JP4316322B2 - 層間絶縁膜のドライエッチング方法 - Google Patents
層間絶縁膜のドライエッチング方法 Download PDFInfo
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- JP4316322B2 JP4316322B2 JP2003288169A JP2003288169A JP4316322B2 JP 4316322 B2 JP4316322 B2 JP 4316322B2 JP 2003288169 A JP2003288169 A JP 2003288169A JP 2003288169 A JP2003288169 A JP 2003288169A JP 4316322 B2 JP4316322 B2 JP 4316322B2
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- Japan
- Prior art keywords
- insulating film
- interlayer insulating
- etching
- frequency
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011229 interlayer Substances 0.000 title claims description 46
- 238000000034 method Methods 0.000 title claims description 22
- 238000001312 dry etching Methods 0.000 title claims description 16
- 238000005530 etching Methods 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 26
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 19
- 150000002500 ions Chemical class 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000002305 electric material Substances 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007348 radical reaction Methods 0.000 description 2
- 241000894007 species Species 0.000 description 2
- 244000132059 Carica parviflora Species 0.000 description 1
- 235000014653 Carica parviflora Nutrition 0.000 description 1
- 101100107923 Vitis labrusca AMAT gene Proteins 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- Drying Of Semiconductors (AREA)
Description
11 真空チャンバ
12 プラズマ発生部
13 基板電極部
S 処理基板
Claims (3)
- 第1高周波電源を介して主放電用の電力を供給し、第2高周波電源を介して主放電により生成されたイオン種を基板へ入射させる基板バイアス用の電力を供給すると共に、エッチングガスを導入して層間絶縁膜をドライエッチングし、配線用のホール、トレンチを微細加工する層間絶縁膜のドライエッチング方法であって、前記第2高周波電源の周波数を3MHzから6MHzの範囲内の所定値に設定して前記ドライエッチングを行うようにしたものにおいて、
前記第2高周波電源の周波数を所定周波数に設定して層間絶縁膜を一旦エッチングし、マイクロトレンチの発生を抑制するのに最適な層間絶縁膜へのイオン入射エネルギ分布となるエッチング条件を見出し、このエッチング条件で、前記第2高周波電源の周波数を前記所定値に変更することを特徴とする層間絶縁膜のドライエッチング方法。 - 前記ドライエッチングを1.5Pa以下の作動圧力下で行うことを特徴とする請求項1記載の層間絶縁膜のドライエッチング方法。
- 前記層間絶縁膜が、SiO2または比誘電率の低い層間絶縁膜を含むことを特徴とする請求項1または請求項2記載の層間絶縁膜のドライエッチング方法。
Priority Applications (1)
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JP2003288169A JP4316322B2 (ja) | 2003-08-06 | 2003-08-06 | 層間絶縁膜のドライエッチング方法 |
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JP2003288169A JP4316322B2 (ja) | 2003-08-06 | 2003-08-06 | 層間絶縁膜のドライエッチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005057141A JP2005057141A (ja) | 2005-03-03 |
JP4316322B2 true JP4316322B2 (ja) | 2009-08-19 |
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JP2003288169A Expired - Fee Related JP4316322B2 (ja) | 2003-08-06 | 2003-08-06 | 層間絶縁膜のドライエッチング方法 |
Country Status (1)
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JP (1) | JP4316322B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011071223A (ja) * | 2009-09-24 | 2011-04-07 | Ulvac Japan Ltd | ドライエッチング方法 |
JP2012142495A (ja) * | 2011-01-05 | 2012-07-26 | Ulvac Japan Ltd | プラズマエッチング方法及びプラズマエッチング装置 |
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2003
- 2003-08-06 JP JP2003288169A patent/JP4316322B2/ja not_active Expired - Fee Related
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JP2005057141A (ja) | 2005-03-03 |
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