JP4211606B2 - Manufacturing method of multilayer ceramic electronic component and electronic apparatus - Google Patents

Manufacturing method of multilayer ceramic electronic component and electronic apparatus Download PDF

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Publication number
JP4211606B2
JP4211606B2 JP2003530475A JP2003530475A JP4211606B2 JP 4211606 B2 JP4211606 B2 JP 4211606B2 JP 2003530475 A JP2003530475 A JP 2003530475A JP 2003530475 A JP2003530475 A JP 2003530475A JP 4211606 B2 JP4211606 B2 JP 4211606B2
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Prior art keywords
ceramic sheet
electronic component
ceramic
groove
multilayer ceramic
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JPWO2003026856A1 (en
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宗之 沢田
英則 勝村
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/562Protection against mechanical damage
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/481Insulating layers on insulating parts, with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701Low temperature co-fired ceramic [LTCC]
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0044Mechanical working of the substrate, e.g. drilling or punching
    • H05K3/0052Depaneling, i.e. dividing a panel into circuit boards; Working of the edges of circuit boards

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【0001】
【発明の属する技術分野】
本発明はチップ部品、半導体等を実装する平面精度に優れた積層セラミック電子部品の製造方法及びその電子部品を用いた電子機器に関する。
【0002】
【従来の技術】
従来の積層セラミック電子部品の製造方法について説明する。まずガラスセラミック粉末に有機バインダーおよび可塑剤などを混合して第1のセラミックシートが得られる。次に第1のセラミックシートの表面に導体パターンが形成され、第1のセラミックシートが積層される。その後、第1のセラミックシートの上下に、第1のセラミックシートの焼成温度で焼結しない第2のセラミックシートが積層されて積層体が得られる。次にこの積層体の表面の第1のセラミックシートにスリットが形成された後に第1のセラミックシートの焼成温度で焼成され、焼結していない第2のセラミックシートが除去される。次いでスリットで積層体が分割され、積層セラミック電子部品が得られる。
【0003】
この積層セラミック電子部品が、表面に電極パターンを有する回路基板に実装され電子機器が製造される。
【0004】
上記積層セラミック電子部品においては、焼成時第2のセラミックシートは焼結せず殆ど収縮しないので、焼結により収縮しようとする第1のセラミックシートを拘束する。従って、第1のセラミックシートの収縮を抑制でき、平面精度に優れた積層セラミック電子部品を生産性良く得ることができる。
【0005】
【発明が解決しようとする課題】
しかし上記方法によると、積層セラミック電子部品の端部は鋭角となる。従って、この電子部品が回路基板に実装される時に回路基板に撓みが発生すると、回路基板にこの端部が接触することにより、積層セラミック電子部品に割れや欠けが発生し、特性が劣化する。
【0006】
【課題を解決するための手段】
第1のセラミックシートが第1のセラミックシートよりも高い焼結温度を有する第2のセラミックシートで挟まれて積層体が得られる。積層体に第1のセラミックシートに至る溝が、第2のセラミックシートが第1のセラミックシートの溝の上端部を被覆するように形成される。第1のセラミックシートが焼結しかつ第2のセラミックシートが焼結しない温度で積層体が焼成される。第2のセラミックシートが除去され、溝で積層体が分割されて、積層セラミック電子部品が製造される。
【0007】
この方法により、平面精度を確保しつつ、耐衝撃性に優れた積層セラミック電子部品が製造される。
【0008】
【発明の実施の形態】
(実施の形態1)
図1〜図4は本発明の実施の形態1における積層セラミック電子部品の製造工程を説明するための要部拡大断面図、図5は積層セラミック電子部品の断面図である。第1のセラミックシート11はAl23,CaO−BaO−SiO2系ガラス等を用いて作製される。第2のセラミックシート12は第1のセラミックシート11の焼結温度よりも高い焼結温度を有し、Al23を用いて作製される。導体パターン13はAgあるいはAg−Ptを用いて形成される。積層体にはスリット状の溝14aとV字状の溝14bが設けられる。
