JP4139803B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP4139803B2 JP4139803B2 JP2004282699A JP2004282699A JP4139803B2 JP 4139803 B2 JP4139803 B2 JP 4139803B2 JP 2004282699 A JP2004282699 A JP 2004282699A JP 2004282699 A JP2004282699 A JP 2004282699A JP 4139803 B2 JP4139803 B2 JP 4139803B2
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- Condensed Matter Physics & Semiconductors (AREA)
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Description
2 第1の絶縁膜
3 電極パッド
5 第2の絶縁膜
6 導体層
7 外部入出力端子(外部接続用端子)
21 接着剤(接着層)
22 ガラス板(補強板)
23 CCDセンサ部(CCDセンサ)
Claims (4)
- 半導体基板の第1面に第1の絶縁膜を介して形成された電極パッドを有し、上記電極パッドと上記半導体基板の第2面に存在する外部接続用端子とを接続する貫通電極を有する半導体装置の製造方法において、
第1面に上記第1の絶縁膜と上記電極パッドとが形成された上記半導体基板に対し、上記電極パッドの直下にて、上記半導体基板に貫通孔を形成する第1の工程と、
上記半導体基板に形成された貫通孔の内壁、および上記半導体基板の第2面に、上記半導体基板を陰極とする電着によって第2の絶縁膜を形成する第2の工程と、
上記第2の絶縁膜をマスクとして、上記第1の絶縁膜をエッチングし、上記電極パッド裏面を上記半導体基板の第2面側に露出させる第3の工程と、
上記貫通孔内に、上記貫通電極となる導電層を形成する第4の工程とを含むことを特徴とする半導体装置の製造方法。 - 上記第1の工程において、上記半導体基板の破損を防止するための補強板が、上記第1面側に接着層を介して貼り合わされている上記半導体基板が用いられることを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記第2の工程において、電着材料がポリイミドあるいはエポキシであることを特徴とする請求項1に記載の半導体装置の製造方法。
- 上記半導体基板の第1面に形成された第1の絶縁膜が酸化膜であることを特徴とする請求項1に記載の半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004282699A JP4139803B2 (ja) | 2004-09-28 | 2004-09-28 | 半導体装置の製造方法 |
US11/227,103 US7442642B2 (en) | 2004-09-28 | 2005-09-16 | Method of forming electrode for semiconductor device |
KR1020050089879A KR100653294B1 (ko) | 2004-09-28 | 2005-09-27 | 반도체 장치 및 그 제조 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004282699A JP4139803B2 (ja) | 2004-09-28 | 2004-09-28 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2006100435A JP2006100435A (ja) | 2006-04-13 |
JP4139803B2 true JP4139803B2 (ja) | 2008-08-27 |
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Application Number | Title | Priority Date | Filing Date |
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JP2004282699A Active JP4139803B2 (ja) | 2004-09-28 | 2004-09-28 | 半導体装置の製造方法 |
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US (1) | US7442642B2 (ja) |
JP (1) | JP4139803B2 (ja) |
KR (1) | KR100653294B1 (ja) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8154105B2 (en) * | 2005-09-22 | 2012-04-10 | International Rectifier Corporation | Flip chip semiconductor device and process of its manufacture |
JP4593427B2 (ja) * | 2005-09-30 | 2010-12-08 | 株式会社フジクラ | 半導体装置及び半導体装置の製造方法 |
JP2007305960A (ja) * | 2006-04-14 | 2007-11-22 | Sharp Corp | 半導体装置およびその製造方法 |
US7626269B2 (en) * | 2006-07-06 | 2009-12-01 | Micron Technology, Inc. | Semiconductor constructions and assemblies, and electronic systems |
US7829438B2 (en) | 2006-10-10 | 2010-11-09 | Tessera, Inc. | Edge connect wafer level stacking |
US8513789B2 (en) | 2006-10-10 | 2013-08-20 | Tessera, Inc. | Edge connect wafer level stacking with leads extending along edges |
US7901989B2 (en) | 2006-10-10 | 2011-03-08 | Tessera, Inc. | Reconstituted wafer level stacking |
US7935568B2 (en) * | 2006-10-31 | 2011-05-03 | Tessera Technologies Ireland Limited | Wafer-level fabrication of lidded chips with electrodeposited dielectric coating |
US7791199B2 (en) | 2006-11-22 | 2010-09-07 | Tessera, Inc. | Packaged semiconductor chips |
US8569876B2 (en) | 2006-11-22 | 2013-10-29 | Tessera, Inc. | Packaged semiconductor chips with array |
US7952195B2 (en) | 2006-12-28 | 2011-05-31 | Tessera, Inc. | Stacked packages with bridging traces |
US7679167B2 (en) * | 2007-01-08 | 2010-03-16 | Visera Technologies Company, Limited | Electronic assembly for image sensor device and fabrication method thereof |
US8405196B2 (en) * | 2007-03-05 | 2013-03-26 | DigitalOptics Corporation Europe Limited | Chips having rear contacts connected by through vias to front contacts |
JP5010948B2 (ja) * | 2007-03-06 | 2012-08-29 | オリンパス株式会社 | 半導体装置 |
EP2186134A2 (en) | 2007-07-27 | 2010-05-19 | Tessera, Inc. | Reconstituted wafer stack packaging with after-applied pad extensions |
