JP4292176B2 - 走査電子顕微鏡 - Google Patents
走査電子顕微鏡 Download PDFInfo
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- JP4292176B2 JP4292176B2 JP2005263171A JP2005263171A JP4292176B2 JP 4292176 B2 JP4292176 B2 JP 4292176B2 JP 2005263171 A JP2005263171 A JP 2005263171A JP 2005263171 A JP2005263171 A JP 2005263171A JP 4292176 B2 JP4292176 B2 JP 4292176B2
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- absorption current
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SEコレクタ電極、5…リング状電極、6…試料・試料台、7…偏向装置、8…試料微動ステージ、9…ガス分子・残留気体分子、10…+イオン、11…吸収電流、12…対物レンズ、13…試料室、14…増幅器・AMP、15…外部電源、16…GND・アース、17…作動距離:ワーキングデイスタンス(W.D.)、G…二次電子のガス増幅作用。
Claims (1)
- 電子ビームを収束する対物レンズと、
前記試料を配置するための試料台と、
前記試料台を内部に有する試料室と、
前記電子線を試料上で走査するための偏向装置と、
前記電子線照射により試料から放出された二次電子を検出するための二次電子検出器と、
前記試料の吸収電流を検出するための吸収電流検出手段
を備えた走査電子顕微鏡において、
前記二次電子検出器に二次電子を収集するための電圧が印加されるコレクタ電極を備え、
前記試料室内の内圧が1Paから3000Paの間の値において、
当該コレクタ電極は、前記吸収電流検出手段による電流検出が行われている時に、前記電圧が印加され、
さらに、前記試料と対物レンズの間に配置され、中心を前記電子線が通過するリング状電極を備え、前記リング状電極は、前記試料との距離を一定に保つように、試料と共に移動すること
を特徴とする走査電子顕微鏡。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005263171A JP4292176B2 (ja) | 2005-09-12 | 2005-09-12 | 走査電子顕微鏡 |
Applications Claiming Priority (1)
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JP2005263171A JP4292176B2 (ja) | 2005-09-12 | 2005-09-12 | 走査電子顕微鏡 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30199999A Division JP2001126655A (ja) | 1999-10-25 | 1999-10-25 | 走査電子顕微鏡 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008317814A Division JP2009272288A (ja) | 2008-12-15 | 2008-12-15 | 走査電子顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005353613A JP2005353613A (ja) | 2005-12-22 |
JP4292176B2 true JP4292176B2 (ja) | 2009-07-08 |
Family
ID=35587855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005263171A Expired - Fee Related JP4292176B2 (ja) | 2005-09-12 | 2005-09-12 | 走査電子顕微鏡 |
Country Status (1)
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JP (1) | JP4292176B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US8947520B2 (en) | 2009-01-22 | 2015-02-03 | Hitachi High-Technologies Corporation | Electron microscope |
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2005
- 2005-09-12 JP JP2005263171A patent/JP4292176B2/ja not_active Expired - Fee Related
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JP2005353613A (ja) | 2005-12-22 |
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