【0009】
図6は実施の形態1における電子機器の側面図である。表面に電極パターン63を有する回路基板64に図5に示す積層セラミック電子部品60が実装される。
【0010】
以下実施の形態1における積層セラミック電子部品の製造方法について説明する。
【0011】
まず第1のセラミックシート11と導体パターン13とが交互に積層され、この上下面が第2のセラミックシート12で挟み込まれて一体化された積層体が作製される。第1のセラミックシート11と第2のセラミックシート12の少なくとも一方の間には導体パターン13が存在する。
【0012】
次に、図1に示すようにカッター刃などで第1のセラミックシート11に至るスリット状の溝14aが積層体の表面の所定の位置に形成され、続いて図2に示すように断面がV字状の金型で溝14aを押し開くようにして溝14bが形成される。この時、金型の先端は第1のセラミックシート11に到達する。溝14a,14bの形成後は、第2のセラミックシート12が第1のセラミックシート11の溝14aの内部上方の部分を被覆する。そして、第1のセラミックシート11の溝14aを形成する部分の上端は曲面状に面取りされる。
【0013】
またこの溝に対向するように、積層体裏面にも同様の溝14a,14bが設けられる。その後、この積層体がプレスされて、図3に示すように溝14bが小さくなる。
【0014】
そしてこの状態のまま、第1のセラミックシート11及び導体パターン13が焼結され、かつ第2のセラミックシート12が焼結されないように積層体が焼成される。このとき、第2のセラミックシート12は焼結されないのでほとんど収縮しない。従って、焼結する第1のセラミックシート11が収縮するのを抑制され、平面精度に優れた焼結体が得られる。第1のセラミックシート11の溝14bの部分は自由度が他の部分よりも大きいので収縮し、溝14bは再び図4に示すように大きくなる。
【0015】
次に、第2のセラミックシート12のみが除去される。第2のセラミックシート12は未焼結なので、容易に除去できる。
【0016】
次いで、導体パターン13を有する表面にIC61やコンデンサ62などが導体パターン13に接続され、溝14a,14bで積層体が分割され、図5に示すような積層セラミック電子部品60が得られる。
【0017】
積層セラミック電子部品60は、平面精度に優れているだけでなく端部が曲面状に面取りされるので、衝撃に強く優れた強度を有する。
【0018】
積層セラミック電子部品60が図6に示すように、表面の電極パターン63を有する回路基板64に実装されることにより、例えば携帯電話などの各種電子機器が製造される。
【0019】
例えば電子機器に衝撃が加わり、回路基板64に撓みが発生した場合、積層セラミック電子部品60は端部が曲面状に面取りされるので、回路基板64に接触したとしても回路基板64の損傷を防止できる。
【0020】
なお、溝14a,14bは別の方法で形成されてもよい。断面がV字状の金型が積層体表面の所定の位置に押し付けられて、断面がV字状の溝が形成される。この時、金型の先端が第1のセラミックシート11に到達し、第2のセラミックシート12が第1のセラミックシート11の溝の内部上方を被覆する。第1のセラミックシート11の溝を形成する部分の上端は曲面状に面取りされる。次にこの溝を更に深くするように、カッター刃などでスリット状の溝が設けられる。
【0021】
導体パターン13は導体パターンを含む抵抗体パターン等の回路パターンでもよい。
【0022】
(実施の形態2)
まず実施の形態1と同様にして形成された積層体は、溝14a,14bが形成された後、実施の形態1と同様に焼成される。ただし、第1のセラミックシート11と第2のセラミックシート12との間に導体パターン13が形成されない。
【0023】
次に第2のセラミックシート12が除去された後、焼結体の表面に金属ペーストが塗布され、焼き付けられることにより導体パターン13が形成される。その後、この導体パターン13の上にICやコンデンサなどの電子部品が実装される。その後、溝14a,14bで積層体が分割され、積層セラミック電子部品60が得られる。そして電子部品60は回路基板に実装され、電子機器が製造される。
【0024】
実施の形態2においても実施の形態1と同様に、得られた積層セラミック電子部品は平面精度に優れているだけでなく端部が曲面状に面取りされるので、衝撃に強く優れた強度を有する。また回路基板に実装後、撓みが発生したとしても積層セラミック電子部品60は端部が曲面状に面取りされるので、回路基板64に接触したとしても損傷を防止できる。
【0025】
実施の形態2と実施の形態1とは、積層セラミック電子部品60の表面の導体パターン13が積層体の焼成前あるいは焼成後に形成されるかだけが異なる。
【0026】
表面の導体パターン13の形成に熱処理工程を含む場合、実施の形態1においては、熱処理工程が一度で済むので実施の形態2よりも生産性に優れる。
【0027】
(実施の形態3)
図7は実施の形態3における積層セラミック電子部品の製造工程を説明するための要部拡大断面図である。実施の形態1,2と同様の構成要素については同番号を付して説明を省略する。
【0028】
まず実施の形態1と同様に第1のセラミックシート11と導体パターン13を交互に積層され、上、下面を第2のセラミックシート12が挟み込んだ積層体が作製され、溝14a,14bが表、裏面に設けられる。
【0029】
次に、図7に示すようにこの積層体の上、下面の溝14a,14bを覆うように第2のセラミックシート12と同様の材質の第3のセラミックシート15が圧着される。この時、積層体は外周から加圧されるため、実施の形態1と同様に溝14aは最初に形成した時よりも小さくなる。
【0030】
その後、この積層体が、第1のセラミックシート11及び導体パターン13が焼結しかつ第2と第3のセラミックシート12、15が未焼結となるように焼成される。この結果、実施の形態1と同様に溝14aは再び大きくなる。
【0031】
