JP4333879B2 - 非接触吸着治具及び非接触チャック装置 - Google Patents
非接触吸着治具及び非接触チャック装置 Download PDFInfo
- Publication number
- JP4333879B2 JP4333879B2 JP2004301493A JP2004301493A JP4333879B2 JP 4333879 B2 JP4333879 B2 JP 4333879B2 JP 2004301493 A JP2004301493 A JP 2004301493A JP 2004301493 A JP2004301493 A JP 2004301493A JP 4333879 B2 JP4333879 B2 JP 4333879B2
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- JP
- Japan
- Prior art keywords
- contact
- wafer
- recess
- fluid
- suction jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
3 凹部
5 流体通路
15、115 ウエハ(吸着対象物)
101 非接触チャック装置
123 空気切替え制御弁(流量個別制御手段)
125 流量制御回路(流量個別制御手段)
Claims (3)
- 吸着対象物を非接触状態で保持する非接触吸着治具であって、
吸着面に開口する円柱状の凹部と、該凹部に流体を噴射する流体通路とを有し、
前記流体通路の幅Hと前記凹部の半径Rとは、
0.1≦H/R≦0.5を満たすように設定されており、
前記流体通路の軸心CLは前記凹部の径線Dと直交するように設けられており、軸心CL及び径線Dの交点Pに関する、該凹部の中心Oを原点とする座標Sは、
0.25R≦S≦0.80Rを満たすように設定されている、
ことを特徴とする非接触吸着治具。 - 前記座標S=0.5Rであることを特徴とする請求項1に記載の非接触吸着治具。
- 請求項1又は2に記載の非接触吸着治具を少なくとも3つ備え、
前記非接触吸着治具毎に流体の噴射流量を制御する流量個別制御手段を備えた、
ことを特徴とする非接触チャック装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004301493A JP4333879B2 (ja) | 2004-10-15 | 2004-10-15 | 非接触吸着治具及び非接触チャック装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004301493A JP4333879B2 (ja) | 2004-10-15 | 2004-10-15 | 非接触吸着治具及び非接触チャック装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006114748A JP2006114748A (ja) | 2006-04-27 |
JP4333879B2 true JP4333879B2 (ja) | 2009-09-16 |
Family
ID=36383008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004301493A Expired - Fee Related JP4333879B2 (ja) | 2004-10-15 | 2004-10-15 | 非接触吸着治具及び非接触チャック装置 |
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JP (1) | JP4333879B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007176637A (ja) * | 2005-12-27 | 2007-07-12 | Harmotec Corp | 非接触搬送装置 |
JP2010533970A (ja) * | 2007-07-19 | 2010-10-28 | セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト | 平面状の基板用の非接触型搬送装置 |
JP2009028862A (ja) * | 2007-07-27 | 2009-02-12 | Ihi Corp | 非接触搬送装置 |
JP2009119562A (ja) * | 2007-11-15 | 2009-06-04 | Izumi Akiyama | 非接触型搬送保持具および非接触型搬送保持装置 |
JP4982875B2 (ja) * | 2008-07-03 | 2012-07-25 | Smc株式会社 | シート状物品のための非接触パッド |
JP2013179137A (ja) * | 2012-02-28 | 2013-09-09 | Tokyo Institute Of Technology | 力発生装置 |
JP2017052056A (ja) * | 2015-09-10 | 2017-03-16 | 学校法人幾徳学園 | 吸着構造 |
JP7178367B2 (ja) * | 2017-12-26 | 2022-11-25 | 株式会社クラレ | 硬化性組成物から形成される成形体 |
-
2004
- 2004-10-15 JP JP2004301493A patent/JP4333879B2/ja not_active Expired - Fee Related
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Publication number | Publication date |
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JP2006114748A (ja) | 2006-04-27 |
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