US7932179B2 (en) * | 2007-07-27 | 2011-04-26 | Micron Technology, Inc. | Method for fabricating semiconductor device having backside redistribution layers |
CN101802990B (zh) | 2007-07-31 | 2013-03-13 | 数字光学欧洲有限公司 | 使用穿透硅通道的半导体封装方法 |
WO2009020572A2 (en) | 2007-08-03 | 2009-02-12 | Tessera Technologies Hungary Kft. | Stack packages using reconstituted wafers |
US8043895B2 (en) | 2007-08-09 | 2011-10-25 | Tessera, Inc. | Method of fabricating stacked assembly including plurality of stacked microelectronic elements |
JP4799543B2 (ja) | 2007-12-27 | 2011-10-26 | 株式会社東芝 | 半導体パッケージ及びカメラモジュール |
US20090212381A1 (en) * | 2008-02-26 | 2009-08-27 | Tessera, Inc. | Wafer level packages for rear-face illuminated solid state image sensors |
US20100053407A1 (en) * | 2008-02-26 | 2010-03-04 | Tessera, Inc. | Wafer level compliant packages for rear-face illuminated solid state image sensors |
JP5639052B2 (ja) | 2008-06-16 | 2014-12-10 | テッセラ,インコーポレイテッド | ウェハレベルでの縁部の積重ね |
JP5313601B2 (ja) * | 2008-07-17 | 2013-10-09 | ローム株式会社 | 半導体装置ユニット |
JP5537016B2 (ja) * | 2008-10-27 | 2014-07-02 | 株式会社東芝 | 半導体装置および半導体装置の製造方法 |
WO2010070826A1 (ja) * | 2008-12-17 | 2010-06-24 | パナソニック株式会社 | 貫通電極の形成方法及び半導体装置 |
US9142586B2 (en) * | 2009-02-24 | 2015-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pad design for backside illuminated image sensor |
CN102422412A (zh) | 2009-03-13 | 2012-04-18 | 德塞拉股份有限公司 | 具有穿过结合垫延伸的通路的堆叠式微电子组件 |
US9640437B2 (en) | 2010-07-23 | 2017-05-02 | Tessera, Inc. | Methods of forming semiconductor elements using micro-abrasive particle stream |
US8796135B2 (en) | 2010-07-23 | 2014-08-05 | Tessera, Inc. | Microelectronic elements with rear contacts connected with via first or via middle structures |
US8791575B2 (en) | 2010-07-23 | 2014-07-29 | Tessera, Inc. | Microelectronic elements having metallic pads overlying vias |
US8847380B2 (en) | 2010-09-17 | 2014-09-30 | Tessera, Inc. | Staged via formation from both sides of chip |
US8610259B2 (en) | 2010-09-17 | 2013-12-17 | Tessera, Inc. | Multi-function and shielded 3D interconnects |
KR101059490B1 (ko) | 2010-11-15 | 2011-08-25 | 테세라 리써치 엘엘씨 | 임베드된 트레이스에 의해 구성된 전도성 패드 |
US8637968B2 (en) | 2010-12-02 | 2014-01-28 | Tessera, Inc. | Stacked microelectronic assembly having interposer connecting active chips |
US8736066B2 (en) | 2010-12-02 | 2014-05-27 | Tessera, Inc. | Stacked microelectronic assemby with TSVS formed in stages and carrier above chip |
US8587126B2 (en) | 2010-12-02 | 2013-11-19 | Tessera, Inc. | Stacked microelectronic assembly with TSVs formed in stages with plural active chips |
US8610264B2 (en) | 2010-12-08 | 2013-12-17 | Tessera, Inc. | Compliant interconnects in wafers |
JP5733990B2 (ja) | 2011-01-12 | 2015-06-10 | キヤノン株式会社 | 半導体装置の製造方法 |
JP6489942B2 (ja) * | 2015-05-29 | 2019-03-27 | 東芝メモリ株式会社 | 半導体デバイスの製造方法 |
TWI685922B (zh) * | 2019-02-22 | 2020-02-21 | 勝麗國際股份有限公司 | 晶片級感測器封裝結構 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3186941B2 (ja) | 1995-02-07 | 2001-07-11 | シャープ株式会社 | 半導体チップおよびマルチチップ半導体モジュール |
JP2001351997A (ja) | 2000-06-09 | 2001-12-21 | Canon Inc | 受光センサーの実装構造体およびその使用方法 |
US20020124398A1 (en) * | 2001-03-08 | 2002-09-12 | Sturni Lance C. | Multi-layer circuit assembly and process for preparing the same |
JP2003289073A (ja) | 2002-01-22 | 2003-10-10 | Canon Inc | 半導体装置および半導体装置の製造方法 |
JP4212293B2 (ja) | 2002-04-15 | 2009-01-21 | 三洋電機株式会社 | 半導体装置の製造方法 |
US6790775B2 (en) | 2002-10-31 | 2004-09-14 | Hewlett-Packard Development Company, L.P. | Method of forming a through-substrate interconnect |
JP4130158B2 (ja) * | 2003-06-09 | 2008-08-06 | 三洋電機株式会社 | 半導体装置の製造方法、半導体装置 |
JP4439976B2 (ja) * | 2004-03-31 | 2010-03-24 | Necエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP4376715B2 (ja) | 2004-07-16 | 2009-12-02 | 三洋電機株式会社 | 半導体装置の製造方法 |
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