次に第2と第3のセラミックシート12、15が除去され、積層体の表面にICやコンデンサ等の電子部品が実装された後、溝14a,14bで積層体を分割され、図5に示すような積層セラミック電子部品が得られる。
【0032】
実施の形態3においては、端部が曲面状に面取りされ、溝14a,14bを形成した後に第3のセラミックシート15で積層体の上、下面が圧着される。これにより、焼成時の第1のセラミックシート11の収縮をされに抑制できるので実施の形態1よりも平面精度に優れた積層セラミック電子部品を得ることができる。
【0033】
実施の形態3においては積層セラミック電子部品表面の導体パターンは、実施の形態1のように焼成前、あるいは実施の形態2のように焼成後に形成されてもよい。
【0034】
実施の形態1〜3においては、第2のセラミックシート12が第1のセラミックシート11の端部を被覆するように溝14aが設けられることにより、積層セラミック電子部品の端部を曲面状に面取りできる。
【0035】
また従来の積層セラミック電子部品においては端部を曲面状に面取りするためには焼成後研磨する必要がある。電子部品が表面に導体パターン13を有する場合、研磨により導体パターン13が損傷する場合があるので端部を曲面にできない。この電子部品が回路基板に実装されると、基板に撓みが発生した場合端部が回路基板に接触し、積層セラミック電子部品が損傷することがある。導体パターン13の代りに抵抗体パターンを有する電子部品では損傷により特性が劣化する。
【0036】
V字状の溝14aとスリット状の溝14bからなる断面がY字状の分割用の溝は、V字状の型で形成された部分よりも、刃で形成された部分の方が長い。これにより第1のセラミックシート11の収縮を抑制しつつ、焼成後に積層体は容易に分割できる。
【0037】
実施の形態1〜3ではこれらの溝は積層体の表、裏面に設けられるが、溝はいずれか一方の面にのみ設けられても焼成後積層体は容易に分割できる。溝は、積層体が回路基板に実装される際の基板に対向する面に形成され、撓みにより電子部品が損傷するのを防止することが好ましい。
【0038】
さらに、第2のセラミックシート12は、平面精度に優れた積層セラミック電子部品を得るため、焼成時に第1のセラミックシート11が収縮するのを抑制する。第1及び第2のセラミックシート11,12の両方に分割用の溝が設けられると、それだけ第1のセラミックシート11の自由度が大きくなる。これにより第1のセラミックシート11は溝を大きくする方向に収縮しやすくなり、積層セラミック電子部品の形状精度が悪くなる恐れが有る。分割用の溝が設けられた後に積層体が加圧されて溝14aが圧縮され、見かけ上溝14aが小さくなる。これにより焼成時、第1のセラミックシートが収縮したとしても、前もって溝14aが圧縮されているので、元の状態、即ち所望の形状の焼結された積層体を得ることができる。
【0039】
【発明の効果】
本発明によると、第1のセラミックシートとこれを挟むこれよりも高い焼結温度を有する第2のセラミックシートとを有する積層体の表面に、第1のセラミックシートに至るように溝が形成される。これにより、端部が曲面状に面取りされる耐衝撃性に優れた積層セラミック電子部品を得ることができる。
【図面の簡単な説明】
【図1】 本発明の実施の形態1における積層セラミック電子部品の要部拡大断面図
【図2】 実施の形態1における積層セラミック電子部品の要部拡大断面図
【図3】 実施の形態1における積層セラミック電子部品の要部拡大断面図
【図4】 実施の形態1における積層セラミック電子部品の要部拡大断面図
【図5】 本発明の実施の形態1,2における積層セラミック電子部品の断面図
【図6】 実施の形態1,2における電子機器の側面図
【図7】 本発明の実施の形態3における積層セラミック電子部品の要部拡大断面図
【符号の説明】
11 第1のセラミックシート
12 第2のセラミックシート
13 導体パターン
14a 溝
14b 溝
15 第3のセラミックシート
60 積層セラミック電子部品
61 IC
62 コンデンサ
63 電極パターン
64 回路基板
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a multilayer ceramic electronic component excellent in planar accuracy for mounting a chip component, a semiconductor or the like, and an electronic apparatus using the electronic component.
[0002]
[Prior art]
A conventional method for manufacturing a multilayer ceramic electronic component will be described. First, an organic binder and a plasticizer are mixed with glass ceramic powder to obtain a first ceramic sheet. Next, a conductor pattern is formed on the surface of the first ceramic sheet, and the first ceramic sheet is laminated. Thereafter, a second ceramic sheet that is not sintered at the firing temperature of the first ceramic sheet is laminated above and below the first ceramic sheet to obtain a laminate. Next, after a slit is formed in the first ceramic sheet on the surface of the laminate, it is fired at the firing temperature of the first ceramic sheet, and the unsintered second ceramic sheet is removed. Next, the laminated body is divided by slits to obtain a laminated ceramic electronic component.
