を含むラダー型のフィルタであり、前記第1の並列共振子が前記第1の接地用環状電極に、前記第2の並列共振子が前記第2の接地用環状電極にそれぞれ接続されていることを特徴とする請求項1記載の弾性表面波装置。
- 前記第1、第2の接地用環状電極のうち前記送信用フィルタと前記受信用フィルタの間に位置する部分が共通化されていることを特徴とする請求項1記載の弾性表面波装置。
- 前記第1のIDT電極が、シリコン、酸化チタン、酸化銅、又は窒化タンタルのいずれかからなる抵抗体を介して前記第1の接地用環状電極に電気的に接続されていることを特徴とする請求項1乃至請求項4のいずれかに記載の弾性表面波装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004190460A JP4443325B2 (ja) | 2004-06-28 | 2004-06-28 | 弾性表面波装置 |
US11/139,024 US7298231B2 (en) | 2004-05-27 | 2005-05-25 | Surface acoustic wave device and communication apparatus |
CN2005100739809A CN1702961B (zh) | 2004-05-27 | 2005-05-27 | 声表面波装置及通信机器 |
KR1020050044925A KR100712441B1 (ko) | 2004-05-27 | 2005-05-27 | 탄성표면파 장치 및 통신기기 |
CNB2005100791653A CN100533970C (zh) | 2004-06-28 | 2005-06-28 | 弹性表面波装置以及通信装置 |
US11/169,303 US7332986B2 (en) | 2004-06-28 | 2005-06-28 | Surface acoustic wave apparatus and communications equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004190460A JP4443325B2 (ja) | 2004-06-28 | 2004-06-28 | 弾性表面波装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006014096A JP2006014096A (ja) | 2006-01-12 |
JP4443325B2 true JP4443325B2 (ja) | 2010-03-31 |
Family
ID=35780753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004190460A Expired - Lifetime JP4443325B2 (ja) | 2004-05-27 | 2004-06-28 | 弾性表面波装置 |
Country Status (2)
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JP (1) | JP4443325B2 (ja) |
CN (1) | CN100533970C (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4518870B2 (ja) * | 2004-08-24 | 2010-08-04 | 京セラ株式会社 | 弾性表面波装置および通信装置 |
JP2007189501A (ja) * | 2006-01-13 | 2007-07-26 | Matsushita Electric Ind Co Ltd | 電子部品 |
JP4535286B2 (ja) * | 2006-03-31 | 2010-09-01 | Tdk株式会社 | 弾性表面波素子および当該素子を備えた弾性表面波装置 |
JP4910500B2 (ja) * | 2006-06-22 | 2012-04-04 | 株式会社村田製作所 | フィルタ装置 |
JP4992908B2 (ja) | 2006-11-13 | 2012-08-08 | 株式会社村田製作所 | 弾性境界波素子、弾性境界波装置及び弾性境界波装置の製造方法 |
JP2008187561A (ja) * | 2007-01-31 | 2008-08-14 | Alps Electric Co Ltd | 表面弾性波素子 |
JP5144309B2 (ja) * | 2008-02-27 | 2013-02-13 | 京セラ株式会社 | 弾性表面波装置及び通信装置 |
JP5177392B2 (ja) * | 2008-03-17 | 2013-04-03 | Tdk株式会社 | 弾性表面波装置 |
JP5144396B2 (ja) * | 2008-06-27 | 2013-02-13 | 京セラ株式会社 | 弾性表面波装置及び通信装置 |
JP5185057B2 (ja) * | 2008-10-17 | 2013-04-17 | 日本電波工業株式会社 | デュプレクサ |
JP4809448B2 (ja) | 2009-02-02 | 2011-11-09 | 日本電波工業株式会社 | デュプレクサ |
CN102783021B (zh) * | 2010-03-11 | 2014-12-17 | 株式会社村田制作所 | 弹性波装置 |
WO2011111743A1 (ja) * | 2010-03-12 | 2011-09-15 | 株式会社村田製作所 | 弾性波共振子及びラダー型フィルタ |
JP5815383B2 (ja) * | 2011-05-06 | 2015-11-17 | 京セラ株式会社 | 弾性波素子およびそれを用いた弾性波装置 |
JP6284717B2 (ja) * | 2013-05-16 | 2018-02-28 | 太陽誘電株式会社 | 電子部品、及び電子部品の製造方法 |
CN103346753B (zh) * | 2013-06-14 | 2016-03-02 | 扬州大学 | 声表面波器件芯片封装热应变的消减方法 |
DE102014101856A1 (de) | 2014-02-13 | 2015-08-13 | Herrmann Ultraschalltechnik Gmbh & Co. Kg | Sonotrode mit Aufdickung |
WO2015190166A1 (ja) * | 2014-06-12 | 2015-12-17 | 株式会社村田製作所 | 弾性表面波装置 |
WO2016088681A1 (ja) * | 2014-12-04 | 2016-06-09 | 株式会社村田製作所 | 電子部品及びその製造方法 |
JP7117828B2 (ja) * | 2017-06-13 | 2022-08-15 | 太陽誘電株式会社 | 弾性波デバイス |
KR20200143027A (ko) | 2019-06-14 | 2020-12-23 | 삼성전기주식회사 | 체적 음향 공진기 |
CN110492206B (zh) * | 2019-08-09 | 2021-09-21 | 天津大学 | 一种双工器 |
CN113328723B (zh) * | 2021-06-16 | 2024-06-14 | 中国科学院上海微***与信息技术研究所 | 一种弹性波谐振器及其制备方法 |
-
2004
- 2004-06-28 JP JP2004190460A patent/JP4443325B2/ja not_active Expired - Lifetime
-
2005
- 2005-06-28 CN CNB2005100791653A patent/CN100533970C/zh not_active Expired - Fee Related
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Publication number | Publication date |
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CN1716769A (zh) | 2006-01-04 |
CN100533970C (zh) | 2009-08-26 |
JP2006014096A (ja) | 2006-01-12 |
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