[0003]
This multilayer ceramic electronic component is mounted on a circuit board having an electrode pattern on its surface to manufacture an electronic device.
[0004]
In the multilayer ceramic electronic component, since the second ceramic sheet is not sintered and hardly contracted during firing, the first ceramic sheet to be contracted by sintering is restrained. Therefore, shrinkage of the first ceramic sheet can be suppressed, and a multilayer ceramic electronic component having excellent planar accuracy can be obtained with high productivity.
[0005]
[Problems to be solved by the invention]
However, according to the above method, the end of the multilayer ceramic electronic component has an acute angle. Therefore, when the circuit board is bent when the electronic component is mounted on the circuit board, the end portion comes into contact with the circuit board, so that the multilayer ceramic electronic component is cracked or chipped, and the characteristics are deteriorated.
[0006]
[Means for Solving the Problems]
The first ceramic sheet is sandwiched between the second ceramic sheets having a higher sintering temperature than the first ceramic sheet to obtain a laminate. A groove reaching the first ceramic sheet is formed in the laminate so that the second ceramic sheet covers the upper end of the groove of the first ceramic sheet. The laminate is fired at a temperature at which the first ceramic sheet is sintered and the second ceramic sheet is not sintered. The second ceramic sheet is removed, and the multilayer body is divided by the grooves to produce a multilayer ceramic electronic component.
[0007]
By this method, a multilayer ceramic electronic component excellent in impact resistance is manufactured while ensuring planar accuracy.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
(Embodiment 1)
1 to 4 are enlarged cross-sectional views of main parts for explaining the manufacturing process of the multilayer ceramic electronic component according to Embodiment 1 of the present invention, and FIG. The first ceramic sheet 11 is produced using Al 2 O 3 , CaO—BaO—SiO 2 glass or the like. The second ceramic sheet 12 has a sintering temperature higher than the sintering temperature of the first ceramic sheet 11, and is produced using Al 2 O 3 . The conductor pattern 13 is formed using Ag or Ag-Pt. The laminated body is provided with slit-shaped grooves 14a and V-shaped grooves 14b.
[0009]
FIG. 6 is a side view of the electronic device according to the first embodiment. A multilayer ceramic electronic component 60 shown in FIG. 5 is mounted on a circuit board 64 having an electrode pattern 63 on the surface.
[0010]
A method for manufacturing the multilayer ceramic electronic component according to Embodiment 1 will be described below.
[0011]
First, the first ceramic sheets 11 and the conductor patterns 13 are alternately laminated, and the upper and lower surfaces are sandwiched between the second ceramic sheets 12 to produce an integrated laminate. A conductor pattern 13 exists between at least one of the first ceramic sheet 11 and the second ceramic sheet 12.
[0012]
Next, as shown in FIG. 1, a slit-like groove 14a reaching the first ceramic sheet 11 with a cutter blade or the like is formed at a predetermined position on the surface of the laminate, and subsequently the cross section is V as shown in FIG. The groove 14b is formed by pushing the groove 14a open with a letter-shaped mold. At this time, the tip of the mold reaches the first ceramic sheet 11. After the formation of the grooves 14a and 14b, the second ceramic sheet 12 covers the upper part of the interior of the groove 14a of the first ceramic sheet 11. And the upper end of the part which forms the groove | channel 14a of the 1st ceramic sheet | seat 11 is chamfered in curved surface shape.
[0013]
Similar grooves 14a and 14b are also provided on the back surface of the laminate so as to face the grooves. Thereafter, this laminate is pressed, and the groove 14b becomes smaller as shown in FIG.
[0014]
In this state, the laminate is fired so that the first ceramic sheet 11 and the conductor pattern 13 are sintered and the second ceramic sheet 12 is not sintered. At this time, since the second ceramic sheet 12 is not sintered, it hardly shrinks. Therefore, shrinkage of the first ceramic sheet 11 to be sintered is suppressed, and a sintered body having excellent planar accuracy can be obtained. Since the portion of the groove 14b of the first ceramic sheet 11 has a greater degree of freedom than the other portions, it shrinks, and the groove 14b becomes larger again as shown in FIG.
[0015]
Next, only the second ceramic sheet 12 is removed. Since the second ceramic sheet 12 is unsintered, it can be easily removed.
[0016]
Next, an IC 61, a capacitor 62, and the like are connected to the conductor pattern 13 on the surface having the conductor pattern 13, and the multilayer body is divided by the grooves 14a and 14b to obtain a multilayer ceramic electronic component 60 as shown in FIG.
[0017]
The multilayer ceramic electronic component 60 is not only excellent in plane accuracy, but also has an endurance that is chamfered in a curved shape, and thus has excellent strength against impact.
[0018]
As shown in FIG. 6, the multilayer ceramic electronic component 60 is mounted on a circuit board 64 having a surface electrode pattern 63, whereby various electronic devices such as a mobile phone are manufactured.
[0019]
For example, when an impact is applied to the electronic device and the circuit board 64 is bent, the end of the multilayer ceramic electronic component 60 is chamfered in a curved shape, so that the circuit board 64 is prevented from being damaged even if it contacts the circuit board 64. it can.
[0020]
The grooves 14a and 14b may be formed by another method. A mold having a V-shaped cross section is pressed against a predetermined position on the surface of the laminated body to form a groove having a V-shaped cross section. At this time, the tip of the mold reaches the first ceramic sheet 11, and the second ceramic sheet 12 covers the upper part of the groove of the first ceramic sheet 11. The upper end of the part forming the groove of the first ceramic sheet 11 is chamfered into a curved surface. Next, a slit-like groove is provided by a cutter blade or the like so as to further deepen the groove.
[0021]
The conductor pattern 13 may be a circuit pattern such as a resistor pattern including a conductor pattern.
[0022]
(Embodiment 2)
First, the laminate formed in the same manner as in the first embodiment is fired in the same manner as in the first embodiment after the grooves 14a and 14b are formed. However, the conductor pattern 13 is not formed between the first ceramic sheet 11 and the second ceramic sheet 12.
[0023]
Next, after the second ceramic sheet 12 is removed, a metal paste is applied to the surface of the sintered body and baked to form the conductor pattern 13. Thereafter, electronic parts such as an IC and a capacitor are mounted on the conductor pattern 13. Thereafter, the multilayer body is divided by the grooves 14a and 14b, and the multilayer ceramic electronic component 60 is obtained. The electronic component 60 is mounted on a circuit board, and an electronic device is manufactured.
[0024]
In the second embodiment, similarly to the first embodiment, the obtained multilayer ceramic electronic component is not only excellent in plane accuracy, but also has an edge that is chamfered in a curved shape, so that it is strong against impact and has excellent strength. . In addition, even if bending occurs after mounting on the circuit board, the end of the multilayer ceramic electronic component 60 is chamfered in a curved shape, so that damage can be prevented even if it contacts the circuit board 64.
[0025]
The second embodiment is different from the first embodiment only in whether the conductive pattern 13 on the surface of the multilayer ceramic electronic component 60 is formed before or after firing the multilayer body.
[0026]
In the case where the formation of the conductive pattern 13 on the surface includes a heat treatment step, the first embodiment is superior in productivity to the second embodiment because the heat treatment step is only required once.
[0027]
(Embodiment 3)
FIG. 7 is an enlarged cross-sectional view of a main part for explaining a manufacturing process of the multilayer ceramic electronic component in the third embodiment. Constituent elements similar to those in the first and second embodiments are denoted by the same reference numerals and description thereof is omitted.
[0028]
First, similarly to the first embodiment, the first ceramic sheet 11 and the conductor pattern 13 are alternately laminated, and a laminate in which the upper and lower surfaces are sandwiched by the second ceramic sheet 12 is produced, and the grooves 14a and 14b are displayed. Provided on the back side.
[0029]
Next, as shown in FIG. 7, a third ceramic sheet 15 made of the same material as that of the second ceramic sheet 12 is pressure-bonded so as to cover the grooves 14a and 14b on the upper and lower surfaces of the laminate. At this time, since the laminated body is pressurized from the outer periphery, the groove 14a becomes smaller than when it is first formed as in the first embodiment.
[0030]
Thereafter, the laminate is fired so that the first ceramic sheet 11 and the conductor pattern 13 are sintered and the second and third ceramic sheets 12 and 15 are unsintered. As a result, the groove 14a becomes larger again as in the first embodiment.
[0031]
Next, after the second and third ceramic sheets 12 and 15 are removed and electronic parts such as ICs and capacitors are mounted on the surface of the laminate, the laminate is divided by grooves 14a and 14b, as shown in FIG. Such a multilayer ceramic electronic component can be obtained.
[0032]
In the third embodiment, the end portions are chamfered in a curved shape, and after the grooves 14a and 14b are formed, the upper and lower surfaces of the laminated body are pressure-bonded by the third ceramic sheet 15. Thereby, since the shrinkage | contraction of the 1st ceramic sheet | seat 11 at the time of baking can be suppressed, the multilayer ceramic electronic component excellent in planar accuracy than Embodiment 1 can be obtained.
[0033]
In the third embodiment, the conductor pattern on the surface of the multilayer ceramic electronic component may be formed before firing as in the first embodiment or after firing as in the second embodiment.
[0034]
In the first to third embodiments, the end portion of the multilayer ceramic electronic component is chamfered into a curved surface by providing the groove 14 a so that the second ceramic sheet 12 covers the end portion of the first ceramic sheet 11. it can.
[0035]
Further, in the conventional multilayer ceramic electronic component, in order to chamfer the end portion into a curved surface, it is necessary to polish after firing. When the electronic component has the conductor pattern 13 on the surface, the conductor pattern 13 may be damaged by polishing, so that the end cannot be curved. When this electronic component is mounted on a circuit board, when the board is bent, the end portion may contact the circuit board, and the multilayer ceramic electronic component may be damaged. In an electronic component having a resistor pattern instead of the conductor pattern 13, the characteristics deteriorate due to damage.
[0036]
A dividing groove having a Y-shaped cross section composed of a V-shaped groove 14a and a slit-shaped groove 14b has a longer portion formed by a blade than a portion formed by a V-shaped mold. Thereby, the laminated body can be easily divided after firing while suppressing the shrinkage of the first ceramic sheet 11.
[0037]
In Embodiments 1 to 3, these grooves are provided on the front and back surfaces of the laminate, but even if the grooves are provided only on one of the surfaces, the laminate can be easily divided after firing. The groove is preferably formed on a surface facing the substrate when the laminated body is mounted on the circuit substrate, and prevents the electronic component from being damaged by bending.
[0038]
Furthermore, the second ceramic sheet 12 suppresses the shrinkage of the first ceramic sheet 11 during firing in order to obtain a multilayer ceramic electronic component having excellent planar accuracy. If the dividing grooves are provided in both the first and second ceramic sheets 11 and 12, the degree of freedom of the first ceramic sheet 11 increases accordingly. As a result, the first ceramic sheet 11 tends to shrink in the direction of increasing the groove, and the shape accuracy of the multilayer ceramic electronic component may be deteriorated. After the dividing grooves are provided, the laminate is pressed to compress the grooves 14a, and the grooves 14a are apparently reduced. As a result, even if the first ceramic sheet contracts during firing, the groove 14a is compressed in advance, so that a sintered laminate in the original state, that is, a desired shape can be obtained.
[0039]
【The invention's effect】
According to the present invention, the groove is formed on the surface of the laminate having the first ceramic sheet and the second ceramic sheet having a higher sintering temperature sandwiching the first ceramic sheet so as to reach the first ceramic sheet. The Thereby, it is possible to obtain a multilayer ceramic electronic component excellent in impact resistance whose end is chamfered in a curved shape.
[Brief description of the drawings]
1 is an enlarged cross-sectional view of a main part of a multilayer ceramic electronic component according to a first embodiment of the present invention. FIG. 2 is an enlarged cross-sectional view of a main part of the multilayer ceramic electronic component according to a first embodiment. FIG. 4 is an enlarged cross-sectional view of the main part of the multilayer ceramic electronic component according to the first embodiment. 6 is a side view of an electronic device according to the first and second embodiments. FIG. 7 is an enlarged cross-sectional view of a main part of a multilayer ceramic electronic component according to a third embodiment of the present invention.
11 First ceramic sheet 12 Second ceramic sheet 13 Conductive pattern 14a Groove 14b Groove 15 Third ceramic sheet 60 Multilayer ceramic electronic component 61 IC
62 Capacitor 63 Electrode Pattern 64 Circuit Board

Claims (1)

第1のセラミックシートを前記第1のセラミックシートよりも高い焼結温度を有する第2のセラミックシートで挟み積層体を得る工程と、前記積層体の第1面に前記第1のセラミックシートに至る溝を形成する工程と、前記溝により分離された前記第2のセラミックシートの端部を前記第1のセラミックシートの上面よりも下にくるように前記溝の部分にV字状の型を押し付ける工程と、前記第1のセラミックシートが焼結しかつ前記第2のセラミックシートが焼結しない温度で前記積層体を焼成する工程と、前記第2のセラミックシートを除去する工程と、前記溝で前記積層体を分割する工程とを備えた、積層セラミック電子部品の製造方法。Sandwiching the first ceramic sheet with a second ceramic sheet having a sintering temperature higher than that of the first ceramic sheet to obtain a laminated body, and reaching the first ceramic sheet on the first surface of the laminated body Forming a groove and pressing a V-shaped mold against the groove so that the end of the second ceramic sheet separated by the groove is below the upper surface of the first ceramic sheet A step of firing the laminate at a temperature at which the first ceramic sheet is sintered and the second ceramic sheet is not sintered; and the second ceramic sheet is removed; and A method for manufacturing a multilayer ceramic electronic component, comprising the step of dividing the multilayer body.
JP2003530475A 2001-09-20 2002-08-30 Manufacturing method of multilayer ceramic electronic component and electronic apparatus Expired - Fee Related JP4211606B2 (en)

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